Self-cooling stirring device and silicon wafer grinding slurry mixing system

Abstract

This utility model relates to the technical field of stirring devices, and more particularly to a self-cooling stirring device and a silicon wafer grinding slurry stirring system. It includes a main shaft and blades, with a first return liquid channel and a second return liquid channel connected, and an inlet liquid channel and an outlet liquid channel connected, forming a coolant flow path with the flow direction being inlet liquid channel, outlet liquid channel, second return liquid channel, and first return liquid channel. Its beneficial effect is that by constructing a complete internal flow channel in the composite structure of the main shaft and blades, efficient and continuous cooling of the blades and slurry is achieved during the stirring process. This cooling path design fully utilizes the structural space of the stirring device itself, eliminating the need for additional external cooling pipes, effectively simplifying the overall equipment layout and improving the integration and reliability of the device. The coolant directly passes through the blades during the flow process, achieving preferential cooling of high-temperature parts and significantly improving heat exchange efficiency.

Description

Technical Field

[0001] This utility model relates to the technical field of stirring devices, and in particular to a self-cooling stirring device and a silicon wafer grinding slurry stirring system. Background Technology

[0002] Grinding mortar is a mixture of quartz sand, cutting fluid, water, and other chemical agents. It is an excellent abrasive material with small particle size. The small quartz sand particles are used to grind silicon wafers. After the mortar is properly proportioned, it forms a viscous, high-density, gel-like substance. The mortar needs to be continuously stirred after the proportions are adjusted to prevent sedimentation or solidification. During normal processing, the grinding equipment uses two grinding discs on the upper and lower surfaces of the silicon wafer for grinding. The mortar flows within it, providing lubrication, cooling, and grinding functions. During the grinding process, the mortar needs to be recycled to a mixing tank for reuse.

[0003] Mortar is mixed in a mixing tank using a mixing device. In existing technology, coils are installed inside the mixing tank to dissipate heat from the mixing medium and blades. Coolant flows through the coils via the mixing device, cooling the mortar through heat transfer. However, in practical applications, gaps exist between the coils, and the coils are close to the outer wall of the mixing tank, requiring various coil fixing devices. Mortar tends to settle and accumulate in these locations during use, forming lumps that easily fall into the system. During production and processing, these lumps can affect product quality. Ordinary coil cooling systems are difficult to clean after use, as the device itself has many unsanitary areas, and the gaps near the outer wall of the mixing tank on the coil side are too small to be thoroughly cleaned. Utility Model Content

[0004] (a) Technical problems to be solved In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a self-cooling stirring device and a silicon wafer grinding slurry stirring system, which solves the technical problems of easy accumulation of lumps in the coil affecting product quality, inconvenient cleaning of the four corners, and low heat exchange efficiency in the prior art using coil cooling slurry.

[0005] (II) Technical Solution To achieve the above objectives, the main technical solutions adopted by this utility model include: In a first aspect, this utility model provides a self-cooling stirring device, including a main shaft and blades. The main shaft includes an inner tube and an outer tube nested together, with a first return channel formed between the inner tube and the outer tube, and an inlet channel formed in the inner cavity of the inner tube. The blades include an outer skin and a core tube, with a second return channel formed between the outer skin and the core tube, and an outlet channel formed in the inner cavity of the core tube. The blades are circumferentially supported on the outer periphery of the main shaft and are arranged in multiples. The first return channel and the second return channel are connected, and the inlet channel and the outlet channel are connected, so as to form a coolant flow path with the flow direction in the order of inlet channel, outlet channel, second return channel, and first return channel.

[0006] In one technical solution of this utility model, it further includes a mixing tank, a cover plate, a rotating drive component, and a coolant rotary joint. The cover plate, the rotating drive component, the main shaft, the blades, and the coolant rotary joint form an assembly unit. The main shaft is axially rotatably supported on the cover plate, and both the rotating drive component and the coolant rotary joint are supported on the cover plate. The rotating drive component is drivenly connected to the main shaft. The coolant rotary joint is connected to the upper end of the main shaft and realizes liquid supply and return when the main shaft rotates. A clearance opening is formed at the top of the mixing tank. The cover plate is detachably and fixedly connected to the top of the mixing tank, and the main shaft and blades can extend from the clearance opening into the mixing tank so that the assembly unit can be disassembled and assembled relative to the mixing tank as a whole.

