Disassembly fixture for the lower pressure plate assembly of the polishing machine head

Abstract

This utility model relates to the technical field of polishing machine maintenance equipment, and in particular to a disassembly fixture for a lower pressure plate assembly of a polishing machine head. The fixture includes a support ring, a support plate, and columns. The support ring and support plate are spaced apart, and multiple columns are provided, supporting the support ring and support plate. The inner diameter of the support ring is larger than the inner diameter of the lower connecting plate, so that the inner circle of the support ring forms a clearance opening for the lower connecting plate. When the fixture supports the polishing head, the lower connecting plate extends into the clearance opening. Its beneficial effects are that it solves the problem of inconvenient disassembly and assembly caused by the lack of dedicated fixtures in the prior art, significantly improving work efficiency; effectively ensuring safety during disassembly and assembly, and reducing the risk of equipment damage and personnel injury; the fixture has a simple structure, is easy to manufacture and use, and can be adapted to various models of polishing machine heads, possessing good versatility and practicality, thereby comprehensively improving the standardization and safety level of polishing equipment maintenance operations.

Description

Technical Field

[0001] This utility model relates to the technical field of polishing machine maintenance equipment, and in particular to a disassembly tool for the lower pressure plate assembly of the polishing head of a polishing machine. Background Technology

[0002] In semiconductor manufacturing, precision optical component processing, and other high-precision surface treatment fields, polishing is a crucial step in achieving global planarization of wafer surfaces. As the core equipment in this process, the performance of the polishing head assembly directly affects the polishing quality. During long-term operation, to ensure polishing uniformity and process stability, the lower pressure plate assembly at the bottom of the polishing head needs to be periodically disassembled, cleaned, replaced, or calibrated. This lower pressure plate assembly typically includes a lower connecting plate fixedly connected to the bottom of the polishing head, and a pyramidal pad located below it and secured with bolts.

[0003] In actual maintenance operations, due to the lack of specialized tooling, operators need to find or build temporary support structures on-site, consuming a significant amount of preparation time. Temporary supports are often difficult to position precisely, leading to repeated adjustments and severely impacting maintenance efficiency. Furthermore, the lack of specialized tools makes the process of disassembling and installing bolts more laborious and time-consuming.

[0004] Temporary supports such as wooden blocks or ordinary pads cannot guarantee their load-bearing capacity, structural strength, and stability. At the moment of disassembling critical connecting bolts, the throwing head may suddenly sink, tilt, or even fall, easily causing damage to the expensive throwing head or lower pressure plate assembly, and more seriously threatening the personal safety of operators, posing a significant safety hazard.

[0005] General-purpose support tools are ill-suited to the unique structure of the lower pressure plate assembly. Improper support placement may obstruct bolt removal paths or interfere with the pyramid pad, forcing operators to work in confined or awkward spaces, increasing operational difficulty and the probability of errors. Utility Model Content

[0006] (a) Technical problems to be solved

[0007] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a disassembly fixture for the lower pressure plate assembly of a polishing machine head, which solves the technical problems of poor operational safety and low operational efficiency in the maintenance process of the lower pressure plate assembly due to the lack of dedicated fixtures in the prior art.

[0008] (II) Technical Solution

[0009] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0010] In a first aspect, this utility model provides a disassembly fixture for a polishing machine's lower pressure plate assembly, used to support the polishing head below the lower pressure plate assembly during disassembly and assembly. The lower pressure plate assembly includes a lower connecting plate and a pyramidal pad. The lower connecting plate is fixedly connected to the bottom of the polishing head, and the pyramidal pad is fixedly connected to the bottom of the lower connecting plate. The diameter of the lower connecting plate is smaller than the diameter of the polishing head. The disassembly fixture includes a support ring, a support plate, and columns. The support ring and support plate are spaced apart, and multiple columns are provided, supporting the polishing head between the support ring and the support plate. The inner diameter of the support ring is larger than the inner diameter of the lower connecting plate, so that the inner circle of the support ring forms a clearance opening for the lower connecting plate. When the fixture supports the polishing head, the lower connecting plate extends into the clearance opening.

[0011] In one technical solution of this utility model, the disassembly fixture also includes multiple pressure sensors, which are axially evenly distributed on the top surface of the support ring, so that the top surface of the support ring forms a pressure detection surface. When the fixture supports the throwing head, the pressure detection surface supports the throwing head.

