A unidirectional stacking station feeding mechanism

Abstract

This utility model discloses a unidirectional lamination loading mechanism, including a transport guide rail, a lifting loading module, a manual loading module, and a traveling arm loading module. The lifting loading modules are arranged on one side of the front end of the transport guide rail, and the manual loading module is located on the rear end of the transport guide rail. A traveling arm loading module is positioned above both the lifting and manual loading modules. The lifting loading module includes a first lifting module, a docking guide rail, and a first upright plate. The drive end of the first lifting module is connected to a first lifting column, and a first air knife and a first material receiving sensor are installed on the upper end of the first upright plate. This unidirectional lamination loading mechanism uses multiple sets of lifting loading modules to dock with material boxes, and the traveling arm loading module grabs half-lamps onto the transport guide rail for conveying. The addition of a manual loading module allows for timely replenishment of materials when the number of half-lamps on the lifting loading module is insufficient, reducing downtime.

Description

Technical Field

[0001] This utility model relates to the technical field of feeding machines, and in particular to a unidirectional stacking station feeding mechanism. Background Technology

[0002] Silicon wafers need to be transferred one by one from the stacked cassettes to the transport section for single or double wafer delivery in preparation for subsequent production. The mismatch between the efficiency of the front cassette transport and the efficiency of the rear half-wafer transport leads to difficulties in front-to-back coordination, preventing the timely delivery of half-wafers. Furthermore, the existing loading structure occupies a significant amount of space, which cannot meet the space requirements of the workshop. Utility Model Content

[0003] One objective of this invention is to provide a unidirectional wafer stacking station loading mechanism, which installs the lifting loading module on the side of the transport guide rail, saving length and adding a manual loading module to assist in replenishing silicon wafers, thereby reducing the possibility of downtime.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A unidirectional stacking loading mechanism includes a transport guide rail, a lifting loading module, a manual loading module, and a traveling arm loading module. The lifting loading modules are arranged on one side of the front end of the transport guide rail, and the manual loading module is located on one side of the rear end of the transport guide rail. The traveling arm loading module is located above both the lifting loading module and the manual loading module.

[0006] The lifting and feeding module includes a first lifting module, a docking guide rail, and a first upright plate. The first lifting module is located below the docking guide rail. The driving end of the first lifting module is connected to a first lifting column. The first upright plate is located on both sides of the docking guide rail. A first air knife and a first material receiving sensor are installed on the upper end of the first upright plate.

[0007] As a preferred technical solution, the transport guide rail is provided with two sets of half-piece conveying guide rails. The two sets of half-piece conveying guide rails are installed symmetrically and parallel to each other along the length direction. A reflector is provided above the half-piece conveying guide rail, and a guide rail sensor is provided below the half-piece conveying guide rail. The guide rail sensor and the reflector are installed correspondingly in the vertical direction.

[0008] As a preferred technical solution, an anti-overlapping sensor is installed at the rear end of the half-piece conveying guide rail.

[0009] As a preferred technical solution, the manual feeding module includes a second lifting module, a pull-out guide rail, and a second upright plate. The pull-out guide rail moves horizontally above the second lifting module. The driving end of the second lifting module is connected to a second lifting column. The second upright plate is located on both sides of the pull-out guide rail. A second air knife and a second material receiving sensor are installed on the upper end of the second upright plate.

[0010] As a preferred technical solution, the walking arm loading module includes a walking translation module and a walking vertical movement cylinder. The walking vertical movement cylinder is installed on the drive end of the walking translation module. The drive end of the walking vertical movement cylinder is vertically connected to a walking suction seat, and a suction cup is installed on the walking suction seat.

[0011] The beneficial effects of this utility model are as follows: It provides a one-way stacking station feeding mechanism. The one-way stacking station feeding mechanism adopts multiple sets of lifting feeding modules to connect to the material box. The walking arm feeding module grabs the half pieces to the transport guide rail for conveying. In addition, a manual feeding module is added. When the half pieces on the lifting feeding module are insufficient, the material is replenished in time to reduce the occurrence of machine downtime. Attached Figure Description

[0012] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0013] Figure 1 This is a schematic diagram of the overall structure of a unidirectional stacking loading mechanism as described in the embodiment.