[0007] In one technical solution of this utility model, an inlet is provided on the outer tube corresponding to the position of the blade, and a first outlet is provided on the side of the outer skin near the main shaft. The outer skin is fixedly connected to the outer tube, and the inlet and the first outlet are kept in communication. A second outlet is provided on the inner tube corresponding to the position of the blade. The core tube passes through the inlet and is fixedly connected to the inner tube. The core tube is kept in communication with the second outlet.

[0008] In one technical solution of this utility model, the main shaft further includes a first support rib, which is located in the first return channel and its two ends are respectively connected to the outer tube and the inner tube; the first support rib is configured in multiple sets.

[0009] In one technical solution of this utility model, the blade further includes a second support rib, which is disposed in the second return liquid channel and its two ends are respectively connected to the core tube and the outer skin; the second support rib is configured in multiple sets.

[0010] In one technical solution of this utility model, the blades are configured as a multi-layer structure along the main shaft axis, and the blades are detachably connected to the main shaft to connect different numbers of blades, thereby forming a self-cooling stirring device with different cooling and stirring levels.

[0011] In one technical solution of this utility model, a sealing component is also included. When the blade is separated from the main shaft, the corresponding liquid inlet and the second liquid outlet are sealed by the sealing component.

[0012] In one technical solution of this utility model, a self-cooling stirring device is used to stir the grinding slurry, and the grinding slurry is used to grind silicon wafers.

[0013] Secondly, this utility model provides a silicon wafer grinding slurry mixing system, including the self-cooling mixing device in the above technical solution, and also includes a coolant supply device, which is adapted to supply coolant to the inlet channel and receive coolant from the first return channel.

[0014] In one technical solution of this utility model, the coolant supply device includes a storage tank, a pump body, and a cooling module; the storage tank is adapted to store coolant and receive coolant from the first return channel; the pump body is adapted to deliver coolant to the inlet channel; and the cooling module is adapted to cool the coolant.

[0015] (III) Beneficial Effects The beneficial effects of this invention are as follows: The self-cooling stirring device and silicon wafer grinding slurry stirring system of this invention achieve efficient and continuous cooling of the blades and slurry during the stirring process by constructing a complete internal flow channel in the composite structure of the main shaft and blades. This cooling path design fully utilizes the structural space of the stirring device itself, eliminating the need for additional external cooling pipes, effectively simplifying the overall equipment layout and improving the integration and reliability of the device. The coolant flows directly over the blades, the area experiencing the greatest stress and frictional heat during stirring, achieving preferential cooling of the high-temperature parts and significantly improving heat exchange efficiency.

[0016] This device satisfies both the mortar mixing and cooling needs, reduces mortar setting, facilitates cleaning, and improves mortar mixing efficiency. The blades directly force heat transfer through convection while mixing the mortar, whereas traditional coil cooling requires vortices formed after the mortar is mixed by the blades to generate convection heat. In this invention, due to the difference in speed between the blades and the mortar (the blade speed is much higher than the mortar speed), the heat transfer efficiency of the mixing blades is higher than that of the coils. Without coils, the mixing tank eliminates dead corners, increasing work efficiency. Since the coolant flow path is built into the main shaft and blades, it avoids the problems of traditional external cooling methods, such as susceptibility to environmental interference, large space occupation, and inconvenient maintenance. It is particularly suitable for continuous mixing operations in high-temperature, high-pressure, or closed reaction environments. The overall structure achieves efficient self-cooling without sacrificing the mechanical strength and hydrodynamic performance of the mixing device. Instead, effective temperature control extends the service life of the blades and main shaft, reducing equipment failures caused by thermal deformation. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the self-cooling stirring device of this utility model; Figure 2This is one of the structural schematic diagrams of the main shaft and blades of this utility model; Figure 3 This is the second schematic diagram of the structure of the main shaft and blades of this utility model; Figure 4 This is the third schematic diagram of the structure of the main shaft and blades of this utility model; Figure 5 This is a system block diagram of the coolant rotary joint and coolant supply device of this utility model.