[0012] In one technical solution of this utility model, the pressure sensor has multiple layers arranged radially on the support ring.

[0013] In one technical solution of this utility model, the columns are evenly distributed circumferentially between the support ring and the support plate, and the two ends of the columns are detachably connected to the support ring and the support plate.

[0014] In one technical solution of this utility model, the surfaces of the support ring and the support plate are provided with connecting grooves, and the two ends of the column form connecting ends, with the connecting grooves and connecting ends interlocked.

[0015] In one technical solution of this utility model, a first magnetic element and a second magnetic element are respectively provided on the connecting groove and the connecting end, and the first magnetic element and the second magnetic element can attract each other when the connecting end is inserted into the connecting groove.

[0016] In one technical solution of this utility model, the columns are configured with multiple length models, and multiple columns of one length model form a group. When replacing columns of different length models, disassembly fixtures of different height models can be formed.

[0017] In one technical solution of this utility model, the support plate and the support ring have the same structure, so that the support plate and the support ring can be interchanged, and the disassembly tooling can be used in both the forward and reverse directions.

[0018] In one technical solution of this utility model, the support ring is a polyetheretherketone ring, the column is a polyetheretherketone column, and the support plate is a polyetheretherketone plate.

[0019] (III) Beneficial Effects

[0020] The beneficial effects of this utility model are as follows: First, the disassembly fixture for the lower pressure plate assembly of the polishing machine head, as described in this utility model, solves the problem of inconvenient disassembly and assembly caused by the lack of dedicated fixtures in the prior art. Operators no longer need to rely on temporary supports or manual lifting, significantly improving work efficiency. Second, by providing a stable and reliable support platform, it effectively ensures safety during the disassembly and assembly process, reducing the risk of equipment damage and personnel injury. Furthermore, the fixture has a simple structure, is easy to manufacture and use, and can be adapted to various models of polishing machine heads, possessing good versatility and practicality, thereby comprehensively improving the standardization and safety level of polishing equipment maintenance operations. Attached Figure Description

[0021] Figure 1 This is one of the structural schematic diagrams of the polishing machine and disassembly fixture of this utility model;

[0022] Figure 2 This is the second structural schematic diagram of the polishing machine and disassembly fixture of this utility model;

[0023] Figure 3 This is a schematic diagram of the axial structure of the disassembly tooling of this utility model;

[0024] Figure 4 This is a schematic diagram of the main structure of the disassembly tooling of this utility model;

[0025] Figure 5 for Figure 4 Schematic diagram of the cross-sectional structure of AA;

[0026] Figure 6 for Figure 4 A magnified schematic diagram of the local structure at point I;

[0027] Figure 7 This is a top view of the disassembly fixture of this utility model.

[0028] [Explanation of Labels in the Attached Image]

[0029] 1: Throwing a head;

[0030] 2: Lower pressure plate assembly; 21: Lower connecting plate; 22: Pyramid pad;

[0031] 3: Support ring; Y: Leaning opening;

[0032] 4: Support plate; X: Connecting groove;

[0033] 5: Column; 5a: Connection end;

[0034] 6: Pressure sensor. Detailed Implementation

[0035] To better explain and facilitate understanding of this utility model, the following description is provided in conjunction with the appendix. Figures 1-7 This invention will be described in detail through specific embodiments. Wherein, directional terms such as "upper" and "lower" are used in this document. Figure 1 The orientation is used as a reference.

[0036] Example 1:

[0037] Reference Figures 1-7 This utility model provides a disassembly fixture for a polishing machine's lower pressure plate assembly, used to support the polishing head 1 below the lower pressure plate assembly 2 during disassembly and assembly. The lower pressure plate assembly 2 includes a lower connecting plate 21 and a pyramidal pad 22. The lower connecting plate 21 is fixedly connected to the bottom of the polishing head 1, and the pyramidal pad 22 is fixedly connected to the bottom of the lower connecting plate 21. The diameter of the lower connecting plate 21 is smaller than the diameter of the polishing head 1. The disassembly fixture includes a support ring 3, a support plate 4, and columns 5. The support ring 3 and support plate 4 are spaced apart, and multiple columns 5 are provided, supporting between the support ring 3 and support plate 4. The inner diameter of the support ring 3 is larger than the inner diameter of the lower connecting plate 21, so that the inner circle of the support ring 3 forms a clearance opening Y in the lower connecting plate 21. When the fixture supports the polishing head 1, the lower connecting plate 21 extends into the clearance opening Y.