[0014] Figure 2 This is a schematic diagram of the lifting and feeding module described in the embodiment;

[0015] Figure 3 This is a schematic diagram of the manual feeding module described in the embodiment;

[0016] Figure 4 This is a schematic diagram of the structure of the walking arm loading module described in the embodiment;

[0017] Figure 5 This is a schematic diagram of the transport guide rail described in the embodiment.

[0018] Figures 1 to 5 middle:

[0019] 1. Transport guide rail; 2. Lifting and feeding module; 3. Manual feeding module; 4. Traveling arm feeding module; 5. First lifting module; 6. Docking guide rail; 7. First upright plate; 8. First lifting column; 9. First air knife; 10. First material receiving sensor; 11. Half-piece conveyor guide rail; 12. Reflector; 13. Anti-overlapping sensor; 14. Second lifting module; 15. Pull-out guide rail; 16. Second upright plate; 17. Second air knife; 18. Second material receiving sensor; 19. Traveling translation module; 20. Traveling vertical movement cylinder; 21. Traveling adsorption seat. Detailed Implementation

[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0021] like Figures 1 to 5 As shown in this embodiment, a unidirectional stacking station loading mechanism includes a transport guide rail 1, a lifting loading module 2, a manual loading module 3, and a traveling arm loading module 4. The lifting loading module 2 is arranged on one side of the front end of the transport guide rail 1, and the manual loading module 3 is located on one side of the rear end of the transport guide rail 1. The traveling arm loading module 4 is located above both the lifting loading module 2 and the manual loading module 3.

[0022] The fully loaded wafer cassettes are transferred to the lifting and loading module 2. The traveling arm loading module 4 is responsible for picking up and placing silicon wafers one by one from the cassettes on the lifting and loading module 2 onto the transport rail 1. When a set of cassettes on the lifting and loading module 2 is emptied, the traveling arm loading module 4 continues to pick up wafers from another set of fully loaded cassettes to ensure that the silicon wafers on the transport rail 1 are continuously loaded. If an accident occurs and additional silicon wafers need to be loaded, silicon wafers can still be picked up from the manual loading module 3 and placed into the transport rail 1.

[0023] The lifting and feeding module 2 includes a first lifting module 5, a docking guide rail 6, and a first upright plate 7. The first lifting module 5 is located below the docking guide rail 6. The driving end of the first lifting module 5 is connected to a first lifting column 8. The first upright plate 7 is located on both sides of the docking guide rail 6. A first air knife 9 and a first material receiving sensor 10 are installed on the upper end of the first upright plate 7.

[0024] The docking guide rail 6 first connects the fully loaded material box. The first lifting module 5 controls the first lifting column 8 to lift the silicon wafers in the material box. When the first incoming material sensor 10 senses the top silicon wafer, the traveling arm loading module 4 grabs the silicon wafer, and the first air knife 9 blows out, so that the grabbed silicon wafer is limited to a single wafer. The traveling arm loading module 4 puts the silicon wafer into the transport guide rail 1. At this time, the first incoming material sensor 10 can no longer sense the top silicon wafer. The first lifting module 5 then controls the silicon wafer to rise until the top silicon wafer is sensed.

[0025] Two sets of half-piece conveying rails 11 are provided on the transport guide rail 1. The two sets of half-piece conveying rails 11 are installed symmetrically and parallel along the length direction. A reflector 12 is provided above the half-piece conveying rail 11, and a guide rail sensor is provided below the half-piece conveying rail 11. The guide rail sensor and the reflector 12 are installed correspondingly in the vertical direction. An anti-overlapping sensor 13 is installed at the rear end of the half-piece conveying rail 11.

[0026] The two half-wafers are transported on two sets of half-wafer transport rails 11 to meet the docking requirements of the downstream equipment. When the rail sensor continuously senses the input of silicon wafers, it transmits a signal to make the half-wafer transport rail 11 continue to transport backward. At the last position, the anti-stack sensor 13 senses the height of the silicon wafers on the half-wafer transport rail 11 to prevent double or multiple layers of silicon wafers from being stacked together and moving.