[0018] [Explanation of Labels in the Attached Image] 1: Main shaft; 11: Inner tube; 12: Outer tube; 13: First support rib; 1a: First return channel; 1b: Inlet channel; 12a. Liquid inlet; 12b. Second liquid outlet; 2: Blade; 21: Outer skin; 22: Core tube; 23: Second support rib; 2a. Second return channel; 2b. Discharge channel; 21a. First liquid outlet; 3: Mixing tank; 3a: Displacement port; 4: Cover plate; 5: Rotation drive component; 6. Coolant rotary joint; 7. Coolant supply device; 71. Coolant tank; 72. Pump body; 73. Cooling module. Detailed Implementation

[0019] To better explain and facilitate understanding of this utility model, the following description is provided in conjunction with the appendix. Figures 1-5 This invention will be described in detail through specific embodiments. Wherein, directional terms such as "upper" and "lower" are used in this document. Figure 1 The orientation is used as a reference.

[0020] Example 1: Reference Figures 1-4 This utility model provides a self-cooling stirring device, including a main shaft 1 and blades 2. The main shaft 1 includes an inner tube 11 and an outer tube 12 nested together, forming a first return channel 1a between the inner tube 11 and the outer tube 12, and an inlet channel 1b within the inner tube 11. The blades 2 include an outer skin 21 and a core tube 22, forming a second return channel 2a between the outer skin 21 and the core tube 22, and an outlet channel 2b within the core tube 22. Multiple blades 2 are circumferentially supported on the outer periphery of the main shaft 1. The first return channel 1a and the second return channel 2a are connected, and the inlet channel 1b and the outlet channel 2b are also connected, forming a coolant flow path with the flow direction in the order of inlet channel 1b, outlet channel 2b, second return channel 2a, and first return channel 1a. The self-cooling stirring device is used to stir grinding slurry, which is used to grind silicon wafers.

[0021] In this embodiment, the main shaft 1 adopts a nested design of inner tube 11 and outer tube 12, forming a first return channel 1a between them. The inner cavity of the inner tube 11 itself serves as the coolant inlet channel 1b, undertaking the function of inputting the cooling medium. A second return channel 2a is formed between the outer casing 21 and the core tube 22, and the internal space of the core tube 22 constitutes the outlet channel 2b. Multiple blades 2 are distributed circumferentially along the main shaft 1 and stably supported on its outer periphery, which not only ensures the mechanical stability during the stirring process but also makes the cooling structure highly concentrated in the stirring area.

[0022] The inlet channel 1b is connected to the outlet channel 2b of the core tube 22, allowing the coolant to enter the core tube 22 of the blade 2 from the inner tube 11 of the main shaft 1 and flow into the internal space of the blade 2 through the outlet channel 2b. Subsequently, after the coolant has completed the heat dissipation of the blade 2 area and the mortar near the blade 2, it returns through the second return channel 2a between the outer skin 21 and the core tube 22, and remains connected with the first return channel 1a of the main shaft 1, thus forming a closed-loop cooling path: the coolant flows through the inlet channel 1b, the outlet channel 2b, the second return channel 2a, and the first return channel 1a in sequence to achieve circulating heat dissipation.

[0023] The self-cooling mixing device achieves efficient and continuous cooling of both the blades 2 and the mortar during mixing by constructing a complete internal flow channel within the composite structure of the main shaft 1 and the blades 2. This cooling path design fully utilizes the structural space of the mixing device itself, eliminating the need for additional external cooling pipes, effectively simplifying the overall equipment layout and improving the device's integration and reliability. The coolant flows directly over the blades 2, the area experiencing the greatest stress and frictional heat during mixing, achieving preferential cooling of the high-temperature components and significantly improving heat exchange efficiency.

[0024] This device satisfies both the mortar mixing and cooling needs, reduces mortar setting, facilitates cleaning, and improves mortar mixing efficiency. The blades 2 directly force heat transfer through convection while mixing the mortar, whereas traditional coil cooling requires vortices formed in the mortar after mixing by the blades 2 to generate convection heat. In this invention, due to the difference in speed between the blades 2 and the mortar (the blades 2's speed is much higher than the mortar's), the heat transfer efficiency of the mixing blades 2 is higher than that of the coil. Without coils, the mixing tank 3 eliminates dead corners, increasing work efficiency. Since the coolant flow path is built into the main shaft 1 and blades 2, it avoids the problems of traditional external cooling methods, such as susceptibility to environmental interference, large space occupation, and inconvenient maintenance. It is particularly suitable for continuous mixing operations in high-temperature, high-pressure, or closed reaction environments. The overall structure achieves efficient self-cooling without sacrificing the mechanical strength and hydrodynamic performance of the mixing device. Instead, effective temperature control extends the service life of the blades 2 and main shaft 1, reducing equipment failures caused by thermal deformation.

