A nozzle for semiconductor lasers

Abstract

This utility model relates to the field of semiconductor technology, and in particular to a nozzle for semiconductor lasers. It includes a main tube, a throat tube fixedly connected to the lower end of the main tube, and a hexagonal adjusting tube fixedly connected to the lower end of the throat tube. Six fastening bolts are threadedly connected to the outer surface of the hexagonal adjusting tube. An internally threaded mounting cavity is formed at the lower end of the hexagonal adjusting tube, and an adapter core reinforcement structure is provided inside the lower part of the hexagonal adjusting tube. This utility model's nozzle for semiconductor lasers enhances the stability of internal component connections through the adapter core reinforcement structure, resisting vibration and complex working conditions, preventing component loosening from affecting laser transmission and gas flow. The adjustable mounting structure allows for quick replacement of the nozzle substrate, adapting to lasers of different power and wavelengths, improving versatility, while ensuring processing accuracy and device yield, reducing equipment changeover costs and time, and providing stable and flexible equipment support for semiconductor laser processing.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a nozzle for semiconductor lasers. Background Technology

[0002] In the field of semiconductor lasers, nozzles are key components that ensure precise processing and equipment stability. Their use is deeply tied to laser application scenarios. As semiconductor manufacturing moves towards miniaturization and high precision, lasers need to achieve micron-level energy focusing and material transport in processes such as chip cutting, thin film etching, and packaging welding. Nozzles not only undertake the tasks of laser beam output and protective gas flow guidance, directly affecting processing accuracy and device yield, but also need to take into account heat dissipation and contamination prevention in high-power laser applications. They are an important guarantee for the continuous operation of equipment. Currently, nozzles have significant shortcomings. First, the connection method of internal components is unreasonable. When affected by external vibration or complex working conditions, they are prone to loosening and displacement, affecting laser transmission and gas flow, resulting in reduced processing accuracy. Second, they lack adaptability. Lasers of different power and wavelength require customized nozzles, resulting in poor versatility and restricting the flexible application of equipment. Utility Model Content

[0003] The main objective of this invention is to provide a nozzle for semiconductor lasers, which can effectively solve the problems in the background art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A nozzle for a semiconductor laser includes a main tube, a throat tube fixedly connected to the lower end of the main tube, a hexagonal adjusting tube fixedly connected to the lower end of the throat tube, six fastening bolts threadedly connected to the outer surface of the hexagonal adjusting tube, an internally threaded mounting cavity opened at the lower end of the hexagonal adjusting tube, an adapter core reinforcement structure provided in the lower part of the hexagonal adjusting tube, and an adjustable mounting structure provided at the lower end of the adapter core reinforcement structure. Preferably, the adapter core reinforcement structure includes a core main rod, the upper part of the outer surface of the core main rod has an external thread section, the lower part of the outer surface of the core main rod is fixedly connected to a limit ring, the lower part of the outer surface of the core main rod is sleeved with a positioning bracket assembly, the positioning bracket assembly is located above the limit ring, the lower part of the outer surface of the core main rod is fixedly connected to an external flow guide seat, the external flow guide seat is located below the limit ring, the lower end of the external flow guide seat is fixedly connected to a connecting plate, the lower end of the connecting plate has screw holes around its circumference, and the lower left and lower right parts of the connecting plate have positioning slots.

[0005] By adopting the above technical solution: the core main rod is the core of the adapter core reinforcement structure, the limiting ring limits the position of the positioning card assembly and the external flow guide seat, the external flow guide seat assists in flow guidance, and the connecting plate is used to connect the adjustable installation structure, which can build a stable adapter core structure and lay the foundation for subsequent component installation and functional realization.

[0006] Preferably, the core main rod is movably connected to the hexagonal adjusting tube via an external thread section, the upper part of the core main rod is located in the internal thread mounting cavity, and the hexagonal adjusting tube communicates with the interior of the core main rod.

