A multi-tray feeding mechanism

Abstract

A multi-tray feeding mechanism includes a first linear mechanism with a movable block on it, a second linear mechanism mounted on the movable block, and a sliding block on the second linear mechanism. A stepper motor drives a lead screw to rotate, and the lead screw moves a sliding block and its movable block. This invention enables automatic feeding of various chips, improving production efficiency for multi-chip eutectic equipment. It can accommodate multiple trays, reducing time wasted on frequent tray changes, achieving continuous feeding, and improving production continuity. Simultaneously, it ensures feeding accuracy; the linear module motion mechanism along the X and Y directions can precisely correct chip position deviations, ensuring the chip is in a precise position when picked up.

Description

Technical Field

[0001] This utility model relates to the field of optical communication packaging technology, and in particular to a multi-tray feeding mechanism. Background Technology

[0002] With the continuous advancement of optical communication technology, optical chips are becoming smaller and more highly integrated. From early simple packaging to today's advanced packaging forms such as 3D packaging, and the application of through-silicon vias (TSVs) and chip stacking technologies, higher demands are placed on the connection technology between the chip and the substrate. The eutectic bonding technology used in multi-chip eutectic bonding equipment can achieve high-quality connections between the chip and the substrate, meeting the needs of the optical communication industry in advanced packaging. Taking 5G communication as an example, the rapid development of 5G technology places increasingly higher demands on laser performance. Especially with the increase in transmission speed, the heat generated by photoelectric signal conversion also increases significantly. Multi-chip eutectic bonding equipment helps improve the quality and reliability of 5G chips. To meet the equipment requirements for multi-chip eutectic bonding, a multi-chip loading mechanism has become an essential component of the equipment. Utility Model Content

[0003] This utility model provides a multi-tray feeding mechanism to overcome the shortcomings of the prior art and solve the problems of chip fixing and orientation adjustment during multi-chip eutectic bonding, and has strong practicality.

[0004] In order to achieve the purpose of this utility model, the following technology is proposed to be adopted: A multi-tray feeding mechanism includes a first linear mechanism with a movable block on it. A second linear mechanism is mounted on the movable block, and a sliding block is mounted on the second linear mechanism. The moving direction of the movable block is perpendicular to the moving direction of the sliding block. The first and second linear mechanisms have the same structure, both including a base. A guide rail, a proximity switch, a stepper motor, and a bearing seat are mounted on the base. A lead screw is rotatably mounted on the bearing seat, with one end of the lead screw connected to the stepper motor. A sliding sleeve is slidably mounted on the guide rail. The movable block and the sliding block are respectively fixed on the sliding sleeve. A sliding seat is threadedly connected to the lead screw, and the movable block and the sliding block are respectively fixed on the sliding seat. In this way, the stepper motor can drive the lead screw to rotate, and the lead screw can drive the sliding seat and the movable block and the sliding block on it to move.

[0005] The moving block is equipped with a rotating mechanism, which has an angle adjustment mechanism. The rotating mechanism is used to place multiple disk-shaped chips, and the angle adjustment mechanism is used to adjust the posture of the disk-shaped chips. The rotating mechanism can adjust the position of the disk-shaped chips to the angle adjustment mechanism so that the chips on the rotating mechanism can be transferred to the chips located on the angle adjustment mechanism by the pick-up device, thereby achieving the purpose of multi-chip eutectic bonding.

[0006] Furthermore, the rotating mechanism includes a fixed seat mounted on the upper end of the sliding block by screws, a mounting seat mounted on the fixed seat, a first motor mounted on the mounting seat, a drive wheel connected to the output shaft of the first motor, a rotating base mounted on the upper end of the fixed seat by screws, a spindle rotatably mounted on the rotating base via a bearing seat, a plurality of through holes arranged in a circumferential array around the axis of the spindle on the rotating base, a driven wheel fixed at the lower end of the spindle, the driven wheel and the drive wheel being driven by a transmission belt, and a turntable fixed at the upper end of the spindle by screws; The turntable has multiple round holes, and annular grooves are formed on the inner circumference of the round holes. A fixing ring is placed in the annular groove, and a blue film is pasted on the upper end of the fixing ring. Chips cut into particles are pasted on the blue film.

[0007] Furthermore, the driving wheel and the driven wheel are synchronous pulleys, and the transmission belt is a synchronous belt.

[0008] Furthermore, the outer periphery of the rotating base is formed with a groove, and the bottom of the groove has a notch. The width of the notch is smaller than the width of the groove. An inner plate is fixed inside the groove by screws. A support wheel is rotatably mounted inside the inner plate via a connecting shaft. The lower wall of the turntable is tangent to the outer periphery of the support wheel.

[0009] Furthermore, several limiting arc plates are formed extending upward on the rotating base, with the inner circumference of the limiting arc plates abutting against the outer circumference of the turntable.

