wet coating equipment

Abstract

This invention relates to a wet coating apparatus, comprising a conveying structure for transporting a coating substrate; a feeding structure for applying a liquid coating solution to the substrate and a coating structure for applying the solution are sequentially arranged along the conveying direction of the conveying structure. The coating structure includes a flexible film for spreading the liquid coating solution evenly across the substrate; a pressing section is provided above the flexible film for pressing and controlling the height of the flexible film to level the coating solution. This invention utilizes the extensibility of the flexible film to maintain a consistent height with the solution contact surface throughout the coating process. The flexible film uniformly coats the wet slurry onto the substrate surface, greatly increasing the uniformity of the liquid film thickness and providing good repeatability, thus improving the coating effect.

Description

Technical Field

[0001] This utility model relates to the field of thin film coating technology, and in particular to a wet coating device that uses a flexible film to coat liquid materials. Background Technology

[0002] Screen printing, ultrasonic spraying, and slot coating are traditional coating processes that are widely used in the thin film industry. However, since the process principle of screen printing is to transfer the paste from the screen opening to the substrate through a squeegee, the screen will inevitably come into contact with the substrate surface during the process. If the process requires the stacking of multiple thin films, it will inevitably lead to film damage, which in turn affects the product yield.

[0003] Ultrasonic spraying uses ultrasonic waves to atomize and spray liquid from the nozzle. The nozzle oscillates back and forth, causing the atomized liquid to adhere to the glass surface and eventually form a uniform liquid film. However, because the liquid needs to be atomized, the nozzle diameter cannot be too wide, which limits the upper limit of the spraying flow rate. This limitation will seriously affect the cycle time of automated production and makes it difficult to become the mainstream process for industrial production.

[0004] Slot coating involves squeezing liquid material into the cavity inside the coating head, allowing it to spread across the entire lip of the coating head along the width of the slot. Finally, the liquid material on the lip contacts the substrate surface to initiate coating, forming a uniform liquid film. However, this process places very high demands on the coating head. If the physical properties of the solution change, the coating effect will be greatly reduced. In such cases, the only solution is to redesign and reprocess the coating head, which will increase the operating cost of the equipment and reduce profits.

[0005] Therefore, based on years of experience and practice in related industries, the inventor proposes a wet coating equipment to overcome the shortcomings of existing technologies. Utility Model Content

[0006] The purpose of this invention is to provide a wet coating equipment that overcomes the problems in the prior art. This invention utilizes the extensibility of a flexible film to ensure that the contact surface with the solution remains consistent throughout the coating process. The flexible film uniformly coats the wet slurry onto the substrate surface, greatly increasing the uniformity of the liquid film thickness and providing good repeatability, thereby improving the coating effect.

[0007] The purpose of this invention is achieved as follows: a wet coating apparatus includes a conveying structure for transporting a coating substrate; a feeding structure for spreading a liquid material onto the coating substrate and a coating structure for coating the liquid material are sequentially arranged along the conveying direction of the conveying structure; the coating structure includes a flexible film for spreading the liquid material onto the coating substrate; and a pressing part is provided above the flexible film for pressing and controlling the height of the flexible film to smooth the coating liquid material.

[0008] In a preferred embodiment of the present invention, the coating structure further includes a film rolling section, which includes an unwinding section and a winding section. The two ends of the flexible film are respectively connected to the unwinding section and the winding section. The winding section and the unwinding section are arranged sequentially along the transport direction of the conveying structure, and the movement direction of the flexible film is opposite to the transport direction of the conveying structure.

[0009] In a preferred embodiment of the present invention, a guide portion is provided between the winding portion and the unwinding portion, the guide portion including at least one correction roller for correcting the deviation of the flexible film.

[0010] In a preferred embodiment of the present invention, the guide portion further includes a plurality of correction adjustment devices for adjusting the horizontal position of each correction roller; the correction adjustment device is provided with a correction sensor for monitoring the horizontal position of the flexible film during the winding and unwinding process, and the correction adjustment device adjusts the horizontal position of the correction roller according to the signal transmitted by the correction sensor.