[0007] By adopting the above technical solution: the core main rod is threadedly connected to the internal threaded mounting cavity of the hexagonal adjustment tube through the external thread section, and the two are internally connected, which can realize the detachable connection between the core main rod and the hexagonal adjustment tube, ensuring the smooth flow of laser and gas transmission channels. This not only facilitates the installation, disassembly and maintenance of the core main rod, but also ensures the stability of the nozzle's core function.

[0008] Preferably, the positioning bracket assembly includes a retaining ring, and six positioning plates are fixedly connected to the upper end of the retaining ring. Each of the six positioning plates has a through bolt hole at the center of the end away from the main rod of the core.

[0009] By adopting the above technical solution: the retaining ring is used to connect the core main rod, the positioning plate is used to connect with the hexagonal adjusting tube, and the bolt hole is used for fastening bolts to pass through, thereby providing a structural basis for the connection of the positioning bracket assembly with other components and improving the overall structural adaptability.

[0010] Preferably, the retaining ring is movably sleeved with the core main rod, the retaining ring is inserted into the hexagonal adjusting tube through six positioning plates, the six bolt holes correspond to the positions of the six fastening bolts and match their dimensions, and the six positioning plates are detachably connected to the hexagonal adjusting tube through the six bolt holes and the six fastening bolts.

[0011] By adopting the above technical solution: the retaining ring is movably connected to the main rod of the core, the positioning plate is inserted into the hexagonal adjusting tube, and the fastening bolt passes through the bolt hole to fix the positioning plate and the hexagonal adjusting tube, so as to achieve the detachable fixing of the positioning plate assembly and the hexagonal adjusting tube.

[0012] Preferably, the adjustable mounting structure includes a nozzle base, with positioning blocks fixedly connected to the upper left and upper right parts of the nozzle base, connecting screws threadedly connected to the lower circumference of the nozzle base, and a nozzle head fixedly connected to the lower center of the nozzle base.

[0013] By adopting the above technical solution: the nozzle base is an adjustable installation structure, the positioning block assists in positioning, the connecting screw is used for fixing, and the nozzle head realizes laser output and gas guidance, providing structural support for precise nozzle operation. The adjustable design creates conditions to adapt to different working conditions.

[0014] Preferably, the two positioning blocks are respectively matched with the dimensions of the two positioning slots, the two positioning blocks are inserted into the two positioning slots, and the four connecting screws are respectively matched with the dimensions of the four screw holes.

[0015] By adopting the above technical solution: the positioning block is inserted into the positioning slot, and the connecting screw and screw hole size match, the nozzle base and the connecting plate are accurately positioned and initially adapted, ensuring that the connection position of the two is accurate, avoiding installation deviation from affecting the nozzle operation accuracy, and laying the foundation for subsequent stable connection.

[0016] Preferably, the nozzle base is located directly below the connecting plate, and the nozzle base is detachably connected to the connecting plate by four connecting screws and four screw holes.

[0017] By adopting the above technical solution, the nozzle base is detachably connected to the screw hole of the connecting plate through connecting screws and is located directly below the connecting plate, realizing a stable connection between the adjustable installation structure and the adapter core reinforcement structure. This facilitates the disassembly and replacement of the nozzle base according to actual needs and improves the compatibility of the nozzle with lasers of different power and wavelength.

[0018] Compared with the prior art, the present invention has the following beneficial effects: 1. In this utility model, when the various accessories of the adapter core reinforcement structure are used together, the core main rod serves as the core to support laser and gas transmission. The external thread section allows it to be stably connected to the hexagonal adjustment tube and ensures unobstructed internal channels. The limiting ring precisely limits the position of the positioning card assembly and the external flow guide seat, preventing axial displacement of the components. The positioning card assembly is connected to the core main rod through a retaining ring. After the positioning card plate is inserted into the hexagonal adjustment tube, a fastening bolt is used to lock it through the bolt hole, further reinforcing the connection between the core main rod and the hexagonal adjustment tube. The external flow guide seat helps optimize the gas flow direction, and the connecting plate provides a foundation for subsequent docking with the adjustable installation structure. These accessories work together to effectively prevent the internal components of the nozzle from loosening, ensure stable laser transmission and gas flow, improve the reliability of the nozzle under complex working conditions, and the detachable design also facilitates later maintenance.

