Laser equipment with dual-beam synchronous and asynchronous processing capabilities

Abstract

This utility model discloses a laser equipment with dual-beam synchronous and asynchronous processing capabilities, including a laser, a beam splitting unit, an optical path adjustment unit, and a scanning and focusing unit. The beam splitting unit is equipped with a beam splitting component for splitting the laser beam into two first beams and a switching control component positioned on the optical paths of the two first beams to control their independent on / off states. The optical path adjustment unit consists of two sets, each used to lengthen the optical paths of the two first beams. These two sets of optical path adjustment units can also adaptively adjust the optical paths of the two first beams. The scanning and focusing unit receives the two first beams adjusted by the optical path adjustment unit and reflects and focuses them onto the processing plane. This laser equipment can achieve synchronous or asynchronous processing of two different positions on the workpiece surface, significantly improving processing efficiency and meeting the needs of multi-task parallel or differentiated processing of workpieces, thus expanding the application scenarios of laser equipment.

Description

Technical Field

[0001] This utility model relates to the field of laser processing equipment technology, and in particular to a laser equipment with dual-beam synchronous and asynchronous processing functions. Background Technology

[0002] Current laser processing equipment mostly focuses on single-beam processing, which uses a single laser beam to process the workpiece surface point by point or line by line. While this processing mode can meet basic processing needs, it still has the following shortcomings: ① A single beam needs to complete processing at multiple locations in a time-sharing manner, resulting in a long overall processing cycle, especially inefficient in mass production; ② A single beam cannot process different areas of the workpiece surface simultaneously, thus failing to meet differentiated processing requirements; and so on.

[0003] In view of the above, this utility model is hereby proposed. Summary of the Invention

[0004] To overcome the above-mentioned defects, this utility model provides a laser equipment with dual-beam synchronous and asynchronous processing functions. Its structure is simple and reasonable, and it can realize synchronous or asynchronous processing of two different positions on the surface of the workpiece. This not only significantly improves the processing efficiency, but also meets the processing needs of multi-task parallel or differentiated processing of workpieces, thus expanding the application scenarios of laser equipment.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a laser equipment with dual-beam synchronous and asynchronous processing functions, including a laser, a beam splitting unit, an optical path adjustment unit, and a scanning and focusing unit. The beam splitting unit is equipped with a beam splitting component and a switch control component. The beam splitting component is used to split the beam emitted by the laser into two first beams. The switch control component is disposed on the optical path of the two first beams and can control the independent on / off state of the two first beams. The optical path adjustment unit is configured in two sets, each used to lengthen the optical path of the two first beams, and each set of optical path adjustment units can also adaptively adjust the optical path of the two first beams. The scanning and focusing unit is used to receive the two first beams adjusted by the optical path adjustment unit and reflect and focus the two first beams onto the processing plane.

[0006] As a further improvement of this utility model, the beam splitting component is provided with a first beam splitter and a first reflector. The first beam splitter is used to split the beam emitted by the laser into a reflected beam A and a transmitted beam A. The first reflector is used to reflect the reflected beam A into an outgoing beam parallel to the transmitted beam A. The outgoing beam and the transmitted beam A are the two first beams.

[0007] As a further improvement of this utility model, the switch control component is provided with two acousto-optic modulators, which are respectively arranged in the optical paths of the two first beams.

[0008] As a further improvement of this utility model, the laser equipment is also equipped with a host computer; each of the optical path adjustment units is equipped with two second beam splitters and two spot analyzers. The two second beam splitters are spaced apart on the preset optical path of the first beam to reflect the first beam twice and lengthen the optical path of the first beam; the two spot analyzers are respectively located beside the two second beam splitters to measure the spot of the transmitted beam B split by the two second beam splitters, and the two spot analyzers are also respectively connected to the host computer for communication; in addition, the host computer can also control the two second beam splitters to adjust their position and orientation.

[0009] As a further improvement of this utility model, each optical path adjustment unit is also provided with two motorized optical adjustment frames, which are used to support the two second beam splitters respectively, and the two motorized optical adjustment frames are respectively connected to the host computer for communication.

[0010] As a further improvement of this utility model, each of the optical path adjustment units is also provided with a light guide tube, which is also arranged on the preset optical path of the first beam and simultaneously located between the two second beam splitters.

[0011] As a further improvement of this utility model, in each group of optical path adjustment units, one second beam splitter is close to the acousto-optic modulator, and the other second beam splitter is far away from the acousto-optic modulator; and the second beam splitter far away from the acousto-optic modulator is defined as second beam splitter A; The scanning focusing unit is equipped with a galvanometer and a field lens. The galvanometer is used to receive and reflect the reflected light beams split by the two second beam splitters A. The field lens is connected to the light-emitting side of the galvanometer and is used to focus the light beam emitted by the galvanometer onto the processing plane.

