Microstructured functional composite membranes, templates and filters

Abstract

This utility model discloses a microstructured functional composite membrane, template, and filter, relating to the field of microstructured functional composite membrane technology. The microstructured functional composite membrane includes a microporous metal substrate membrane and a polymer functional layer. The microporous metal substrate membrane is integrally formed, and its working area has a first through-hole, which has a fully open structure. The polymer functional layer is applied to at least one area on at least one surface of the microporous metal substrate membrane through coating and patterning processes. The polymer functional layer has a second through-hole communicating with the first through-hole. This utility model combines a polymer functional layer with a designable three-dimensional morphology with a microporous metal substrate membrane, enabling precise control of the passing fluid, improving its accuracy and durability as a template, or its efficiency and functionality as a filter.

Description

Technical Field

[0001] This utility model relates to the field of microstructure functional composite membrane technology, and in particular to a microstructure functional composite membrane, template and filter. Background Technology

[0002] Functional composite films with precise micropores are key components in fields such as microelectronics and new energy. Existing technologies typically employ multilayer composite structures to balance mechanical strength and special functions.

[0003] Currently, there are two main composite processes. The first is adhesive lamination, which involves bonding a metal microporous mesh to a polymer membrane using an adhesive. The disadvantage of this method is that the adhesive is prone to clogging the micropores and aging, leading to low product precision and short lifespan. The second is electroforming growth, which involves growing a metal layer in situ on the polymer membrane. While this method eliminates the need for an adhesive, the quality of the metal layer is limited by the polymer substrate and the electroforming process, making independent optimization difficult and restricting the overall performance of the composite membrane.

[0004] Furthermore, the metal substrates used as supports in the aforementioned processes are mostly traditional "grid-like" structures. Their through-holes present as microscopic, discontinuous grids. This structure not only interferes with the smooth flow of fluid, but more importantly, it imposes fundamental structural limitations on the construction of functional layers with specific three-dimensional morphologies (such as groove structures) on it.

[0005] In summary, existing technologies face a dual challenge: in terms of process, it is difficult to simultaneously select high-performance substrates and bond with high-strength interfaces; structurally, traditional mesh-like substrates limit the construction of advanced three-dimensional functional structures. Therefore, there is an urgent need in this field for a novel composite membrane technology that can simultaneously solve the aforementioned process and structural bottlenecks. Utility Model Content

[0006] The main purpose of this invention is to propose a microstructured functional composite membrane, template, and filter, which aims to solve the limitations of existing composite processes and substrate structures, namely, the difficulty in simultaneously achieving the selection of high-performance substrates, high-strength interface bonding, and the construction of three-dimensional functional structures.

[0007] To achieve the above objectives, the microstructured functional composite membrane proposed in this utility model includes:

[0008] A microporous metal substrate membrane, wherein the microporous metal substrate membrane is integrally formed, and the working area of ​​the microporous metal substrate membrane is provided with a first through hole, the first through hole being a fully open structure;

[0009] A polymer functional layer is disposed on at least one region of at least one surface of the microporous metal substrate film by coating and patterning processes, and the polymer functional layer is provided with a second through hole communicating with the first through hole.

[0010] In one embodiment, the first through hole and the second through hole constitute a through channel. The second through hole includes a first extension section in the extension direction of the through channel. On the cross-section of a plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the first extension section is larger than the cross-sectional area of ​​the first through hole, so that the first extension section forms a groove structure.

[0011] In one embodiment, the first through hole and the second through hole constitute a through channel. The second through hole includes a second extension segment in the extension direction of the through channel. On the cross-section of a plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the second extension segment is smaller than the cross-sectional area of ​​the first through hole, so that the second extension segment forms a flange structure corresponding to the edge of the first through hole.

[0012] In one embodiment, the groove structure has a trapezoidal cross-section formed by a plane perpendicular to the surface of the polymer functional layer.

[0013] In one embodiment, the sidewall of the groove structure is provided with at least one stepped structure, which gradually expands in a direction away from the microporous metal substrate film.

[0014] In one embodiment, the edge of the groove opening of the groove structure is chamfered.

[0015] In one embodiment, the polymer functional layer forms a second extension segment at the edge of the second through-hole, extending toward the microporous metal substrate film, the second extension segment extending into the first through-hole and abutting against the sidewall of the first through-hole.

[0016] In one embodiment, the polymer material of the polymer functional layer of the microstructured functional composite membrane is a semi-crystalline polymer.

[0017] In one embodiment, the microporous metal substrate film has a working surface and an bonding surface disposed opposite to each other, and both the working surface and the bonding surface are provided with the polymer functional layer, wherein the hardness of the polymer functional layer disposed on the working surface is greater than the hardness of the polymer functional layer disposed on the bonding surface.

[0018] In one embodiment, at least one region of the polymer functional layer includes a substrate layer, a main body layer, and a release layer stacked sequentially. The release layer is disposed on the side of the main body layer away from the microporous metal substrate film, and the thickness of both the substrate layer and the release layer is less than the thickness of the main body layer.

[0019] In one embodiment, the microporous metal substrate film has a single-layer structure.

[0020] In one embodiment, the microporous metal substrate film includes a plurality of metal mesh units stacked along the thickness direction of the microstructure functional composite film.

[0021] In one embodiment, the first through hole is provided with a reinforcing structure and is divided into a plurality of sub-through holes.

[0022] This utility model also proposes a template and filter including the aforementioned microstructured functional composite membrane:

[0023] A template, wherein the above-mentioned microstructure functional composite membrane provides a template pattern for the template.

[0024] A filter in which the above-described microstructured functional composite membrane is used as the filter medium.

[0025] The technical solution of this invention involves depositing a polymer functional layer onto at least one region of at least one surface of a microporous metal substrate membrane using a coating and patterning process. This allows for direct interfacial bonding between the polymer functional layer and the microporous metal substrate membrane, eliminating the need for a separate adhesive layer. This avoids problems such as microstructure functional composite membrane failure and fluid contamination caused by adhesive aging, dissolution, and flow. Furthermore, the polymer functional layer and the microporous metal substrate membrane can be independently selected and optimized. A high-quality pre-fabricated microporous metal substrate membrane can be chosen to ensure basic precision, and then matched with high-performance polymer materials. This better maintains the strength of the microporous metal substrate membrane while imparting excellent flexibility to the polymer functional layer, thereby improving the precision and durability of the microstructure functional composite membrane. In addition, the microporous metal substrate membrane provided by this invention includes a fully open structure, providing an ideal structural basis for constructing functional three-dimensional structures (such as groove structures, flange structures, etc.) through patterning processes. This enables the composite membrane to perform precise three-dimensional control of fluids, significantly improving its performance in applications such as precision template patterning or high-efficiency filtration. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0027] Figure 1 A cross-sectional view of an embodiment of the microstructured functional composite membrane provided by this utility model;

[0028] Figure 2 A cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0029] Figure 3 A cross-sectional view of yet another embodiment of the microstructured functional composite membrane provided by this utility model;

[0030] Figure 4 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0031] Figure 5 for Figure 4 A top view of the microstructured functional composite membrane in the image;

[0032] Figure 6 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0033] Figure 7 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0034] Figure 8 A top view of yet another embodiment of the microstructured functional composite membrane provided by this utility model;

[0035] Figure 9 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0036] Figure 10 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0037] Figure 11 Cross-sectional view of another embodiment of the microstructured functional composite membrane provided by this utility model;

[0038] Figure 12 A cross-sectional view of an embodiment of the polymer functional layer provided by this utility model;

[0039] Figure 13 This is a cross-sectional view of an embodiment of the microporous metal substrate membrane provided by this utility model.

