A material transfer device for high-temperature purification equipment

Abstract

This utility model relates to a material conveying device for high-temperature purification equipment, belonging to the field of carbon-based material production equipment. It solves the problem of damage to material conveying device components during material feeding and discharging in existing high-temperature purification equipment due to material weight or inconsistent force between the conveying drive motor and the conveying device. The technical solution includes several first conveying components and several second conveying components. The first and second conveying components are connected by first connecting parts, and multiple second conveying components are sequentially connected end-to-end by second connecting parts. One end of each first conveying component has an integrally formed first connecting part, and each opposite end of each second conveying component has an integrally formed second connecting part. The second connecting parts of the preceding and following second conveying components cooperate with each other, and the second connecting parts also cooperate with the first connecting parts, preventing damage to either the first or second conveying component. This utility model is applied to purification processes.

Description

Technical Field

[0001] This invention provides a material transfer device for high-temperature purification equipment, belonging to the technical field of carbon-based material production equipment. Background Technology

[0002] With my country's increasing investment in semiconductor research and development, domestic enterprises have made significant progress in the development of third-generation semiconductor equipment. Currently, the purity of domestically developed high-temperature purification equipment can be stably controlled at ≤5ppm. To reduce the cost of purified products, the high-temperature purification equipment adopts a large horizontal structure to increase material loading capacity, and its material transfer device is made of graphite. Due to the limitations of graphite blank size, the transfer device employs a spliced ​​structure design.

[0003] The old structure used a concave-convex joint, which was prone to damage when materials were fed into or discharged from the furnace, especially if the materials were heavy or the force on the transmission drive motor and the transmission device was uneven. Once damaged, the transmission device parts needed to be replaced, resulting in high replacement costs. Utility Model Content

[0004] This invention addresses the technical problem of damage to components of existing high-temperature purification equipment material conveying devices during material feeding and discharging due to material weight or inconsistent force between the conveying drive motor and the conveying device. A new material conveying device for high-temperature purification equipment is proposed.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a material transfer device for high-temperature purification equipment, comprising a plurality of first transfer accessories and a plurality of second transfer accessories, wherein the first transfer accessories and the second transfer accessories are connected by a first connector, and the plurality of second transfer accessories are connected end to end in sequence by the second connector; One end of the first transmission component is integrally formed with a first connecting part, and the first transmission component and the first connecting part form an "L" shaped structure; The second transmission component has a second connecting part integrally formed at each of its opposite ends. The second transmission component and the two second connecting parts form a "T" shaped structure. The second connecting part of the first second transmission component cooperates with the second connecting part of the second second transmission component, and the second connecting part also cooperates with the first connecting part. The first connecting part has a first groove, the first groove has a first through hole, the first through hole and the first groove are coaxially arranged, and the first groove, the first through hole and the first connecting part cooperate with each other; The second connecting part has a second groove, and the second groove has a second through hole. The second through hole and the second groove are coaxially arranged. The second groove, the second through hole and the second connecting member cooperate with each other. The first groove, the second groove, the second through hole and the first connecting member cooperate with each other.

[0006] Furthermore, the first connector includes a first connecting rod, which is detachably and fixedly connected to a first fixing member, and the second connector includes a second connecting rod, which is detachably and fixedly connected to a second fixing member.

[0007] Furthermore, the first end face of the first connecting part and the third end face of the first transmission accessory are in the same plane, and the second end face of the first connecting part and the fourth end face of the first transmission accessory form a trapezoidal structure.

[0008] Furthermore, the fifth end face of the second connecting part and the seventh end face of the second transmission accessory are in the same plane, and the sixth end face of the second connecting part and the eighth end face of the second transmission accessory form a trapezoidal structure.

[0009] Furthermore, multiple first transmission components and multiple second transmission components cooperate to form a square structure.

[0010] Furthermore, the end of the first fixing member that is away from the first end face is not higher than the fourth end face of the first transmission accessory.

[0011] Furthermore, the end of the second fixing member that is away from the fifth end face is not higher than the eighth end face of the second transmission accessory.

