A dry film ring-cutting mechanism for electrostatic chucks

Abstract

This utility model discloses a dry film ring-cutting mechanism for an electrostatic chuck, relating to the field of electrostatic chuck technology. It includes a worktable and a fixed upright plate, with a lifting and adjusting mechanism installed on the inner side of the fixed upright plate. This utility model, through the lifting and adjusting mechanism, can raise and lower the cutter and adjust it to a suitable position. During use, the electric cylinder is activated to raise and lower the cutter to a suitable height. The cutter then slides along the outer wall of the guide rail, and is fixed in place by fastening bolts, moving the cutter to the appropriate position. This avoids the situation where the cutter's movement is difficult, preventing it from properly ring-cutting the dry film, thus ensuring the practicality of the dry film ring-cutting mechanism. It also avoids the situation where the mechanism can only ring-cut dry film of the same radius due to difficulty in adjusting the ring-cutting radius, ensuring the flexibility of the dry film ring-cutting mechanism.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically a dry film ring-cutting mechanism for electrostatic chucks. Background Technology

[0002] Currently, after electrostatic chuck-type workpieces are laminated, the dry film adhering to the workpiece surface needs to be cut to remove unwanted film. An automated circular film cutting mechanism needs to be developed and designed to replace manual film cutting.

[0003] Most dry film ring cutting mechanisms currently in use are difficult to raise and lower the cutter and are difficult to adjust the ring cutting radius. During use, if it is difficult to raise and lower the cutter, it will cause the cutter to move up and down unevenly, which will prevent the cutter from ring cutting the dry film normally, making the dry film ring cutting mechanism less practical. If it is difficult to adjust the ring cutting radius, the mechanism will only be able to ring cut dry film of the same radius, making the dry film ring cutting mechanism less flexible. Utility Model Content

[0004] The purpose of this invention is to provide a dry film ring-cutting mechanism for electrostatic chucks to solve the problems raised in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a dry film ring cutting mechanism for an electrostatic chuck, comprising a worktable and a fixed upright plate, wherein a lifting adjustment mechanism is provided on the inner side of the fixed upright plate, the lifting adjustment mechanism includes a slide rail, a connecting plate is provided on the outer wall of the slide rail, an electric cylinder is provided on the inner side of the fixed upright plate, a connecting plate is provided at the bottom of the electric cylinder, and a support plate is provided at the bottom of the connecting plate.

[0006] As a preferred technical solution, the support plate has a rotating cylinder inside, the bottom of the rotating cylinder has a guide rail, and the outer wall of the guide rail has a guide block.

[0007] As a preferred technical solution, the guide block is provided with a fastening bolt inside, and a spring telescopic assembly is provided on the top of the guide block.

[0008] As a preferred technical solution, the top of the support plate is provided with a photoelectric sensor group, and the bottom of the guide block is provided with a cutter cover.

[0009] As a preferred technical solution, the cutter cover has a cutter body inside, and a cover guide wheel is provided on one side of the cutter cover.

[0010] As a preferred technical solution, a rotating ring-cutting mechanism is provided on the top of the support plate, and the rotating ring-cutting mechanism includes a motor.

[0011] As a preferred technical solution, the outer wall of the motor is provided with a pulley, and the inner wall of the pulley is provided with a rotating drum.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model, through the setting of a lifting and adjusting mechanism, can achieve the functions of raising and lowering the cutter and adjusting the cutter to a suitable position. During use, the electric cylinder is activated to drive the cutter to raise and lower it to a suitable height. The guide block slides on the outer wall of the guide rail, and then the guide block is fixed by the fastening bolts, moving the cutter to the appropriate position. This avoids the situation where the cutter is difficult to raise and lower, resulting in uneven cutting and thus preventing the cutter from properly circumferentially cutting the dry film. This ensures the practicality of the dry film circumferential cutting mechanism and also avoids the situation where the mechanism can only circumferentially cut dry film of the same radius due to the difficulty in adjusting the circumferential cutting radius, thus ensuring the flexibility of the dry film circumferential cutting mechanism.

[0014] 2. This utility model, through the setting of a rotary ring-cutting mechanism, can achieve the function of rotating the cutter to ring-cut the dry film. During use, the motor is started to drive the rotating drum to rotate the cutter body, so that the cutter ring-cuts the dry film. This combination can hide the cutter when not in use, preventing accidental operation to people or other materials. At the same time, the film cutting is smooth and efficient, avoiding the situation where the rotation process is not smooth due to the difficulty in rotating the cutter, resulting in poor ring-cutting effect and poor quality of the ring-cut dry film, thus ensuring the practicality of the dry film ring-cutting mechanism. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present utility model;

[0016] Figure 2 This is a schematic diagram of the lifting and adjusting mechanism of this utility model;

[0017] Figure 3 This is a schematic diagram of the connection structure between the cutter cover and the cover guide wheel of this utility model;

[0018] Figure 4 This is a schematic diagram showing the rotation direction of the cutter of this utility model;

[0019] Figure 5 This utility model Figure 1 Enlarged schematic diagram of the structure at point A in the middle.

