A substrate holder conveying device

Abstract

This utility model relates to the technical field of substrate holder transportation, and more particularly to a substrate holder conveying device, including a base, a moving mechanism, and a guiding mechanism. The base is provided with opposing first and second frames and a receiving cavity disposed between the first and second frames. The moving mechanism is disposed at the lower part of the receiving cavity, and the receiving cavity is provided with a guiding mechanism on at least one side. The first and second frames position the substrate holder in the receiving cavity, the moving mechanism supports the substrate holder and drives it to move within the receiving cavity, and the guiding mechanism guides the substrate holder's movement. The moving mechanism ensures smooth movement of the substrate holder within the receiving cavity, improving the loading and unloading efficiency of the substrate holder. The guiding mechanism ensures the positional accuracy of the substrate holder during movement, preventing the substrate holder from shifting or jamming. Compared with the prior art, this conveying device realizes automated conveying of the substrate holder, reduces the risk of manual operation, and improves the turnover efficiency and reliability of the substrate holder.

Description

Technical Field

[0001] This utility model relates to the technical field of substrate carrier transportation, and in particular to a substrate carrier conveying device. Background Technology

[0002] In the vacuum coating production process, the substrate holder, as a key carrier of the product, needs to frequently switch between vacuum and atmospheric environments. This condition makes the substrate holder structure prone to thermal deformation and mechanical fatigue, while coating residues continuously accumulate on the holder surface. Current technologies mainly rely on integrated online transport devices to achieve the cyclical transfer of substrate holders, but this has significant drawbacks: when the substrate holder requires maintenance, it must be manually transferred from the production line to the maintenance station. Especially for large-sized substrate holders, manual handling is not only inefficient but also poses a safety hazard of slipping and falling.

[0003] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0004] This invention addresses the problem in the prior art where substrate holders need to be manually transferred from the production line to the maintenance station, especially for large substrate holders. Manual handling is not only inefficient but also poses a safety hazard of slipping and falling. This invention proposes a substrate holder conveying device.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A substrate holder conveying device, comprising:

[0007] A base, wherein the base is provided with a first frame and a second frame opposite to each other, and a receiving cavity disposed between the first frame and the second frame;

[0008] A moving mechanism is provided at the lower part of the receiving cavity, and the moving mechanism is used to drive the substrate holder to move within the receiving cavity;

[0009] A guiding mechanism is provided on at least one side of the receiving cavity, and the guiding mechanism is used to guide the substrate holder to move within the receiving cavity.

[0010] As described above, in a substrate carrier conveying device, the moving mechanism includes a first driving device connected to the base. The first driving device includes a motor module and a drive wheel module disposed on the base. The drive wheel module includes a first mounting seat disposed on the base and a drive gear rotatably disposed in the first mounting seat. The motor module drives the drive gear to rotate in the first mounting seat. The drive gear is located in the lower part of the receiving cavity and is meshed with the substrate carrier for transmission.

[0011] As described above, in a substrate carrier conveying device, the moving mechanism further includes a second driving device disposed on the base. The second driving device includes a plurality of support wheel modules, each of which is spaced apart along the moving direction of the substrate carrier. The driving wheel module is disposed on one side of any of the support wheel modules, and the support wheel modules assist the substrate carrier in moving within the receiving cavity.

[0012] As described above, in a substrate carrier conveying device, each of the support wheel modules includes a second mounting base disposed on the base, a support wheel rotatably disposed on the second mounting base, a clearance groove on the outside of the support wheel, and a rotating surface located on at least one side of the clearance groove and in contact with the substrate carrier, the clearance groove being located in the lower part of the receiving cavity.

[0013] As described above, in a substrate carrier conveying device, the moving mechanism further includes a positioning device connected to a second driving device. The positioning device includes a plurality of baffle wheel modules. Each of the support wheel modules has a baffle wheel module on both sides opposite to it. Each baffle wheel module includes an assembly bracket connected to the support wheel module and a baffle wheel connected to the assembly bracket. The baffle wheel is rotatably disposed on the side of the assembly bracket facing the support wheel module, and the baffle wheel is in contact with the substrate carrier.

