A quartz ring polishing device with angle adjustment
Patent Information
- Application Number
- CN202522021118.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-19
- Publication Date
- 2026-08-14
- Estimated Expiration
- 2035-09-19
AI Technical Summary
[0004]本实用新型的目的是为了解决现有技术中存在的石英环抛光装置角度调节灵活性差、石英环固定稳定性不足及调节效率低,难以满足高精度、多样化抛光需求的问题,而提出的一种带角度调节的石英环抛光装置
1、本实用新型中,通过设置由伺服电机、第一锥形齿轮、第二锥形齿轮、从动齿轮及齿轮底座组成的驱动调节结构,配合定位杆与支撑板的稳定支撑,两个上下交错布置的伺服电机可分别驱动真空发生器带动吸盘实现水平位置调整与角度偏转,实现石英环抛光角度的精准、灵活调节,有效解决传统装置角度调节单一的问题,适配不同部位的抛光需求。
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Figure CN224630473U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of quartz product processing equipment, and in particular to a quartz ring polishing device with angle adjustment. Background Technology
[0002] In the processing and production of quartz rings, the polishing process directly affects the surface accuracy and performance of the quartz rings. Especially in high-precision applications such as semiconductor wafer carriers and optical lens assemblies, the requirements for polishing angle and polishing uniformity of different parts of the quartz ring are extremely high.
[0003] However, in existing technologies, most quartz ring polishing devices lack flexible and precise angle adjustment mechanisms, and can only perform polishing operations on quartz rings at a single angle. This makes it difficult to meet the polishing requirements of different tilt angles under complex working conditions. At the same time, some devices lack sufficient stability in fixing the quartz rings, and the quartz rings are prone to displacement and shaking during the polishing process, resulting in decreased polishing accuracy and increased scrap rate. In addition, the adjustment operation of existing devices mostly relies on manual control, which is not only inefficient but also makes it difficult to ensure the consistency of angle adjustment, and cannot adapt to the needs of large-scale, high-precision quartz ring production and processing. Utility Model Content
[0004] The purpose of this invention is to solve the problems of poor angle adjustment flexibility, insufficient quartz ring fixing stability and low adjustment efficiency of existing quartz ring polishing devices, which make it difficult to meet the needs of high precision and diversified polishing. Therefore, this invention proposes a quartz ring polishing device with angle adjustment.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: a quartz ring polishing device with angle adjustment, comprising an operating table, an equipment bracket fixedly installed on one side of the operating table, a polishing component slidably installed on one side of the equipment bracket, an angle adjustment mechanism fixedly installed inside the operating table, the angle adjustment mechanism comprising a support plate, a suction cup, and a partition frame, the partition frame fixedly installed on the lower surface of the suction cup, the suction cup being located directly below the polishing component, a vacuum generator connected to the bottom of the suction cup, a limit rod fixedly installed on the outer wall of the vacuum generator, the end of the partition frame being rotatably connected to the limit rod, a second bevel gear fixedly installed on the inner side of the partition frame, a first bevel gear meshing with the bottom of the second bevel gear, and the first bevel gear being rotatably installed on the outer wall of the bottom of the vacuum generator.
[0006] Preferably, an electric cylinder assembly is fixedly installed on the top of the equipment bracket, and one end of the piston rod of the electric cylinder assembly is fixedly connected to the polishing assembly.
[0007] Preferably, a motor and belt drive assembly are fixedly installed on the upper surface of the polishing assembly, and a limit plate is fixedly installed on the top of the operating table.
[0008] Preferably, a positioning rod is fixedly installed inside the operating table, and a support plate is fixedly installed on the lower surface of the positioning rod.
[0009] Preferably, servo motors are symmetrically fixedly installed at both ends of the support plate, and the gears at the output ends of the two servo motors are arranged in an alternating manner.
[0010] Preferably, a gear base is fixedly installed at the bottom of the vacuum generator, and the gear base meshes with a gear at the output end of one of the servo motors.
[0011] Preferably, a driven gear is fixedly mounted on the lower surface of the first bevel gear, and the driven gear meshes with a gear at the output end of another servo motor.
