An air-floating electric spindle and machining equipment

Abstract

This utility model discloses an air-bearing electric spindle and processing equipment, comprising: a body assembly having a spindle core cavity and an exhaust channel communicating with the spindle core cavity; a spindle core disposed in the spindle core cavity and supported on the body assembly by an air-bearing bearing; an encoder assembly including a reading head and an encoder, the encoder being disposed on the spindle core and the reading head corresponding to the encoder being disposed on the body assembly; a dynamic balancing detection assembly disposed on the body assembly; and a laser disposed on the body assembly, the laser being used to cut and remove weight from the spindle core. By combining a non-contact material removal balancing correction scheme with bearing exhaust heat dissipation and chip removal, the spindle can automatically perform dynamic balancing correction during spindle production, improving spindle production efficiency and ensuring spindle balance accuracy.

Description

Technical Field

[0001] This utility model is applicable to the field of electric spindles, and in particular relates to an air-bearing electric spindle and processing equipment. Background Technology

[0002] In the traditional production process of air-bearing electric spindles, dynamic balancing is an indispensable step. In addition, during actual processing, the chucks are replaced regularly, and corrosion and weathering of the spindle core can also lead to imbalances.

[0003] Traditional dynamic balancing methods typically require removing the spindle and placing it on a specific balancing machine for adjustment. This method is not only inefficient but also often fails to achieve the required adjustment accuracy.

[0004] In summary, the problems existing in the relevant technologies urgently need to be solved. Utility Model Content

[0005] The purpose of this utility model is to solve at least one of the technical problems existing in the prior art and to provide an air-bearing electric spindle and processing equipment.

[0006] The technical solution adopted by this utility model to solve its technical problem is:

[0007] Firstly, an air-bearing electric spindle includes:

[0008] A body assembly, wherein the body assembly has a shaft core cavity and an exhaust channel communicating with the shaft core cavity;

[0009] A shaft core is disposed in the inner cavity of the shaft core and supported on the body assembly by an air bearing;

[0010] An encoder assembly includes a reading head and an encoder, wherein the encoder is disposed on the shaft core and the reading head is disposed on the body assembly corresponding to the encoder;

[0011] A dynamic balancing detection component is disposed on the body component;

[0012] A laser, disposed on the body assembly, is used to cut and remove weight from the shaft core.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the laser is disposed on the body assembly radially toward the outer peripheral surface of the shaft core.

[0014] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the body assembly is provided with an air blowing hole, which faces the cutting area on the outer peripheral surface of the shaft core.

[0015] In combination with the first aspect and the above-mentioned implementations, in some implementations of the first aspect, the body assembly is provided with an annular air intake chamber, a plurality of air blowing holes are distributed along the inner circumferential surface of the inner cavity of the shaft core and guided by the annular air intake chamber to the outer circumferential surface of the shaft core, and the body assembly is provided with a one-way air intake connector communicating with the annular air intake chamber.

[0016] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the body assembly has a piston chamber at one end of the annular air intake chamber, a piston is provided in the piston chamber, the piston has a blocking part extending into the annular air intake chamber, the blocking part can move with the piston to enter or exit the annular air intake chamber, thereby blocking or opening the one-way air intake connector and the blowing hole to form a pulse airflow.

[0017] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the air blowing hole includes a first air blowing hole located on one side of the laser and a second air blowing hole located on the other side of the laser, wherein the first air blowing hole and the second air blowing hole extend obliquely from both sides of the laser toward the cutting area of ​​the outer peripheral surface of the shaft core.

[0018] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the body assembly is provided with an electrostatic precipitator in the exhaust channel.

[0019] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the shaft extends axially, the front end of the shaft is supported on the body assembly by a front air bearing and a thrust air bearing, the rear end of the shaft is supported on the body assembly by a rear air bearing, a rotor is provided between the front and rear air bearings, the body assembly is provided with a stator that cooperates with the rotor, the laser includes a first laser and a second laser, the first laser is disposed between the front air bearing and the stator, the rear end of the shaft extends beyond the rear air bearing, and the second laser is disposed behind the rear air bearing.

[0020] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the dynamic balancing detection component includes a first dynamic balancing detection component disposed in the front air bearing and a second dynamic balancing detection component disposed in the rear air bearing.

[0021] In a second aspect, a processing apparatus includes an air-bearing electric spindle as described in any implementation of the first aspect.