[0014] As described above, a substrate holder conveying device includes a guiding mechanism comprising a first guiding device disposed on the upper part of the first frame and a second guiding device disposed on the upper part of the second frame. The first guiding device and the second guiding device are respectively located on both sides of the receiving cavity, and the substrate holder is guided to move within the receiving cavity by the first guiding device and the second guiding device.

[0015] As described above, in a substrate carrier conveying device, the first guiding device and the second guiding device each include a telescopic drive device, a connecting bracket connected to the telescopic drive device, a guide wheel module disposed on the connecting bracket, and a slide rail module disposed at the lower part of the connecting bracket. The guide wheel module is provided in a plurality of units and is spaced apart along the connecting bracket. The telescopic drive device drives the connecting bracket to telescopically move relative to the receiving cavity, thereby driving the guide wheel module to telescopically move synchronously.

[0016] As described above, in a substrate carrier conveying device, each of the guide wheel modules includes a third mounting base connected to the connecting bracket and a guide wheel rotatably connected to the third mounting base. The guide wheel is located at one end of the third mounting base facing the receiving cavity, and the guide wheel can contact the substrate carrier and guide the substrate carrier to move within the receiving cavity.

[0017] The substrate carrier conveying device described above further includes a first position detector and a second position detector disposed on at least one side of the receiving cavity. The first position detector and the second position detector are spaced apart along the moving direction of the substrate carrier and are respectively disposed near both ends of the receiving cavity.

[0018] The substrate carrier conveying device described above further includes a limiting component disposed at at least one end of the receiving cavity, which restricts the substrate carrier from leaving the receiving cavity. The limiting component includes a fourth mounting base and a baffle rotatably disposed in the fourth mounting base. The baffle can rotate relative to the fourth mounting base to move closer to or away from the receiving cavity.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] This invention provides a substrate holder conveying device. A first frame and a second frame position the substrate holder within a receiving cavity. A moving mechanism supports the substrate holder and drives it to move within the cavity. A guiding mechanism also guides the substrate holder's movement within the cavity. This invention solves the safety hazards associated with manually handling large substrate holders by incorporating a specialized conveying device. The moving mechanism provides a stable driving force for the substrate, reducing reliance on manual pushing and additional mechanical equipment such as robotic arms, ensuring smooth movement of the substrate holder within the receiving cavity and improving loading and unloading efficiency. The guiding mechanism ensures the positional accuracy of the substrate holder during movement, preventing offset or jamming. Compared to existing technologies, this conveying device achieves automated substrate holder transport, reduces the risks of manual operation, and improves substrate holder turnover efficiency and reliability.

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0022] Figure 1 This is a perspective view of the substrate holder conveying device of this utility model;

[0023] Figure 2 This is a perspective view of the first drive device of the substrate carrier conveying device of this utility model;

[0024] Figure 3 for Figure 2 C-C section view in the middle;

[0025] Figure 4 This is a perspective view of the first driving device and positioning device of the substrate carrier conveying device of this utility model;

[0026] Figure 5 This is a perspective view of the guiding mechanism of the substrate holder conveying device of this utility model;

[0027] Figure 6 This is a diagram showing the substrate carrier conveying device of this utility model in use;

[0028] Figure 7 for Figure 6 This is an enlarged view of part A;

[0029] Figure 8 for Figure 6 A partial enlarged view of the B-B section view in the image;

[0030] Figure 9 The operating state of the guide mechanism of the substrate carrier conveying device of this utility model. Figure 1 ;

[0031] Figure 10 The operating state of the guide mechanism of the substrate carrier conveying device of this utility model. Figure 2 ;

[0032] Figure 11 The operating status of the limiting component of the substrate carrier conveying device of this utility model. Figure 1 ;

[0033] Figure 12 The operating status of the limiting component of the substrate carrier conveying device of this utility model. Figure 2 . Detailed Implementation

[0034] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0035] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0036] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0037] like Figure 1 As shown in Figure 12, this utility model provides a substrate holder conveying device. The conveying device 100 can be used in conjunction with a vacuum coating production line. When the substrate holder 200 needs maintenance, the substrate holder 200 is transferred between the coating production line and the maintenance station through the conveying device 100, thereby ensuring the safe and smooth turnover of the substrate holder 200 between the coating production line and the maintenance station and improving the turnover efficiency of the substrate holder 200.

