Platform device and liquid coating equipment

Abstract

This utility model relates to a stage device and a liquid coating apparatus. The stage device includes a stage. The stage has a table surface configured for placing a substrate. The table surface has a plurality of first air grooves and a plurality of second air grooves. The first air grooves extend along a first direction. The second air grooves extend along a second direction. The second direction is perpendicular to the first direction. Adjacent first air grooves are connected by second air grooves. In this application, the first and second air grooves of the stage device are arranged longitudinally and transversely, thereby enabling the stage device to effectively adsorb non-circular substrates.

Description

Technical Field

[0001] This utility model relates to a process equipment, and more particularly to a stage device and liquid coating equipment. Background Technology

[0002] To prevent warping of the substrate to be coated, which could affect the yield and reliability of subsequent processes, conventional coating platforms typically incorporate concentrically arranged air channels within the platform to absorb and reduce warping. However, with advancements in process technology, there is a growing demand for coating non-circular substrates. Currently, the concentrically arranged air channels in conventional platforms are not effective at correcting warping in non-circular substrates, failing to meet the requirements of customized processes. Utility Model Content

[0003] Therefore, one objective of this invention is to provide a platform device and a liquid coating equipment that can overcome at least one disadvantage of the prior art.

[0004] According to the above-mentioned objective disclosed in this utility model, a stage device is proposed, comprising a stage. The stage has a table surface configured for placing a substrate. The table surface has a plurality of first air grooves and a plurality of second air grooves. The first air grooves extend along a first direction. The second air grooves extend along a second direction. The second direction is perpendicular to the first direction. Two adjacent first air grooves are connected by the second air grooves.

[0005] Preferably, two adjacent air grooves of the first air groove are connected to the two ends of the second air groove.

[0006] Preferably, two of the first air grooves and two of the second air grooves are intersected to form a first annular groove with a rectangular appearance.

[0007] Preferably, two of the first air grooves intersect with two of the second air grooves to form a second annular groove with a rectangular appearance, and the second annular groove is located on the periphery of the first annular groove.

[0008] Preferably, two of the first air grooves and two of the second air grooves are intersected to form a second annular groove with a rectangular appearance, and the second annular groove intersects with the first annular groove.

[0009] Preferably, the platform includes a plurality of air channels in one body, the air channels extending along the first direction below the platform surface, each air channel corresponding to one of the first air grooves, and each air channel communicating with the corresponding air groove in the first air groove via a plurality of air holes.

[0010] Preferably, the platform has a plurality of first mounting holes in its main body, the first mounting holes extending along the first direction below the platform surface, and a heating element is installed in each of the first mounting holes.

[0011] Preferably, the body has a plurality of second mounting holes, which extend along the first direction below the table surface. A temperature sensing element is installed in each of the second mounting holes, and each of the second mounting holes is located between two adjacent first mounting holes.

[0012] As a preferred option, it also includes: A stand, configured for setting up the platform; and A receiving mechanism is provided on the pedestal and includes a receiving assembly, wherein the receiving assembly is driven to move up and down and includes a plurality of receiving members, the receiving members being configured to receive the substrate and place it on the pedestal. The platform has a first working area and a second working area. The first working area is located on the periphery of the second working area. The platform also has a plurality of through holes through which the receiving component passes. The through holes are located in the first working area. The first air groove and the second air groove are located in the second working area and can adsorb a bottom surface of the substrate.

[0013] Preferably, the receiving element is arranged in a straight line along the first direction and the second direction.

[0014] Preferably, one end of each of the receiving members is disposed on a lifting member, which is driven to move up and down, and one end of each of the receiving members includes a corrugated suction nozzle configured to adsorb the bottom surface of the substrate.

[0015] Preferably, the second working area has a plurality of adsorption regions, each of which corresponds to a different number of negative pressure sources.

[0016] Preferably, the system further includes a pressure plate mechanism, wherein the pressure plate mechanism is located on the pedestal and includes a pressure plate assembly, which is driven to press the substrate placed on the pedestal.

[0017] Preferably, it further includes: a supporting mechanism, wherein the supporting mechanism is located on the pedestal and includes a supporting component that is driven to support a bottom surface of the platform.

[0018] Preferably, the platform further includes a translation mechanism configured to set the platform and drive the platform to move horizontally.