[0025] The blade 2 has multiple different second return channels 2a and different outlet channels 2b connected in parallel.

[0026] Example 2: Reference Figures 1-4 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions: The self-cooling stirring device also includes a stirring tank 3, a cover plate 4, a rotating drive component 5, and a coolant rotary joint 6. The cover plate 4, the rotating drive component 5, the main shaft 1, the blades 2, and the coolant rotary joint 6 form an assembly unit. The main shaft 1 is axially rotatably supported on the cover plate 4. The rotating drive component 5 and the coolant rotary joint 6 are both supported on the cover plate 4. The rotating drive component 5 is drivenly connected to the main shaft 1. The coolant rotary joint 6 is connected to the upper end of the main shaft 1 and realizes liquid supply and return when the main shaft 1 rotates. A relief opening 3a is formed at the top of the stirring tank 3. The cover plate 4 is detachably and fixedly connected to the top of the stirring tank 3. The main shaft 1 and the blades 2 can extend from the relief opening 3a into the stirring tank 3 so that the assembly unit can be disassembled and assembled as a whole relative to the stirring tank 3.

[0027] In this embodiment, the self-cooling stirring device further integrates the stirring tank 3, cover plate 4, rotating drive component 5, and coolant rotary joint 6, forming a highly integrated functional unit that can be independently assembled and disassembled. The entire assembly unit is structurally integrated through the cover plate 4. The main shaft 1 is rotatably connected to the cover plate 4 along the axial direction via bearings or similar support structures, ensuring its stability and concentricity under high-speed operation. The rotating drive component 5, such as a motor or reducer, is fixedly installed on the cover plate 4 and connected to the main shaft 1 via the reducer, achieving efficient power transmission and driving the main shaft 1 and blades 2 to rotate to complete the stirring operation. The coolant rotary joint 6 is also integrated into the cover plate 4 and connected to the upper end of the main shaft 1. Its core function is to achieve dynamic sealing and continuous flow of coolant under the continuous rotation of the main shaft 1, ensuring that coolant can be stably input into the inlet channel 1b and that the return liquid after heat exchange is smoothly discharged, ensuring uninterrupted operation of the cooling system. The coolant rotary joint 6 is a prior art method, and related components can be directly purchased and will not be described in detail here.

[0028] The top of the mixing tank 3 is provided with a clearance opening 3a that matches the assembly unit. The cover plate 4 is fixed to the top of the mixing tank 3 by bolts, flanges or other detachable connection methods, so that the entire assembly unit can be installed as a whole from top to bottom or disassembled as a whole from the mixing tank 3.

[0029] When the assembly unit is installed, the main shaft 1 and blades 2 extend into the mixing tank 3 through the clearance port 3a, entering the working area. When maintenance, cleaning, or component replacement is required, there is no need for complex disassembly of the internal structure of the mixing tank 3. Simply lift and remove the cover plate 4 along with the integrated main shaft 1, blades 2, drive components, and rotary joints, greatly simplifying the maintenance process and improving the maintainability and operational flexibility of the equipment. This modular design not only shortens downtime but also reduces interference with the cleanliness of the reaction tank's interior.

[0030] The liquid enters the inlet channel 1b of the inner tube 11 of the main shaft 1 through a rotary joint, and flows to the front end of the stirring area through the outlet channel 2b of the core tube 22 of the blade 2, achieving active cooling of the high-temperature parts. The cooled liquid, after absorbing heat, returns to the first return channel 1a between the outer tube 12 and the inner tube 11 of the main shaft 1 through the second return channel 2a of the blade 2, and is finally discharged through the return port of the rotary joint, forming a closed loop. The entire cooling system, drive system, and support structure are highly integrated on the cover plate 4, with a compact structure and high space utilization, while ensuring the synchronous and coordinated operation of cooling and stirring functions.

[0031] Example 3: Reference Figures 1-4 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions: The outer tube 12 has a liquid inlet 12a at the position corresponding to the blade 2, and the outer skin 21 has a first liquid outlet 21a on the side near the main shaft 1. The outer skin 21 is fixedly connected to the outer tube 12, and the liquid inlet 12a and the first liquid outlet 21a are kept in communication. The inner tube 11 has a second liquid outlet 12b at the position corresponding to the blade 2. The core tube 22 passes through the liquid inlet 12a and is fixedly connected to the inner tube 11. The core tube 22 is kept in communication with the second liquid outlet 12b, which realizes the efficient docking of the cooling flow channel between the main shaft 1 and the blade 2, and ensures that the coolant can be accurately introduced into the internal space of the blade 2 from the inside of the main shaft 1.