[0012] As a further improvement of this utility model, the galvanometer includes two sets of reflector assemblies, each set of reflector assemblies corresponding one-to-one with the two second beam splitters A, and each set of reflector assemblies is provided with two second reflectors and a micro motor capable of driving the two second reflectors to adjust their positions.

[0013] As a further improvement of this utility model, each of the optical path adjustment units is also provided with a beam expander, which is disposed between the acousto-optic modulator and a second beam splitter close to the acousto-optic modulator.

[0014] The beneficial effects of this utility model are as follows: Compared with the prior art, ① the laser equipment of this utility model has dual-beam synchronous and asynchronous processing functions, that is, the laser equipment can realize synchronous or asynchronous processing (which can be manifested as interval / or alternating processing) on ​​two different positions on the surface of the workpiece, thereby significantly improving processing efficiency and meeting the processing needs of multi-task parallel or differentiated workpieces, and greatly expanding the application scenarios of laser equipment. ② The laser equipment of this utility model is not only simple and reasonable in structure and low in manufacturing cost, but also has high processing accuracy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the laser equipment with dual-beam synchronous and asynchronous processing functions described in this utility model.

[0016] Referring to the accompanying drawings, the following explanations are provided: 1. Laser; 2. Beam splitting unit; 21. First beam splitter; 22. First reflector; 23. Acousto-optic modulator; 3. Optical path adjustment unit; 31. Second beam splitter; 32. Beam analyzer; 33. Light guide tube; 34. Beam expander; 4. Scanning and focusing unit; 41. Galvanometer; 42. Field mirror. Detailed Implementation

[0017] The preferred embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0018] Example 1:

[0019] This embodiment 1 provides a laser device that can emit two independent beams, which can act synchronously or asynchronously on the surface of a workpiece; that is, the laser device described in this embodiment 1 has dual-beam synchronous and asynchronous processing functions.

[0020] Please see the appendix Figure 1As shown in the figure, the implementation structure of the laser equipment with dual-beam synchronous and asynchronous processing function described in Embodiment 1 is as follows: it includes a laser 1, a beam splitting unit 2, an optical path adjustment unit 3, and a scanning and focusing unit 4. The beam splitting unit 2 is equipped with a beam splitting component and a switch control component. The beam splitting component is used to split the beam emitted by the laser 1 into two first beams L1. The switch control component is disposed on the optical path of the two first beams L1 and can control the two first beams L1 to be independently switched on and off. That is, under the control of the switch control component, the passing state or the blocked state of the two first beams L1 does not interfere with each other. For example, according to the workpiece processing requirements, the switch control component can control the two first beams L1 to be simultaneously in the passing state or simultaneously in the blocked state. Alternatively, the switch control unit can control one of the first beams L1 to be in a passing state and the other first beam L1 to be in a blocked state; the optical path adjustment unit 3 is configured as two sets, and is used to lengthen the optical paths of the two first beams L1 respectively, and the two sets of optical path adjustment units 3 can also adaptively adjust the optical paths of the two first beams L1 respectively, so as to improve the transmission accuracy and efficiency of the two first beams L1; the scanning and focusing unit 4 is used to receive the two first beams L1 after being adjusted by the optical path adjustment unit 3, and reflect and focus the two first beams L1 onto the processing plane, so as to realize synchronous or asynchronous processing of two different positions on the workpiece surface (e.g., it can be manifested as interval / or alternating processing).

[0021] The following provides a detailed description of the specific structure of the laser equipment with dual-beam synchronous and asynchronous processing functions described in Embodiment 1.

[0022] Please continue to refer to the appendix. Figure 1 As shown, in the laser equipment described in Embodiment 1, the preferred implementation structure of the beam splitting component is as follows: the beam splitting component is provided with a first beam splitter 21 and a first reflector 22. The first beam splitter 21 is used to split the beam emitted by the laser 1 into a reflected beam A and a transmitted beam A. The first reflector 22 is used to reflect the reflected beam A into an outgoing beam parallel to the transmitted beam A, and the outgoing beam and the transmitted beam A are the two first beams L1. It is understood that the energy ratio between the two first beams L1 is determined according to the reflectivity (transmittance) of the first beam splitter 21 and the first reflector 22, and also according to the workpiece processing requirements. This embodiment does not impose any restrictions on this.

[0023] The preferred implementation of the switch control component is as follows: the switch control component has two acousto-optic modulators (AOMs) 23, which are respectively arranged in the optical paths of the two first beams L1 to control the on / off state of the two first beams L1; that is, each acousto-optic modulator 23 can allow the corresponding first beam L1 to pass through or block the corresponding first beam L1. Furthermore, according to the design requirements of the laser equipment, the two acousto-optic modulators AOMs can also be replaced with two optical switches.