[0038] The disassembly fixture for the lower pressure plate assembly of the polishing machine head is used to provide stable support under the lower pressure plate assembly 2 during disassembly and assembly, so as to bear the weight of the polishing head 1 and ensure the safety and convenience of the operation process.

[0039] During the disassembly and assembly process, if there is a lack of dedicated support devices, operators often need to use temporary supports or manually lift the throwing head 1, which is not only inconvenient to operate, but also poses a risk of the throwing head 1 falling accidentally, seriously affecting the safety and efficiency of the operation.

[0040] In this embodiment, the disassembly fixture includes a support ring 3, a support plate 4, and multiple columns 5. The columns 5 are evenly distributed and vertically connected between the support ring 3 and the support plate 4, forming a stable frame structure to ensure sufficient load-bearing capacity and structural rigidity of the overall fixture. The inner diameter of the support ring 3 is designed to be larger than the outer diameter of the lower connecting plate 21, creating a suitable clearance opening Y. When the fixture is positioned below the lower pressure plate assembly 2 and lifts the throwing head 1 upwards, the lower connecting plate 21 can smoothly extend into the clearance opening Y, while the upper surface of the support ring 3 contacts the bottom surface of the throwing head 1, effectively supporting the throwing head 1. With this structure, the disassembly and assembly processes of the pyramid pad 22 and the lower connecting plate 21 can be performed without interference, thus ensuring sufficient operating space for the connecting bolts during disassembly and assembly. It also allows for convenient and quick removal of the connecting bolts, pyramid pad 22, and connecting plate.

[0041] This technical solution addresses several key issues. First, it resolves the inconvenience of disassembly and assembly caused by the lack of specialized tooling in existing technologies. Operators no longer need to rely on temporary supports or manual lifting, significantly improving work efficiency. Second, by providing a stable and reliable support platform, it effectively ensures safety during disassembly and assembly, reducing the risk of equipment damage and personnel injury. Third, the tooling is simple in structure, easy to manufacture and use, and compatible with various types of polishing machine heads, exhibiting excellent versatility and practicality. This comprehensively enhances the standardization and safety of polishing equipment maintenance operations.

[0042] Example 2:

[0043] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0044] The disassembly fixture also includes multiple pressure sensors 6, which are axially evenly distributed on the top surface of the support ring 3, so that the top surface of the support ring 3 forms a pressure detection surface. When the fixture supports the throwing head 1, the pressure detection surface supports the throwing head 1.

[0045] In this embodiment, pressure sensors 6 are evenly distributed along the top surface of the support ring 3, so that the upper surface of the support ring 3 forms an integrated pressure detection surface. When the fixture is used to support the polishing head 1, the top surface of the support ring 3, i.e., the pressure detection surface, directly contacts the outer ring of the bottom surface of the polishing head 1, thereby bearing the entire weight from the polishing head 1 and the lower pressure plate assembly 2.

[0046] Multiple pressure sensors 6 synchronously collect pressure data from each support point, enabling real-time monitoring of the stress state at each location during the support process. This ensures balanced stress distribution on the throwing head 1 during assembly and disassembly, preventing structural deformation or accidental slippage due to localized stress concentration or unstable support. Connected to the sensor system via an external display or alarm device, operators can intuitively monitor the load-bearing status of the tooling. In case of abnormal stress, such as unilateral load imbalance or overload, the system can provide feedback on the actual status of components driving the lifting and lowering of the throwing head 1, including the cylinders, facilitating maintenance and further enhancing operational safety.

[0047] By incorporating pressure sensor 6, not only is the original tooling's clearance function for the lower connecting plate 21 and structural stability retained, but the introduction of pressure detection functionality enables intelligent monitoring of the disassembly and assembly process. Its beneficial effect lies in further resolving the problem of poor disassembly and assembly safety caused by the lack of a force feedback mechanism in existing technologies, avoiding safety accidents caused by human error or uneven support. Simultaneously, quantifying support force data helps standardize operating procedures, improve disassembly and assembly accuracy and repeatability, and is particularly suitable for maintenance scenarios of high-precision polishing equipment, significantly enhancing the reliability, safety, and intelligence level of equipment maintenance.