[0011] In a preferred embodiment of the present invention, the coating section includes a coating head disposed between the winding section and the unwinding section and capable of being raised and lowered and pressed above the flexible film. A film pressing section for adjusting the tilt angle of the flexible film is disposed between the coating head and the winding section, and the bottom end of the film pressing section is higher than the bottom end of the coating head.

[0012] In a preferred embodiment of the present invention, the unwinding section includes an unwinding roller suspended above the conveying structure and a first motor for adjusting the tension of the unwinding roller; the winding section includes a winding roller suspended above the conveying structure and a second motor for adjusting the tension of the winding roller.

[0013] Torque sensors are provided on the sides of the unwinding roller and / or the winding roller to detect the tightness of the flexible film being unwound and rewound between the rollers.

[0014] In a preferred embodiment of the present invention, the conveying structure includes a conveying guide rail extending longitudinally in the horizontal direction and a conveying platform that can move along the longitudinal extension direction of the conveying guide rail; a first sidewall and a second sidewall are arranged parallel to each other on both sides of the conveying guide rail.

[0015] In a preferred embodiment of the present invention, at least two adsorption holes for vacuum adsorption positioning of the coated substrate are formed on the surface of the conveying platform, and the adsorption holes are interconnected and connected to a vacuum pump; the first and second ends of the conveying guide rail along the longitudinal extension direction are provided with rollers for loading or unloading.

[0016] In a preferred embodiment of the present invention, the feeding structure includes a feeding support frame, on which a movable injection pump is mounted, and a position adjustment device for driving the injection pump to move is connected to the injection pump; the position adjustment device includes a first driving member for driving the injection pump to move horizontally and a second driving member for driving the injection pump to move vertically, the first driving member being connected to the feeding support frame, and the second driving member being connected to the first driving member.

[0017] In a preferred embodiment of this utility model, the flexible film is made of polyamide film, polyimide film, polyester film, polycarbonate film, polyethylene film, polyvinyl chloride film, polystyrene film, polytetrafluoroethylene film, polypropylene film, polyethylene terephthalate film, polymethyl methacrylate film, or graphene film.

[0018] As described above, the wet coating equipment of this utility model has the following beneficial effects:

[0019] Compared to screen printing, this invention allows the flexible film to avoid contact with the substrate, while also offering the speed, convenience, and low cost that ultrasonic spraying and slot coating processes lack. It is an excellent solution to address the shortcomings of existing coating processes.

[0020] In this invention, the flexibility of the flexible film is utilized to ensure that the height of the contact surface with the solution remains consistent throughout the coating process. The flexible film uniformly coats the wet slurry onto the substrate surface, greatly increasing the uniformity of the liquid film thickness and providing good repeatability, thereby improving the coating effect. Attached Figure Description

[0021] The following figures are intended only to illustrate and explain the present invention and do not limit the scope of the present invention. Wherein:

[0022] Figure 1 This is a cross-sectional view of the wet coating equipment of this utility model.

[0023] Figure 2 This is a schematic diagram of the wet coating equipment of this utility model.

[0024] In the picture:

[0025] 1. Transmission structure;

[0026] 11. Conveyor rail; 12. Conveyor platform; 121. Adsorption hole; 13. First sidewall; 14. Second sidewall;

[0027] 2. Material supply structure;

[0028] 21. Feeding support frame; 22. Liquid injection pump; 23. First drive component; 24. Second drive component;

[0029] 3. Coating structure;

[0030] 31. Flexible film; 32. Coating section; 33. Unwinding section; 331. Unwinding roller; 34. Winding section; 341. Winding roller; 351. First alignment roller; 352. Second alignment roller; 353. Third alignment roller; 354. Fourth alignment roller; 36. Film pressing section. Detailed Implementation

[0031] To provide a clearer understanding of the technical features, objectives, and effects of this utility model, the specific embodiments of this utility model are now described with reference to the accompanying drawings.

[0032] The specific embodiments of the present invention described herein are for illustrative purposes only and should not be construed as limiting the present invention in any way. Under the teachings of this invention, those skilled in the art can conceive of any possible modifications based on this invention, and these should all be considered within the scope of this invention. It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "mounted," "connected," and "linked" should be interpreted broadly; for example, they can refer to mechanical or electrical connections, or internal connections between two elements, and can be direct or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible embodiments.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0034] like Figure 1, Figure 2 As shown, this utility model provides a wet coating apparatus, including a conveying structure 1 for transporting the coating substrate; along the conveying direction of the conveying structure 1 ( Figure 1 In the middle (from right to left is the conveying direction), the feeding structure 2 and the coating structure 3 are arranged in sequence. The feeding structure 2 is set at the beginning of the coating of the equipment. The feeding structure 2 is used to lay the material liquid to the front end of the coating substrate.