[0019] In accordance with the aforementioned objectives disclosed in this utility model, a liquid coating apparatus is further proposed, comprising a machine base and a coating device. The machine base is configured to accommodate a platform device. The coating device includes a liquid valve and a multi-axis drive mechanism. The liquid valve is configured to dispense liquid material. The multi-axis drive mechanism is configured to drive the liquid valve to move relative to the platform.

[0020] Based on the above, the first and second air grooves of the stage device disclosed in this utility model are arranged in a longitudinal and transverse manner, thereby enabling the stage device to effectively adsorb non-circular substrates. Attached Figure Description

[0021] The shape of this application can be better understood from the following detailed description taken in conjunction with the accompanying drawings. It should be noted that, according to industry standard practice, the features are not drawn to scale. In fact, the dimensions of each feature can be arbitrarily increased or decreased for clarity of discussion.

[0022] Figure 1 This is a three-dimensional schematic diagram of a platform device according to one embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of a platform device according to one embodiment of the present invention.

[0024] Figure 3 This is an assembly diagram of a platform device according to one embodiment of the present invention.

[0025] Figure 4 This is a top-view schematic diagram of a platform device according to one embodiment of the present invention.

[0026] Figure 5 This is a top view schematic diagram of a platform device according to one embodiment of the present invention.

[0027] Figure 6 This is a partially enlarged top view of the platform of a platform device according to one embodiment of the present invention.

[0028] Figure 7-10 This is a schematic diagram of the operation of a platform device according to one embodiment of the present invention.

[0029] Figure 11 This is a three-dimensional schematic diagram of a liquid coating device according to one embodiment of the present invention.

[0030] Explanation of reference numerals in the attached figures: 100: Platform device 200: Platform 202: Through hole 210: Countertop 212: First air trench 212a: First air channel 212b: First air trench 212c: First air groove 214: Second air channel 214a: Second air groove 214b: Second air channel 214c: Second gas groove 220: First Circular Ditch 230: Second Circular Ditch 230a: Second annular trench 240: Ontology 242: Airway 244: Stomata 246: First mounting hole 248: Second mounting hole 250: Heating element 260: Temperature sensing element 270: First Working Area 280: Second Work Area 282: Adsorption region 282a: Adsorption region 282b: Adsorption region 300: pedestal 400: Contracting Agency 410: Component Subcontractor 412: Components 414: Lifting components 416: Corrugated nozzle 420: Driver Component 422: Motor 424: Screw 500: Pressure plate mechanism 510: Pressure Plate Assembly 512: Pressure plate 514: Mounting bracket 520: Cylinder 530: Drive unit 600: Debt-receiving institution 610: Support Component 700: Translation mechanism 800: Liquid Coating Equipment 810: Machine 820: Coating apparatus 822: Liquid Valve 824: Multi-axis drive mechanism 900: Robotic Arm WP: substrate X: First direction Y: Second direction Z: Third-party. Detailed Implementation

[0031] The embodiments of this utility model are discussed in detail below. However, it is understood that the embodiments provide many applicable concepts that can be implemented in a wide variety of specific situations. The embodiments discussed and disclosed are for illustrative purposes only and are not intended to limit the scope of this application. All embodiments of this utility model disclose a variety of different features, but these features can be implemented individually or in combination as needed.

[0032] Furthermore, the terms "first," "second," etc., used in this article do not specifically refer to order or sequence; they are merely used to distinguish elements or operations described using the same technical terms.

[0033] The spatial relationship between the two elements described in this utility model applies not only to the orientation shown in the drawings, but also to orientations not shown in the drawings, such as inverted orientations. Furthermore, the terms "connection," "electrical connection," or similar expressions used in this utility model to refer to the two components are not limited to a direct or electrical connection, but may also include indirect or electrical connections as needed.

[0034] Please refer to Figures 1 to 3 These are, respectively, a perspective view, a device view, and an assembly view of a platform device 100 according to an embodiment disclosed in this utility model. The platform device 100 mainly includes a platform 200.

[0035] The platform 200 is a platform structure, which can be, for example, rectangular or other platforms of any suitable shape. Figure 1 As shown, the stage 200 has a platform 210 on which a substrate WP is placed. The platform 210 has a plurality of first air grooves 212, 212a, 212b, and 212c, and a plurality of second air grooves 214, 214a, 214b, and 214c. These first air grooves 212, 212a, 212b, and 212c extend in the platform 210 along a first direction X, and the second air grooves 214, 214a, 214b, and 214c extend in the platform 210 along a second direction Y. In some embodiments, the first direction X and the second direction Y are perpendicular to each other. Therefore, the first air grooves 212, 212a, 212b, and 212c are perpendicular to the intersecting second air grooves 214, 214a, 214b, and 214c.