[0027] The manual feeding module 3 includes a second lifting module 14, a pull-out guide rail 15, and a second upright plate 16. The pull-out guide rail 15 moves horizontally above the second lifting module 14. The drive end of the second lifting module 14 is connected to a second lifting column. The second upright plate 16 is located on both sides of the pull-out guide rail 15. A second air knife 17 and a second material sensor 18 are installed on the upper end of the second upright plate 16.

[0028] When the five sets of lifting and feeding modules 2 cannot meet the continuous input of silicon wafers, the fully loaded material box is manually placed into the pull-out guide rail 15. The pull-out guide rail 15 is pushed into the upper part of the second lifting module 14. Similarly, the second material sensor 18 is used to sense the silicon wafer at the top, and the second air knife 17 prevents the wafers from stacking. Then, the walking arm feeding module 4 grabs the silicon wafer and puts it into the transport guide rail 1 for replenishment. This will not affect the progress of subsequent equipment. After the box is empty, the manual pull-out guide rail 15 is pulled out to replace the material box.

[0029] The walking arm loading module 4 includes a walking translation module 19 and a walking vertical movement cylinder 20. The walking vertical movement cylinder 20 is installed on the drive end of the walking translation module 19. The drive end of the walking vertical movement cylinder 20 is vertically connected to a walking suction seat 21, and a suction cup is installed on the walking suction seat 21.

[0030] When the silicon wafers are transferred between the five sets of lifting and feeding modules 2 and the one set of manual feeding modules 3, the walking arm feeding module 4 controls the movement of the silicon wafers in the two directions of translation and vertical movement through the walking translation module 19 and the walking vertical movement cylinder 20 respectively, and the suction cup on the walking adsorption seat 21 adsorbs the silicon wafers under negative pressure.

[0031] All of the above modules are linear modules.

[0032] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles applied thereto. Within the scope of the technology disclosed in this utility model, any variations or substitutions that are easily conceived by those skilled in the art should be covered within the protection scope of this utility model.

Claims

1. A work station feeding mechanism for unidirectional laminates, characterized by, It includes a transport guide rail, a lifting and feeding module, a manual feeding module, and a traveling arm feeding module. The lifting and feeding modules are arranged on one side of the front end of the transport guide rail, and the manual feeding module is located on one side of the rear end of the transport guide rail. The traveling arm feeding module is located above both the lifting and feeding modules and above the manual feeding module. The lifting and feeding module includes a first lifting module, a docking guide rail, and a first upright plate. The first lifting module is located below the docking guide rail. The driving end of the first lifting module is connected to a first lifting column. The first upright plate is located on both sides of the docking guide rail. A first air knife and a first material receiving sensor are installed on the upper end of the first upright plate.

2. The one-way lamination station feed mechanism of claim 1, wherein, The transport guide rail is provided with two sets of half-piece conveying guide rails, which are installed symmetrically and parallel to each other along the length direction. A reflector is provided above the half-piece conveying guide rail, and a guide rail sensor is provided below the half-piece conveying guide rail. The guide rail sensor and the reflector are installed correspondingly in the vertical direction.

3. The one-way lamination station feed mechanism of claim 2, wherein, An anti-overlapping sensor is installed at the rear end of the half-piece conveyor rail.

4. The one-way lamination station feed mechanism of claim 1, wherein, The manual feeding module includes a second lifting module, a pull-out guide rail, and a second upright plate. The pull-out guide rail moves horizontally above the second lifting module. The drive end of the second lifting module is connected to a second lifting column. The second upright plate is located on both sides of the pull-out guide rail. A second air knife and a second material receiving sensor are installed on the upper end of the second upright plate.

5. The one-way lamination station feed mechanism of claim 1, wherein, The walking arm loading module includes a walking translation module and a walking vertical movement cylinder. The walking vertical movement cylinder is installed on the drive end of the walking translation module. The drive end of the walking vertical movement cylinder is vertically connected to a walking suction seat, and a suction cup is installed on the walking suction seat.

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