[0035] The coating structure 3 is used to coat the liquid material. The coating structure 3 includes a flexible film 31 for spreading the liquid material all over the coating substrate. A pressure coating part 32 is provided above the flexible film 31. The pressure coating part 32 is used to control the height of the flexible film 31 to scrape the liquid material. That is, by controlling the height of the flexible film 31 through the pressure coating part 32, the solution (liquid material) on the surface of the substrate is scraped flat to achieve high uniformity of the coating film.

[0036] The advantages of this invention are: compared with screen printing, the flexible film does not need to contact the substrate, and it can also take into account the speed, convenience and low cost that ultrasonic spraying and slot coating processes do not have, making it an excellent solution to the shortcomings of existing coating processes.

[0037] In this invention, the flexibility of the flexible film is utilized to ensure that the height of the contact surface with the solution remains consistent throughout the coating process. The flexible film uniformly coats the wet slurry (liquid material) onto the substrate surface, greatly increasing the uniformity of the liquid film thickness and providing good repeatability, thereby improving the coating effect.

[0038] Furthermore, such as Figure 1 , Figure 2 As shown, the coating structure 3 also includes a film rolling section, which includes an unwinding section 33 and a winding section 34. The two ends of the flexible film 31 are respectively connected to the unwinding section 33 and the winding section 34. The winding section 34 and the unwinding section 33 are along the transport direction of the conveying structure 1. Figure 1 In the middle, the flexible film 31 is arranged sequentially from right to left (the conveying direction is the same as the conveying direction of the conveying structure 1), and the movement direction of the flexible film 31 is opposite to the conveying direction of the conveying structure 1.

[0039] Furthermore, the unwinding section 33 includes an unwinding roller 331 suspended above the conveying structure 1 and a first motor and controller for adjusting the tension of the unwinding roller 331; the winding section 34 includes a winding roller 341 suspended above the conveying structure 1 and a second motor and controller for adjusting the tension of the winding roller.

[0040] A torque sensor is provided on the side (motor part) of the unwinding roller 331 and / or the take-up roller 341 to detect the tightness of the flexible film 31 being unwound and rewound between the rollers. The torque sensor detects the tightness of the flexible film 31 being unwound and rewound between the two roller shafts, thereby indirectly controlling the tension of the film (flexible film 31).

[0041] Furthermore, a guide section is provided between the winding section 34 and the unwinding section 33, the guide section including at least one correction roller for correcting deviation of the flexible film.

[0042] Furthermore, the guide section also includes multiple correction adjustment devices for adjusting the horizontal position of each correction roller; the correction adjustment device is equipped with a correction sensor for monitoring the horizontal position of the flexible film during the winding and unwinding process, and the correction adjustment device adjusts the horizontal position of the correction roller according to the signal transmitted by the correction sensor.

[0043] The correction sensor is used to monitor whether the flexible film 31 deviates from its position during the unfolding and rewinding process; when the flexible film 31 deviates from its position, the correction sensor sends a signal, and the servo motor of the correction adjustment device (horizontal adjustment) (existing technology) adjusts the position of the correction roller according to the calculated distance.

[0044] like Figure 1 As shown, in a specific embodiment of this utility model, the number of correction rollers is four, designated as a first correction roller 351, a second correction roller 352, a third correction roller 353, and a fourth correction roller 354; the correction adjustment device includes: a first horizontal adjustment device for adjusting the first correction roller 351, a second horizontal adjustment device for adjusting the second correction roller 352, a third horizontal adjustment device for adjusting the third correction roller 353, and a fourth horizontal adjustment device for adjusting the fourth correction roller 354.