[0040] Explanation of icon numbers:

[0041] 100, Microporous metal substrate film; 200, Polymer functional layer; 300, Groove structure; 101, Working surface; 102, Bonding surface; 110, First through hole; 120, First metal wire; 130, Second metal wire; 140, Third metal wire; 210, Second through hole; 220, Second extension section; 230, Substrate layer; 240, Main layer; 250, Release layer; 200a, First polymer functional layer; 200b, Second polymer functional layer; 201, First grid line structure; 202, Second grid line structure; 310, Current storage structure; 311, First current storage section; 312, Second current storage section; 330, Step structure; 410, Main grid area; 420, Fine grid area.

[0042] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0044] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0045] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0046] This invention proposes a microstructured functional composite membrane.

[0047] Please see Figure 1 and Figure 9 In one embodiment of the present invention, the microstructure functional composite membrane includes a microporous metal base membrane 100 and a polymer functional layer 200. The microporous metal base membrane 100 is integrally formed, and the working area of ​​the microporous metal base membrane 100 is provided with a first through hole 110, which includes a fully open structure. The polymer functional layer 200 is disposed on at least one area of ​​at least one surface of the microporous metal base membrane 100 by coating and patterning processes, and the polymer functional layer 200 is provided with a second through hole 210 communicating with the first through hole 110.

[0048] Specifically, the microstructured functional composite membrane includes a microporous metal substrate 100 and a polymer functional layer 200. The microporous metal substrate 100 has a first through-hole 110 extending through its thickness direction, serving as a basic through-channel. The polymer functional layer 200 is formed on at least one region of at least one surface of the microporous metal substrate 100 through a coating and patterning process, and has a second through-hole 210 communicating with the first through-hole 110. The first through-hole 110 and the second through-hole 210 together constitute a complete through-channel. In the microstructured functional composite membrane proposed in this invention, the polymer functional layer 200 and the microporous metal substrate 100 are directly bonded by the interfacial bonding forces of the materials themselves (such as intermolecular forces, chemical bonds, etc.), and there are no independent adhesive layers and conductive layers in the structure. It can be formed by coating a liquid or flowable polymer precursor onto a pre-fabricated microporous metal substrate 100, and then through a patterning and curing process. The patterned polymer functional layer 200 provides the microstructured functional composite membrane with superior flexibility.

[0049] This invention's microstructured functional composite membrane abandons the traditional adhesive bonding method. The polymer functional layer 200 and the microporous metal base membrane 100 achieve physical anchoring and mechanical interlocking through direct interface bonding, without a separate adhesive layer. This fundamentally eliminates problems such as blockage of the metal mesh, uneven fluid permeation, and blurred pattern edges caused by adhesive flow during curing. Simultaneously, it avoids the failure of the microstructured functional composite membrane and fluid contamination caused by aging, swelling, or detachment of the adhesive after long-term contact with fluid solvents, significantly improving structural reliability and service life. Regarding material selection and performance optimization, this invention achieves independent control of the microporous metal base membrane 100 and the polymer functional layer 200. High-tensile, high-precision commercially available prefabricated microporous metal base membrane 100 can be used as a supporting framework to ensure overall structural strength and dimensional stability. At the same time, polymer materials with different properties can be matched according to working requirements, such as high-hardness resin to enhance the wear resistance of the working surface 101, or flexible materials to improve the fluid release performance of the bonding surface 102. Through reasonable material selection and structural design, while maintaining the high strength of the microporous metal base membrane, the microstructure functional composite membrane is endowed with excellent flexibility and impact resistance.

[0050] Taking the field of screen printing technology as an example, the microporous metal base film of this invention differs from traditional woven screen printing plates. The microporous metal base film 100 of this invention is integrally formed from a flat, ultra-strong metal sheet as raw material, and a uniform grid structure is formed on the metal sheet through physical and chemical processing methods, resulting in superior material strength. The high strength, high stability, high wear resistance, and high corrosion resistance of the microporous metal base film itself ensure the stability of the screen printing template and its printing life is longer than that of the mainstream PI screen printing plates currently on the market.

[0051] The first through-hole 110 includes a fully open structure: broadly speaking, at least one open area of ​​the first through-hole 110 is completely open with no obstructions, and its corresponding working area has no intersecting nodes; narrowly speaking, the periphery of the basic through-hole of at least one open area of ​​the first through-hole 110 is a continuous structure, unlike the discontinuous structure of a grid-type screen. The fully open structure ensures that the corresponding working area pattern has little or no obstruction from metal wires or other similar structures. When applied in screen printing technology, this reduces silver paste consumption, ensures uniform average printing height, significantly improves solar energy conversion efficiency, and extends product lifespan. This fully open structure optimizes the deposition effect of conductive paste during printing, improving the clarity and consistency of the printed pattern. Simultaneously, conventional woven screens or electroformed grid-type screens, due to their size limitations and grid division, struggle to construct functional structures, while the continuity around the through-holes of the fully open structure provides the structural basis for constructing functional structures with polymer functional layers.

[0052] In terms of manufacturing process, the polymer functional layer 200 is patterned using photolithography. Photolithography has higher resolution and edge control capabilities, which can overcome the limitations of spot size and heat-affected zone, and achieve precise forming of sub-micron linewidths and complex geometries. This ensures that the edges of the second via 210 are steep and the dimensions are consistent, thereby significantly improving the accuracy and consistency of the pattern. Of course, in other embodiments, the polymer functional layer 200 can also be patterned using laser.

[0053] The microporous metal substrate 100 can be obtained by electroforming on a specific substrate and then peeling it off. The material of the microporous metal substrate 100 can be Ni, an alloy of Ni and other materials, or other metallic materials. In this invention, the geometry of the microporous metal substrate can be flexibly designed according to specific applications and is not limited to a specific shape. In one embodiment, when applied to screen printing, the solid portion of the microporous metal substrate 100, i.e., the metal wires, can be arranged in parallel or approximately parallel configurations, while its perforated portion consists of strip-shaped through-holes formed by intervals between adjacent metal wires. In another embodiment, when applied to precision filtration, the solid portion of the microporous metal substrate 100 is a continuous metal substrate, and its perforated portion consists of an array of circular, near-circular, rectangular, or hexagonal micropores. The microporous metal substrate 100 can be made from high-precision, high-flatness nickel mesh, nickel alloy mesh, or stainless steel mesh prepared through an independent process (such as electroforming followed by peeling). Its quality is independently controllable and unaffected by the subsequent polymer functional layer 200 process. The polymer functional layer 200 is formed by a coating process (such as spraying, blade coating, spin coating, or roll coating), preferably by spraying. The material of the polymer functional layer 200 is preferably photosensitive polyimide (PSPI), but it can also be other photosensitive polymers such as photocurable polyurethane, photosensitive epoxy resin, or high-performance polymers such as PEEK and PTFE modified with photosensitive groups, and patterned by photolithography. Patterning of the photosensitive polymer can be achieved using a binary photomask, or more refined patterns can be prepared using a phase photomask, ring illumination, or multiple exposure. Alternatively, it can be a non-photosensitive polymer such as PI, PU, ​​PE, TPE, PET, PVC, PMMA, PEEK, or PTFE, and the polymer functional layer 200 can be patterned by laser or imprinting after coating. The polymer functional layer 200 is finally formed by a curing process (such as thermosetting, photocuring, or electron beam / ion beam curing). The resolution (e.g., by blending photosensitizers, photoinitiators, or quantum dots), adhesion (e.g., by introducing silane coupling agents), corrosion resistance (e.g., by adding inorganic nanoparticles (e.g., SiO2, TiO2) or fluorides), thermal stability (e.g., by introducing high-temperature resistant fillers), and elastic modulus (e.g., by selecting polymer materials with high cross-linking degree or introducing high-modulus nanofibers to improve modulus and hardness as working surface 101, and selecting polymer materials with low cross-linking degree, long-chain flexible molecular segments, or added plasticizers to reduce modulus and hardness as bonding surface 102) of polymer materials can be adjusted according to specific working requirements.