[0010] Furthermore, at least two pressure plates abut against the upper end of the fixing ring, and a connecting screw is provided on the outer end of the pressure plate. The lower end of the connecting screw is connected to the turntable by a thread, and a spring is sleeved on the upper end of the connecting screw. The lower end of the spring abuts against the upper wall of the pressure plate.

[0011] Furthermore, a proximity switch is mounted on the rotating base by screws, and a T-shaped piece is mounted on the upper wall of the turntable by screws. The proximity switch is used to detect whether the T-shaped piece is close.

[0012] Furthermore, the angle adjustment mechanism includes a base plate mounted on a rotating base. A lower extension plate is fixed to the lower wall of the base plate. A connecting plate is fixed to the lower end of the lower extension plate by screws. A second motor is mounted on the lower end of the connecting plate. The rotating shaft of the second motor is a hollow tubular structure. A connector is rotatably provided at the lower end of the rotating shaft of the second motor. A connecting pipe is connected to the upper end of the rotating shaft of the second motor. A suction head is provided at the upper end of the connecting pipe. The suction head passes through the base plate, and the upper end of the suction head extends out of the base plate.

[0013] Furthermore, a probe is fixed on the lower extension plate, and a rotating plate is fixed on the connecting pipe. The outer end of the rotating plate has a convex arc-shaped structure, and the probe is used to sense whether the rotating plate is close.

[0014] The advantages of the above technical solution are: This invention enables automated feeding of various chips, improving production efficiency for multi-chip eutectic bonding equipment. It can accommodate multiple trays, reducing time wasted on frequent tray changes and achieving continuous feeding, thus improving production continuity. Simultaneously, it ensures feeding accuracy. The linear module motion mechanism along the X and Y directions precisely corrects chip position deviations, ensuring the chip is in a precise position when picked up, meeting the stringent positional accuracy requirements of eutectic bonding. For example, by setting a high-precision visual recognition camera for visual recognition and fine-tuning, the chip positioning accuracy can reach ±0.01mm, significantly improving the yield rate of chip eutectic bonding and reducing product defects caused by insufficient feeding accuracy. Enhanced equipment adaptability: The carrier design can be modified to flexibly adjust according to the type of tray, adapting to different tray types. The tray carrier can accommodate trays of different or the same specifications, meeting the needs of simultaneous feeding of multiple chip types. This allows the equipment to be applied to diverse chip packaging production scenarios, improving its versatility and applicability, and reducing the cost of changing equipment for different types of chips. Attached Figure Description

[0015] To make the objectives, technical solutions, and advantages of this utility model clearer, the following will provide a further detailed description of this utility model in conjunction with the accompanying drawings.

[0016] Figure 1 A three-dimensional structural diagram of the multi-tray feeding mechanism is shown.

[0017] Figure 2 A three-dimensional structural diagram of the first linear mechanism and the second linear mechanism is shown.

[0018] Figure 3 The three-dimensional structure of the rotating mechanism is shown. Figure 1 .

[0019] Figure 4 The three-dimensional structure of the rotating mechanism is shown. Figure 2 .

[0020] Figure 5 A three-dimensional structural diagram of the angle adjustment mechanism is shown. Detailed Implementation

[0021] like Figures 1-5 As shown, a multi-tray feeding mechanism includes a first linear mechanism 1, a movable block 100 is movably mounted on the first linear mechanism 1, a second linear mechanism 2 is mounted on the movable block 100, and a sliding block 20 is mounted on the second linear mechanism 2. The moving direction of the movable block 100 is perpendicular to the moving direction of the sliding block 20.

[0022] The first and second linear mechanisms have the same structure, both including a base 10. A guide rail 11, a proximity switch 12, a stepper motor, and a bearing housing are mounted on the base 10. A lead screw is rotatably mounted on the bearing housing, with one end connected to the stepper motor. A sliding sleeve is slidably mounted on the guide rail 11. A moving block 100 and a sliding block 20 are respectively fixed to the sliding sleeve. A sliding seat is threaded onto the lead screw, and the moving block 100 and sliding block 20 are respectively fixed to the sliding seat. Thus, the stepper motor can drive the lead screw to rotate, and the lead screw drives the sliding seat and its moving blocks 100 and 20 to move. Alternatively, the first and second linear mechanisms can also be composed of a permanent magnet stator and a movable mover.

[0023] The movable block 100 is equipped with a rotating mechanism, which is provided with an angle adjustment mechanism. The rotating mechanism is used to place multiple disk-shaped chips, and the angle adjustment mechanism is used to adjust the posture of the disk-shaped chips.