[0036] Please refer to Figure 4This is a top view schematic diagram illustrating a platform 200 of a platform device 100 according to an embodiment disclosed in this utility model. In some embodiments, two adjacent first air grooves 212, 212a, 212b, and 212c can be connected via a second air groove 214, 214a, 214b, and 214c. Since the first air grooves 212, 212a, 212b, and 212c and the second air grooves 214, 214a, 214b, and 214c are arranged in a crisscross pattern, one of the second air grooves 214, 214a, 214b, or 214c can connect to two adjacent first air grooves 212, 212a, 212b, and 212c. Moreover, these two adjacent first air grooves 212, 212a, 212b, and 212c can respectively connect to the two ends of the second air groove 214, 214a, 214b, or 214c.

[0037] like Figure 4 As shown, in some embodiments, the two first air grooves 212a and the two second air grooves 214a are orthogonal to each other and can be interwoven to form a first annular groove 220 with a rectangular appearance. Specifically, the first annular groove 220 is a rectangular groove formed by connecting one end of each of the two first air grooves 212a to one end of each of the two second air grooves 214a.

[0038] like Figure 4 As shown, in some embodiments, two additional first air grooves 212b and two additional second air grooves 214b can be arranged in a crisscross pattern to form a second annular groove 230. The second annular groove 230 also has a rectangular appearance and is located outside the first annular groove 220, forming a double-layered rectangular groove with the first annular groove 220. For example, the second annular groove 230 can be parallel to the first annular groove 220, and each side of the second annular groove 230 can have the same distance from the opposite side of the first annular groove 220.

[0039] In some embodiments, such as Figure 4 As shown, two more first air grooves 212c and two more second air grooves 214c can be arranged in a crisscross pattern to form a second annular groove 230a with a rectangular appearance. The second annular groove 230a intersects with the first annular groove 220. Specifically, the two second air grooves 214c forming the second annular groove 230a intersect with the two first air grooves 212a forming the first annular groove 220. Therefore, the positional relationship of the second annular groove 230a to the first annular groove 220 is different from the positional relationship of the second annular groove 230 to the first annular groove 220. That is to say, the second annular groove 230a and the second annular groove 230 have different dimensions and orientations. The first air grooves 212c may, for example, intersect the second air grooves 214a perpendicularly.

[0040] Please refer to the following at the same time Figure 5 and Figure 6These are, respectively, a top view and a partially enlarged top view of a platform device 100 according to an embodiment disclosed in this utility model. The body 240 of the platform 200 includes a plurality of air passages 242, which allow gas to flow in and out of the body 240. In some embodiments, such as Figure 5 As shown, the air passage 242 extends along the first direction X below the platform 210. Therefore, the air passage 242 is parallel to the first air grooves 212, 212a, 212b, and 212c. Each air passage 242 may correspond to one or more of the first air grooves 212, 212a, 212b, and 212c, and each air passage 242 is connected to the corresponding first air grooves 212, 212a, 212b, and 212c via several air holes 244. Gas can enter and exit the body 240 through the air passage 242, and then enter and exit the first air grooves 212, 212a, 212b, and 212c through the air holes 244. Because the first gas channels 212, 212a, 212b, and 212c intersect with the second gas channels 214, 214a, 214b, and 214c, gas can further enter and exit the intersecting second gas channels 214, 214a, 214b, and 214c via the first gas channels 212, 212a, 212b, and 212c. For example... Figure 6 As shown, the pores 244 are arranged along the first direction X on the first air grooves 212, 212a, 212b and 212c, and the air passage 242 can extend to cover the pores 244 arranged on the corresponding first air grooves 212, 212a, 212b and 212c.

[0041] In some embodiments, the body 240 of the stage 200 has a plurality of first mounting holes 246. For example... Figure 5 and Figure 6 As shown, a first mounting hole 246 extends along a first direction X below the table surface 210. The first mounting hole 246 is configured to mount a heating element 250. In some embodiments, the body 240 of the platform 200 further has a second mounting hole 248. The second mounting hole 248 may extend along the first direction X below the table surface 210. The second mounting hole 248 is configured to mount a temperature sensing element 260. In some embodiments, each second mounting hole 248 is located between two adjacent first mounting holes 246. In such an embodiment, the temperature sensing element 260 is located between two heating elements 250, so the temperature sensing element 260 can sense temperature changes more accurately. When there is sufficient space in the body 240, one second mounting hole 248 may be provided between every two first mounting holes 246, that is, there is one temperature sensing element 260 between every two heating elements 250, but this utility model is not limited to this.