[0019] 2. In this utility model, the nozzle base serves as the load-bearing foundation. The upper positioning block precisely engages with the positioning slot of the connecting plate, quickly aligning the two and avoiding installation deviations. The lower connecting screw engages with the screw hole of the connecting plate, firmly fixing the nozzle base below the connecting plate and ensuring structural stability during use. The nozzle head serves as the output end of the laser and protective gas, directly delivering the energy and airflow required for processing. These components work together to form a detachable connection structure, ensuring the stability of laser transmission and gas flow through precise positioning and stable connection. Furthermore, it allows for quick disassembly and replacement of nozzle bases with different nozzle heads, adapting to lasers of different power and wavelengths, significantly improving nozzle versatility and reducing equipment changeover costs and time. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a nozzle for a semiconductor laser according to the present invention; Figure 2 This is a schematic diagram of the overall structure of the adapter core reinforcement structure for the nozzle of a semiconductor laser according to the present invention; Figure 3 This is a schematic diagram of the overall structure of a positioning bracket assembly for a nozzle of a semiconductor laser according to the present invention; Figure 4 This is a schematic diagram of an adjustable mounting structure for a nozzle of a semiconductor laser according to the present invention.

[0021] In the diagram: 1. Main tube; 2. Throat tube; 3. Hexagonal adjusting tube; 4. Fastening bolt; 5. Adaptive core reinforcement structure; 6. Adjustable installation structure; 7. Internal threaded mounting cavity; 51. Core main rod; 52. Limiting retaining ring; 53. External threaded section; 54. Positioning bracket assembly; 55. External flow guide seat; 56. Connecting plate; 57. Positioning slot; 58. Screw hole; 61. Nozzle base; 62. Connecting screw; 63. Positioning insert; 64. Nozzle head; 541. Snap ring; 542. Positioning plate; 543. Bolt hole. Detailed Implementation

[0022] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0023] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," and "connected," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Please see Figure 1-4 This utility model provides a technical solution: A nozzle for a semiconductor laser includes a main tube 1, a throat tube 2 fixedly connected to the lower end of the main tube 1, a hexagonal adjusting tube 3 fixedly connected to the lower end of the throat tube 2, six fastening bolts 4 threadedly connected to the outer surface of the hexagonal adjusting tube 3, an internally threaded mounting cavity 7 opened at the lower end of the hexagonal adjusting tube 3, an adapter core reinforcement structure 5 provided in the lower part of the hexagonal adjusting tube 3, and an adjustable mounting structure 6 provided at the lower end of the adapter core reinforcement structure 5.

[0026] In this embodiment, the adapter core reinforcement structure 5 includes a core main rod 51. An external thread section 53 is formed on the upper part of the outer surface of the core main rod 51. A limiting ring 52 is fixedly connected to the lower part of the outer surface of the core main rod 51. A positioning bracket assembly 54 is sleeved on the lower part of the outer surface of the core main rod 51, located above the limiting ring 52. An external flow guide seat 55 is fixedly connected to the lower part of the outer surface of the core main rod 51, located below the limiting ring 52. A connecting plate 56 is fixedly connected to the lower end of the external flow guide seat 55. Screw holes 58 are formed around the lower end of the connecting plate 56. Positioning slots 57 are formed on the lower left and lower right sides of the connecting plate 56. The core main rod 51 is connected to the external thread section 53... The hexagonal adjusting tube 3 is threaded and movable. The upper part of the core main rod 51 is located in the internal threaded mounting cavity 7. The hexagonal adjusting tube 3 communicates with the interior of the core main rod 51. The positioning bracket assembly 54 includes a retaining ring 541. The upper end of the retaining ring 541 is fixedly connected to six positioning plates 542. Each of the six positioning plates 542 has a through bolt hole 543 in the middle of the end away from the core main rod 51. The retaining ring 541 is movably sleeved with the core main rod 51. The retaining ring 541 is inserted into the hexagonal adjusting tube 3 through the six positioning plates 542. The six bolt holes 543 correspond to the positions and sizes of the six fastening bolts 4 respectively. The six positioning plates 542 are detachably connected to the hexagonal adjusting tube 3 through the six bolt holes 543 and the six fastening bolts 4.