[0054] The technical solution of this utility model involves depositing a polymer functional layer 200 onto at least one surface of a microporous metal base membrane 100 using a coating and patterning process. This allows for direct interfacial bonding between the polymer functional layer 200 and the microporous metal base membrane 100, eliminating the need for a separate adhesive layer. This prevents problems such as microstructure functional composite membrane failure and fluid (e.g., ink, filtrate) contamination caused by adhesive aging, dissolution, or flow. Furthermore, the polymer functional layer 200 and the microporous metal base membrane 100 can be independently selected and optimized. A high-quality pre-fabricated microporous metal base membrane 100 can be chosen to ensure basic precision, and then matched with high-performance polymer materials. This better maintains the strength of the microporous metal base membrane 100 while also ensuring the excellent flexibility of the polymer functional layer 200, thereby improving the precision and durability of the microstructure functional composite membrane.

[0055] The microstructure functional composite membrane of this invention features a flexible design and strong functional expandability. By adjusting the single-sided or double-sided arrangement of the polymer functional layer 200, the relationship between the cross-sectional areas of the second through-hole 210 and the first through-hole 110, the difference in material hardness, and the introduction of multi-level steps, irregular contours, and other structures, multiple functions can be integrated.

[0056] By differentiating the cross-sectional area and three-dimensional morphology of the second through-hole 210 and the first through-hole 110, the composite membrane can exhibit specific geometric configurations in different working areas. These geometric configurations, such as groove structures or flanged through-holes, endow the composite membrane with customizable functional response characteristics. They can actively interact with material flows (including macroscopic fluids or microscopic particle beams) passing through or acting on them to adapt to the needs of different technical fields: in printing applications, they can be used to control the storage, flow, and release behavior of inks; in filtration applications, they can be used to achieve fluid guidance and anti-fouling, coalescence separation, or precision sieving; in micro / nano manufacturing template applications, they can be used to collimate material beams or define the boundaries of electrochemical reactions. This ability to combine basic geometric configurations with specific application functions greatly enhances the overall performance and application range of the microstructured functional composite membrane.

[0057] In one implementation, please refer to Figures 1 to 7 The first through hole 110 and the second through hole 210 form a through channel. The second through hole 210 includes a first extension section 220 in the extension direction of the through channel. On the cross-section of the plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the first extension section 220 is larger than the cross-sectional area of ​​the first through hole 110, so that the first extension section 220 forms a groove structure 300.

[0058] It should be understood that the technical feature that the cross-sectional area of ​​the second through hole 210 is greater than that of the first through hole 110 can be achieved in various ways depending on the specific geometry of the first through hole 110 and the second through hole 210. For example, when the second through hole 210 is rectangular or strip-shaped, this feature can be reflected in the fact that the width of the second through hole 210 is greater than the width of the first through hole 110; when the second through hole 210 is circular or elliptical, this feature can be reflected in the fact that the diameter or major and minor axis dimensions of the second through hole 210 are greater than the corresponding dimensions of the first through hole 110. The term "cross-sectional area" is used in this application to encompass all differences in geometric configuration that can form a receiving space, and is not limited to a specific shape.

[0059] By making the cross-sectional area of ​​the first extension 220 larger than the cross-sectional area of ​​the first through hole 110, the first extension 220 forms a groove structure 300. The first extension 220 may extend from one end of the second through hole 210 to the opposite end; it may also be located at the end of the second through hole 210 away from the microporous metal substrate 100; or it may be located at the end of the second through hole 210 close to the microporous metal substrate 100. When the first extension 220 is located at the end of the second through hole 210 close to the microporous metal substrate 100, the inner peripheral wall of the first extension 220 and the outer surface of the microporous metal substrate 100 together define the groove structure 300.

[0060] In printing applications, the formation of the groove structure 300 increases the local fluid carrying space, improves fluid filling and release uniformity, reduces insufficient fluid supply or clogging, and enhances the precision and durability of the microstructured functional composite film. Specifically, during the fluid-pushing process by the squeegee, the groove structure 300 can accommodate more fluid, avoiding filling gaps or line breaks caused by insufficient instantaneous fluid supply, which is especially suitable for printing high-viscosity pastes (such as photovoltaic silver paste, conductive adhesives, etc.). The groove structure 300 also improves the uniformity and stability of fluid release. It can act as a buffer chamber, balancing fluid pressure fluctuations, reducing fluid unevenness caused by mesh edge effects, and improving the edge clarity and linewidth consistency of printed graphics. The groove structure 300 also enhances the anti-clogging ability of the microstructured functional composite film. Since the fluid mainly accumulates in the larger second through-hole 210 in the upper layer, the smaller first through-hole 110 area of ​​the microporous metal substrate film 100 is less likely to be completely clogged by particle deposition, facilitating cleaning and reuse.

[0061] In one embodiment, the microporous metal substrate 100 has a first pattern. The microporous metal substrate 100 includes first metal wires 120 extending along a first direction. The width of the first through-holes 110 formed between adjacent first metal wires 120 is 10 μm, and the thickness of the first metal wires 120 is 10 μm. A layer of photosensitive polyimide (PSPI) solution is coated on the working surface 101 of the microporous metal substrate 100 by spraying. The PSPI is exposed, developed, and cured using a mask to obtain a PSPI layer with a thickness of 10 μm. The PSPI layer forms a polymer functional layer 200 with a second pattern on the working surface 101 of the microporous metal substrate 100. The polymer functional layer 200 includes only gate line structures extending along the first direction, and the width of the second through-holes 210 formed between adjacent gate line structures is 100 μm.

[0062] In one implementation, please refer to Figure 9 and Figure 10 The first through hole 110 and the second through hole 210 form a through channel. The second through hole 210 includes a second extension 220 in the extension direction of the through channel. On the cross-section of the plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the second extension 220 is smaller than the cross-sectional area of ​​the first through hole 110, so that the second extension 220 forms a flange structure corresponding to the edge of the first through hole 110.

[0063] It should be understood that the cross-sectional area of ​​the second through hole 210 is smaller than that of the first through hole 110. This technical feature can also be achieved in various ways depending on the specific geometry of the first through hole 110 and the second through hole 210. Further details will not be elaborated here.

[0064] By making the cross-sectional area of ​​the second through hole 210 smaller than that of the first through hole 110, the second extension 220 forms a flange structure corresponding to the edge of the first through hole 110. The second extension 220 may extend from one end of the second through hole 210 to the opposite end; it may also be located at the end of the second through hole 210 away from the microporous metal substrate 100; or it may be located at the end of the second through hole 210 close to the microporous metal substrate 100.

[0065] When the polymer functional layer 200 covers the microporous metal substrate film 100, its material extends to the edge region of the first through-hole 110 but does not completely cover the first through-hole 110, thereby forming a partially covered structure around the periphery of the first through-hole 110. This flange structure allows the polymer functional layer 200 to form a flange structure at the edge of the first through-hole 110 that extends toward the interior of the first through-hole 110 or laterally along the surface of the polymer functional layer 200, so as to provide physical protection for the weak corners of the microporous metal substrate film 100, reduce the wear of the scraper on the edge of the first through-hole 110, and make the fluid release smoother.