[0045] Furthermore, such as Figure 1 As shown, the coating section 32 includes a coating head disposed between the winding section 34 and the unwinding section 33, which is vertically pressable above the flexible film 31. A first height adjustment device is connected to the coating head. The first height adjustment device is connected to the first sidewall 13 and the second sidewall 14 and is disposed along a direction perpendicular to the conveying structure 1 (the conveying guide rail 11 of the equipment) (vertical direction). The first height adjustment device is used to adjust the height of the coating head. The coating head can be roller-shaped, conical, or trapezoidal prism-shaped.

[0046] A pressing part 36 for adjusting the tilt angle of the flexible film is provided between the coating head and the winding part 34. The bottom end of the pressing part 36 is set higher than the bottom end of the coating head to ensure the tension of the flexible film 31 when passing through the coating head. The angle between the flexible film 31 and the tangent point of the coating head is in the range of 0 to 90°.

[0047] The pressing section 36 can be roller-shaped or flat-shaped; the contact position between the pressing section 36 and the flexible film 31 is arc-shaped. The pressing section 36 adopts a pressing roller, and a second height adjustment device is connected to the pressing roller. The second height adjustment device is connected to the first side wall and the second side wall and is arranged in a direction perpendicular to the conveying structure 1 (the conveying guide rail of the equipment) (vertical direction). The second height adjustment device is used to adjust the height of the pressing roller.

[0048] The correction rollers are respectively installed on both sides of the first height adjustment device and the second height adjustment device and suspended on the first side wall 13 and the second side wall 14.

[0049] Furthermore, such as Figure 1 , Figure 2 As shown, the conveying structure 1 includes a conveying guide rail 11 extending longitudinally in the horizontal direction and a conveying platform 12 movable along the longitudinal extension direction of the conveying guide rail 11; a first sidewall 13 and a second sidewall 14 are arranged parallel to each other on both sides of the conveying guide rail 11. The thickness of the first sidewall 13 and the second sidewall 14 is 0 to 500 mm, preferably 10 mm to 50 mm. The conveying guide rail 11 has a first end and a second end opposite to each other along the longitudinal extension direction.

[0050] Furthermore, such as Figure 2 As shown, the surface of the conveying platform 12 has at least two adsorption holes 121 for vacuum adsorption and positioning of the coated substrate. The adsorption holes 121 are interconnected and connected to a vacuum pump. When the vacuum pump is started, the coated substrate is vacuum adsorbed through the adsorption holes 121, so that the conveying platform 12 has a platform vacuum adsorption function. The first and second ends of the conveying guide rail 11 along the longitudinal extension direction are provided with rollers for loading or unloading.

[0051] Furthermore, such as Figure 2 As shown, the feeding structure 2 includes a feeding support frame 21, on which a movable injection pump 22 is mounted. A position adjustment device for driving the injection pump 22 to move is connected to the injection pump 22. The position adjustment device includes a first driving member 23 for driving the injection pump 22 to move horizontally and a second driving member 24 for driving the injection pump to move vertically. The first driving member 23 is connected to the feeding support frame 21, and the second driving member 24 is connected to the first driving member 23.

[0052] In a specific embodiment of this utility model, a horizontal transverse guide rail is provided on the feeding support frame 21 along the transverse direction of the conveying guide rail 11. A first driving member 23 is connected to the horizontal transverse guide rail. The first driving member 23 is driven by a motor to make the injection pump 22 reciprocate along the horizontal transverse guide rail. A vertical guide rail is provided on the first driving member 23. A second driving member 24 is connected to the vertical guide rail. The second driving member 24 is driven by a motor to make the injection pump 22 reciprocate along the vertical guide rail.

[0053] Furthermore, the flexible film can be made of polyamide film, polyimide film, polyester film, polycarbonate film, polyethylene film, polyvinyl chloride film, polystyrene film, polytetrafluoroethylene film, polypropylene film, polyethylene terephthalate film, polymethyl methacrylate or graphene film.

[0054] The method of using the wet coating equipment of this utility model is as follows:

[0055] S1: Place the rigid coating substrate that has undergone the previous process on the conveyor platform 12, activate the platform vacuum adsorption function, and then the conveyor platform 12 moves from the first end of the equipment to directly below the injection pump 22. The movement stops when the starting position of the substrate to be coated is aligned with the pump head of the injection pump (existing technology).

[0056] S2: Adjust the height of the injection pump 22, start the injection pump 22, make it move back and forth, and spread the liquid evenly on the front end of the coating substrate.