[0027] Through the above scheme: the core main rod 51 is threadedly connected to the internal threaded mounting cavity 7 of the hexagonal adjusting tube 3 via the external thread section 53, initially fixing its position. The limiting ring 52 limits the vertical position of the positioning card assembly 54 and the external guide seat 55 to prevent axial displacement. The retaining ring 541 of the positioning card assembly 54 is sleeved on the core main rod 51. Six positioning plates 542 are inserted into the hexagonal adjusting tube 3, and then six fastening bolts 4 are passed through the bolt holes 543 to lock, forming a double fixation. Therefore, the multiple connection structure resists external vibration and complex working conditions, prevents components from loosening or displacing, ensures unobstructed flow between the hexagonal adjusting tube 3 and the core main rod 51, stabilizes laser transmission and gas flow, avoids reduction in processing accuracy, and the detachable design facilitates maintenance, improving the stability and reliability of the nozzle.

[0028] In this embodiment, the adjustable mounting structure 6 includes a nozzle base 61. Positioning blocks 63 are fixedly connected to the upper left and upper right parts of the nozzle base 61. Connecting screws 62 are threaded and movably connected to the lower circumference of the nozzle base 61. A nozzle head 64 is fixedly connected to the lower middle part of the nozzle base 61. The two positioning blocks 63 are respectively matched with the dimensions of the two positioning slots 57 and are inserted into the two positioning slots 57. The four connecting screws 62 are respectively matched with the dimensions of the four screw holes 58. The nozzle base 61 is located directly below the connecting plate 56 and is detachably connected to the connecting plate 56 through the four connecting screws 62 and the four screw holes 58.

[0029] Through the above scheme: the nozzle base 61 of the adjustable mounting structure 6 is precisely inserted into the two positioning slots 57 of the connecting plate 56 through the two positioning blocks 63 at the upper end to achieve initial positioning. Then, four connecting screws 62 are passed through the nozzle base 61 and screwed into the four screw holes 58 of the connecting plate 56 to complete the stable connection. When changing the nozzle head 64 to adapt to different power and wavelength lasers, only the connecting screws 62 need to be removed to replace the nozzle base 61. Thus, by changing the nozzle base 61 with different nozzle heads 64, it can adapt to a variety of lasers, improve versatility, reduce equipment changeover costs and time, overcome the constraints of insufficient adaptability on the flexible application of equipment, and ensure processing efficiency.