[0038] Specifically, such as Figure 1As shown, the conveying device 100 includes a base 110, a moving mechanism 150 for driving the substrate holder 200 to move, and a guiding mechanism 160 for guiding the movement of the substrate holder 200. The base 110 has opposing first frames 120 and second frames 130, and a receiving cavity 140 located between the first frames 120 and the second frames 130. The moving mechanism 150 is located at the lower part of the receiving cavity 140. The receiving cavity 140 has the guiding mechanism 160 on at least one side. In practical applications, the substrate holder 200 can be positioned within the receiving cavity 140 by the first frames 120 and the second frames 130. The moving mechanism 150 supports the substrate holder 200 and drives it to move within the receiving cavity 140. Simultaneously, the guiding mechanism 160 guides the substrate holder 200 to move within the receiving cavity 140. This utility model utilizes a dedicated conveying device 100. This invention solves the safety hazards associated with manually handling large substrate holders 200. The moving mechanism 150 provides a stable main driving force for the substrates, reducing reliance on manual pushing and additional mechanical equipment such as robotic arms. This ensures smooth movement of the substrate holder 200 within the receiving cavity 140, improving the loading and unloading efficiency of the substrate holder 200 in the conveying device 100. The guiding mechanism 160 ensures the positional accuracy of the substrate holder 200 during movement, preventing deviation or jamming. Compared with existing technologies, this conveying device 100 achieves automated conveying of the substrate holder 200, reducing the risks of manual operation and improving the turnover efficiency and reliability of the substrate holder 200. Furthermore, by integrating the moving mechanism 150 and the guiding mechanism 160 onto the base 110, a compact conveying system is formed, facilitating the relocation of the conveying device 100 between different locations within the factory.

[0039] In this embodiment, the receiving cavity 140 is formed by a first frame 120 and a second frame 130 spaced apart, such that both ends of the receiving cavity 140 form open openings 141 communicating with the outside. The receiving cavity 140 extends upward along the height direction of the first frame 120 and the second frame 130, and both open openings 141 can be passed through by the substrate holder 200. The receiving cavity 140 has a preset movement trajectory communicating with the two open openings 141, and the substrate holder 200 can enter and exit the receiving cavity through either open opening 141. The substrate holder 200 moves in the direction from the left or right opening 141 of the receiving cavity 140 toward the interior of the receiving cavity 140, forming the moving direction of the substrate holder 200. The opening 141 for the substrate holder 200 to enter and exit the receiving cavity 140 can be the same or different, and this utility model does not make a specific limitation. Furthermore, the conveying device 100 may be provided with a walking mechanism (not shown in the figure). The walking mechanism can be manually pushed or an automatic walking mechanism, and this utility model does not make a specific limitation. In practical applications, the substrate holder 200 can be clamped by existing hoisting equipment in the vacuum coating plant, driving the substrate holder 200 into the receiving cavity 140 from any of the openings 141. The moving mechanism 150 is connected to the substrate holder 200 to drive the substrate holder 200 to move within the receiving cavity 140. At the same time, the guiding mechanism 160 further guides the substrate holder 200 to move within the receiving cavity 140 along a preset trajectory, thereby ensuring the safe and smooth turnover of the substrate holder 200 between the coating production line and the maintenance station, thus improving the turnover efficiency of the substrate holder 200. Furthermore, the conveying device 100 can pick up an empty substrate holder 200 at any appropriate position in the coating production line and transfer the substrate holder 200 from the coating production line to the maintenance station. The maintenance station can be set outside the cleanroom to save cleanroom space, and the transfer of the substrate holder 200 will not pollute the cleanroom environment.