[0048] Example 3:

[0049] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0050] The pressure sensor 6 has multiple layers arranged radially on the support ring 3.

[0051] In this embodiment, each layer of sensors is uniformly distributed circumferentially, forming a multi-level pressure sensing area. This multi-level radial layout can more accurately capture the pressure distribution between the contact surface of the support ring 3 and the lower connecting plate 21, and in particular, can identify uneven force states caused by installation eccentricity or the offset of the center of gravity of the throwing head 1.

[0052] When the tooling supports the polishing machine head 1, pressure sensors 6 at different radial positions can detect the force magnitude in the inner, middle, and outer ring areas respectively, thereby constructing a complete pressure distribution map and achieving a comprehensive assessment of the support status. This structure not only improves the spatial resolution of pressure detection but also enhances its adaptability to complex stress conditions. Combined with the signal acquisition and processing system, it can determine in real time whether there are abnormalities such as unilateral suspension, tilted load, or local overload, and prompt operators to adjust the tooling position or check the connection status in a timely manner through a visual interface or audible and visual alarms.

[0053] This technical solution further enhances safety monitoring capabilities during the disassembly and assembly process, effectively addressing safety hazards caused by the lack of refined monitoring of the support stress state in existing technologies, and preventing equipment damage or personal injury due to improper support. Simultaneously, the multi-layered radially arranged pressure sensors 6 provide the tooling with higher detection accuracy and reliability, facilitating standardized and data-driven management of disassembly and assembly operations. It is particularly suitable for maintenance scenarios of automated polishing equipment with high precision and safety requirements, further improving the safety, stability, and intelligence level of the lower pressure plate disassembly and assembly operations.

[0054] Example 4:

[0055] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0056] The columns 5 are evenly distributed around the support ring 3 and the support plate 4, and the two ends of the columns 5 are detachably connected to the support ring 3 and the support plate 4.

[0057] In this embodiment, the two ends of the column 5 are detachably connected to the support ring 3 and the support plate 4, respectively, giving the entire tooling excellent modularity. This facilitates disassembly and storage when not in use, significantly reducing storage space requirements and also simplifying transportation and on-site assembly. Furthermore, during long-term use, if individual columns 5 or support components require replacement or maintenance due to wear, deformation, or other reasons, the entire tooling does not need to be scrapped; only the damaged parts need to be replaced individually, reducing maintenance costs and extending the tooling's lifespan. This structure further enhances the tooling's flexibility and practicality, making it particularly suitable for maintenance scenarios involving multi-station, mobile, or space-constrained equipment.

[0058] Example 5:

[0059] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0060] The support ring 3 and the support plate 4 have connecting grooves X on their opposite surfaces. The two ends of the column 5 form connecting ends 5a, and the connecting grooves X and connecting ends 5a are inserted into each other.

[0061] In this embodiment, the connecting groove X is formed concavely along the axial direction, and connecting ends 5a adapted to the connecting groove X are machined at both ends of the column 5. The connecting ends 5a and the connecting groove X are detachably connected by plugging. By inserting the connecting ends 5a at both ends of the column 5 into the connecting groove X on the support ring 3 and the support plate 4, the entire tooling can be quickly assembled, which is simple to operate and has high disassembly and assembly efficiency. This structural design not only ensures the overall structural rigidity and load-bearing capacity of the tooling, but also further enhances the modularity, making each component more flexible and efficient in transportation, storage and field use. Through the standardized and modular plug-in structure design, the ease of assembly and structural reliability of the tooling are significantly improved.

[0062] Example 6:

[0063] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0064] The connecting groove X and the connecting end 5a are respectively provided with a first magnetic element and a second magnetic element, which can attract each other when the connecting end 5a is inserted into the connecting groove X.