[0022] One of the above technical solutions has at least one of the following advantages or beneficial effects: In the dynamic balancing correction process, the present invention first detects the imbalance data of the spindle, such as the imbalance amount and phase angle, through a dynamic balancing detection component. Then, the rotation angle information of the spindle core is fed back through a laser combined with an encoder component, and the spindle core is cut and corrected. During this process, the heat and waste generated during cutting can be directly blown away from the cutting area by the airflow discharged from the air bearing, and finally discharged through the exhaust channel. The present invention, through a non-contact material removal balancing correction scheme combined with bearing exhaust heat dissipation and chip removal, enables automatic dynamic balancing correction during spindle production, improving spindle production efficiency and ensuring spindle balance accuracy. For users, disassembling and reassembling the spindle due to imbalance is time-consuming and labor-intensive, and reduces the precision of parts. Once online balancing correction is achieved, unplanned downtime can be reduced, thereby improving user production efficiency.

[0023] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0024] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0025] Figure 1 This is a schematic diagram of one embodiment of the air-bearing electric spindle of this utility model;

[0026] Figure 2 yes Figure 1 Enlarged view of a portion of point A in the middle;

[0027] Figure 3 This is a schematic diagram of the encoder assembly structure of an embodiment of the air-bearing electric spindle of this utility model;

[0028] Figure 4 This is a schematic diagram of the air bearing structure of one embodiment of the air-bearing electric spindle of this utility model;

[0029] Figure 5 This is a schematic diagram of the front air bearing structure of one embodiment of the air-bearing electric spindle of this utility model. Detailed Implementation

[0030] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0031] In this utility model, when directions (up, down, left, right, front, and back) are described, it is only for the convenience of describing the technical solution of this utility model, and does not indicate or imply that the technical features referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this utility model.

[0032] In this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc. are understood to exclude the stated number; "above," "below," "within," etc. are understood to include the stated number. In the description of this utility model, if "first" or "second" is used, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0033] In this utility model, unless otherwise explicitly defined, terms such as "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a direct connection or an indirect connection through an intermediate medium; a fixed connection, a detachable connection, or an integrally formed connection; a mechanical connection, an electrical connection, or a connection capable of mutual communication; or the internal connection of two components or the interaction between two components. Those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model based on the specific content of the technical solution.

[0034] in, Figure 1 The reference direction coordinate system of this utility model embodiment is given below, in conjunction with Figure 1 The embodiments of this utility model will be described in the directions shown.

[0035] See figure Figure 2 An embodiment of this utility model provides an air-bearing electric spindle, including a body assembly 100, a spindle core 200, an encoder assembly 300, a dynamic balancing detection assembly 400, and a laser 500. The body assembly 100 is provided with a spindle core inner cavity 101 and an exhaust channel 102 communicating with the spindle core inner cavity 101. The exhaust channel 102 is used to discharge the airflow in the spindle core inner cavity 101 to the outside.

[0036] The shaft core 200 is disposed in the inner cavity 101 of the shaft core and is supported by the air bearing in the body assembly 100. The shaft core 200 can rotate at high speed in the body assembly 100 by means of the air bearing.

[0037] The encoder assembly 300 includes a reading head 301 and an encoder 302. The encoder 302 can be an optical grating or a magnetic grating. The encoder 302 is disposed on the shaft core 200, and the reading head 301 is disposed on the body assembly 100 corresponding to the encoder 302. The encoder 302 and the reading head 301 cooperate to detect the rotational position of the shaft core 200 in the body assembly 100 online.

[0038] The dynamic balancing detection component 400 is installed in the machine body component 100 and is used to extract and calculate dynamic balancing information such as unbalance and phase angle, so as to provide unbalance analysis data for the dynamic balancing correction of the spindle.

[0039] The laser 500 is installed on the machine body assembly 100 and is used to cut and remove weight from the spindle core 200. The electric spindle can be controlled by a host computer to rotate the spindle core 200 to a position facing the laser 500 based on the imbalance amount and phase angle obtained by the rotary position encoder 302 and the dynamic balance detection component 400. The host computer then controls the laser 500 to cut and correct the spindle core 200 based on the imbalance amount.

[0040] See Figure 1 , Figure 2 In this invention, during dynamic balancing, the unbalance data of the spindle, such as the unbalance amount and phase angle, is first detected by the dynamic balancing detection component 400. Then, the rotation angle information of the spindle core 200 is fed back by the laser 500 and the encoder component 300, and the spindle core 200 is cut and calibrated. During this process, the heat and waste generated by cutting can be directly blown away from the cutting area by the airflow discharged from the air bearing, and finally discharged through the exhaust channel 102. This invention, through a non-contact material removal balancing calibration scheme combined with bearing exhaust heat dissipation and chip removal, enables automatic dynamic balancing calibration of the spindle during spindle production, improving spindle production efficiency and ensuring spindle balance accuracy. For users, disassembling and assembling the spindle due to imbalance is time-consuming and labor-intensive, and can reduce the precision of parts. Once online balancing calibration is achieved, unplanned downtime can be reduced, thereby improving user production efficiency.