[0032] Specifically, the coolant first enters the inlet channel 1b of the inner tube 11 through the coolant rotary joint 6, and flows downward along the inner tube 11 under pressure. When the coolant reaches the installation position of the blade 2, it enters the outlet channel 2b of the core tube 22 of the blade 2 through the second outlet 12b on the inner tube 11, thus directly delivering the low-temperature coolant to the blade 2 area. Since the core tube 22 is wrapped by the outer sheath 21 to form a second return channel 2a, the coolant can preferentially cool the front end of the blade 2, i.e., the front end area most prone to heat accumulation during the stirring process, as it flows forward in the core tube 22. Subsequently, the coolant flows out from the end of the core tube 22, diffuses in the internal space of the blade 2 and flows in the opposite direction, flowing backward through the second return channel 2a between the outer sheath 21 and the core tube 22, completing the heat exchange of the entire blade 2. The high-temperature coolant that flows back enters the first return channel 1a between the outer tube 12 and the inner tube 11 through the first outlet 21a on the outer casing 21, and finally returns upward along the outer tube 12 of the main shaft 1, and is discharged from the system through the return port of the rotary joint, forming a complete cooling cycle.

[0033] This flow channel connection not only ensures reliable delivery and return of the cooling medium in the rotating components, but also enhances the structural rigidity between the blades 2 and the main shaft 1 through the fixed connection between the core tube 22 and the inner tube 11, and between the outer tube 12 and the outer casing 21, thereby improving the overall mechanical stability of the device. The coolant inlet and outlet paths are spatially rationally distributed. The coolant enters the core tube 22 through the second outlet 12b from the inner tube 11, representing a central inlet. The coolant returns through the annular gap between the outer casing 21 and the core tube 22 to the first outlet 21a, and then flows into the annular return channel of the outer tube 12 of the main shaft 1. This avoids short-circuiting or interference between hot and cold fluids, ensuring the orderly and efficient cooling process. Furthermore, since all fluid interfaces are located at the connection root area between the blades 2 and the main shaft 1, sealing and assembly alignment are facilitated, improving manufacturing and maintenance convenience. This integrated flow channel layout ensures cooling performance without increasing the burden on external piping, further enhancing the compactness and reliability of the device.

[0034] Specifically, connecting flanges can be installed at the joints between the outer tube 12 and the outer sheath 21, as well as between the inner tube 11 and the core tube 22. Bolts are used to achieve a sealed and stable connection of the components via the connecting flanges. This is an existing technical method and will not be described in detail here.

[0035] Example 4: Reference Figures 1-4 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions: The main shaft 1 also includes a first support rib 13, which is located in the first return channel 1a and is connected to the outer tube 12 and the inner tube 11 at both ends respectively; the first support rib 13 is configured in multiple sets.

[0036] In this embodiment, the first support rib 13 forms a support structure between the inner tube 11 and the outer tube 12. By controlling the density of the first support rib 13, the first support rib 13 will not affect the flow path of the coolant in the first return channel 1a.

[0037] Multiple sets of first support ribs 13 are evenly distributed around the main shaft 1, which can provide balanced support in multiple radial directions, effectively enhance the structural rigidity between the inner tube 11 and the outer tube 12, and prevent deflection, vibration or eccentricity caused by the long main shaft 1 or high-speed rotation.

[0038] Considering the entire cooling cycle path, the high-temperature coolant returning from the second return channel 2a of blade 2 enters the first return channel 1a through the first outlet 21a, and then flows through the area of ​​the first support rib 13. Under the guiding effect of the support rib, it can be more evenly distributed in the annular channel, avoiding the formation of heat stagnation zones due to excessively low local flow velocities, thereby improving the heat dissipation uniformity of the return process. Overall, the design of multiple sets of first support ribs 13 optimizes the flow field distribution and improves thermal management efficiency while ensuring the structural strength of the cooling channel, enabling the spindle 1 to maintain stable and reliable performance under harsh operating conditions such as high speed, high temperature, and long-term operation.