[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, by setting up a drive adjustment structure consisting of a servo motor, a first bevel gear, a second bevel gear, a driven gear and a gear base, and with the stable support of the positioning rod and the support plate, two servo motors arranged vertically and vertically can drive the vacuum generator to drive the suction cup to achieve horizontal position adjustment and angle deflection, so as to realize the precise and flexible adjustment of the polishing angle of the quartz ring, effectively solving the problem of the single angle adjustment of the traditional device, and adapting to the polishing needs of different parts.
[0013] 2. In this utility model, the vacuum generator and suction cup work together to form a stable vacuum adsorption and fixation for the quartz ring, preventing the quartz ring from shifting or shaking during the polishing process. At the same time, the electric cylinder assembly drives the polishing assembly to move up and down. Combined with the stable polishing power provided by the motor and belt drive assembly, the stability and polishing accuracy of the polishing process can be guaranteed, the scrap rate can be reduced, and the overall device has a high degree of automation, reducing manual intervention, improving processing efficiency, and is more suitable for the needs of large-scale production. Attached Figure Description
[0014] Figure 1 A three-dimensional structural diagram of a quartz ring polishing device with angle adjustment is provided for this utility model. Figure 2 A front view of a quartz ring polishing device with angle adjustment is provided for this utility model; Figure 3 A three-dimensional structural diagram of the angle adjustment mechanism of a quartz ring polishing device with angle adjustment is provided for this utility model. Figure 4This utility model presents a three-dimensional structural diagram of a quartz ring polishing device with angle adjustment, comprising a partition frame, a vacuum generator, and a second bevel gear.
[0015] Legend: 1. Operating table; 2. Equipment bracket; 3. Electric cylinder assembly; 4. Motor and belt drive assembly; 5. Polishing assembly; 6. Angle adjustment mechanism; 7. Positioning rod; 8. Limiting plate; 61. Support plate; 62. Servo motor; 63. Suction cup; 64. Separating frame; 65. Vacuum generator; 66. Gear base; 67. Driven gear; 68. First bevel gear; 69. Second bevel gear; 610. Limiting rod. Detailed Implementation
[0016] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.
[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.
[0018] Example 1: As Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, this utility model provides a quartz ring polishing device with angle adjustment, including an operating table 1. A device support 2 is fixedly installed on one side of the operating table 1, and a polishing component 5 is slidably installed on one side of the device support 2. An angle adjustment mechanism 6 is fixedly installed inside the operating table 1. The angle adjustment mechanism 6 includes a support plate 61, a suction cup 63, and a partition frame 64. The partition frame 64 is fixedly installed on the lower surface of the suction cup 63, which is located directly below the polishing component 5. A vacuum generator 65 is connected to the bottom of the suction cup 63, and a vacuum generator 65 is fixedly mounted on the outer wall of the vacuum generator 65. A limit rod 610 is installed, and the end of the partition frame 64 is rotatably connected to the limit rod 610. A second bevel gear 69 is fixedly installed on the inner side of the partition frame 64. A first bevel gear 68 meshes with the bottom of the second bevel gear 69. The first bevel gear 68 is rotatably installed on the outer wall of the bottom of the vacuum generator 65. An electric cylinder assembly 3 is fixedly installed on the top of the equipment bracket 2. One end of the piston rod of the electric cylinder assembly 3 is fixedly connected to the polishing assembly 5. A motor and belt drive assembly 4 are fixedly installed on the upper surface of the polishing assembly 5. A limit plate 8 is fixedly installed on the top of the operating table 1.