[0020] The components include: 1. Workbench; 2. Lifting and adjusting mechanism; 201. Slide rail; 202. Electric cylinder; 203. Connecting plate; 204. Guide rail; 205. Guide block; 206. Fastening bolt; 207. Spring telescopic assembly; 3. Rotary ring cutting mechanism; 301. Motor; 302. Pulley; 303. Rotary drum; 4. Fixed upright plate; 5. Support plate; 6. Photoelectric induction assembly; 7. Cutter cover; 8. Cutter body; 9. Cover guide wheel. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example: Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, this utility model provides the following technical solution, including a workbench 1 and a fixed upright plate 4. A lifting adjustment mechanism 2 is provided on the inner side of the fixed upright plate 4. A support plate 5 is provided at the bottom of the connecting plate 203. A photoelectric induction group 6 is provided at the top of the support plate 5. A cutter cover 7 is provided at the bottom of the guide block 205. A cutter body 8 is provided inside the cutter cover 7. A cover guide wheel 9 is provided on one side of the cutter cover 7. A rotating ring cutting mechanism 3 is provided at the top of the support plate 5.

[0023] Specifically: When the dry film circumferential cutting mechanism is needed, the position of the cutter body 8 must first be adjusted according to requirements. The position of the cutter body 8 is adjusted according to requirements by the lifting adjustment mechanism 2. After the cutter body 8 is adjusted to the appropriate position, the dry film is placed on the worktable 1. Then, the cutter body 8 needs to be lowered to the appropriate position for circumferential cutting. The lifting adjustment mechanism 2 is used to lower the cutter body 8 to the appropriate position for circumferential cutting. During descent, the cover guide wheel 9 on the cutter cover 7 first contacts the workpiece. The spring telescopic group 207 retracts, driving the cutter cover 7 to rise, so that the cutter body 8 is exposed and contacts the dry film on the worktable 1. The dry film is punctured first, and then circumferential cutting can begin. The circumferential cutting is performed by the rotating circumferential cutting mechanism 3, thereby completing the work.

[0024] like Figure 1 , Figure 2 , Figure 3 and Figure 5As shown, a lifting adjustment mechanism 2 is provided on the inner side of the fixed upright plate 4. The lifting adjustment mechanism 2 includes a slide rail 201. The slide rail 201 is provided on the inner side of the fixed upright plate 4. A connecting plate 203 is provided on the outer wall of the slide rail 201. An electric cylinder 202 is provided on the inner side of the fixed upright plate 4. A connecting plate 203 is provided at the bottom of the electric cylinder 202. A support plate 5 is provided at the bottom of the connecting plate 203. A rotating cylinder 303 is provided inside the support plate 5. A guide rail 204 is provided at the bottom of the rotating cylinder 303. A guide block 205 is provided on the outer wall of the guide rail 204. A fastening bolt 206 is provided inside the guide block 205. A spring telescopic assembly 207 is provided at the top of the guide block 205.

[0025] Specifically: When the dry film ring cutting mechanism is needed, the position of the cutter body 8 must first be adjusted according to requirements. At this time, the guide block 205 is moved, allowing it to move along the outer wall of the guide rail 204. After the guide block 205 is moved to the appropriate position, the fastening bolt 206 is rotated, causing it to rotate within the threaded hole in the guide block 205. This causes the fastening bolt 206 to abut against the guide rail 204, fixing the position of the cutter body 8, thus completing the adjustment. After adjusting the cutter body 8 to the appropriate position, the dry film is placed on the worktable 1, and then the cutter body 8 needs to be lowered to the appropriate position. Perform a circular cut at the appropriate position. At this time, start the electric cylinder 202, which drives the connecting plate 203 to begin descending. The connecting plate 203 drives the support plate 5 to begin descending, and the support plate 5 drives the cutter body 8 to begin descending. During the descent of the cutter body 8, the sliding of the connecting plate 203 on the outer wall of the slide rail 201 makes the descent of the cutter body 8 more stable and smooth, thus completing the lifting and lowering work. During the descent, the cover guide wheel 9 on the cutter cover 7 first contacts the workpiece. The spring telescopic group 207 retracts, driving the cutter cover 7 to rise. Then the cutter body 8 is exposed and contacts the dry film on the worktable 1, puncturing the dry film first.