[0042] Please refer to this again. Figure 3In some embodiments, the stage device 100 further includes a pedestal 300 and a receiving mechanism 400. The pedestal 300 provides a mounting surface for the stage 200. The pedestal 300 may be, for example, a quadrilateral frame structure.

[0043] The receiving mechanism 400 is disposed on the base 300 and includes a receiving assembly 410. The receiving assembly 410 is drivable for lifting and lowering. The receiving assembly 410 includes a plurality of receiving members 412. The receiving members 412 may be rod-shaped structures and are configured to receive the substrate WP and place the received substrate WP on the platform 210. In some embodiments, the receiving assembly 410 further includes a lifting member 414. One end of each receiving member 412 may be disposed on the lifting member 414. The lifting member 414 is drivable for rising or falling in a third direction Z, and further drives the receiving members 412 to rise or fall. For example, the receiving mechanism 400 may further include a drive assembly 420. The drive assembly 420 may include, for example, a motor 422 and a screw 424, the motor 422 driving the screw 424 to rotate, thereby driving the lifting member 414 to rise or fall.

[0044] Each receiving member 412 has a corrugated suction nozzle 416 at its other end to absorb the bottom surface of the substrate WP. Specifically, when the substrate WP is moved into the stage device 100, the drive assembly 420 drives the lifting member 414 to rise. Then, the receiving member 412 rises with the lifting member 414 to a preset height to receive the substrate WP, and uses the corrugated suction nozzle 416 to absorb the bottom surface of the substrate WP to receive the substrate WP. Subsequently, the lifting member 414 descends so that the substrate WP received by the receiving member 412 can be placed on the table surface 210.

[0045] like Figure 3 As shown, in some embodiments, the receiving members 412 are arranged in a straight line along the first direction X and the second direction Y. The positions of the receiving members 412 can correspond to the periphery of the platform 210. Specifically, the platform 210 is provided with a first working area 270 and a second working area 280. The first working area 270 is located on the periphery of the second working area 280, surrounding the second working area 280. The stage 200 has several through holes 202 located in the first working area 270. The positions of the through holes 202 can correspond to the positions of the receiving members 412, so that the corresponding receiving members 412 can pass through them. A first air groove 212 and a second air groove 214 are provided in the second working area 280. When the substrate WP is placed on the platform 210, the first air groove 212 and the second air groove 214 can adsorb the bottom surface of the substrate WP.

[0046] exist Figure 4 and Figure 5In the illustrated embodiment, the second working area 280 has several different adsorption regions 282, 282a, and 282b, which are formed by alternating arrangement of first air channels 212, 212a, 212b, and 212c and second air channels 214, 214a, 214b, and 214c. The adsorption regions 282, 282a, and 282b are not interconnected. The adsorption regions 282, 282a, and 282b can be, for example, rectangular blocks, small L-shaped blocks, and large L-shaped blocks. In some embodiments, the adsorption regions 282, 282a, and 282b are arranged sequentially from the inside out, and each adsorption region 282, 282a, and 282b can correspond to a different negative pressure source to form independent negative pressure zones.

[0047] Please refer to this again. Figure 1 The stage assembly 100 further includes a pressure plate mechanism 500. The pressure plate mechanism 500 is located on the platform 300 and can be used to press the substrate WP placed on the platform 210. The pressure plate mechanism 500 includes a pressure plate assembly 510. The pressure plate assembly 510 can be driven to move up, down, left, and right to an appropriate position to press the two side edges of the substrate WP on the platform 210. For example, the pressure plate assembly 510 may include two pressure plates 512 and two mounting seats 514. These two mounting seats 514 are spaced apart on opposite sides of the platform 300 in the first direction X. The two pressure plates 512 are respectively disposed on the mounting seats 514.