[0019] The specific settings and functions of this embodiment are described below. The working principle of the quartz ring polishing device with angle adjustment of this utility model is as follows: The operating table 1 provides the installation foundation for the whole device. The equipment bracket 2 fixed on one side of the operating table 1 is used to support the electric cylinder assembly 3 and the polishing assembly 5. The electric cylinder assembly 3 at the top of the equipment bracket 2 can drive the polishing assembly 5, which is slidably installed on one side of the equipment bracket 2, to move up and down through the extension and retraction of the piston rod. The motor and belt drive assembly 4 fixed on the upper surface of the polishing assembly 5 can provide power to the polishing assembly 5 to realize the polishing action. The angle adjustment mechanism 6 fixed inside the operating table 1 is used to adjust the angle of the quartz ring. The partition frame 64 is fixed on the lower surface of the suction cup 63. The suction cup 63 is located directly below the polishing assembly 5 to adsorb and fix the quartz ring. The vacuum generator 65 connected to the bottom of the suction cup 63 can generate a vacuum to stably adsorb the quartz ring. The limiting rod 610 fixed on the outer wall of the vacuum generator 65 is rotatably connected to the end of the partition frame 64. The second bevel gear 69 fixed on the inner side of the partition frame 64 is rotatably connected to the vacuum generator 65. The first bevel gear 68 on the bottom outer wall of the generator 65 meshes, and by driving the first bevel gear 68 to rotate, the second bevel gear 69 and the partition frame 64 can be rotated, thereby driving the suction cup 63 and the quartz ring to adjust their angles. The limiting plate 8 fixed on the top of the operating table 1 can limit the maximum rotation range of the suction cup 63. The polishing component 5 can be moved up and down flexibly by the electric cylinder assembly 3, which facilitates the adjustment of the distance between the polishing component 5 and the quartz ring to meet different polishing needs. The motor and belt drive assembly 4 can provide stable power to the polishing component 5 to ensure the polishing effect. In the angle adjustment mechanism 6, the vacuum generator 65, together with the suction cup 63, can stably adsorb and fix the quartz ring to prevent the quartz ring from shifting during polishing. The meshing transmission of the first bevel gear 68 and the second bevel gear 69 can realize convenient and precise adjustment of the quartz ring angle to meet the polishing needs of different angles. The limiting plate 8 can further ensure the stability of the device operation and polishing process. The overall device structure is reasonable, which can effectively improve the efficiency and quality of quartz ring polishing and is highly convenient to operate.
[0020] Example 2: Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, a positioning rod 7 is fixedly installed inside the operating table 1. A support plate 61 is fixedly installed on the lower surface of the positioning rod 7. Servo motors 62 are symmetrically fixedly installed at both ends of the support plate 61. The gears at the output ends of the two servo motors 62 are arranged in an alternating manner. A gear base 66 is fixedly installed at the bottom of the vacuum generator 65. The gear base 66 meshes with the gear at the output end of one of the servo motors 62. A driven gear 67 is fixedly installed on the lower surface of the first bevel gear 68. The driven gear 67 meshes with the gear at the output end of the other servo motor 62.
[0021] The overall effect of this embodiment is that the positioning rod 7 fixed inside the operating table 1 provides mounting support for the support plate 61. Servo motors 62 are symmetrically mounted at both ends of the support plate 61, which is fixed to the lower surface of the support plate 61. The gears at the output ends of the two servo motors 62 are arranged alternately. The gear base 66 fixed at the bottom of the vacuum generator 65 meshes with the gear at the output end of one of the servo motors 62. When this servo motor 62 operates, it drives the gear base 66 and the vacuum generator 65 to move through gear transmission, thereby directly driving the suction cup 63 to rotate. The driven gear 67 fixed to the lower surface of the first bevel gear 68 meshes with the gear at the output end of the other servo motor 62. This servo motor 62 operates... During rotation, the driven gear 67 and the first bevel gear 68 are driven to rotate through gear transmission. Then, through the meshing of the first bevel gear 68 and the second bevel gear 69, the separator frame 64, the suction cup 63, and the quartz ring are driven to adjust their angles. The positioning rod 7 cooperates with the support plate 61 to provide a stable mounting base for the servo motor 62. The two servo motors 62 drive the gear base 66 and the driven gear 67 respectively through the staggered output end gears, realizing independent adjustment of the horizontal position and angle of the quartz ring. The adjustment accuracy is high, the servo motor 62 has stable power, and the gear transmission efficiency is high, which can ensure the stability and timeliness of the quartz ring's position and angle adjustment, meet diverse polishing needs, and improve polishing quality and efficiency.