[0030] It should be noted that this utility model is a nozzle for a semiconductor laser. During use, the laser first enters from the main tube 1, is conducted through the throat tube 2 to the hexagonal adjustment tube 3, and then exits through the internal channel of the core main rod 51, which is threadedly connected to the internal threaded mounting cavity 7 of the hexagonal adjustment tube 3. The core main rod 51 is fixed by the external thread section 53. The limiting ring 52 limits the position of the positioning bracket assembly 54 and the external guide seat 55. The retaining ring 541 of the positioning bracket assembly 54 is sleeved on the core main rod 51. Six positioning plates 542 are inserted into the hexagonal adjustment tube 3, and fastening bolts 4 pass through bolt holes 543 for reinforcement. The core rod 51 is stabilized, and the protective gas flows along the above-mentioned channel. After being guided by the external guide seat 55, it is ejected from the nozzle head 64 of the adjustable mounting structure 6 along with the laser. When replacing the nozzle head 64 with a laser of different power and wavelength, the connecting screw 62 is removed, the nozzle base 61 is separated from the screw hole 58 of the connecting plate 56, and then the new nozzle base 61 is accurately replaced through the positioning insert 63 and the positioning slot 57. Thus, this nozzle solves the problems of easy loosening and poor adaptability of traditional nozzles through the cooperation of various components, and ensures the stability of laser transmission and gas guidance, thereby improving processing accuracy and equipment flexibility.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A nozzle for a semiconductor laser, comprising a main tube (1), characterized in that: The lower end of the main tube (1) is fixedly connected to a throat tube (2), the lower end of the throat tube (2) is fixedly connected to a hexagonal adjusting tube (3), the outer surface of the hexagonal adjusting tube (3) is threaded with six fastening bolts (4), the lower end of the hexagonal adjusting tube (3) is provided with an internal threaded mounting cavity (7), the lower part of the hexagonal adjusting tube (3) is provided with an adapter core reinforcement structure (5), and the lower end of the adapter core reinforcement structure (5) is provided with an adjustable mounting structure (6). The adapter core reinforcement structure (5) includes a core main rod (51). The upper part of the outer surface of the core main rod (51) is provided with an external thread section (53). The lower part of the outer surface of the core main rod (51) is fixedly connected with a limit stop ring (52). The lower part of the outer surface of the core main rod (51) is sleeved with a positioning card assembly (54). The positioning card assembly (54) is located on the upper side of the limit stop ring (52). The lower part of the outer surface of the core main rod (51) is fixedly connected with an external flow guide seat (55). The external flow guide seat (55) is located on the lower side of the limit stop ring (52). The lower end of the external flow guide seat (55) is fixedly connected with a connecting plate (56). The lower end of the connecting plate (56) is provided with screw holes (58) around its perimeter. The lower left and lower right parts of the connecting plate (56) are provided with positioning slots (57).

2. The nozzle for a semiconductor laser according to claim 1, characterized in that: The core main rod (51) is threadedly connected to the hexagonal adjusting tube (3) through the external thread section (53). The upper part of the core main rod (51) is located in the internal thread mounting cavity (7). The hexagonal adjusting tube (3) is connected to the interior of the core main rod (51).

3. A nozzle for a semiconductor laser according to claim 1, wherein: The positioning bracket assembly (54) includes a retaining ring (541), and six positioning plates (542) are fixedly connected to the upper end of the retaining ring (541). Each of the six positioning plates (542) has a through bolt hole (543) in the middle of the end away from the core main rod (51).

4. A nozzle for a semiconductor laser according to claim 3, wherein: The retaining ring (541) is movably sleeved with the core main rod (51). The retaining ring (541) is inserted into the hexagonal adjusting tube (3) through six positioning plates (542). The six bolt holes (543) correspond to the positions and sizes of the six fastening bolts (4). The six positioning plates (542) are detachably connected to the hexagonal adjusting tube (3) through the six bolt holes (543) and the six fastening bolts (4).

5. A nozzle for a semiconductor laser according to claim 1, wherein: The adjustable mounting structure (6) includes a nozzle base (61), with positioning blocks (63) fixedly connected to the upper left and upper right parts of the nozzle base (61), and connecting screws (62) threadedly connected to the lower circumference of the nozzle base (61), and a nozzle head (64) fixedly connected to the lower middle part of the nozzle base (61).

6. A nozzle for a semiconductor laser according to claim 5, wherein: The two positioning blocks (63) are respectively matched with the dimensions of the two positioning slots (57), and the two positioning blocks (63) are inserted into the two positioning slots (57). The four connecting screws (62) are respectively matched with the dimensions of the four screw holes (58).

7. A nozzle for a semiconductor laser as claimed in claim 5, characterised in that: The spray head base (61) is located directly below the connecting disc (56), and is detachably connected with the connecting disc (56) through four connecting screws (62) and four screw holes (58).

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