[0039] Specifically, threaded holes can be provided on the inner tube 11, and through holes can be provided on the outer tube 12. The first support rib 13 is a bolt. After the bolt passes through the through hole, it is threaded onto the threaded hole. By adjusting the evenly distributed bolts, the inner tube 11 and the outer tube 12 can be kept coaxial. Furthermore, there should be a sealing structure between the through hole and the bolt, such as a sealing ring in the through hole and a rubber sealing sleeve on the bolt, so that the sealing ring and the sealing sleeve cooperate.

[0040] Example 5: Reference Figures 1-4 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions: The blade 2 also includes a second support rib 23, which is located in the second return channel 2a and connected at both ends to the core tube 22 and the outer skin 21, respectively; multiple sets of the second support rib 23 are provided.

[0041] In this embodiment, multiple sets of second ribs 23 are introduced into the blade 2 structure to form a support frame for the internal return channel of the blade 2. This design significantly enhances the structural strength and overall rigidity of the blade 2 without interfering with the flow of coolant, and is particularly suitable for operating conditions involving high-viscosity media or high-torque stirring.

[0042] Multiple sets of second support ribs 23 are evenly distributed along the circumference of the blade 2, which can evenly bear the centrifugal force and fluid impact force during rotation, effectively suppressing the deformation, vibration or local stress concentration of the blade 2 caused by high-speed rotation. Since the blade 2 is at the front end of the mixing device and directly participates in material mixing, it is subjected to complex forces and is easily affected by heat. The setting of the second support ribs 23 can greatly improve its fatigue resistance and thermal stability, and prevent failure problems such as bulging of the outer skin 21, displacement of the core tube 22 or loosening of the connection parts caused by long-term thermo-mechanical coupling.

[0043] Meanwhile, the second support rib 23 is located within the second return channel 2a, and its surface is in direct contact with the high-temperature coolant returning from the tip of the blade 2. It not only provides structural support but also acts as a flow guide to improve the flow state of the coolant during the return process. By rationally designing the cross-sectional shape and arrangement angle of the support rib, moderate turbulence can be induced within the return channel, disrupting the laminar boundary layer attached to the wall and enhancing the heat transfer efficiency between the coolant and the inner wall of the core tube 22 and the outer skin 21, thereby improving the overall heat dissipation capacity of the blade 2.

[0044] Specifically, the setting method of the second support rib 23 can be referred to the first support rib 13 mentioned above, and will not be repeated here.

[0045] Example 6: Reference Figures 1-4 In addition to possessing all the technical solutions of the above embodiments, the embodiments of this utility model further possess the following technical solutions: The blades 2 are configured as a multi-layer structure along the axial direction of the main shaft 1, and the blades 2 are detachably connected to the main shaft 1 to connect different numbers of blades 2, thereby forming self-cooling stirring devices with different cooling and stirring levels. The self-cooling stirring device also includes a sealing component, which seals the corresponding liquid inlet 12a and the second liquid outlet 12b when the blades 2 are detached from the main shaft 1.

[0046] In this embodiment, each layer of blades 2 can be installed or removed independently. By adjusting the number and arrangement of the blades 2, the stirring intensity and cooling capacity can be flexibly configured. This modular design allows the same spindle 1 system to be adapted to different numbers of blades 2 according to different process requirements, such as mortar viscosity and stirring intensity, thereby forming multiple cooling and stirring level configuration schemes, realizing "one machine for multiple uses" and performance adjustment as needed, significantly improving the adaptability and efficiency of the equipment.

[0047] The blades 2 and the main shaft 1 are connected in a detachable manner, such as by the flange bolt connection described above, which facilitates quick assembly and disassembly of the blade 2 unit during equipment maintenance, replacement, or adjustment of operating conditions. When enhanced mixing or increased cooling coverage is required, the number of blade 2 layers can be increased; conversely, when handling low heat loads or small-volume materials, the number of blades 2 can be reduced, avoiding energy waste and structural redundancy. This flexible configuration not only optimizes the energy efficiency ratio but also extends the service life of core components such as the main shaft 1 and the drive system.

[0048] To ensure the system's sealing integrity when some blades 2 are not installed or removed, the device is also equipped with a dedicated sealing component. When a layer of blades 2 is removed from the main shaft 1, the inlet 12a and the second outlet 12b, which were originally used to connect that layer of blades 2, will be exposed to the flow channel system. If not sealed, this could lead to coolant leakage or cross-contamination of the flow channels, affecting the cooling effect of other working layers. At this time, the sealing component can be precisely installed in the corresponding position to reliably seal the inlet 12a and the second outlet 12b, blocking the coolant passage and preventing the cooling medium from leaking from the empty interface, while maintaining the normal operation of the cooling cycle in the layer where the remaining working blades 2 are located.