[0066] Understandably, the edge of the first through-hole 110 of the microporous metal substrate film 100 is a stress concentration area, which is prone to fatigue damage under long-term doctor blade action. Locally coating it with a flange structure formed by the polymer functional layer 200 can effectively disperse local stress, inhibit crack propagation, and significantly extend the service life of the microstructured functional composite film. In traditional structures, fluid easily seeps into the adhesive layer or interface gaps along the metal wire edges, causing contamination or drying blockage. In this embodiment, the polymer functional layer 200 directly coats the edge of the first through-hole 110, forming a protective barrier to prevent fluid intrusion, keep the through-hole clean, and reduce cleaning difficulty. Furthermore, the flange structure in this embodiment can effectively constrain the fluid flow path, making it more concentrated and inhibiting lateral diffusion or edge extension of the fluid at the edge of the first through-hole 110, thereby reducing graphic distortion during printing and helping to improve the resolution of printed graphics and the sharpness of line edges.

[0067] In one embodiment, the second through hole 210 includes a first extension 220 and a second extension 220 in the extension direction of the through hole. The second extension 220 may be located at one end of the first extension 220 away from the microporous metal substrate 100, or at the other end of the first extension 220 close to the microporous metal substrate 100.

[0068] In other embodiments, the opening areas of the first through hole 110 and the second through hole 210 are the same, that is, the inner walls of the first through hole 110 and the second through hole 210 extend along the extension direction of the through hole and are smoothly connected.

[0069] In one embodiment, the sidewalls of the second through-hole 210 of the polymer functional layer 200 may extend in a direction perpendicular to the surface of the polymer functional layer 200, or may be formed into a tilted, or complex or irregularly shaped structure with microgrooves using techniques such as grayscale photolithography or tilted exposure, to improve the wear resistance and service life of the microstructured functional composite film. See, for example, [link to relevant documentation]. Figure 4 and Figure 5 Regular patterns of raised or recessed areas are set on the surface of the polymer functional layer 200; irregular structures can also be set as fluid guiding channels, such as straight grooves perpendicular to the printing direction on the surface of the polymer functional layer 200, so as to actively control the flow and spreading shape of the paste during the printing process and achieve more uniform printing or specific line contours.

[0070] In one implementation, please refer to Figure 2 The groove structure 300 has a trapezoidal cross-section formed by a plane perpendicular to the surface of the polymer functional layer 200.

[0071] When the polymer functional layer 200 is formed on the surface of the microporous metal substrate film 100 through patterning processes such as photolithography or laser processing, the sidewalls of the second through-hole 210 can be tilted by precisely controlling the exposure dose, development time, or etching parameters. This results in a trapezoidal cross-section groove structure 300 that is narrower at the top and wider at the bottom, with tilted sidewalls, after bonding with the microporous metal substrate film 100. Its upper base corresponds to the smaller opening of the second through-hole 210, but is still larger than the opening of the first through-hole 110; its lower base is larger than its upper base, and the two inclined sides are formed by the inner peripheral walls of the polymer functional layer 200. Alternatively, a trapezoidal cross-section groove structure 300 that is wider at the top and narrower at the bottom can be formed, with its upper base corresponding to the larger opening of the second through-hole 210, its lower base aligned with or slightly larger than the first through-hole 110, and the two inclined sides formed by the inner peripheral walls of the polymer functional layer 200.

[0072] The sidewalls of the groove structure 300 can be designed to be inclined, resulting in a trapezoidal cross-section. This design offers significant performance advantages for various applications. First, the inclined sidewalls form a funnel-shaped, gradually expanding / contracting inlet. Compared to a steep right-angle structure, this smooth transition significantly reduces flow resistance when fluid enters and exits the groove, suppressing eddies and flow separation caused by abrupt changes in the channel cross-section. This not only improves the efficiency of material filling or passage but also helps reduce residue in corner areas, enhancing cleanliness and consistency for reuse. Simultaneously, the smooth transition also helps eliminate air bubbles entrained in the fluid, preventing cavitation and ensuring the uniformity and integrity of the material within the channel.

[0073] The specific advantages of this trapezoidal structure are demonstrated in different applications as follows:

[0074] When used as a printing template, the trapezoidal groove structure 300, which is wider at the top and narrower at the bottom, facilitates smooth ink filling driven by the squeegee, maintaining a stable ink supply, especially under high-speed printing conditions. Simultaneously, its downward-narrowing structure guides and converges the ink, allowing the ink flow to pass more concentratedly through the micropores 110 of the underlying base film, helping to reduce edge diffusion and improve the resolution and edge sharpness of the printed image.

[0075] When used as a core component of a filter, the trapezoidal groove structure with a wider top and narrower bottom on the inlet side helps to reduce the inlet flow velocity and evenly distribute the incoming flow, thereby reducing the direct impact on the surface of the filter media and delaying membrane fouling. Conversely, the trapezoidal groove structure with a narrower top and wider bottom on the outlet side (i.e., an inverted trapezoid) reduces outflow resistance, minimizes energy loss due to the outlet effect, and increases the overall filtration flux.

[0076] In one implementation, please refer to Figure 3 and Figure 4The sidewall of the groove structure 300 is provided with at least one step structure 330, and the step structure 330 gradually expands in the direction away from the microporous metal substrate 100.

[0077] When the polymer functional layer 200 is formed on the surface of the microporous metal substrate film 100 through multi-step photolithography, grayscale exposure, or layer coating processes, the sidewalls of the second via 210 can exhibit one or more step-like abrupt changes by controlling the exposure area and depth during the patterning process. Each step is further away from the microporous metal substrate film 100 and has a larger lateral dimension than the next step, thus forming a stepped groove structure that expands upwards. In the field of screen printing technology, the stepped structure 330 design of the groove structure 300 increases the fluid carrying capacity. Compared with a single conical or cylindrical via, the multi-level stepped structure 330 provides a larger internal volume at the same height, which can effectively improve the local fluid storage capacity without increasing the total thickness of the microstructure functional composite film. It is particularly suitable for printing applications that require high paste deposition thickness, such as solar cell electrodes and thick-film ceramic circuits. Secondly, the stepped structure 330 also improves the stability and controllability of fluid release. Each step can serve as a temporary buffer platform for fluid flow, slowing down fluid velocity fluctuations and preventing splashing or line breakage caused by sudden changes in doctor blade pressure. At the same time, the progressively narrowing structure creates a progressively focusing effect during the downward flow, which helps maintain the consistency of the outflow direction and improves the dimensional accuracy and edge clarity of the printed graphics.

[0078] Furthermore, the stepped structure 330 can be realized using existing microfabrication techniques, such as multi-layer photolithography, grayscale mask exposure, or layer-by-layer deposition-etching processes, without the need for additional complex equipment, and has good process compatibility and scalability. The number of steps, the width and height of each step can be flexibly designed according to specific printing requirements to achieve functions such as fluid storage, buffering, flow guidance, and multi-stage depth filtration.

[0079] In one embodiment, a layer of PSPI solution modified with a silane coupling agent is sprayed onto one surface of the microporous metal substrate film 100, with a thickness controlled at 2 μm, and then pre-baked and soft-baked. The first polymer functional layer 200 is patterned, and after curing, the width of the second through-hole 210 of the first polymer functional layer 200 is greater than the width of the first through-hole 110 of the microporous metal substrate film 100, and the width of the second through-hole 210 of the first polymer functional layer 200 is 50 μm.

[0080] A high-hardness PSPI solution containing nano-SiO2 particles (10-50 nm in diameter, 2-3 wt%) is sprayed onto the substrate, with a thickness controlled at 10 μm, and then pre-baked again. The second polymer functional layer 200 is patterned, and after curing, a composite microstructure functional film is obtained. The width of the second through-hole 210 in the second polymer functional layer 200 is greater than the width of the second through-hole 210 in the first polymer functional layer 200, and the width of the second through-hole 210 in the second polymer functional layer 200 is 200 μm. The surface of the second polymer functional layer 200 has wear-resistant areas and microgroove structures 300.