[0024] The preferred implementation structure of the optical path adjustment unit 3 is as follows: each group of optical path adjustment units 3 is provided with two second beam splitters 31 and two spot analyzers 32. The two second beam splitters 31 are spaced apart on the preset optical path of the first beam L1 to reflect the first beam L1 twice and lengthen the optical path of the first beam L1. Specifically, the first second beam splitter 31 (close to the acousto-optic modulator 23) splits the first beam L1 to form a reflected beam BL2 and a transmitted beam BL3. The second second beam splitter 31 (away from the acousto-optic modulator 23) splits the reflected beam BL2 to form a reflected beam CL4 and a transmitted beam BL3. The reflected beam BL2 and the reflected beam CL4 are the lengthened optical path of the first beam L1. The two spot analyzers 32 are respectively arranged beside the two second beam splitters 31 to analyze the transmitted beam BL2 split by the two second beam splitters 31. L3 performs beam spot measurement, and the two beam spot analyzers 32 are also connected to the host computer in the laser equipment. That is, the two beam spot analyzers 32 can transmit the beam spot information and beam spot analysis results of the transmitted beam B they have collected to the host computer. The host computer can control the two second beam splitters 31 to adjust their pose according to the beam spot analysis results of the transmitted beam B, so as to improve the accuracy and efficiency of beam transmission.

[0025] Furthermore, in this embodiment, the specific implementation structure for enabling the host computer to control the pose adjustment of the second beam splitter 31 is as follows: each optical path adjustment unit 3 is further provided with two motorized optical adjustment frames. The two motorized optical adjustment frames are respectively used to support the two second beam splitters 31, and the two motorized optical adjustment frames are communicatively connected to the host computer. That is to understand, the host computer controls the movement of the motorized optical adjustment frames to adjust the pose of the second beam splitter 31 mounted on the motorized optical adjustment frames.

[0026] Note: The described motorized optical adjustment frame is a device that combines precision mechanics, motor drive, and optical adjustment functions. It is mainly used for the automated pose adjustment and positioning of optical components in an optical path to meet optical path design requirements. The motorized optical adjustment frame is a conventional optical device, therefore its specific structure will not be described in detail here.

[0027] Furthermore, each of the optical path adjustment units 3 is also provided with a light guide tube 33, which is also arranged on the preset optical path of the first beam L1 and simultaneously located between the two second beam splitters 31, so as to transmit the beam accurately and with low loss.

[0028] Furthermore, each of the optical path adjustment units 3 is also provided with a beam expander 34, which is disposed between the acousto-optic modulator 23 and a second beam splitter 31 close to the acousto-optic modulator 23, so as to collimate and expand the first beam.

[0029] The preferred implementation structure of the scanning focusing unit 4 is as follows: the second beam splitter 31 in each group of optical path adjustment units 3 that is far away from the acousto-optic modulator 23 is defined as the second beam splitter A; the scanning focusing unit 4 is provided with a galvanometer 41 and a field lens 42. The galvanometer 41 is used to receive and reflect the reflected light beams (i.e., the reflected light beams CL4 mentioned above) split by the two second beam splitters A. The field lens 42 is connected to the light-emitting side of the galvanometer 41 and is used to focus the light beam emitted by the galvanometer 41 onto the processing plane.

[0030] Furthermore, the preferred implementation structure of the galvanometer 41 is as follows: the galvanometer 41 includes two sets of reflector assemblies, each set corresponding one-to-one with one of the two second beam splitters A (i.e., each set of reflector assemblies corresponding one-to-one with one of the two reflected beams CL4), and each set of reflector assemblies is provided with two second reflectors and a micro motor capable of driving the two second reflectors to adjust their positions, that is, the micro motor can drive the two second reflectors to adjust their positions to fit the reflected beam CL4 and reflect the reflected beam CL4 twice. In addition, the number of micro motors is the same as the number of second reflectors, that is, each second reflector is driven by one micro motor for position adjustment. Furthermore, each second reflector is mounted on a micro-support, and the micro-support is positioned and connected to the power output shaft of the micro motor.

[0031] Understandably, the scanning and focusing unit 4 can reflect and focus two beams (i.e., reflected beam C) without interference, thereby enabling the function of synchronous or asynchronous processing of two beams.

[0032] Note: The prefixes "first", "second", etc. of the component names in this specification (such as first beam splitter, second beam splitter, etc.) and the suffixes "A", "B", "C", etc. of the component names (such as reflected beam A, reflected beam B, reflected beam C, etc.) are only for clarity of description and are not intended to limit the scope of this utility model patent.