[0048] In some embodiments, such as Figure 3 As shown, the pressure plate mechanism 500 further includes two cylinders 520 and two driving members 530. The two cylinders 520 are respectively positioned below the two pressure plates 512. The two driving members 530 are also respectively positioned below the two pressure plates 512. The cylinders 520 and driving members 530 can drive the mounting base 514, and further drive the pressure plates 512 on the mounting base 514 to move. The pressure plates 512 can be moved up and down by the corresponding cylinders 520. The pressure plates 512 can be moved left and right by the driving members 530.

[0049] Please refer to Figures 7 to 10 This is a schematic diagram illustrating the operation of a platform device 100 according to an embodiment disclosed in this utility model. When the platform device 100 is operated, the lifting member 414 first pushes the receiving member 412 along the third direction Z to a preset height capable of receiving the substrate WP, so that the corrugated suction nozzle 416 can adsorb the bottom surface of the substrate WP, as shown below. Figure 7 As shown. Next, the lifting member 414 descends, causing the receiving member 412 to place the received substrate WP onto the first working area 270 and the second working area 280 of the platform 210, as shown. Figure 8 As shown.

[0050] Subsequently, as Figure 9 As shown, the pressure plate assembly 510 can be driven to move above the substrate WP to press the substrate WP. Specifically, when the substrate WP is placed on the platform 210, the cylinder 520 can push the pressure plate 512 to a height higher than the substrate WP on the platform 210. Then, the pressure plate 512 is pushed inward by the drive member 530 to above the opposite sides of the substrate WP on the platform 210, and the cylinder 520 then lowers the pressure plate 512 to the surface of the substrate WP on the platform 210, so that the pressure plate 512 can press the substrate WP on the platform 210. At this time, the adsorption areas 282, 282a, and 282b of the second working area 280 sequentially activate the negative pressure source from the inside out to adsorb the substrate WP, so that the substrate WP can be flatly adsorbed on the platform 210. After the substrate WP is adsorbed by the adsorption areas 282, 282a, and 282b of the second working area 280, as Figure 10 As shown, the pressure plate 512 can be driven to move upward and outward away from the substrate WP and reset to the initial position located on the stage 300.

[0051] In some embodiments, such as Figure 3 As shown, the platform device 100 further includes a supporting mechanism 600. The supporting mechanism 600 is located on the pedestal 300. The platform 200 supported on the pedestal 300 is structurally supported around its perimeter, while the center of the platform 200 is supported by the supporting mechanism 600 to prevent collapse and deformation caused by a large area of ​​the center of the platform 200 being suspended in the air. The supporting mechanism 600 includes a top support assembly 610. The top support assembly 610 is used to support the bottom surface of the platform 200 and can be driven to move up and down. For example, the top support assembly 610 can be located below the center of the platform 200. Depending on the deformation of the platform 200, the top support assembly 610 can be moved up and down to finely adjust its height and adjust the flatness of the platform 200.

[0052] In some embodiments, such as Figure 2 As shown, the stage device 100 further includes a translation mechanism 700. The translation mechanism 700 may be, for example, a track trolley structure. The translation mechanism 700 is configured to mount the platform 300 and can drive the platform 300 to move horizontally along the track direction. For example, the translation mechanism 700 may be arranged along a first direction X, driving the platform 300 mounted on the translation mechanism 700 to move along the first direction X according to process requirements, so that the platform 300 is displaced to a predetermined position.

[0053] The aforementioned stage device 100 can be applied in process equipment, such as liquid coating equipment 800. Please refer to... Figure 11 This is a perspective view illustrating a liquid coating apparatus 800 according to an embodiment disclosed in this utility model. The liquid coating apparatus 800 uses a stage device 100 and mainly includes a machine base 810 and a coating device 820.

[0054] The machine tool 810 can be provided with a platform device 100. The platform device 100 can drive the base 300 to move horizontally on the machine tool 810 via a translation mechanism 700. In some embodiments, such as Figure 11 As shown, the coating apparatus 820 is mounted on the machine base 810 and includes a liquid valve 822 and a multi-axis drive mechanism 824. The liquid valve 822 is configured to dispense liquid material. The multi-axis drive mechanism 824 can drive the liquid valve 822 to move relative to the stage 200. For example, a substrate WP can be transferred to the liquid coating apparatus 800 by a robot arm 900. After the substrate WP is placed on the stage 200, the liquid valve 822 can be driven by the multi-axis drive mechanism 824 to move above the stage apparatus 100 and dispense liquid material onto the substrate WP carried by the stage 200 to perform a liquid coating operation.