[0026] like Figure 1 and Figure 4 As shown, a rotating ring-cutting mechanism 3 is provided on the top of the support plate 5. The rotating ring-cutting mechanism 3 includes a motor 301. The motor 301 is provided on the top of the support plate 5. A pulley 302 is provided on the outer wall of the motor 301. A rotating drum 303 is provided on the inner wall of the pulley 302.

[0027] Specifically: When it is necessary to perform ring cutting on the dry film, the motor 301 is started, which drives the pulley 302 to start rotating. The pulley 302 drives the drum 303 to start rotating, and the drum 303 drives the cutter body 8 to start rotating, so that the cutter body 8 can perform ring cutting on the dry film, thereby completing the rotary ring cutting work.

[0028] The working principle of this utility model is as follows: When the dry film circumferential cutting mechanism is needed, the position of the cutter body 8 needs to be adjusted according to the requirements. At this time, the guide block 205 is moved so that the guide block 205 moves on the outer wall of the guide rail 204. After the guide block 205 is moved to the appropriate position, the fastening bolt 206 is rotated so that the fastening bolt 206 rotates in the threaded hole opened in the guide block 205, thereby causing the fastening bolt 206 to abut against the guide rail 204 and fix the position of the cutter body 8, thus completing the adjustment work. After the cutter body 8 is adjusted to the appropriate position, the dry film is placed on the worktable 1. Then, the cutter body 8 needs to be lowered to the appropriate position for circumferential cutting. At this time, the electric cylinder 202 is activated so that the electric cylinder 202 drives the connecting plate 203 to start lowering. The connecting plate 203 drives the support The plate 5 begins to descend, and the support plate 5 drives the cutter body 8 to descend. During the descent of the cutter body 8, the sliding of the connecting plate 203 on the outer wall of the slide rail 201 makes the descent of the cutter body 8 more stable and smooth, thus completing the lifting operation. During descent, the cover guide wheel 9 on the cutter cover 7 first contacts the workpiece. The spring telescopic group 207 retracts, driving the cutter cover 7 to rise, and then the cutter body 8 is exposed and contacts the dry film on the worktable 1. The dry film is punctured first, and then the dry film can be circumferentially cut. At this time, the motor 301 is started, which drives the pulley 302 to start rotating. The pulley 302 drives the drum 303 to start rotating, and the drum 303 drives the cutter body 8 to start rotating, so that the cutter body 8 can circumferentially cut the dry film, thus completing the rotary circumferential cutting operation.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A dry film ring-cutting mechanism for an electrostatic chuck, comprising a worktable (1) and a fixed upright plate (4), characterized in that: The inner side of the fixed upright plate (4) is provided with a lifting adjustment mechanism (2), which includes a slide rail (201). The inner side of the fixed upright plate (4) is provided with a slide rail (201), and the outer wall of the slide rail (201) is provided with a connecting plate (203). The inner side of the fixed upright plate (4) is provided with an electric cylinder (202), and the bottom of the electric cylinder (202) is provided with a connecting plate (203). The bottom of the connecting plate (203) is provided with a support plate (5).

2. The dry film ring-cutting mechanism for an electrostatic chuck according to claim 1, characterized in that: The support plate (5) is provided with a rotating cylinder (303) inside, and a guide rail (204) is provided at the bottom of the rotating cylinder (303). A guide block (205) is provided on the outer wall of the guide rail (204).

3. The dry film ring-cutting mechanism for an electrostatic chuck according to claim 2, characterized in that: The guide block (205) is provided with a fastening bolt (206) inside, and a spring telescopic assembly (207) is provided on the top of the guide block (205).

4. The dry film ring-cutting mechanism for an electrostatic chuck according to claim 2, characterized in that: The top of the support plate (5) is provided with a photoelectric sensor group (6), and the bottom of the guide block (205) is provided with a cutter cover (7).

5. The dry film ring-cutting mechanism for an electrostatic chuck according to claim 4, characterized in that: The cutter cover (7) has a cutter body (8) inside, and a cover guide wheel (9) is provided on one side of the cutter cover (7).

6. The dry film ring-cutting mechanism for an electrostatic chuck according to claim 1, characterized in that: The top of the support plate (5) is provided with a rotating ring cutting mechanism (3), which includes a motor (301).

7. The dry film ring cutting mechanism for an electrostatic chuck according to claim 6, wherein: The outer wall of the motor (301) is provided with a pulley (302), and the inner wall of the pulley (302) is provided with a drum (303).

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