[0040] In one alternative embodiment of the moving mechanism 150, such as Figures 1 to 3 , Figure 7 and Figure 8As shown, the moving mechanism 150 includes a first driving device 151 connected to the base 110. The first driving device 151 includes a motor module 1511 and a drive wheel module 1512 disposed on the base 110. The drive wheel module 1512 includes a first mounting seat 15121 disposed on the base 110 and a drive gear 15122 rotatably disposed in the first mounting seat 15121. The motor module 1511 drives the drive gear 15122 to rotate in the first mounting seat 15121. The drive gear 15122 is located at the lower part of the receiving cavity 140 and is meshed with the substrate holder 200 for transmission. Specifically, the motor module 1511 may be disposed on the outside of the first frame 120 or the second frame 130 and mounted on... On the base 110, the output shaft of the motor module 1511 passes through the first mounting base 15121 in the direction perpendicular to the moving direction of the substrate holder 200 and is connected to the drive gear 15122, so that the motor module 1511 can drive the drive gear 15122 to rotate in the first mounting base 15121. The drive gear 15122 can be rotatably connected to the first mounting base 15121 through a bearing assembly. The moving mechanism 150 realizes precise movement control of the substrate holder 200 through gear meshing transmission. Compared with the traditional friction drive method, gear transmission has higher positioning accuracy and transmission efficiency, which can effectively avoid slippage and improve the loading and unloading efficiency and movement efficiency of the substrate holder 200 in the conveying device 100, thereby improving the turnover efficiency of the substrate holder 200.

[0041] Furthermore, the drive gear 15122 extends at least partially into the receiving cavity 140 through the top of the first mounting base 15121, which can ensure the meshing transmission connection between the drive gear 15122 and the substrate holder 200, ensure the transmission stability between the moving mechanism 150 and the substrate holder 200, and avoid interference from other mechanical structures.

[0042] Further optional, such as Figure 2 and Figure 3As shown, the drive wheel module 1512 further includes a transmission assembly 15123 disposed between the first mounting base 15121 and the drive gear 15122. The transmission assembly 15123 includes a rotating shaft 151231 rotatably passing through the first mounting base 15121. One end of the rotating shaft 151231 passes through the first mounting base 15121 and is connected to the motor module 1511. The drive gear 15122 is sleeved outside the rotating shaft 151231. Between the rotating shaft 151231 and the drive gear 15122... A limiting block 151232 is provided to restrict the rotation of the drive gear 15122 around the rotating shaft 151231. Specifically, the rotating shaft 151231 passes through the first mounting base 15121 along the axial direction of the drive gear 15122, and one end of the rotating shaft 151231 extending out of the first mounting base 15121 is connected to the output shaft of the motor module 1511 via a coupling, so as to facilitate the transmission connection between the motor module 1511 and the transmission assembly 15123, and enable the drive gear 15122 to rotate around the shaft 151231. 2. The rotating shaft 151231 can rotate synchronously with the output shaft of the motor module 1511, which helps to simplify the rotation drive structure of the drive gear 15122 and improve transmission efficiency. Furthermore, the rotating shaft 151231 is connected to the first mounting base 15121 via a bearing, so that the rotating shaft 151231 can rotate within the first mounting base 15121. Furthermore, the limiting block 151232 is located outside the rotating shaft 151231, and the drive gear 15122 has a groove that matches the limiting block 151232. 151221, the drive gear 15122 is fitted and installed outside the rotating shaft 151231, and the limiting block 151232 is fitted and connected inside the groove 151221 to ensure that the drive gear 15122 and the rotating shaft 151231 are relatively stationary. In actual application, the rotating shaft 151231 is driven to rotate by the motor module 1511, and the drive gear 15122 is driven to rotate in the first mounting seat 15121 by the rotating shaft 151231, thereby driving the substrate holder 200 to move by the drive gear 15122.

[0043] Optionally, the motor module 1511 may be a servo motor module 1511, etc., and this utility model does not make a specific limitation; in practical applications, the rotation direction of the drive gear 15122 can be controlled by the servo motor module, thereby adjusting the conveying direction of the substrate frame 200.