[0033] In summary, the laser equipment described in this utility model has a simple and reasonable structure, which can realize synchronous or asynchronous processing of two different positions on the surface of a workpiece. This not only significantly improves processing efficiency, but also meets the processing needs of multi-task parallel processing or differentiation of workpieces, thus expanding the application scenarios of laser equipment.

[0034] Many specific details have been set forth in the above description to provide a full understanding of this utility model. However, the above description is only a preferred embodiment of this utility model, and this utility model can be implemented in many other ways different from those described herein. Therefore, this utility model is not limited to the specific embodiments disclosed above. Furthermore, any person skilled in the art can make many possible variations and modifications to the technical solution of this utility model using the methods and techniques disclosed above, or modify it into equivalent embodiments with equivalent changes, without departing from the scope of the technical solution of this utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model, without departing from the content of the technical solution of this utility model, shall still fall within the protection scope of the technical solution of this utility model.

Claims

1. A laser apparatus with dual-beam synchronous and asynchronous processing functions, characterized in that: It includes a laser (1), a beam splitting unit (2), an optical path adjustment unit (3), and a scanning and focusing unit (4), wherein, The beam splitting unit (2) is provided with a beam splitting component and a switch control component. The beam splitting component is used to split the beam emitted by the laser (1) into two first beams. The switch control component is set in the optical path of the two first beams and can control the two first beams to be turned on and off independently. The optical path adjustment unit (3) is configured in two sets and is used to lengthen the optical paths of the two first beams respectively. The two sets of optical path adjustment units (3) are also capable of adaptively adjusting the optical paths of the two first beams respectively. The scanning focusing unit (4) is used to receive the two first beams after being adjusted by the optical path adjustment unit (3), and to reflect and focus the two first beams onto the processing plane.

2. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 1, characterized in that: The beam splitting assembly is provided with a first beam splitter (21) and a first reflector (22). The first beam splitter (21) is used to split the beam emitted by the laser (1) into a reflected beam A and a transmitted beam A. The first reflector (22) is used to reflect the reflected beam A into an outgoing beam parallel to the transmitted beam A. The outgoing beam and the transmitted beam A are the two first beams.

3. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 1, characterized in that: The switch control unit is provided with two acousto-optic modulators (23), and the two acousto-optic modulators (23) are respectively arranged in the optical paths of the two first beams.

4. The laser equipment with dual-beam synchronous and asynchronous processing functions according to claim 3, characterized in that: The laser equipment is also equipped with a host computer. Each optical path adjustment unit (3) is provided with two second beam splitters (31) and two spot analyzers (32). The two second beam splitters (31) are spaced apart on the preset optical path of the first beam to reflect the first beam twice and lengthen the optical path of the first beam. The two spot analyzers (32) are respectively located on the side of the two second beam splitters (31) to measure the spot of the transmitted beam B split by the two second beam splitters (31). The two spot analyzers (32) are also connected to the host computer for communication. In addition, the host computer can also control the two second beam splitters (31) to adjust their position.

5. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 4, characterized in that: Each optical path adjustment unit (3) is also provided with two motorized optical adjustment frames. The two motorized optical adjustment frames are used to support the two second beam splitters (31) respectively, and the two motorized optical adjustment frames are respectively connected to the host computer for communication.

6. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 4, characterized in that: Each of the optical path adjustment units (3) is also provided with a light guide tube (33), which is also set on the preset optical path of the first beam and is located between the two second beam splitters (31).

7. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 4, characterized in that: In each group of optical path adjustment units (3), one second beam splitter (31) is close to the acousto-optic modulator (23), and the other second beam splitter (31) is far away from the acousto-optic modulator (23); and the second beam splitter (31) far away from the acousto-optic modulator (23) is defined as second beam splitter A; The scanning focusing unit (4) is provided with a galvanometer (41) and a field lens (42). The galvanometer (41) is used to receive and reflect the reflected light beams split by the two second beam splitters A. The field lens (42) is connected to the light-emitting side of the galvanometer (41) and is used to focus the light beam emitted by the galvanometer (41) onto the processing plane.

8. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 7, characterized in that: The galvanometer (41) includes two sets of reflector assemblies, each set of which corresponds to one of the two second beam splitters A. Each set of reflector assemblies is provided with two second reflectors and a micro motor that can drive the two second reflectors to adjust their positions.

9. The laser apparatus with dual-beam synchronous and asynchronous processing functions according to claim 7, characterized in that: Each of the optical path adjustment units (3) is also provided with a beam expander (34), which is disposed between the acousto-optic modulator (23) and a second beam splitter (31) close to the acousto-optic modulator (23).

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