[0081] In one implementation, please refer to Figure 5 and Figure 6 The groove of the groove structure 300 has a chamfered edge.

[0082] The groove structure 300 has a chamfered edge, meaning that the opening edge of the second through hole 210 on the polymer functional layer 200 has a chamfered structure with an inclined or rounded transition. See also... Figure 5 The chamfer can be a bevel with preset angles such as 45°, 30°, or 60°; please refer to [link / reference]. Figure 6 The chamfer can also be a rounded corner with a circular transition, located at the junction area of ​​the upper surface of the groove structure 300 that contacts the outside world, and at the inlet edge facing the scraper feed side.

[0083] In the field of screen printing technology, the chamfered edges of the groove structure 300 facilitate smooth fluid introduction and filling. The smooth transition inlet formed by the chamfer effectively guides the fluid pushed by the squeegee into the groove structure 300 quickly and evenly, reducing flow resistance and eddy currents, avoiding fluid separation or air resistance problems caused by right-angled edges, and improving fluid supply efficiency and initial filling speed. Secondly, it can also reduce the risk of squeegee wear and damage. During the printing process, the squeegee frequently contacts the surface of the microstructured functional composite film. If the groove edge is a sharp right angle, it is easy to cause scratches on the squeegee blade or cracking of the polymer functional layer 200 edge. The chamfered structure can buffer the mechanical impact between the squeegee and the screen, reduce local stress concentration, and extend the service life of the squeegee and the microstructured functional composite film. In addition, it can also help prevent fluid from snagging and residue. The chamfer makes it easier for the fluid to slide into the groove along the inclined surface, avoiding the formation of beads or stringing at the groove edge, reducing fluid accumulation in non-working areas, and improving cleanliness and printing consistency.

[0084] In one implementation, please refer to Figure 8The microstructured functional composite membrane includes at least two working regions. The polymer functional layer 200 and / or the microporous metal substrate membrane 100 have different geometric configurations within these regions, enabling them to possess different functional properties. For example, the functional properties could be fluid permeability characteristics, including fluid storage capacity and fluid flux. In precision filtration applications, for instance, a coarse filtration zone with large pores is used for rapid passage of the main fluid, while a fine filtration zone with micropores and adsorption functional layers is used to capture specific impurities. In screen printing technology, the at least two working regions can be a main grid region, a fine grid region, and a connecting region, and the number of these regions can be one or more.

[0085] By independently designing the geometric configurations of the polymer functional layer 200 and the microporous metal substrate membrane 100 in different working areas, the fluid flow characteristics can be finely controlled by partitioning.

[0086] In one implementation, please refer to Figure 8 Within a region of the microstructured functional composite membrane, there are a main gate region 410 and two fine gate regions 420 distributed along its length. The main gate region 410 is located between the two fine gate regions 420, and the effective current-passing region of the main gate region 410 is wider. The width of the second through-hole 210 of the polymer functional layer 200 of the main gate region 410 is gradually reduced along the length of the microstructured functional composite membrane, i.e., its width gradually decreases from the middle to both ends. The main gate region 410 does not have a current storage structure, that is, the polymer functional layer 200 and the microporous metal substrate membrane 100 do not form a groove structure 300. Of course, when the microporous metal substrate membrane 100 of the main gate region 410 is a patternless metal sheet, it can also be designed to have a current storage structure. The fine grid region 420 is provided with a current storage structure 310, which includes a first current storage segment 311 and a second current storage segment 312 along the length of the microstructure functional composite membrane. The widths of the first current storage segment 311 and the second current storage segment 312 are different, resulting in a gradient design for the width of the current storage structure 310. Specifically, the width of the first through-hole 110 of the microporous metal substrate membrane 100 remains constant, while the width of the second through-hole 210 of the polymer functional layer 200 is larger in one region, corresponding to the formation of the first current storage segment 311; the width of the current storage space of the polymer functional layer 200 is smaller in another region, corresponding to the formation of the second current storage segment 312.

[0087] The above is merely an exemplary combination, and those skilled in the art can arbitrarily combine the designs of different regions according to actual needs. For example, it can also be designed such that the width of the second through-hole 210 of the polymer functional layer 200 remains unchanged, while the width of the first through-hole 110 of the microporous metal substrate film 100 varies; or both can vary simultaneously.

[0088] In one implementation, please refer to Figure 8The main grid area is based on a metal mesh with a fully open structure and is combined with a conventional wire mesh structure to improve the structural stability of the microstructure functional composite membrane.

[0089] In one implementation, please refer to Figure 8 The main grid region 410 is located in the center of the microstructure functional composite film and is used for printing the main current collection lines (main grid lines) of the electrodes, which need to carry a large current. The main grid lines are usually thick (about 1-2 mm wide) and made of highly conductive materials (such as silver), which can quickly collect the current collected by the fine grid and conduct it to the external circuit, reducing losses during current transmission. The fine grid regions 420 are distributed on both sides of the main grid region 410 and are used to print fine bus lines (fine grid lines), which are responsible for collecting photogenerated carriers and guiding them into the main grid region 410. The fine grid lines are very thin (about 50-100 μm wide), numerous and uniformly distributed on the surface of the cell, which can contact as many photogenerated carriers (electrons and holes) as possible, and efficiently collect the current generated inside the cell.

[0090] The first storage section 311 is wider, serving as the main fluid storage area and providing ample fluid capacity. The second storage section 312 is narrower, located at the end of the first storage section 311 near the main gate region 410, serving as a connection and guide, and directly communicating with the through-channel of the main gate region 410. This achieves a dynamic fluid supply balance between the main gate region 410 and the fine gate region 420, preventing fluid loss in the main gate region 410 due to its distance from the main fluid supply path. Fluid enters the through-channel of the main gate region 410 from the wide first storage section 311 through the narrower second storage section 312, and is finally printed into fine grid lines through the array of first through-holes 110 of the microporous metal substrate film 100.

[0091] In one implementation, please refer to Figure 9 The polymer functional layer 200 forms a second extension 220 at the edge of the second through hole 210, extending toward the microporous metal substrate film 100. The second extension 220 extends into the first through hole 110 and abuts against the sidewall of the first through hole 110.

[0092] The polymer functional layer 200 forms a second extension segment 220 extending toward the microporous metal substrate film 100 at the edge of the second through-hole 210. The second extension segment 220 extends from the opening edge of the second through-hole 210 toward the microporous metal substrate film 100 and extends into the interior of the first through-hole 110 of the microporous metal substrate film 100, abutting against the sidewall of the first through-hole 110, forming a structure in which the polymer material completely or partially covers the microporous metal substrate film 100. The second extension segment 220 is a downward protruding structure formed by controlling the material flow, exposure depth or etching contour during the forming process of the polymer functional layer 200 through coating and patterning processes. Its axial extension direction is perpendicular to or slightly inclined to the surface of the microstructure functional composite film, and it can penetrate into the first through-hole 110 to a certain depth and achieve physical contact with the pore wall of the microporous metal substrate film 100, forming a smooth transition and protection for the edge of the first through-hole 110, buffering the direct impact of the scraper on the edge of the first through-hole 110, reducing damage such as burrs and deformation, and extending the service life of the microstructure functional composite film. The contact between the extension section 220 and the sidewall of the first through-hole 110 creates a mechanical interlocking effect between the polymer functional layer 200 and the microporous metal base film 100. This effectively prevents the polymer functional layer 200 from peeling, wrinkling, or slipping due to repeated pressure from the squeegee or fluid impact during printing, thus improving the stability and durability of the overall structure. As part of the through-hole, the second extension section 220 guides and focuses the fluid entering the first through-hole 110, reducing eddies and edge diffusion, making the fluid more concentrated and stable, and contributing to improved edge clarity and linewidth consistency of the printed pattern. The tight contact between the second extension section 220 and the sidewall effectively seals the potential gap between the polymer functional layer 200 and the microporous metal base film 100, preventing fluid from laterally penetrating into non-patterned areas along the interface, avoiding incomplete printing or contamination, while also reducing cleaning difficulty and residue risk.