[0057] S3: Set the height of the coating head so that there is enough gap between the lowest point of the flexible film 31 and the surface of the coating substrate. Then adjust the height of the pressing part 36 to indirectly adjust the angle between the flexible film 31 and the lowest point of the coating head to a suitable angle.

[0058] S4: Continue to start the conveyor platform 12, and simultaneously start the unwinding roller 331 and the take-up roller 341. The movement direction of the flexible film 31 is opposite to the movement direction of the conveyor platform 12. Adjust the angular velocity of the two rollers to ensure that the tension of the flexible film 31 is uniform and stable during movement. When the conveyor platform 12 carries the coating substrate past the pressure coating head, the flexible film 31 carries the liquid that has been spread at the front end of the substrate to the rear end of the substrate, so that the liquid can be evenly spread on the surface of the entire substrate to form a uniform liquid film.

[0059] S5: After coating is completed, the unwinding roller 331 and the take-up roller 341 stop running. At the same time, the conveying platform 12 moves to the second end position of the equipment, turns off the vacuum adsorption function, and the conveying rollers transfer the substrate to the next process.

[0060] Example 1:

[0061] S1: Place the pre-processed silicon wafer (600mm*600mm in size) on the conveyor platform 12, activate the platform vacuum adsorption function, and then the conveyor platform 12 moves from the first end of the equipment to directly below the liquid injection pump 22. Stop moving when the starting position of the silicon wafer substrate to be coated is aligned with the liquid injection pump head.

[0062] S2: Adjust the height of the injection pump 22, start the injection pump 22, make it move back and forth, and spread the photoresist evenly on the coating front end of the silicon wafer;

[0063] S3: Set the height of the coating head so that the lowest point of the flexible PVC film 31 leaves a gap of about 120 micrometers between it and the surface of the silicon substrate. Then adjust the height of the coating part 36 to indirectly adjust the angle between the flexible film 31 and the lowest point of the conical coating head to a suitable angle.

[0064] S4: Continue to start the conveyor platform 12, and simultaneously start the unwinding roller 331 and the take-up roller 341. The movement direction of the flexible film 31 is opposite to the movement direction of the conveyor platform 12. Adjust the angular velocity of the two rollers to ensure that the tension of the flexible film 31 is uniform and stable during movement. When the conveyor platform 12 carries the silicon wafer substrate past the coating head, the flexible film 31 carries the liquid material that has been spread at the front end of the silicon wafer substrate to the rear end of the silicon wafer substrate, so that the liquid material can be evenly distributed on the surface of the entire silicon wafer substrate to form a uniform liquid film.

[0065] S5: After coating is completed, the unwinding roller 331 and the take-up roller 341 stop running. At the same time, the conveying platform 12 moves to the second end position of the equipment, turns off the vacuum adsorption function, and the conveying rollers transfer the silicon wafer substrate to the high-temperature drying equipment.

[0066] S6: After drying, take 81 points on the silicon wafer and measure its thickness on an ellipsometry. After obtaining the data, summarize the data and calculate the film uniformity.

[0067] Example 2:

[0068] S1: Place the glass with conductive film (600mm*600mm in size) that has undergone the previous treatment on the conveying platform 12, activate the platform vacuum adsorption function, and then the conveying platform 12 moves from the first end of the equipment to directly below the injection pump 22. Stop moving when the starting position of the glass substrate that needs to be coated is aligned with the injection pump head.

[0069] S2: Adjust the height of the injection pump 22, start the injection pump 22, make it move back and forth, and spread the perovskite precursor evenly on the front end of the glass coating.

[0070] S3: Set the height of the coating head so that the lowest point of the flexible PTFE film 31 leaves a gap of about 100 micrometers between it and the surface of the glass substrate. Then adjust the height of the pressing part 36 to indirectly adjust the angle between the flexible film 31 and the lowest point of the roller-shaped coating head to a suitable angle.