[0065] In this embodiment, the first magnetic component is embedded in the connecting groove X on the support ring 3 and the support plate 4, while the second magnetic component is installed on the connecting ends 5a at both ends of the column 5. The two components are spatially opposite and have opposite polarities, enabling automatic adsorption as the connecting ends 5a of the column 5 are inserted into the connecting groove X. When the operator aligns the column 5 and pushes it into the connecting groove X, the magnetic attraction between the first and second magnetic components creates a stable pre-tightened state between the connecting ends 5a and the connecting groove X. This magnetic adsorption structure not only effectively prevents the column 5 from accidentally falling off during handling or slight vibration, improving the overall structural stability of the tooling, but also provides clear feedback during assembly, allowing operators to quickly determine whether the connection is complete, thus improving assembly efficiency and accuracy. Furthermore, as an auxiliary means of detachable connection, the magnetic connection enhances the reliability of the plug-in connection without adding a complex mechanical structure. Disassembly only requires applying appropriate pulling force, without affecting the tooling's rapid assembly and disassembly characteristics.

[0066] Example 7:

[0067] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0068] The uprights 5 are available in various lengths, with multiple uprights 5 of one length forming a group. When replacing uprights 5 with different lengths, disassembly fixtures of different heights can be created.

[0069] In this embodiment, the columns 5 are interchangeable. By replacing columns 5 of different lengths, the axial distance between the support ring 3 and the support plate 4 can be flexibly adjusted, thereby achieving the adjustability of the overall height of the disassembly fixture and forming fixture configurations with various height specifications. This modular height adjustment design allows the same set of fixtures to be adapted to polishing machine heads 1 of different models or with different installation height requirements, significantly improving the versatility and applicability of the fixture.

[0070] In practical applications, operators can select the appropriate column 5 for assembly based on the specific equipment's structural parameters, ensuring that the tooling accurately aligns with the support position between the pressure plate and the throwing head 1 during use. This avoids assembly difficulties or inadequate support due to height mismatch. This variable height design further enhances the tooling's adaptability, especially overcoming the resource waste and management inconvenience caused by the need for multiple sets of fixed tooling due to differences in equipment models in traditional operations. The standardized and modular replacement of column 5 enables multi-purpose use, reducing manufacturing costs and storage space requirements while significantly improving the flexibility and efficiency of maintenance operations.

[0071] Example 8:

[0072] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0073] The support plate 4 and the support ring 3 have the same structure so that the support plate 4 and the support ring 3 can be interchanged, and the disassembly tooling can be used in both the forward and reverse directions.

[0074] In this embodiment, the support plate 4 and the support ring 3 maintain a consistent structural design, specifically having the same outer diameter, inner diameter, and the same distribution and size of the connecting groove X. This consistent structural design allows the support ring 3 and the support plate 4 to be interchangeable in the tooling, meaning that either one can be chosen as the upper support structure or the lower foundation support structure during assembly. This bidirectional usability significantly improves the flexibility and adaptability of the tooling, especially in situations where space is limited or the on-site installation direction is restricted, allowing assembly and support operations to be completed without adjusting the placement of the equipment or tooling. Combined with the multi-length replaceable design of the column 5, and the plug-in fit and magnetic adsorption structure between the connecting groove X and the connecting end 5a, this interchangeability design further enhances the modularity and universality of the tooling. It not only solves the problems of inconvenient assembly and disassembly, unstable support, and poor safety caused by the lack of dedicated tooling in the prior art, but also avoids the limitations of traditional unidirectional tooling in specific scenarios through structural symmetry and component interchangeability. Meanwhile, the reversible design extends the service life of the tooling and reduces the risk of overall scrapping due to local wear. When one end face wears out due to long-term use, the other end face can be flipped over to achieve uniform wear.

[0075] Furthermore, in this embodiment, the pressure sensor 6 may be omitted, and only the support function of the tooling may be retained.

[0076] Example 9:

[0077] Reference Figures 1-7 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions:

[0078] Support ring 3 is a polyetheretherketone ring, column 5 is a polyetheretherketone column, and support plate 4 is a polyetheretherketone plate.