[0049] The sealing component can be designed as a plug type, blind plate type or sealing cover structure. Its material is matched with the inner tube 11 and outer tube 12 of the main shaft 1, and has good pressure resistance, temperature resistance and sealing performance, ensuring that it can maintain stable sealing under high temperature and high pressure operating conditions.

[0050] In summary, through the coordinated design of the multi-layer detachable blade 2 structure and the sealing component, this self-cooling stirring device achieves graded control of cooling capacity and stirring intensity, taking into account high flexibility, high sealing performance and high reliability. It is particularly suitable for production environments with multiple varieties and changing working conditions, effectively reducing equipment investment costs and operation and maintenance complexity, while ensuring the integrity and safety of the cooling system.

[0051] Example 7: Figures 1-5In addition to providing a silicon wafer grinding slurry mixing system, the embodiments of this utility model also include the self-cooling mixing device in any of the above embodiments, and a coolant supply device 7. The coolant supply device 7 is adapted to supply coolant to the inlet channel 1b and to receive coolant from the first return channel 1a. The coolant supply device 7 includes a storage tank 71, a pump body 72, and a cooling module 73; the storage tank 71 is adapted to store coolant and receive coolant from the first return channel 1a; the pump body 72 is adapted to deliver coolant to the inlet channel 1b; and the cooling module 73 is adapted to cool the coolant.

[0052] In this embodiment, the storage tank 71 serves as a coolant storage and collection unit. On one hand, it stores sufficient coolant to maintain system operation; on the other hand, it receives the high-temperature return coolant discharged from the upper end of the self-cooling stirring device's main shaft 1 via the coolant rotary joint 6, i.e., the heated coolant from the first return channel 1a. The returned high-temperature coolant mixes with other coolants in the storage tank 71, gradually dissipating heat and providing stable inlet conditions for subsequent processing by the cooling module 73. The storage tank 71 can also be equipped with a level sensor, temperature probe, and filter to achieve real-time monitoring of the coolant's state and remove any small particles or impurities that may be carried during circulation, preventing blockage of narrow flow channels and ensuring long-term stable system operation.

[0053] The pump body 72 is positioned between the storage tank 71 and the stirring device. Its inlet 12a is connected to the outlet of the storage tank 71, and the outlet is connected to the inlet 12a of the coolant rotary joint 6 via a pipeline. After the pump body 72 is started, it pressurizes and delivers the low-temperature coolant in the storage tank 71 to the inlet channel 1b of the inner tube 11 of the main shaft 1, pushing the coolant to flow along a preset path: passing through the inner tube 11 and the second outlet 12b in sequence into the outlet channel 2b of the core tube 22 of the blade 2, flowing towards the front end of the stirring area for heat absorption and cooling, and then returning to the first return channel 1a between the outer tube 12 and the inner tube 11 via the second return channel 2a and the first outlet 21a, and finally flowing back to the storage tank 71 through the return port of the rotary joint, completing a complete cooling cycle.

[0054] The cooling module 73 is integrated into the system and can take the form of an air-cooled radiator, a refrigeration unit or a plate heat exchanger. Its function is to actively cool the high-temperature coolant flowing through the liquid storage tank 71 or the independent circulation branch, so that it returns to the set low temperature state, thereby ensuring that the coolant entering the stirring device is always kept within a suitable temperature range.

[0055] This system achieves continuous cooling of the mixing shaft 1, blades 2, and mortar through the coordinated operation of a self-cooling stirring device with built-in flow channels and an external coolant supply system. This effectively suppresses temperature rise and ensures the uniformity and stability of the stirring process. Simultaneously, the modular, enclosed cooling design avoids contact between the cooling medium and the grinding material, eliminating the risk of cross-contamination and meeting the high cleanliness standards required for semiconductor manufacturing.

[0056] It can be understood that, except for conflicting parts, the above embodiments 1-7 can be freely combined to form other embodiments of this utility model.

[0057] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0058] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0059] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the liquid level of the first feature is higher than that of the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the liquid level of the first feature is lower than that of the second feature.