[0044] In another alternative embodiment of the moving mechanism 150, such as Figures 1 to 3 , Figure 7 and Figure 8As shown, the moving mechanism 150 further includes a second driving device 152 disposed on the base 110. The second driving device 152 includes a plurality of support wheel modules 1521, each of which is spaced apart along the moving direction of the substrate holder 200. A driving wheel module 1512 is disposed on one side of any of the support wheel modules 1521. The preset trajectory is located between the driving wheel module 1512 and each of the support wheel modules 1521. Based on the driving wheel module 1512 driving the substrate holder 200 to move, the support wheel modules 1521 assist in the movement. The substrate holder 200 moves within the receiving cavity 140; optionally, each of the support wheel modules 1521 is evenly distributed along the bottom of the receiving cavity 140; the conveying device 100 can drive the substrate holder 200 to move by cooperating with the drive wheel module 1512 through several of the support wheel modules 1521, further improving the turnover efficiency and movement stability of the substrate holder 200, and each of the support wheel modules 1521 can support the substrate holder 200, effectively distributing the weight load of the substrate holder 200, and avoiding excessive load on the drive gear 15122, which would affect its service life.

[0045] Further optional, such as Figures 1 to 3 , Figure 7 and Figure 8As shown, each of the support wheel modules 1521 includes a second mounting base 15211 disposed on the base 110, and a support wheel 15212 rotatably disposed on the second mounting base 15211. The support wheel 15212 has a clearance groove 15213 on its outer side and a rotating surface 15214 located on at least one side of the clearance groove 15213 and in contact with the substrate holder 200. The rotating surface 15214 is formed through the outer wall of the support wheel 15212. The clearance groove 1521... 3 is located at the lower part of the receiving cavity 140; specifically, the support wheel module 1521 is fixed to the base 110 by the second mounting seat 15211, the support wheel 15212 is rotatably mounted in the second mounting seat 15211, the clearance groove 15213 on the outside of the support wheel 15212 is used to provide moving space for the substrate holder 200, and the rotating surface 15214 contacts the substrate holder 200 to provide support and assist movement; during the movement of the substrate holder 200, each of the support wheels 1521 The rotation direction of 2 is consistent with the rotation direction of the drive gear 15122. In practical applications, the support wheel 15212 contacts the substrate holder 200 through the rotating surface 15214. When the substrate holder 200 is driven to move by the drive gear 15122, sliding friction is generated between the rotating surface 15214 and the substrate holder 200, causing the support wheel 15212 to rotate in the second mounting base 15211 to further drive the substrate holder 200 to move. This is beneficial to improving the conveying efficiency and movement stability of the substrate holder 200. In this embodiment, by optimizing the structural design of the support wheel 15212, it can better adapt to the movement requirements of the substrate holder 200, reduce the maintenance frequency of the substrate holder 200, and improve the production efficiency of coated products. In addition, the clearance groove 15213 and the drive gear 15122 are in the same straight line to ensure that the substrate holder 200 moves stably along a preset trajectory in the receiving cavity 140, avoiding misalignment or displacement of the substrate holder 200.

[0046] Alternatively, the relief groove 15213 can be set in the middle of the support wheel 15212, and the rotating surface 15214 can be symmetrically distributed on both sides of the relief groove 15213 to provide more stable support for the substrate holder 200.