[0012] Furthermore, both the first and second grooves are square structures.

[0013] Furthermore, the first and second transmission accessories are the same size.

[0014] Furthermore, both the first connecting rod and the second connecting rod are graphite screws, and both the first fixing member and the second fixing member are graphite nuts.

[0015] The advantages of this utility model over the prior art are as follows: 1. The first transmission accessory, the second transmission accessory, the first connector, and the second connector of this utility model cooperate with each other. The strength of the first connector and the second connector is lower than that of the first transmission accessory and the second transmission accessory. When the material transmission device of the high-temperature purification equipment of this utility model carries material into or out of the furnace, if the material is unevenly distributed on the material transmission device of the high-temperature purification equipment, resulting in uneven force on the material transmission device of the high-temperature purification equipment, or if the force on the transmission drive motor and the material transmission device of the high-temperature purification equipment is inconsistent, the first connector and the second connector will break first, which can prevent damage to the first transmission accessory or the second transmission accessory, thereby reducing maintenance costs. 2. In this utility model, the end of the first fixing member that is away from the first end face is not higher than the fourth end face of the first transmission accessory. The end of the second fixing member that is away from the fifth end face is not higher than the eighth end face of the second transmission accessory, which can effectively prevent interference between the first fixing member and the second fixing member and the purified material when the purified material is placed on the material transmission device of the high-temperature purification equipment of this utility model. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is the front view of the present invention; Figure 3 This is a top view of the present invention; Figure 4 For along Figure 3 Sectional view of line AA in the middle; Figure 5 for Figure 4 Enlarged schematic diagram of part B in the middle; Figure 6 for Figure 4 An enlarged schematic diagram of section C; Figure 7 This is a schematic diagram of the structure in which the first transmission accessory and the first connecting part cooperate with each other. Figure 8 This is a schematic diagram showing the structure in which the second transmission accessory and the second connecting part cooperate with each other. In the figure: 1 is the first transmission accessory, 2 is the second transmission accessory, 3 is the first connecting rod, 4 is the first fixing part, 5 is the second connecting rod, 6 is the second fixing part, 7 is the first connecting part, 8 is the second connecting part, 9 is the first end face, 10 is the second end face, 11 is the third end face, 12 is the fourth end face, 13 is the fifth end face, 14 is the sixth end face, 15 is the seventh end face, 16 is the eighth end face, 17 is the first groove, 18 is the first through hole, 19 is the second groove, 20 is the second through hole, 21 is the first connecting part, and 22 is the second connecting part. Detailed Implementation

[0017] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] like Figures 1 to 8 As shown, this utility model provides a material transfer device for high-temperature purification equipment, including several first transfer components 1 and several second transfer components 2. The first transfer components 1 and the second transfer components 2 are connected by a first connector 21, and the multiple second transfer components 2 are connected end to end by a second connector 22. In this embodiment, the first transfer components 1 and the second transfer components 2 are the same size, that is, the length, width, and height of the first transfer components 1 and the second transfer components 2 are the same. There are two first transfer components 1, and the number of second transfer components 2 can be determined according to the actual operation.

[0020] One end of the first transmission accessory 1 is integrally formed with a first connecting part 7. The first end face 9 of the first connecting part 7 and the third end face 11 of the first transmission accessory 1 are in the same plane. The second end face 10 of the first connecting part 7 and the fourth end face 12 of the first transmission accessory 1 form a trapezoidal structure. The first transmission accessory 1 and the first connecting part 7 form an "L" shaped structure.

[0021] The second transmission accessory 2 has a second connecting portion 8 integrally formed at each of its opposite ends. The fifth end face 13 of the second connecting portion 8 and the seventh end face 15 of the second transmission accessory 2 are in the same plane. The sixth end face 14 of the second connecting portion 8 and the eighth end face 16 of the second transmission accessory 2 form a trapezoidal structure. The second transmission accessory 2 and the two second connecting portions 8 form a "T"-shaped structure. The second connecting portions 8 of the preceding second transmission accessory 2 and the second connecting portions 8 of the following second transmission accessory 2 cooperate with each other.