[0060] The term "comprising" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to those processes, articles, or apparatus / devices.

[0061] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A self-cooling stirring device, characterized in that: It includes a main shaft (1) and blades (2). The main shaft (1) includes an inner tube (11) and an outer tube (12) nested together. A first return channel (1a) is formed between the inner tube (11) and the outer tube (12). An inlet channel (1b) is formed in the inner cavity of the inner tube (11). The blade (2) includes an outer skin (21) and a core tube (22), a second return channel (2a) is formed between the outer skin (21) and the core tube (22), and an outlet channel (2b) is formed in the inner cavity of the core tube (22). The blades (2) are circumferentially supported on the outer periphery of the main shaft (1) and are configured as multiple. The first return channel (1a) and the second return channel (2a) are kept in communication, and the inlet channel (1b) and the outlet channel (2b) are kept in communication to form a coolant flow path with the flow direction in the order of the inlet channel (1b), the outlet channel (2b), the second return channel (2a), and the first return channel (1a).

2. The self-cooling stirring device as described in claim 1, characterized in that: It also includes a mixing tank (3), a cover plate (4), a rotating drive component (5), and a coolant rotary joint (6), wherein the cover plate (4), the rotating drive component (5), the main shaft (1), the blades (2), and the coolant rotary joint (6) form an assembly unit; The main shaft (1) is axially rotatably supported on the cover plate (4), and the rotation drive (5) and the coolant rotary joint (6) are both supported on the cover plate (4). The rotation drive (5) is drivenly connected to the main shaft (1). The coolant rotary joint (6) includes an upper end connected to the main shaft (1) and realizes the supply and return of coolant when the main shaft (1) is rotating. The top of the mixing tank (3) forms a relief opening (3a), the cover plate (4) is detachably fixed to the top of the mixing tank (3), and the main shaft (1) and the blade (2) can extend from the relief opening (3a) into the mixing tank (3) so that the assembly unit can be assembled and disassembled as a whole relative to the mixing tank (3).

3. The self-cooling stirring device as described in claim 1, characterized in that: The outer tube (12) has an inlet (12a) at the position corresponding to the blade (2), and the outer skin (21) has a first outlet (21a) on the side near the main shaft (1). The outer skin (21) is fixedly connected to the outer tube (12), and the inlet (12a) and the first outlet (21a) are kept in communication. The inner tube (11) has a second liquid outlet (12b) at the position corresponding to the blade (2). The core tube (22) passes through the liquid inlet (12a) and is fixedly connected to the inner tube (11). The core tube (22) is in communication with the second liquid outlet (12b).

4. The self-cooling stirring device as described in claim 1, characterized in that: The main shaft (1) also includes a first support rib (13), which is located in the first return channel (1a) and its two ends are respectively connected to the outer tube (12) and the inner tube (11); the first support rib (13) is configured in multiple groups.

5. The self-cooling stirring device as described in claim 1, characterized in that: The blade (2) also includes a second support rib (23), which is located in the second return channel (2a) and its two ends are respectively connected to the core tube (22) and the outer skin (21); the second support rib (23) is configured in multiple sets.

6. The self-cooling stirring device as described in claim 3, characterized in that: The blade (2) is configured as a multi-layer structure along the axial direction of the main shaft (1), and the blade (2) is detachably connected to the main shaft (1) to connect different numbers of blades (2), thereby forming the self-cooling stirring device with different cooling and stirring levels.

7. The self-cooling stirring device as described in claim 6, characterized in that: It also includes a sealing element, which seals the inlet (12a) and the second outlet (12b) when the blade (2) is disengaged from the main shaft (1).

8. The self-cooling stirring device according to any one of claims 1-7, characterized in that: The self-cooling stirring device is used to stir the grinding slurry, which is used to grind silicon wafers.

9. A silicon wafer grinding slurry mixing system, characterized in that: The self-cooling stirring device as described in any one of claims 1-8 further includes a coolant supply device (7) adapted to supply coolant to the inlet channel (1b) and to receive coolant from the first return channel (1a).

10. The silicon wafer grinding slurry mixing system as described in claim 9, characterized in that: The coolant supply device (7) includes a storage tank (71), a pump body (72), and a cooling module (73). The storage tank (71) is adapted to store coolant and receive coolant from the first return channel (1a); The pump body (72) is adapted to deliver the coolant to the inlet channel (1b). The cooling module (73) is adapted to cool the coolant.

Images