[0093] In one implementation, please refer to Figure 10 The microporous metal substrate 100 includes a first metal wire 120 extending along a first direction. A first polymer functional layer 200a is provided on one surface of the microporous metal substrate 100. The first polymer functional layer 200a includes a first gate structure 201 extending along the first direction and a second gate structure 202 extending along a second direction. The outer surfaces of the first polymer functional layer 200a and the microporous metal substrate 100 are also covered with a second polymer functional layer 200b. The second polymer functional layer 200b also has a second through-hole 210 corresponding to the second through-hole 210 on the first polymer functional layer 200a and the first through-hole 110 on the microporous metal substrate 100. An extension segment 220 extending toward the microporous metal substrate 100 is formed at the edge of the second through-hole 210 of the second polymer functional layer 200b. The extension segment 220 extends into the first through-hole 110 and abuts against the sidewall of the first through-hole 110.

[0094] In one embodiment, the microstructure functional composite membrane further includes a protective layer, which is disposed in at least one region on one side of the microporous metal substrate membrane 100 or the polymer functional layer 200 away from each other, and the protective layer is provided with a third through hole communicating with the second through hole 210.

[0095] A protective layer is applied to the side of the microporous metal substrate 100 and / or the polymer functional layer 200 away from each other, i.e., on the outermost surface of the microstructured functional composite membrane, to improve the wear resistance, chemical corrosion resistance, and surface properties of the microstructured functional composite membrane. A third through-hole is provided on the protective layer, and the third through-hole is at least partially aligned axially with the second through-hole 210 and the first through-hole 110 of the microporous metal substrate 100 to ensure the continuity and unobstructed flow of the through-channels.

[0096] Specifically, the protective layer, as the outermost functional film, can be made of high-hardness, low-friction materials, such as diamond-like carbon (DLC), titanium nitride (TiN), graphene, or ceramic coatings formed by physical vapor deposition (PVD) or chemical vapor deposition (CVD), or it can be a solvent-resistant polymer film. The protective layer can also be configured as a protective film with high hardness, wear resistance, low friction, self-cleaning, and anti-adhesion properties. After the protective layer covers the outer surface of the microporous metal substrate film 100 or the polymer functional layer 200, a third through-hole is formed through photolithography, laser aperture opening, or mask deposition processes. The lateral dimension of this third through-hole is not less than that of the second through-hole 210, ensuring that there is no additional shrinkage in the entire through-channel from the squeegee side to the bonding surface 102, preventing fluid accumulation, insufficient filling, or uneven fluid supply due to excessively small outer through-holes, and maintaining high printing consistency. The protective layer directly withstands the friction of the scraper and the scouring of the fluid. Its high hardness and low friction characteristics significantly reduce the surface wear rate and prevent the polymer functional layer 200 or the edge of the metal mesh from developing burrs, peeling or clogging due to long-term friction, thus greatly extending the service life of the microstructure functional composite membrane.

[0097] In one embodiment, the polymer material of the polymer functional layer of the microstructured functional composite membrane is a semi-crystalline polymer.

[0098] Semi-crystalline polymers, such as certain grades of polyimide (PI), polyetheretherketone (PEEK), and polyphenylene sulfide (PPS)—high-performance engineering plastics—possess both highly ordered crystalline regions and disordered amorphous regions within their molecular chains. Their crystallinity can be controlled through specific heat treatment processes (such as high-temperature annealing), thereby achieving performance advantages that amorphous polymers cannot match. Since these semi-crystalline polymers typically lack photosensitive properties, their patterning can be achieved through laser ablation, reactive ion etching (RIE), or imprinting.

[0099] Using a semi-crystalline polymer as the polymer functional layer can improve chemical corrosion resistance, abrasion resistance, and heat resistance to a certain extent. Specifically, the semi-crystalline structure can effectively resist the penetration and erosion of strong solvents. Therefore, this composite membrane can be used stably for long-term filtration of corrosive fluids, or maintain stable performance in harsh environments such as printing with corrosive inks and high temperature and high humidity. Its regular crystalline structure gives the functional layer higher hardness and deformation resistance. This allows it to better resist doctor blade wear when used as a printing stencil working surface; maintain the long-term precision of the microporous structure when used as a support structure for high-pressure filters; or withstand higher mechanical stress when used as a micro / nano manufacturing stencil. In addition, the semi-crystalline polymer has a higher heat distortion temperature, making this composite membrane suitable for high-temperature process environments. For example, it can be used for printing with high-temperature curing inks, or as a filter for hot fluids / hot gases and process stencils requiring high-temperature treatment.

[0100] In one implementation, please refer to Figure 11 The microporous metal substrate film 100 has a working surface 101 and a bonding surface 102 disposed opposite to each other. Both the working surface 101 and the bonding surface 102 are provided with polymer functional layers 200. The hardness of the polymer functional layer 200 disposed on the working surface 101 is greater than that of the polymer functional layer 200 disposed on the bonding surface 102. The working surface refers to the side surface that mainly bears external active forces during use, and the bonding surface refers to the side surface that mainly contacts the downstream substrate or support structure or serves as the outlet for materials during use.

[0101] For example, in the field of screen printing technology, a microporous metal substrate film 100 has a working surface 101 facing the squeegee and an bonding surface 102 facing the substrate, which are arranged opposite to each other. Both the working surface 101 and the bonding surface 102 are provided with polymer functional layers 200, and the hardness of the polymer functional layer 200 provided on the working surface 101 is greater than the hardness of the polymer functional layer 200 provided on the bonding surface 102, forming a double-sided heterogeneous, functionally graded composite structure design.

[0102] The polymer functional layer 200 of the working surface 101 directly bears the reciprocating friction and pressure of the scraper. Therefore, a high-hardness material (such as epoxy acrylate resin with high cross-linking density, composite resin containing inorganic fillers, or diamond-like carbon coating modified layer) is used to improve wear resistance and scratch resistance, and prevent surface damage, fuzzing, or through-hole deformation caused by long-term friction. The polymer functional layer 200 of the bonding surface 102 faces the printing substrate (such as silicon wafer, glass, or flexible film). It is necessary to ensure smooth fluid release and gentle contact to avoid damage to sensitive surfaces. Therefore, a flexible material with low hardness and low elastic modulus (such as polyurethane acrylate resin, soft siloxane modified polymer, etc.) is used to achieve good adhesion and de-flow performance.

[0103] By enhancing abrasion resistance on the squeegee side and improving flexibility on the printing side, the performance requirements of the microstructured functional composite film under both dynamic friction and static release conditions are met. The high-hardness working surface 101 polymer functional layer 200 effectively resists mechanical wear, reducing fluid blockage or pattern distortion caused by surface scratches; simultaneously, the low-hardness layer of the bonding surface 102 reduces the risk of scratching expensive substrates (such as photovoltaic cells), lowering the scrap rate. The flexible polymer functional layer 200 of the bonding surface 102 has better compliance when in contact with the substrate, enabling uniform fluid release, reducing splattering, broken lines, or edge burrs, and improving the resolution and edge clarity of fine line printing.

[0104] In addition, both polymer functional layers 200 can be precisely aligned and independently controlled through step-by-step coating and patterning processes (such as first coating the bonding surface 102 with photolithography, and then coating the working surface 101 with molding), resulting in good process compatibility.