[0024] The rotating mechanism includes a fixed base 30 mounted on the upper end of the sliding block 20 by screws, a mounting base 33 mounted on the fixed base 30, a first motor 34 mounted on the mounting base 33, a drive wheel 35 connected to the output shaft of the first motor 34, a rotating base 39 mounted on the upper end of the fixed base 30 by screws, a spindle 38 rotatably mounted on the rotating base 39 via a bearing seat, a plurality of through holes 40 arranged in a circumferential array around the axis of the spindle 38 on the rotating base 39, a driven wheel 37 fixed to the lower end of the spindle 38, the driven wheel 37 and the drive wheel 35 being driven by a transmission belt 36, and a turntable 45 fixed to the upper end of the spindle 38 by screws. The turntable 45 has multiple round holes 46, and annular grooves 47 are formed on the inner circumference of the round holes 46. A fixing ring 50 is placed in the annular groove 47. A blue film is pasted on the upper end of the fixing ring 50. Chips cut into granules are pasted on the blue film. A proximity switch 53 is installed on the rotating base 39 by screws. A T-shaped piece 52 is installed on the upper wall of the turntable 45 by screws. The proximity switch 53 is used to sense whether the T-shaped piece 52 is close.

[0025] In some embodiments, the drive wheel 35 and the driven wheel 37 are synchronous pulleys, and the transmission belt 36 is a synchronous belt.

[0026] In some embodiments, the outer periphery of the rotating base 39 is formed with a groove 41, and the bottom of the groove 41 is provided with a notch 42. The width of the notch 42 is smaller than the width of the groove 41. An inner plate 43 is fixed in the groove 41 by screws. A support wheel is rotatably provided in the inner plate 43 through a connecting shaft. The lower wall of the turntable 45 is tangent to the outer periphery of the support wheel. The support wheel supports the turntable 45 to improve the flexibility of the turntable 45 rotation.

[0027] In some embodiments, a plurality of limiting arc plates 54 are formed extending upward on the rotating base 39, and the inner periphery of the limiting arc plates 54 abuts against the outer periphery of the turntable 45, thereby improving the stability of the rotation of the turntable 45.

[0028] In some embodiments, the upper end of the retaining ring 50 abuts against at least two pressure plates 49, the outer end of the pressure plate 49 is provided with a connecting screw 48, the lower end of the connecting screw 48 is threadedly connected to the turntable 45, the upper end of the connecting screw 48 is sleeved with a spring, and the lower end of the spring abuts against the upper wall of the pressure plate 49.

[0029] The angle adjustment mechanism includes a base plate 6 mounted on a rotating base 39. A lower extension plate 60 is fixed to the lower wall of the base plate 6. A connecting plate 62 is fixed to the lower end of the lower extension plate 60 by screws. A second motor 63 is mounted on the lower end of the connecting plate 62. The rotating shaft of the second motor 63 has a hollow tubular structure. A connector 65 is rotatably provided at the lower end of the rotating shaft of the second motor 63. A connecting pipe 66 is connected to the upper end of the rotating shaft of the second motor 63. A suction head 67 is provided at the upper end of the connecting pipe 66. The suction head 67 passes through the base plate 6, and its upper end extends out of the base plate 6. A probe head 61 is fixed on the lower extension plate 60, and a rotating plate 670 is fixed on the connecting pipe 66. The outer end of the rotating plate 670 has a convex arc-shaped structure. The probe head 61 is used to sense whether the rotating plate 670 is close. The second motor 63 can adjust the orientation of the chip on the suction head 67 to facilitate the placement of the chip on the turntable 45 and the eutectic operation.

[0030] In this embodiment, the cut chips are respectively pasted onto the blue film, and the blue film is pasted onto the fixing ring 50. In this embodiment, four types of ring grooves 47 are provided for placing the chips. The fixing ring 50 and the ring grooves 47 are matched in size to avoid the problem of displacement when adjusting the position of the fixing ring 50 and the chips on it after placement. In addition, after the fixing ring 50 is placed, it is fixed by the set pressure plate 49, which can further prevent the position of the fixing ring 50 and the chips on it from shifting, thereby improving the accuracy of eutectic when four different chips are eutectic.

[0031] In addition, the chip used to support four different chips is used as a carrier board and is suctioned onto the suction head 67 by negative pressure. After placement, its posture can be adjusted by a high-precision visual recognition camera to ensure the positional accuracy of different chips during co-crystallization. The rotating plate 670 and the probe head 61 set on it can provide feedback on the rotation amount of the chip's posture adjustment, thereby ensuring the accuracy of the adjustment.

[0032] In this embodiment, when adjusting and correcting the position of the chip in the X and Y directions, the stepper motors on the first linear mechanism 1 and the second linear mechanism 2 are activated. In this way, the coordinate points of the rotating base 39 and the five different chips on it in the X and Y directions can be adjusted by the stepper motors.

[0033] In this embodiment, during eutectic bonding, a chip transfer mechanism is also required. This mechanism can sequentially transfer the chips on the turntable 45 to the chips placed on the pick-up head 67.