[0041] The laser 500 may be axially offset at one end of the shaft core 200, or it may be disposed on the outer periphery of the shaft core 200. See also the following embodiments: Figure 1 , Figure 2The laser 500 is disposed on the machine body assembly 100 radially toward the outer peripheral surface of the spindle core 200. In this embodiment, the electric spindle can be controlled by a host computer to rotate the spindle core 200 to a position facing the laser 500 based on the imbalance amount and phase angle obtained by the rotary position encoder 302 and the dynamic balance detection component 400. The laser 500 can then cut one side of the outer peripheral surface of the spindle core 200 based on the imbalance amount, thereby achieving dynamic balance correction. This embodiment effectively improves the dynamic balance correction effect by reducing the weight on the outer peripheral surface of the spindle core 200.

[0042] In some embodiments, see Figure 1 , Figure 2 The machine body assembly 100 is provided with an air blowing hole 103, which faces the cutting area on the outer peripheral surface of the shaft core 200. In this embodiment, based on the heat dissipation and chip removal of the air bearing, the air blowing hole 103 is further provided to improve the cooling and chip removal effect of laser cutting weight removal.

[0043] Further, see Figure 1 , Figure 2 The machine body assembly 100 is provided with an annular air inlet chamber 104, and multiple air blowing holes 103 are distributed along the inner circumferential surface of the shaft core 201 and guided by the annular air inlet chamber 104 to the outer circumferential surface of the shaft core 200. The machine body assembly 100 is provided with a one-way air inlet connector 105 communicating with the annular air inlet chamber 104. During laser cutting for deweight removal, external gas is introduced into the annular air inlet chamber 104 through the one-way air inlet connector 105, and then further blown onto the outer circumferential surface of the shaft core 200 through the circumferentially distributed air blowing holes 103, which fully ensures the cooling and chip removal effect of the cutting area of ​​the shaft core 200 and ensures the uniformity of cooling of the shaft core 200.

[0044] Further, see Figure 1 , Figure 2The body assembly 100 has a piston chamber 106 at one end of the annular air intake chamber 104, and a piston 107 is provided in the piston chamber 106. The piston chamber 106 and the piston 107 form a pulse cylinder. The piston 107 can move along the front-rear direction of the body assembly 100 under the action of fluids on both sides of the piston chamber 106. The piston 107 has a blocking part 108 extending into the annular air intake chamber 104. The blocking part 108 can move with the piston 107 to enter or exit the annular air intake chamber 104, thereby blocking or opening the one-way air intake connector 105 and the air blowing hole 103 to form a pulse airflow. In this embodiment, by setting piston 107 to block and open one-way air inlet connector 105 and air blowing hole 103, a pulsed airflow is formed, effectively increasing the airflow pressure blown out of air blowing hole 103. This allows the pressure to be increased from 0.3 MPa to 1.5 MPa or even higher within 0.1 seconds, and then intermittently sprayed at speeds exceeding 30 m / s, thereby achieving enhanced spraying and instantaneous cooling (temperature rise < 3℃) and a higher particle removal rate > 99.9%. This embodiment employs laser online weight removal + dual-source air cooling, fully utilizing bearing exhaust, and combining it with a built-in pulse cylinder to form a cleaning system with on-demand pressurization, ensuring online weight removal of shaft core 200 and achieving dynamic balance correction.

[0045] In some embodiments, see Figure 1 , Figure 2 The air blowing port 103 includes a first air blowing port located on one side of the laser 500 and a second air blowing port located on the other side of the laser 500. The first and second air blowing ports extend obliquely from both sides of the laser 500 toward the cutting area on the outer peripheral surface of the shaft core 200. In this embodiment, the air blowing ports 103 are arranged in an oblique and converging manner from both sides toward the cutting area on the outer peripheral surface of the shaft core 200, which further increases the air flow and improves the cooling and chip removal effect on the cutting area.

[0046] In some embodiments, see Figure 1 The machine body assembly 100 is equipped with an electrostatic precipitator 600 in the exhaust channel 102. Waste chips generated by laser cutting and weight removal are airflowed to the electrostatic precipitator 600 in the exhaust channel 102, where they are further adsorbed by the electrostatic precipitator 600. Clean gas is discharged outside the shaft, preventing waste chips from returning to the machine body and causing damage to the spindle.

[0047] In some embodiments, see Figure 1The shaft core 200 extends axially. Its front end is supported on the body assembly 100 via a front air bearing 701 and a thrust air bearing 702, while its rear end is supported on the body assembly 100 via a rear air bearing 703. A rotor is positioned between the front and rear air bearings 701 and 703. The body assembly 100 has a stator 109 that mates with the rotor. The laser 500 includes a first laser and a second laser. The first laser is positioned between the front air bearing 701 and the stator 109, and the rear end of the shaft core 200 extends beyond the rear air bearing 703. The second laser is positioned behind the rear air bearing 703. In this embodiment, multiple lasers 500 are positioned at both ends of the shaft core 200, allowing for weight reduction and cutting of the shaft core 200 from multiple locations, effectively improving the system's dynamic balance correction capability.