[0071] S4: Continue to start the conveyor platform 12, and simultaneously start the unwinding roller 331 and the take-up roller 341. The movement direction of the flexible film 31 is opposite to the movement direction of the platform. Adjust the angular velocity of the two rollers to ensure that the tension of the flexible film 31 is uniform and stable during movement. When the conveyor platform 12 carries the glass substrate under the coating head, the flexible film 31 carries the liquid material that has been spread at the front end of the glass substrate to the rear end of the glass substrate, so that the liquid material can be evenly distributed on the surface of the entire glass substrate to form a uniform liquid film.

[0072] S5: After coating is completed, the unwinding roller 331 and the take-up roller 341 stop running. At the same time, the conveying platform 12 moves to the second end position of the equipment, turns off the vacuum adsorption function, and the conveying rollers transfer the glass substrate to the high-temperature drying equipment.

[0073] S6: After drying, take 81 points on the glass and measure its thickness on an ellipsometry. After obtaining the data, summarize the data and calculate the film uniformity.

[0074] Example 3:

[0075] S1: Place the glass with conductive film (600mm*600mm in size) that has undergone the previous treatment on the conveying platform 12, activate the platform vacuum adsorption function, and then the conveying platform 12 moves from the first end of the equipment to directly below the injection pump 22. Stop moving when the starting position of the glass substrate that needs to be coated is aligned with the injection pump head.

[0076] S2: Adjust the height of the injection pump 22, start the injection pump 22, make it move back and forth, and spread the silver paste evenly on the front end of the glass coating.

[0077] S3: Set the height of the coating head so that the lowest point of the flexible polycarbonate film leaves a gap of about 100 micrometers between the bottom of the film and the surface of the glass substrate. Then adjust the height of the film pressing part 36 to indirectly adjust the angle between the flexible film 31 and the lowest point of the roller-shaped coating head to a suitable angle.

[0078] S4: Continue to start the conveyor platform 12, and simultaneously start the unwinding roller 331 and the take-up roller 341. The movement direction of the flexible film 31 is opposite to the movement direction of the conveyor platform 12. Adjust the angular velocity of the two rollers to ensure that the tension of the flexible film 31 is uniform and stable during movement. When the conveyor platform 12 carries the glass substrate under the coating head, the flexible film 31 carries the liquid material that has been spread at the front end of the glass substrate to the rear end of the glass substrate, so that the liquid material can be evenly distributed on the surface of the entire glass substrate to form a uniform liquid film.

[0079] S5: After coating is completed, the unwinding roller 331 and the take-up roller 341 stop running. At the same time, the conveying platform 12 moves to the second end position of the equipment, turns off the vacuum adsorption function, and the conveying rollers transfer the glass substrate to the high-temperature drying equipment.

[0080] S6: After drying, take 81 points on the glass and measure its thickness on an ellipsometry. After obtaining the data, summarize the data and calculate the film uniformity.

[0081] Comparative Example 1:

[0082] S1: Place the glass with conductive film (600mm*600mm in size) that has undergone the previous treatment on the slit coating conveyor platform and activate the platform vacuum adsorption function.

[0083] S2: Adjust the slit height of the slit coating die, adjust the dispensing speed of the injection pump, and adjust the coating transfer speed;

[0084] S3: After the slot coating die head has gone through the cleaning, wetting and pre-coating processes in sequence, move the slot coating die head to the coating start position.

[0085] S4: Click to start coating. The die head will coat the glass from one end to the other according to the set parameters. When the coating is finished, the die head will return to the initial position.

[0086] S5: After coating is completed, the conveyor platform moves to the end of the equipment, the vacuum adsorption function is turned off, and the conveyor rollers transfer the glass substrate to the high-temperature drying equipment.

[0087] S6: After drying, take 81 points on the glass and measure its thickness on an ellipsometry. After obtaining the data, summarize the data and calculate the film uniformity.

[0088] Comparative Example 2:

[0089] S1: Place the glass with conductive film (600mm*600mm in size) that has undergone previous processing on the conveyor platform and activate the platform's vacuum adsorption function;

[0090] S2: Adjust the level of the conveyor platform, and then place a 180-mesh screen on the glass;

[0091] S3: Pour the prepared solution onto one end of the screen, then use a scraper to scrape the solution back and forth on the screen. After ten back and forth motions, stop coating when the solution can be seen to evenly cover the entire glass surface and remove the screen.

[0092] S4: Then the conveyor platform moves to the beginning of the next drying process, turns off the vacuum adsorption function, and the conveyor rollers transfer the glass substrate to the high-temperature drying equipment.