[0047] In another alternative embodiment of the moving mechanism 150, such as Figures 1 to 3 , Figure 7 and Figure 8As shown, the moving mechanism 150 further includes a positioning device 153 connected to the second driving device 152. The positioning device 153 includes a plurality of baffle wheel modules 1531. Each of the support wheel modules 1521 has a baffle wheel module 1531 on both sides opposite to it. Each baffle wheel module 1531 includes an assembly bracket 15311 connected to the support wheel module 1521 and a baffle wheel 15312 connected to the assembly bracket 15311. The baffle wheel 15312 is rotatably disposed on the side of the assembly bracket 15311 facing the support wheel module 1521, and the baffle wheel 15312 is connected to the substrate frame 2. 00 contact; specifically, the mounting bracket 15311 in the baffle wheel module 1531 can be fixed to the second mounting seat 15211 in the support wheel module 1521 by welding or bolt connection. This embodiment does not make specific limitations. The baffle wheel 15312 can be rotatably connected to the mounting bracket 15311 through the bearing assembly. The rotation axis of the baffle wheel 15312 is perpendicular to the moving direction of the substrate frame 200. Furthermore, the baffle wheel module 1531 is symmetrically arranged on both sides of the support wheel module 1521 so that the corresponding two sides of the substrate frame 200 are balanced, ensuring the stability of movement and avoiding misalignment and displacement of the substrate frame 200. In this embodiment, rotatable baffle wheels 15312 are provided on both sides of the support wheel module 1521 to achieve the movement and positioning of the substrate holder 200. This effectively limits the lateral displacement of the substrate holder 200 during movement. When the substrate holder 200 undergoes lateral displacement due to its own weight or inertia, the baffle wheels 15312 generate a reverse force through rolling contact with the substrate holder 200, thereby maintaining the linear motion trajectory of the substrate holder 200. At the same time, the positioning and auxiliary movement of the substrate holder 200 are achieved through the rolling friction of the baffle wheels 15312 on both sides. This avoids hard contact between the baffle wheels 15312 and the substrate holder 200, which would cause structural damage to the substrate holder 200. It also significantly reduces the labor intensity of the operators and improves the conveying efficiency and movement stability of the substrate holder 200.

[0048] This utility model also provides an optional embodiment of the guide mechanism 160, such as... Figure 1 , Figure 9 and Figure 10As shown, the guiding mechanism 160 includes a first guiding device 160a disposed on the upper part of the first frame 120 and a second guiding device 160b disposed on the upper part of the second frame 130. The first guiding device 160a and the second guiding device 160b are respectively located on both sides of the receiving cavity 140. The substrate holder 200 is guided to move within the receiving cavity 140 by the first guiding device 160a and the second guiding device 160b. Specifically, the top of the substrate holder 200 can extend out from the top of the receiving cavity 140. The first guiding device 160a and the second guiding device 160b are disposed opposite to each other on both sides of the receiving cavity 140, so that the first guiding device 160a and the second guiding device 160b can contact the sides of the substrate holder 200 to further realize the movement and positioning of the substrate holder 200 and improve the movement reliability and stability of the substrate holder 200.

[0049] like Figure 1 , Figure 9 and Figure 10 As shown, Figure 9 This indicates the retracted state of the telescopic drive device 161. Figure 10This indicates the extended state of the telescopic drive device 161; further optionally, both the first guide device 160a and the second guide device 160b include a telescopic drive device 161, a connecting bracket 162 connected to the telescopic drive device 161, a guide wheel module 163 disposed on the connecting bracket 162, and a slide rail module 164 disposed at the lower part of the connecting bracket 162. The guide wheel module 163 is provided in a plurality of units and spaced apart along the connecting bracket 162. The telescopic drive device 161 drives the connecting bracket 162 to telescopically move relative to the receiving cavity 140, thereby... The guide wheel module 163 moves synchronously telescopically. Since the first guide device 160a and the second guide device 160b have similar structures, the following description uses the first guide device 160a as an example. Specifically, the telescopic drive device 161 is fixedly installed on the top of the first frame 120, and the moving end of the telescopic drive device 161 faces the receiving cavity 140. The connecting bracket 162 is connected to the moving end of the telescopic drive device 161. The connecting bracket 162 extends along the length of the receiving cavity 140, and several guide wheel modules 163 are evenly distributed along the length of the connecting bracket 162. The slide rail module... Group 164 is installed between the first frame 120 and the connecting bracket 162. Several slide rail modules 164 can be provided and evenly distributed along the length of the connecting bracket 162. In this embodiment, the telescopic drive device 161 drives the connecting bracket 162 to telescopically move relative to the receiving cavity 140, thereby driving the guide wheel modules 163 to telescopically move synchronously. This allows the guide wheel modules 163 in the first guide device 160a and the second guide device 160b to move towards or away from each other, thus achieving rapid positioning and release actions of the guide wheel modules 163 on both sides of the substrate holder 200. Simultaneously, the slide rail module 164... The rail module 164 supports the connecting bracket 162 and further assists the connecting bracket 162 in moving, enabling the guide wheel module 163 to move smoothly, thereby improving the telescopic stability and efficiency of the guide wheel module 163. In addition, the connecting bracket 162 obtains telescopic movement power through the telescopic drive device 161, which drives the slide rail module 164 to run. The slide rail module 164 assists the connecting bracket 162 in moving, further improving the movement stability and efficiency of the guide wheel module 163. Moreover, the slide rail module 164 can ensure the linear motion accuracy of the connecting bracket 162 during the telescopic process and prevent deviation.