[0055] In some embodiments, there may be more than one liquid valve 822, and the number of liquid valves 822 can be increased according to the application requirements of the liquid coating equipment 800. For example, two coating devices 820 may be installed on the machine base 810, and these two coating devices 820 are arranged facing each other. In addition, two liquid valves 822 may be installed on one coating device 820 at the same time. Therefore, in such an embodiment, there may be four liquid valves 822.

[0056] As can be seen from the above embodiments, the advantage disclosed in this utility model is that the first and second air grooves of the stage device are arranged in a longitudinal and transverse pattern. Therefore, it can effectively adsorb non-circular materials to be coated.

[0057] Although the present invention has been disclosed above by way of embodiments, it is not intended to limit the present application. Anyone with ordinary knowledge in this art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A stage device characterized by comprising: include: A stage having a platform, wherein the platform is configured to place a substrate, and having: A plurality of first air channels are provided, extending along a first direction; and A plurality of second air channels extend along a second direction, wherein the second direction is perpendicular to the first direction, and two adjacent first air channels are connected via one of the second air channels.

2. The stage apparatus of claim 1, wherein The two adjacent air grooves of the first air groove are respectively connected to the two ends of the second air groove.

3. The stage apparatus of claim 1, wherein Two of the first air grooves intersect with two of the second air grooves to form a first annular groove with a rectangular appearance.

4. The platform device as described in claim 3, characterized in that, Two of the first air grooves intersect with two of the second air grooves to form a second annular groove with a rectangular appearance, and the second annular groove is located on the periphery of the first annular groove.

5. The stage apparatus of claim 3, wherein Two of the first air grooves intersect with two of the second air grooves to form a second annular groove with a rectangular appearance, and the second annular groove intersects with the first annular groove.

6. The stage apparatus of claim 1, wherein, The platform has a body containing a plurality of air channels extending below the platform along the first direction. Each air channel corresponds to one of the first air grooves, and each air channel is connected to the corresponding air groove via a plurality of air holes.

7. The stage apparatus of claim 1, wherein The platform has a plurality of first mounting holes in its main body, the first mounting holes extending along the first direction below the platform surface, and a heating element is installed in each of the first mounting holes.

8. The stage apparatus of claim 7, wherein The main body has a plurality of second mounting holes, which extend along the first direction below the table surface. A temperature sensing element is installed in each of the second mounting holes, and each of the second mounting holes is located between two adjacent first mounting holes.

9. The stage apparatus of claim 1, wherein Also includes: A stand, configured for setting up the platform; and A receiving mechanism is provided on the pedestal and includes a receiving assembly, wherein the receiving assembly is driven to move up and down and includes a plurality of receiving members, the receiving members being configured to receive the substrate and place it on the pedestal. The platform has a first working area and a second working area. The first working area is located on the periphery of the second working area. The platform also has a plurality of through holes through which the receiving component passes. The through holes are located in the first working area. The first air groove and the second air groove are located in the second working area and can adsorb a bottom surface of the substrate.

10. The stage apparatus of claim 9, wherein, The receiving components are arranged in a straight line along the first direction and the second direction.

11. The stage apparatus of claim 9, wherein Each of the receiving components has one end disposed on a lifting component, which is driven to move up and down. Each of the receiving components has one end comprising a corrugated suction nozzle configured to adsorb the bottom surface of the substrate.

12. The stage apparatus of claim 9, wherein, The second working area has a plurality of adsorption regions, each of which corresponds to a different negative pressure source.

13. The stage apparatus of claim 9, wherein It also includes: a pressure plate mechanism, wherein the pressure plate mechanism is located on the platform and includes a pressure plate assembly, the pressure plate assembly being driven to press the substrate placed on the platform.

14. The stage apparatus of claim 9, wherein, Also includes: A jacking mechanism, wherein the jacking mechanism is located on the pedestal and includes a jacking assembly that is driven to jack a bottom surface of the platform.

15. The stage apparatus of claim 9, wherein, Also includes: A translation mechanism, wherein the translation mechanism is configured to dispose and drive the stage to horizontally displace.

16. A liquid material coating apparatus characterized by comprising: The liquid material coating apparatus includes the stage device according to any one of claims 1 to 15. A machine table configured to dispose the stage device; and A coating device including: A liquid valve configured to discharge liquid material; and A multi-axis drive mechanism configured to drive the liquid valve to displace relative to the stage.

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