[0022] The operating method and working principle of this device are as follows: The positioning rod 7 fixed inside the operating table 1 provides mounting support for the support plate 61. Servo motors 62 are symmetrically mounted on both ends of the support plate 61, which is fixed to the lower surface of the support plate 61. The gears at the output ends of the two servo motors 62 are arranged alternately. The gear base 66 fixed at the bottom of the vacuum generator 65 meshes with the gear at the output end of one of the servo motors 62. When the servo motor 62 is running, it drives the gear base 66 and the vacuum generator 65 to move through gear transmission, thereby directly driving the suction cup 63 to rotate. The driven gear 67 fixed on the lower surface of the first bevel gear 68 meshes with the gear at the output end of the other servo motor 62. When this servo motor 62 is running... During rotation, the driven gear 67 and the first bevel gear 68 are driven to rotate through gear transmission. Then, through the meshing of the first bevel gear 68 and the second bevel gear 69, the separator frame 64, the suction cup 63, and the quartz ring are driven to adjust their angles. The positioning rod 7 cooperates with the support plate 61 to provide a stable mounting base for the servo motor 62. The two servo motors 62 drive the gear base 66 and the driven gear 67 respectively through the staggered output end gears, realizing independent adjustment of the horizontal position and angle of the quartz ring. The adjustment accuracy is high, the servo motor 62 has stable power, and the gear transmission efficiency is high, which can ensure the stability and timeliness of the quartz ring's position and angle adjustment, meet diverse polishing needs, and improve polishing quality and efficiency.
[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.
Claims
1. A quartz ring polishing device with angle adjustment, comprising an operating table (1), wherein a device bracket (2) is fixedly mounted on one side of the operating table (1), and a polishing component (5) is slidably mounted on one side of the device bracket (2), characterized in that: An angle adjustment mechanism (6) is fixedly installed inside the operating table (1). The angle adjustment mechanism (6) includes a support plate (61), a suction cup (63), and a partition frame (64). The partition frame (64) is fixedly installed on the lower surface of the suction cup (63). The suction cup (63) is located directly below the polishing assembly (5). The bottom of the suction cup (63) is connected to a vacuum generator (65). A limit rod (610) is fixedly installed on the outer wall of the vacuum generator (65). The end of the partition frame (64) is rotatably connected to the limit rod (610). A second bevel gear (69) is fixedly installed on the inner side of the partition frame (64). A first bevel gear (68) meshes with the bottom of the second bevel gear (69). The first bevel gear (68) is rotatably installed on the outer wall of the bottom of the vacuum generator (65).
2. A quartz ring polishing device with angle adjustment according to claim 1, characterized in that: An electric cylinder assembly (3) is fixedly installed on the top of the equipment bracket (2), and one end of the piston rod of the electric cylinder assembly (3) is fixedly connected to the polishing assembly (5).
3. A quartz ring polishing device with angle adjustment according to claim 1, characterized in that: The upper surface of the polishing component (5) is fixedly mounted with a motor and belt drive assembly (4), and the top of the operating table (1) is fixedly mounted with a limiting plate (8).
4. The quartz ring polishing apparatus with angle adjustment according to claim 1, characterized in that: A positioning rod (7) is fixedly installed inside the operating table (1), and a support plate (61) is fixedly installed on the lower surface of the positioning rod (7).
5. A quartz ring polishing device with angle adjustment according to claim 4, characterized in that: Servo motors (62) are symmetrically fixed at both ends of the support plate (61), and the gears at the output ends of the two servo motors (62) are arranged in an alternating manner.
6. The quartz ring polishing apparatus with angle adjustment according to claim 1, characterized in that: A gear base (66) is fixedly mounted on the bottom of the vacuum generator (65), and the gear base (66) meshes with the gear at the output end of one of the servo motors (62).
7. The quartz ring polishing apparatus with angle adjustment according to claim 1, characterized in that: A driven gear (67) is fixedly mounted on the lower surface of the first bevel gear (68), and the driven gear (67) meshes with the gear at the output end of another servo motor (62).