[0022] The first connecting part 7 of the first transmission accessory 1 and the second connecting part 8 of the second transmission accessory 2 cooperate with each other, and the two first transmission accessories 1 and the multiple second transmission accessories 2 cooperate with each other to form a square structure.

[0023] The first connecting part 7 has a first groove 17, and the first groove 17 has a first through hole 18. The first through hole 18 and the first groove 17 are coaxially arranged, and the first groove 17, the first through hole 18 and the first connecting member 21 cooperate with each other. The second connecting part 8 has a second groove 19, and the second groove 19 has a second through hole 20. The second through hole 20 and the second groove 19 are coaxially arranged, and the second groove 19, the second through hole 20 and the second connecting member 22 cooperate with each other. The first groove 17, the second groove 19, the second through hole 20 and the first connecting member 21 cooperate with each other.

[0024] Specifically, the first connecting member 21 includes a first connecting rod 3, which is detachably and fixedly connected to a first fixing member 4. The second connecting member 22 includes a second connecting rod 5, which is detachably and fixedly connected to a second fixing member 6. In this embodiment, both the first connecting rod 3 and the second connecting rod 5 are graphite screws, and both the first fixing member 4 and the second fixing member 6 are graphite nuts. The first connecting rod 3 and the first fixing member 4 are threadedly connected, and the second connecting member 22 and the second fixing member 6 are threadedly connected.

[0025] A first groove 17 is provided on the first connecting part 7, and a first through hole 18 is provided on the first groove 17. The first through hole 18 and the first groove 17 are coaxially arranged. The first through hole 18 is clearance-fitted with the first connecting rod 3, and the first groove 17 is clearance-fitted with the first fixing member 4.

[0026] The second connecting part 8 has a second groove 19, and the second groove 19 has a second through hole 20. The second through hole 20 and the second groove 19 are coaxially arranged. The second through hole 20 is clearance-fitted with the first connecting rod 3, the second connecting rod 5, the second groove 19 is clearance-fitted with the first fixing member 4, and the second fixing member 6.

[0027] When the first connecting part 7 and the second connecting part 8 are connected to each other, the first through hole 18 and the second through hole 20 are coaxially arranged, the first connecting rod 3 passes through the first through hole 18 and the second through hole 20, and the two ends of the first connecting rod 3 are fixed by the first fixing member 4. The two first fixing members 4 are respectively placed in the first groove 17 and the second groove 19 of the second connecting part 8 that cooperates with the first connecting part 7.

[0028] When the second connecting part 8 of the preceding second transmission accessory 2 is connected to the second connecting part 8 of the following second transmission accessory 2, the second through holes 20 of the two mutually cooperating second connecting parts 8 are coaxially arranged. The second connecting rod 5 passes through the second through holes 20 of the two mutually cooperating second connecting parts 8 in sequence, and the two ends of the second connecting rod 5 are fixed by the second fixing member 6. The second fixing members 6 at both ends of the second connecting rod 5 are respectively placed in the second grooves 19 of the two mutually cooperating connecting parts.

[0029] The end of the first fixing member 4 furthest from the first end face 9 is not higher than the fourth end face 12 of the first transmission accessory 1. The end of the second fixing member 6 furthest from the fifth end face 13 is not higher than the eighth end face 16 of the second transmission accessory 2. This prevents interference between the first fixing member 4 and the second fixing member 6 and the purified material when the purified material is placed on the material transmission device of the high-temperature purification equipment of this utility model.

[0030] In this embodiment, the first groove 17 and the second groove 19 are both square structures, and the first through hole 18 and the second through hole 20 are both circular structures.