[0034] Specifically, when transferring chips, the first motor 34 needs to be started. Driven by the first motor 34, the drive wheel 35 rotates. The rotation of the drive wheel 35 will drive the driven wheel 37 to rotate through the transmission belt 36. The rotation of the driven wheel 37 will drive the turntable 45 to rotate, so that one of the chips is brought close to the chip on the suction head 76. Then, the chip transfer mechanism picks up the chip and transfers it to the chip on the suction head 76.

[0035] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations of this utility model fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A multi-tray feed mechanism, characterized by, It includes a first linear mechanism (1), a movable block (100) is provided on the first linear mechanism (1), a second linear mechanism (2) is installed on the movable block (100), and a sliding block (20) is provided on the second linear mechanism (2). The moving direction of the movable block (100) is perpendicular to the moving direction of the sliding block (20). A rotating mechanism is installed on the movable block (100), and an angle adjustment mechanism is provided on the rotating mechanism. The rotating mechanism is used to place multiple disk-shaped chips, and the angle adjustment mechanism is used to adjust the posture of the disk-shaped chips.

2. The multiple tray feeder mechanism according to claim 1, wherein, The rotating mechanism includes a fixed seat (30) mounted on the upper end of the sliding block (20) by screws, a mounting seat (33) mounted on the fixed seat (30), a first motor (34) mounted on the mounting seat (33), a drive wheel (35) connected to the output shaft of the first motor (34), a rotating base (39) mounted on the upper end of the fixed seat (30) by screws, a spindle (38) rotatably mounted on the rotating base (39) by bearing seats, a plurality of through holes (40) arranged in a circumferential array around the axis of the spindle (38) on the rotating base (39), a driven wheel (37) fixed at the lower end of the spindle (38), the driven wheel (37) and the drive wheel (35) are driven by a transmission belt (36), and a turntable (45) fixed at the upper end of the spindle (38) by screws. The turntable (45) has multiple round holes (46), and an annular groove (47) is provided on the inner circumference of the round holes (46). A fixing ring (50) is placed in the annular groove (47), and a blue film is pasted on the upper end of the fixing ring (50). Chips cut into particles are pasted on the blue film.

3. The multi-tray feed mechanism of claim 2, wherein, The drive wheel (35) and the driven wheel (37) are synchronous pulleys, and the transmission belt (36) is a synchronous belt.

4. The multiple tray feed mechanism of claim 2 wherein, The outer periphery of the rotating base (39) is formed with a groove (41), and a notch (42) is provided at the bottom of the groove (41). The width of the notch (42) is smaller than the width of the groove (41). An inner plate (43) is fixed inside the groove (41) by screws. A support wheel is rotatably provided inside the inner plate (43) through a connecting shaft. The lower wall of the turntable (45) is tangent to the outer periphery of the support wheel.

5. The multi-tray feed mechanism of claim 2, wherein, Several limiting arc plates (54) are formed extending upward on the rotating base (39), and the inner periphery of the limiting arc plates (54) abuts against the outer periphery of the turntable (45).

6. The multi-tray feed mechanism of claim 2, wherein, The upper end of the fixing ring (50) abuts against at least two pressure plates (49). The outer end of the pressure plate (49) is provided with a connecting screw (48). The lower end of the connecting screw (48) is connected to the turntable (45) by a thread. The upper end of the connecting screw (48) is fitted with a spring, and the lower end of the spring abuts against the upper wall of the pressure plate (49).

7. The multi-tray feed mechanism of claim 2, wherein, A proximity switch (53) is mounted on the rotating base (39) by screws, and a T-shaped piece (52) is mounted on the upper wall of the turntable (45) by screws. The proximity switch (53) is used to sense whether the T-shaped piece (52) is close.

8. The multiple tray feed mechanism of claim 2 wherein, The angle adjustment mechanism includes a base plate (6) mounted on a rotating base (39). A lower extension plate (60) is fixed to the lower wall of the base plate (6). A connecting plate (62) is fixed to the lower end of the lower extension plate (60) by screws. A second motor (63) is mounted on the lower end of the connecting plate (62). The rotating shaft of the second motor (63) is a hollow tubular structure. A connector (65) is rotatably provided at the lower end of the rotating shaft of the second motor (63). A connecting pipe (66) is connected to the upper end of the rotating shaft of the second motor (63). A suction head (67) is provided at the upper end of the connecting pipe (66). The suction head (67) passes through the base plate (6), and the upper end of the suction head (67) extends out of the base plate (6).

9. The multi-tray feed mechanism of claim 8, wherein, A probe (61) is fixed on the lower extension plate (60), and a rotating plate (670) is fixed on the connecting pipe (66). The outer end of the rotating plate (670) has a raised arc-shaped structure. The probe (61) is used to sense whether the rotating plate (670) is close.

Images