[0105] In one embodiment, the polymer functional layer 200 disposed on the working surface 101 is made of a material with high hardness, high modulus, and low coefficient of friction (e.g., PSPI reinforced by blending nano-silica or diamond powder, or thermosetting PI with high crosslinking density) to resist wear from the squeegee. The polymer functional layer 200 disposed on the bonding surface 102 is made of a material with low hardness and high elasticity (e.g., flexible PSPI, photocurable polyurethane, or elastomer) to serve as a buffer layer, which can better adhere to the substrate (such as a fragile silicon wafer) during printing and reduce damage to the substrate.

[0106] In one embodiment, a hard PSPI mixed with 1% (by weight) nano-silica is sprayed onto the working surface 101 of the microporous metal substrate 100. A polymer functional layer 200 patterned on its surface is formed by photolithography, thus forming a hard layer. The second through-hole 210 of the hard layer has a width of 100 μm and a thickness of 10 μm. A flexible photocurable polyurethane is sprayed onto the bonding surface 102 of the microporous metal substrate 100. A polymer functional layer 200 patterned on its surface is formed by photolithography, thus forming a buffer layer. The second through-hole 210 of the buffer layer has a width of 15 μm and a thickness of 10 μm.

[0107] In one implementation, please refer to Figure 12 At least one region of the polymer functional layer 200 includes a substrate layer 230, a main layer 240 and a release layer 250 stacked sequentially. The release layer 250 is located on the side of the main layer 240 away from the microporous metal substrate film 100. The thickness of the substrate layer 230 and the release layer 250 is less than the thickness of the main layer 240.

[0108] The polymer functional layer 200 is composed of multiple layers of materials with different properties stacked together. At least one region of the polymer functional layer 200 includes a substrate layer 230, a main body layer 240, and a release layer 250 stacked sequentially. The substrate layer 230 is directly disposed on the surface of the microporous metal substrate 100, serving as an interfacial bonding layer between the polymer functional layer 200 and the microporous metal substrate 100. The substrate layer 230 is made of a material with excellent adhesion (such as a modified resin containing silane coupling agents or epoxy functional groups) to enhance the interfacial bonding force between the polymer functional layer 200 and the microporous metal substrate 100, preventing delamination or peeling caused by stress concentration during the printing process. The main body layer 240 is disposed on the substrate layer 230, forming the main structure of the polymer functional layer 200, providing the main mechanical support and the foundation for the formation of the second through-hole 210. The main body layer 240 uses a high-sensitivity, high-resolution photoresist material (such as acrylic resin), and through photolithography, it precisely forms complex graphic structures such as the second through-hole 210 and the groove structure 300. Its relatively thick design can ensure sufficient fluid capacity and structural rigidity. The release layer 250 is disposed on the side of the main body layer 240 away from the microporous metal substrate film 100, that is, the outermost surface facing the squeegee or the substrate, and plays a role in reducing surface adhesion, promoting fluid release, or enhancing wear resistance. The release layer 250 uses a low surface energy material (such as fluorinated acrylic resin, siloxane coating, or graphene-containing oleophobic film) to reduce fluid adhesion and improve desiccation smoothness, while also having wear resistance, anti-fouling, and anti-aging properties. In terms of thickness design, the thickness of the substrate layer 230 and the release layer 250 is less than that of the main layer 240, ensuring that the main layer 240 occupies a dominant position in the overall structure and maintains sufficient structural strength and stability of the dimensions of the second through hole 210.

[0109] In one embodiment, the substrate layer 230 is a thin, high-adhesion PSPI, the body layer 240 is a thicker PSPI, and the release layer 250 is an ultra-thin, low-surface-energy fluoropolymer.

[0110] In one implementation, please refer to Figure 1 The microporous metal-based film 100 has a single-layer structure.

[0111] The microporous metal substrate membrane 100 is a single-layer structure, consisting of a single layer of metal material with regularly arranged through-holes, serving as the supporting framework for the microstructured functional composite membrane. This microporous metal substrate membrane 100 has a first through-hole 110 extending through its thickness direction, forming a basic channel and providing a structural support platform for the upper polymer functional layer 200. The single-layer structure can be made using high-quality metal mesh prepared using existing mature processes, such as stainless steel mesh or nickel electroformed mesh. The mesh shape can be square, hexagonal, polygonal, or a combination thereof, with uniform wire diameter, stable tension, and high dimensional accuracy. Alternatively, the single-layer structure can be made by arranging multiple first metal wires 120 extending along a first direction at intervals to form the first through-holes 110.

[0112] In one implementation, please refer to Figure 13 The microporous metal substrate membrane 100 includes a plurality of metal mesh units stacked along the thickness direction of the microstructure functional composite membrane.

[0113] The microporous metal-based film 100 comprises multiple metal mesh units stacked along the thickness direction of the microstructured functional composite film, i.e., a multi-layer metal mesh structure. Each metal mesh unit is sequentially stacked and fixedly connected along the thickness direction of the printing screen, collectively forming a composite support framework. Each metal mesh unit can independently possess specific mesh size, wire diameter, or material properties, achieving synergistic optimization of structural performance through rational combination. The metal mesh unit materials include stainless steel, nickel, copper, or their alloys. The layers can be fixed and connected through electroforming and welding, ensuring the mechanical stability and electrical continuity of the overall structure. The number of stacked layers can be designed to be two or more according to actual needs; for example, the bottom layer focuses on strength and tension retention, while the upper layer focuses on aperture accuracy and surface flatness. Different layers of metal mesh units can have differentiated parameters. For example, a layer near the working surface 101 uses a fine-wire, high-density mesh to improve surface flatness; a layer near the bonding surface 102 uses a large-aperture mesh to facilitate fluid release; and the middle layer provides high-strength support. Through interlayer cooperation, a balance between strength, permeability, and accuracy is achieved. Multi-layer metal mesh units work together to bear external active forces, effectively dispersing stress concentration, reducing tensile deformation, mesh distortion or breakage caused by excessive local stress in single-layer mesh, and improving the service life of microstructure functional composite membranes.

[0114] In one implementation, please refer to Figure 13 The metal mesh unit is provided in two parts. One metal mesh unit includes a first metal wire 120 extending along a first direction, and the other metal mesh unit includes a second metal wire 130 extending along the first direction and a third metal wire 140 extending along a second direction. The first direction and the second direction intersect.

[0115] The microporous metal-based film 100 includes two stacked metal mesh units arranged along the thickness direction of the microstructure functional composite film. One metal mesh unit includes first metal wires 120 extending in a first direction, with adjacent first metal wires 120 spaced apart to form strip-shaped first through-holes 110, constituting a unidirectional support layer. The other metal mesh unit includes second metal wires 130 extending in the first direction and third metal wires 140 extending in a second direction, with the second metal wires 130 and third metal wires 140 intersecting to form a two-dimensional mesh structure, constituting a composite support layer. The dual-layer metal mesh unit can be achieved through staged electroforming combined with masking technology, avoiding misalignment between the upper and lower layers. For example, the upper metal mesh unit has a unidirectional metal wire structure, mainly used to guide fluid flow in a specific direction or reduce scraper friction resistance; the lower metal mesh unit has an orthogonal cross structure, providing all-around mechanical support and structural stability, and can provide a stable adhesion surface for the upper unidirectional mesh, preventing deformation under tension.

[0116] In another embodiment, the metal mesh unit is not limited to two layers, and the metal wires of the metal mesh unit are not limited to the first direction and the second direction. Parameters such as the width of the metal wires, the width of the first through-hole 110, the thickness of the metal wires, and the angle formed by the intersection of the metal wires can be independently preset and optimized according to specific printing requirements, thereby ensuring quality and consistency.