[0050] In practical applications, when the conveyor 100 is feeding substrates, the hoisting equipment or robotic arm in the factory can grab the top of the substrate holder 200 and move the substrate holder 200, allowing it to enter the receiving cavity 140 through either of the openings 141 at both ends. At this time, the moving ends of the telescopic drive devices 161 on both sides retract, creating clearance space between the first guide device 160a and the second guide device 160b to allow the substrate holder 200 to move, ensuring stable feeding of the substrate holder 200 and preventing mechanical interference between the substrate holder 200 and the guide mechanism 160, thereby protecting the substrate holder 200. When the substrate... After the substrate holder 200 enters the receiving cavity 140, the moving ends of the telescopic drive devices 161 on both sides can be triggered to extend and drive the guide wheel modules 163 on both sides to move towards each other. The guide wheel modules 163 on both sides move towards each other until they contact the substrate holder 200, realizing the rapid movement and positioning of the substrate holder 200. At the same time, it can further guide the substrate holder 200 to move within the receiving cavity 140, further improving the movement efficiency and stability of the substrate holder 200. When the conveying device 100 unloads the substrate, the telescopic drive devices 161 on both sides can drive the guide wheel modules 163 on both sides to move away from each other to release the substrate holder 200. At this time, the substrate holder 200 can be easily removed. Compared with the fixed clamping groove structure in the existing conveying device 100, this embodiment effectively avoids the guide mechanism 160 from obstructing the substrate holder 200 during loading and unloading by setting the guide wheel modules 163 on both sides as telescopic drives. This reduces the difficulty of alignment between the substrate holder 200 and the guide mechanism 160 during loading and unloading, thereby protecting the substrate holder 200. Moreover, the distance between the guide wheel modules 163 on both sides can be adjusted by the telescopic drive device 161, so that the conveying device 100 can be adapted to use with substrate holders 200 of different thicknesses, improving the adaptability and versatility of the conveying device 100.

[0051] Optionally, the telescopic drive device 161 may be a linear drive component such as an electric push rod or a telescopic cylinder, and this utility model does not make any specific limitation.

[0052] Optionally, the slide rail module 164 may be a linear slide rail module in the prior art, and this utility model does not make any specific limitation.

[0053] Optionally, each guide wheel module 163 includes a third mounting base 1631 connected to the connecting bracket 162 and a guide wheel 1632 rotatably connected to the third mounting base 1631. The guide wheel 1632 is located at one end of the third mounting base 1631 facing the receiving cavity 140. The guide wheel 1632 can contact the substrate holder 200 and guide the substrate holder 200 to move within the receiving cavity 140. Specifically, the rotation axis of the guide wheel 1632 is perpendicular to the moving direction of the substrate holder 200. The third mounting base 1631 can be connected to the connecting bracket 162 via bolts, screws, or other connecting parts. The third mounting base 1631 extends at least partially relative to the connecting bracket 162 towards the receiving cavity 140. The guide wheel 1632 can be rotatably mounted in the third mounting base 1631 near the receiving cavity 140 via a bearing assembly. This facilitates the assembly of the guide wheel 1632, shortens the travel of the guide wheel 1632, and improves the telescopic movement efficiency of the guide wheel 1632. In practical applications, when the substrate holder 200 moves within the receiving cavity 140 and comes into contact with the guide wheel 1632, rolling friction is generated between the guide wheel 1632 and the substrate holder 200. This allows the guide wheel 1632 to further guide the substrate holder 200 to move within the receiving cavity 140, improving the movement stability and efficiency of the substrate holder 200. Furthermore, the rolling friction of the guide wheel 1632 reduces the frictional resistance of the substrate holder 200 during movement, preventing vibration or scratches on the substrate holder 200 due to friction.