[0048] In some embodiments, see Figure 3 The encoder 302 is interference-fitted to the shaft core 200, and the reading head 301 is mounted on the stator 109 or the machine housing, etc. In this embodiment, the encoder assembly 300 is set near the stator 109, which allows the cables of the stator 109 and the reading head 301 to be set together, simplifying the spindle wiring layout.

[0049] In some embodiments, see Figure 1 , Figure 4 , Figure 5 The dynamic balancing detection assembly 400 includes a first dynamic balancing detection assembly 401 disposed in the front air bearing 701 and a second dynamic balancing detection assembly 402 disposed in the rear air bearing 703. In this embodiment, the dynamic balancing detection assembly 400 is arranged in the air bearing, so that the dynamic balancing detection assembly 400 can be installed together with the air bearing in the body assembly 100, making installation more convenient. Moreover, by placing the dynamic balancing detection assembly 400 in the bearing supporting the shaft core 200, the accuracy and precision of the imbalance analysis can be improved.

[0050] This utility model also provides a processing device, including the air-bearing electric spindle from any of the above embodiments. Real-time dynamic balance correction during spindle operation is achieved through non-contact material removal combined with dual-source gas (bearing exhaust + pulsed high-pressure blowing) heat dissipation. It is suitable for high-precision applications such as PCB air-bearing drilling machines, lithography machine spindles, and semiconductor wafer processing equipment.

[0051] In the description of this specification, references to terms such as "example," "embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0052] Of course, the present invention is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are all included within the scope defined by the claims of this application.

Claims

1. Aerostatic electric spindle, characterized in that include: A body assembly, wherein the body assembly has a shaft core cavity and an exhaust channel communicating with the shaft core cavity; A shaft core is disposed in the inner cavity of the shaft core and supported on the body assembly by an air bearing; An encoder assembly includes a reading head and an encoder, wherein the encoder is disposed on the shaft core and the reading head is disposed on the body assembly corresponding to the encoder; A dynamic balancing detection component is disposed on the body component; A laser, disposed on the body assembly, is used to cut and remove weight from the shaft core.

2. The aerostatic electric spindle according to claim 1, characterized in that The laser is disposed on the body assembly radially toward the outer peripheral surface of the shaft.

3. The air-bearing electric spindle according to claim 2, characterized in that, The body assembly is provided with an air blowing hole, which faces the cutting area on the outer peripheral surface of the shaft core.

4. The aerostatic electric spindle according to claim 3, characterized in that The body assembly is provided with an annular air intake chamber, and a plurality of air blowing holes are distributed along the inner circumferential surface of the inner cavity of the shaft core and guided by the annular air intake chamber to the outer circumferential surface of the shaft core. The body assembly is provided with a one-way air intake connector communicating with the annular air intake chamber.

5. The aerostatic electric spindle according to claim 4, characterized in that The body assembly has a piston chamber at one end of the annular air intake chamber, and a piston is provided in the piston chamber. The piston has a blocking part extending into the annular air intake chamber. The blocking part can move with the piston to enter or exit the annular air intake chamber, thereby blocking or opening the one-way air intake connector and the air blowing hole to form a pulse airflow.

6. The aerostatic electric spindle according to claim 4, characterized in that The air blowing holes include a first air blowing hole located on one side of the laser and a second air blowing hole located on the other side of the laser. The first air blowing hole and the second air blowing hole extend obliquely from both sides of the laser toward the cutting area of ​​the outer peripheral surface of the shaft core.

7. The aerostatic electric spindle according to claim 1, characterized in that The body assembly is equipped with an electrostatic precipitator in the exhaust channel.

8. The aerostatic electric spindle according to claim 1, characterized in that The shaft extends axially, with its front end supported by a front air bearing and a thrust air bearing on the body assembly, and its rear end supported by a rear air bearing on the body assembly. A rotor is disposed between the front and rear air bearings on the shaft, and the body assembly has a stator that mates with the rotor. The laser includes a first laser and a second laser. The first laser is disposed between the front air bearing and the stator, the rear end of the shaft extends beyond the rear air bearing, and the second laser is disposed behind the rear air bearing.

9. The aerostatic electric spindle according to claim 8, characterized in that The dynamic balancing detection assembly includes a first dynamic balancing detection assembly disposed in the front air bearing and a second dynamic balancing detection assembly disposed in the rear air bearing.

10. A processing apparatus characterized by comprising: The air-bearing electric spindle includes any one of claims 1 to 9.

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