[0031] In this invention, the first connecting rod 3 and the first fixing member 4 cooperate to fix the first transmission accessory 1 and the second transmission accessory 2. The second connecting rod 5 and the second fixing member 6 cooperate to fix multiple second transmission accessories 2 sequentially. The first transmission accessory 1 and multiple second transmission accessories 2 cooperate to form the square structure of the material transmission device for high-temperature purification equipment of this invention. When the material to be purified is transmitted through the material transmission device of this invention, if the material is unevenly distributed on the material transmission device, resulting in uneven force on the material transmission device or inconsistent force between the transmission drive motor and the material transmission device, the first connecting rod 3 and the second connecting rod 5 are the main force-bearing components. The first connecting rod 3 and the second connecting rod 5 break first, which can prevent damage to the first transmission accessory 1 or the second transmission accessory 2, thereby reducing maintenance costs.

[0032] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A high temperature purification plant material conveying device, characterized by: It includes several first transmission accessories (1) and several second transmission accessories (2), the first transmission accessories (1) and the second transmission accessories (2) are connected by a first connector (21), and the multiple second transmission accessories (2) are connected end to end in sequence by a second connector (22); The first transmission component (1) has a first connecting part (7) integrally formed at one end, and the first transmission component (1) and the first connecting part (7) form an "L" shaped structure; The second transmission component (2) has a second connecting part (8) integrally formed at each of its opposite ends. The second transmission component (2) and the two second connecting parts (8) form a "T" shaped structure. The second connecting part (8) of the first second transmission component (2) and the second connecting part (8) of the second second transmission component (2) cooperate with each other. The second connecting part (8) also cooperates with the first connecting part (7). The first connecting part (7) is provided with a first groove (17), and the first groove (17) is provided with a first through hole (18). The first through hole (18) and the first groove (17) are coaxially arranged, and the first groove (17), the first through hole (18) and the first connecting piece (21) cooperate with each other. The second connecting part (8) has a second groove (19) and a second through hole (20) on the second groove (19). The second through hole (20) and the second groove (19) are coaxially arranged. The second groove (19), the second through hole (20) and the second connecting member (22) cooperate with each other. The first groove (17), the second groove (19), the second through hole (20) and the first connecting member (21) cooperate with each other.

2. A high temperature purification equipment material transfer device according to claim 1, characterized in that: The first connector (21) includes a first connecting rod (3), which is detachably and fixedly connected to a first fixing member (4). The second connector (22) includes a second connecting rod (5), which is detachably and fixedly connected to a second fixing member (6).

3. A high temperature purification apparatus material transfer device according to claim 2, wherein: The first end face (9) of the first connecting part (7) and the third end face (11) of the first transmission accessory (1) are in the same plane, and the second end face (10) of the first connecting part (7) and the fourth end face (12) of the first transmission accessory (1) form a trapezoidal structure.

4. A high temperature purification apparatus material transfer device according to claim 2, wherein: The fifth end face (13) of the second connecting part (8) and the seventh end face (15) of the second transmission accessory (2) are in the same plane, and the sixth end face (14) of the second connecting part (8) and the eighth end face (16) of the second transmission accessory (2) form a trapezoidal structure.

5. A high temperature purification equipment material transfer device according to claim 1, wherein: Multiple first transmission accessories (1) and multiple second transmission accessories (2) cooperate to form a square structure.

6. A high temperature purification apparatus material transfer device according to claim 3, wherein: The end of the first fixing member (4) that is away from the first end face (9) is not higher than the fourth end face (12) of the first transmission accessory (1).

7. A high temperature purification apparatus material transfer device according to claim 4, wherein: The end of the second fastener (6) away from the fifth end face (13) is not higher than the eighth end face (16) of the second transmission accessory (2).

8. The material transfer device for high-temperature purification equipment according to claim 1, characterized in that: Both the first groove (17) and the second groove (19) are square structures.

9. A high temperature purification equipment material transfer device according to claim 1, wherein: The first transmission accessory (1) and the second transmission accessory (2) are the same size.

10. A high temperature purification equipment material transfer device according to claim 2, wherein: The first connecting rod (3) and the second connecting rod (5) are both graphite screws, and the first fixing part (4) and the second fixing part (6) are both graphite nuts.

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