[0117] In one embodiment, the first through hole 110 is provided with a reinforcing structure, and the first through hole 110 is divided into a plurality of sub-through holes.

[0118] In one embodiment, a reinforcing structure is provided inside the first through-hole 110. The reinforcing structure is integrally connected to the inner wall of the first through-hole 110 and extends along the plane of the first through-hole 110, dividing the originally continuous opening area into multiple independent or connected sub-through-holes. The reinforcing structure can be in the form of strips, grids, crosses, or radial shapes, etc., and its dimensions are optimized to effectively enhance the local stiffness of the microporous metal substrate 100, preventing deformation or vibration due to external active forces or tension during the printing process, while not significantly hindering the normal passage of fluids (such as ink or filtrate). The microporous metal substrate 100 maintains high permeability while possessing superior mechanical strength and dynamic stability. In addition, the distribution of multiple sub-through-holes helps to regulate the fluid flow path, reduce turbulence and edge effects, thereby improving the uniformity of the fluid layer and the graphic resolution. The reinforcing structure can be integrally formed with the microporous metal substrate 100 through electroforming or photolithography etching processes, ensuring the reliability of the structural connection and dimensional accuracy, further improving the durability and reusability of the screen printing plate.

[0119] When the microporous metal substrate 100 is a single-layer structure, the reinforcing structure can be integrally formed with the microporous metal substrate 100, or formed within the thickness range of the first through-hole 110 through processes such as secondary electroforming. The reinforcing structure is located in the permeable region of the original layer, which can enhance the local structural strength while maintaining fluid flow capacity, ensuring that fluid can still pass smoothly. When the microporous metal substrate 100 is a multi-layer structure, the reinforcing structure is located in the region corresponding to the permeable region of the original layer or / and non-original layers, and plays a strengthening role, which can alleviate deformation during operation to a certain extent. The reinforcing structure is not limited to the metal of the original layer, but can also be composed of the pattern of the polymer functional layer 200.

[0120] This invention also proposes a template. The template uses the aforementioned microstructured functional composite membrane as a template pattern.

[0121] In one embodiment, the template includes an outer frame, a mesh fabric, and a microstructure functional composite membrane. The specific structure of the microstructure functional composite membrane is as described in the above embodiments. Since this template adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0122] The mesh fabric surrounds the microstructured functional composite membrane and is connected to the outer frame.

[0123] The microstructured functional composite film, as the core component for achieving high-precision graphic transfer, is located in the central area of ​​the printing template. It comprises an integrally molded microporous metal base film and a polymer functional layer formed through coating and patterning processes. A mesh fabric surrounds the circumferential edge of the microstructured functional composite film and connects to the non-working areas of the film. The entire assembly is tensioned and fixed to the outer frame. The mesh fabric can be a woven polymer fiber mesh, such as polyester or nylon, used to transfer and balance tension, enhancing the overall mechanical stability of the structure. The outer frame can be made of metal or high-strength engineering plastics, providing rigid support for the entire printing template and facilitating installation, positioning, and reuse in printing equipment. By integrating the microstructured functional composite film with the frame structure, the printing template not only retains the advantages of the microporous metal base film—high precision, high transparency, and no intersecting nodes—but also achieves excellent stress distribution and resistance to deformation through the outer mesh fabric, effectively preventing image shift or mesh damage caused by uneven local stress during printing.

[0124] It should be understood that the template described in this utility model is not limited to the printing templates mentioned above. Its high-precision patterned structure makes it suitable as a core template element in various micro-nano manufacturing processes.

[0125] For example:

[0126] In one embodiment, the template is configured as a mask template for selective material deposition.

[0127] In another embodiment, the template is configured as an electrochemical growth template for an integrated electrode: a conductive metal substrate film serves directly as the growth electrode, while an insulating polymer functional layer acts as a high-precision growth template, and hydrophobic microstructures are designed on the polymer functional layer to achieve higher fidelity metal microstructure growth.

[0128] This invention also proposes a filter. The filter uses the aforementioned microstructured functional composite membrane as the filter medium.

[0129] The specific structure of the microstructure functional composite membrane is as described in the above embodiments. Since this filter adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0130] In one embodiment, the filter is encapsulated within a filter cartridge or filter plate frame, forming a replaceable filter element. The high strength of the microstructured functional composite membrane enables it to withstand high fluid pressure differentials and facilitates cleaning and regeneration via backwashing. Customizable functional structures, such as pre-settling guide chambers, in the polymer functional layers can significantly enhance the filter's functionality.

[0131] The above description is merely an exemplary embodiment of the present utility model and does not limit the scope of protection of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present utility model.

Claims

1. A microstructured functional composite film, characterized by, include: A microporous metal substrate film, wherein the microporous metal substrate film is integrally formed, and the working area of ​​the microporous metal substrate film is provided with a first through hole, the first through hole having a fully open structure; A polymer functional layer is disposed on at least one region of at least one surface of the microporous metal substrate film by coating and patterning processes, and the polymer functional layer is provided with a second through hole communicating with the first through hole.

2. The microstructured functional composite film according to claim 1, wherein The first through hole and the second through hole form a through channel. The second through hole includes a first extension section in the extension direction of the through channel. On the cross-section of the plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the first extension section is larger than the cross-sectional area of ​​the first through hole, so that the first extension section forms a groove structure. And / or, the first through hole and the second through hole constitute a through channel, the second through hole includes a second extension segment in the extension direction of the through channel, and on the cross section of a plane perpendicular to the extension direction of the through channel, the cross-sectional area of ​​the second extension segment is smaller than the cross-sectional area of ​​the first through hole, so that the second extension segment forms a flange structure corresponding to the edge of the first through hole.

3. The microstructured functional composite film according to claim 2, wherein The groove structure has a trapezoidal cross-section formed by a plane perpendicular to the surface of the polymer functional layer; And / or, the sidewall of the groove structure is provided with at least one step structure, the step structure gradually expanding in the direction away from the microporous metal substrate film; And / or, the edges of the groove opening of the groove structure are chamfered.

4. The microstructured functional composite film according to claim 2, wherein The polymer functional layer forms a second extension segment at the edge of the second through hole, extending toward the microporous metal substrate film. The second extension segment extends into the first through hole and abuts against the sidewall of the first through hole.

5. The microstructured functional composite film according to claim 1, wherein The polymer material of the polymer functional layer is a semi-crystalline polymer.

6. The microstructured functional composite film according to any one of claims 1 to 5, wherein The microporous metal substrate film has a working surface and an bonding surface arranged opposite to each other. Both the working surface and the bonding surface are provided with the polymer functional layer. The hardness of the polymer functional layer provided on the working surface is greater than the hardness of the polymer functional layer provided on the bonding surface. And / or, at least one region of the polymer functional layer includes a substrate layer, a main body layer and a release layer stacked sequentially, the release layer being disposed on the side of the main body layer away from the microporous metal substrate film, and the thickness of the substrate layer and the release layer being less than the thickness of the main body layer.

7. The microstructured functional composite film according to any one of claims 1 to 5, wherein The microporous metal substrate film has a single-layer structure; Alternatively, the microporous metal substrate film may include a plurality of metal mesh units stacked along the thickness direction of the microstructure functional composite film.

8. The microstructured functional composite film according to claim 1, wherein The first through hole is provided with a reinforcing structure and is divided into multiple sub-through holes.

9. A template characterized in that, The template pattern is provided using the microstructured functional composite membrane according to any one of claims 1 to 8.

10. A filter characterized by, The filter is provided with a filter medium using the microstructured functional composite membrane as described in any one of claims 1 to 8.

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