[0079] Specifically, polyetheretherketone (PEEK), a high-performance engineering plastic, possesses excellent mechanical strength, high-temperature resistance, creep resistance, chemical stability, and dimensional stability, enabling it to maintain structural integrity and geometric accuracy over long periods under complex working conditions. This material selection not only ensures that the tooling is not prone to plastic deformation or fatigue fracture when subjected to the large load of the polishing machine head 1, but also endows it with good corrosion resistance, allowing it to adapt to equipment maintenance environments containing chemical media such as coolants and cleaning agents, avoiding performance degradation due to material aging or corrosion. Simultaneously, PEEK itself possesses a certain degree of self-lubrication and a low coefficient of friction, facilitating smooth mating between the connecting groove X and the connecting end 5a during insertion, reducing assembly resistance, and extending the service life of the contact surfaces. Combined with its relatively lighter density compared to metal materials, the entire disassembly tooling achieves a lightweight design while ensuring sufficient rigidity and strength, facilitating operator handling and on-site operations. The superior performance of the material itself, combined with the modular, height-adjustable, reversible, magnetic positioning, and pressure monitoring structural design of the tooling, not only enhances the reliability of the connection between components and the accuracy of repeated assembly, but also enables long-term stable operation under harsh maintenance conditions such as high humidity, high corrosion, and frequent disassembly and assembly. This significantly extends the service life of the tooling, reduces maintenance costs, and meets the comprehensive requirements of modern precision polishing equipment for disassembly and assembly tools in terms of safety, versatility, and sustainable use.

[0080] It can be understood that, except for conflicting parts, the above embodiments 1-9 can be freely combined to form other embodiments of this utility model.

[0081] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0082] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part. They can refer to a mechanical connection or an electrical connection. They can refer to a direct connection or an indirect connection through an intermediate medium. They can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0083] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0084] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0085] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A disassembly fixture for a polishing machine head lower pressure plate assembly, used to support the polishing head (1) below the lower pressure plate assembly (2) during disassembly and assembly; the lower pressure plate assembly (2) includes a lower connecting plate (21) and a pyramid pad (22), the lower connecting plate (21) being fixedly connected to the bottom of the polishing head (1), the pyramid pad (22) being fixedly connected to the bottom of the lower connecting plate (21), the diameter of the lower connecting plate (21) being smaller than the diameter of the polishing head (1), characterized in that: The disassembly fixture includes a support ring (3), a support plate (4), and a column (5). The support ring (3) and the support plate (4) are spaced apart. Multiple columns (5) are provided and supported between the support ring (3) and the support plate (4). The inner diameter of the support ring (3) is larger than the inner diameter of the lower connecting plate (21) so that the inner circle of the support ring (3) forms the clearance opening (Y) of the lower connecting plate (21); when the tooling supports the throwing head (1), the lower connecting plate (21) extends into the clearance opening (Y).

2. The polishing head down force pad assembly dismounting tool of claim 1, wherein: The disassembly fixture also includes multiple pressure sensors (6), which are axially evenly distributed on the top surface of the support ring (3) so that the top surface of the support ring (3) forms a pressure detection surface; When the tooling supports the throwing head (1), the pressure detection surface supports the throwing head (1).

3. The polishing head down force pad assembly disassembly tool of claim 2, wherein: The pressure sensor (6) has multiple layers arranged radially on the support ring (3).

4. The polishing head down force pad assembly disassembly tool of claim 1, wherein: The columns (5) are evenly distributed circumferentially between the support ring (3) and the support plate (4), and the two ends of the columns (5) are detachably connected to the support ring (3) and the support plate (4).

5. The polishing head down force pad assembly disassembly tool of claim 4, wherein: The support ring (3) and the support plate (4) have connecting grooves (X) on their opposite surfaces. The two ends of the column (5) form connecting ends (5a), and the connecting grooves (X) and the connecting ends (5a) are inserted into each other.

6. The polishing head down force pad assembly disassembly tool of claim 5, wherein: The connecting groove (X) and the connecting end (5a) are respectively provided with a first magnetic element and a second magnetic element, which can attract each other when the connecting end (5a) is inserted into the connecting groove (X).

7. The polishing head down force pad assembly disassembly tool of claim 1, wherein: The column (5) is configured with multiple length models, and multiple columns (5) of one length model form a group; When the column (5) of different lengths is replaced, disassembly fixtures of different heights can be formed.

8. The polishing head down force pad assembly disassembly tool of claim 1, wherein: The support plate (4) has the same structure as the support ring (3) so that the support plate (4) and the support ring (3) can be interchanged, and the disassembly tool can be used in both directions.

9. The polishing head down force platen assembly disassembly tool of any of claims 1-8, wherein: The support ring (3) is a polyether ether ketone ring, the column (5) is a polyether ether ketone column, and the support plate (4) is a polyether ether ketone plate.

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