[0093] S5: After drying, take 81 points on the glass and measure its thickness on an ellipsometry. After obtaining the data, summarize the data and calculate the film uniformity.

[0094] The uniformity calculated by summarizing the data from the five examples above is shown in the table below:

[0095]

[0096] Therefore, through comparison, it was found that using the wet coating equipment of this utility model can better and more evenly coat the wet paste on the substrate surface compared with slot coating and screen printing processes, and has good repeatability, making it more competitive.

[0097] The above description is merely an illustrative embodiment of this utility model and is not intended to limit the scope of this utility model. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of this utility model should fall within the protection scope of this utility model.

Claims

1. A wet coating apparatus characterized by comprising: The invention includes a conveying structure for transporting a coated substrate; a feeding structure for applying a liquid coating solution to the coated substrate and a coating structure for applying the liquid coating solution are sequentially arranged along the conveying direction of the conveying structure, the coating structure including a flexible film for spreading the liquid coating solution evenly on the coated substrate; and a pressing part is provided above the flexible film for pressing and controlling the height of the flexible film to smooth the liquid coating solution.

2. The wet coating apparatus according to claim 1, wherein The coating structure further includes a film rolling section, which includes an unwinding section and a winding section. The two ends of the flexible film are respectively connected to the unwinding section and the winding section. The winding section and the unwinding section are arranged sequentially along the transport direction of the conveying structure, and the movement direction of the flexible film is opposite to the transport direction of the conveying structure.

3. The wet coating apparatus according to claim 2, wherein A guide section is provided between the winding section and the unwinding section, and the guide section includes at least one correction roller for correcting deviation of the flexible film.

4. The wet coating apparatus according to claim 3, wherein The guide section also includes a plurality of correction adjustment devices for adjusting the horizontal position of each correction roller; the correction adjustment device is equipped with a correction sensor for monitoring the horizontal position of the flexible film during the winding and unwinding process, and the correction adjustment device adjusts the horizontal position of the correction roller according to the signal transmitted by the correction sensor.

5. The wet coating apparatus according to claim 2, wherein The coating section includes a coating head disposed between the winding section and the unwinding section and capable of being raised and lowered and pressed above the flexible film. A film pressing section for adjusting the tilt angle of the flexible film is disposed between the coating head and the winding section, and the bottom end of the film pressing section is higher than the bottom end of the coating head.

6. The wet coating equipment as described in claim 2, characterized in that, The unwinding section includes an unwinding roller suspended above the conveying structure and a first motor for adjusting the tension of the unwinding roller; the winding section includes a winding roller suspended above the conveying structure and a second motor for adjusting the tension of the winding roller. Torque sensors are provided on the sides of the unwinding roller and / or the winding roller to detect the tightness of the flexible film being unwound and rewound between the rollers.

7. The wet coating apparatus according to claim 2, wherein The conveying structure includes a conveying guide rail extending longitudinally in the horizontal direction and a conveying platform that can move along the longitudinal extension direction of the conveying guide rail; a first sidewall and a second sidewall are arranged parallel to each other on both sides of the conveying guide rail.

8. The wet coating apparatus according to claim 7, wherein The surface of the conveying platform has at least two adsorption holes for vacuum adsorption and positioning of the coated substrate. The adsorption holes are interconnected and connected to a vacuum pump. The first and second ends of the conveying guide rail along the longitudinal extension direction are provided with rollers for loading or unloading.

9. The wet coating equipment as described in claim 1, characterized in that, The feeding structure includes a feeding support frame, on which a movable injection pump is mounted. A position adjustment device for driving the injection pump to move is connected to the injection pump. The position adjustment device includes a first driving member for driving the injection pump to move horizontally and a second driving member for driving the injection pump to move vertically. The first driving member is connected to the feeding support frame, and the second driving member is connected to the first driving member.

10. The wet coating apparatus according to claim 1, wherein The flexible film is made of polyamide film, polyimide film, polyester film, polycarbonate film, polyethylene film, polyvinyl chloride film, polystyrene film, polytetrafluoroethylene film, polypropylene film, polyethylene terephthalate film, polymethyl methacrylate film, or graphene film.

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