[0054] Optionally, the outer wall of the guide wheel 1632 can be configured as a spherical or cylindrical surface to improve the smoothness of the movement of the substrate holder 200 and reduce the noise during the movement of the substrate holder 200.

[0055] Optionally, the guide wheel 1632 may be made of PEEK (polyether ether ketone) material to improve the flexible contact between the guide wheel 1632 and the substrate holder 200, thereby further protecting the substrate holder 200 and reducing noise during the transport process of the substrate holder 200.

[0056] On the other hand, in another alternative embodiment of the conveying device 100, such as Figure 1As shown, the conveying device 100 further includes a first position detector 171 and a second position detector 172 disposed on at least one side of the receiving cavity 140. The first position detector 171 and the second position detector 172 are spaced apart along the moving direction of the substrate holder 200 and are respectively disposed near both ends of the receiving cavity 140. Specifically, the first position detector 171 and the second position detector 172 can be installed in the first frame 120 or the second frame 130, and the detection ends of the first position detector 171 and the second position detector 172 both face the receiving cavity 140. The first position detector 171 and the second position detector 172 are respectively disposed near the openings 141 at the left and right ends of the receiving cavity 140, and the position of the substrate holder 200 in the receiving cavity 140 is detected by the first position detector 171 and the second position detector 172. Optionally, the first position detector 171 and the second position detector 172 can be configured as ultrasonic sensors or photoelectric sensors, etc., and this utility model does not impose specific limitations. Further, the first position detector 171 and / or the second position detector 172 can be configured to operate in conjunction with the guide mechanism 160. In practical applications, when one of the position detectors detects that the substrate holder 200 has entered the receiving cavity 140, it can trigger the telescopic drive devices 161 on both sides to drive the guide wheel modules 163 on both sides to move towards each other, so as to quickly position the substrate holder 200 and guide the substrate holder 200 to move. When both position detectors detect the substrate holder 200, it can be said that the substrate holder 200 has moved into place in the conveying device 100. At this time, the conveying device 100 can be moved as a whole to improve the automation control of the conveying device 100, thereby improving the turnover efficiency of the substrate holder 200.

[0057] In another optional embodiment of the conveying device 100, the first position detector 171 and the second position detector 172 can be provided in both the first frame 120 and the second frame 130 to improve the accuracy of the position detection of the substrate holder 200 in the receiving cavity 140. The first position detector 171 in the first frame 120 and the second frame 130 are arranged opposite to each other, and the second position detector 172 in the first frame 120 and the second frame 130 are arranged opposite to each other to avoid confusion in the detection position and affect the coordinated operation control of the various mechanisms of the conveying device 100.

[0058] On the other hand, such as Figure 1 , Figure 11 and Figure 12 As shown, Figure 11 This indicates the stop state of the limit component 180. Figure 12This indicates the cancellation of the stop state of the limiting component 180; in another optional embodiment of the conveying device 100, the conveying device 100 further includes a limiting component 180 disposed at at least one end of the receiving cavity 140, which restricts the substrate holder 200 from leaving the receiving cavity 140. The limiting component 180 includes a fourth mounting base 181 and a baffle 182 rotatably disposed in the fourth mounting base 181. The baffle 182 can rotate relative to the fourth mounting base 181 to approach or move away from the receiving cavity 140. Specifically, the fourth mounting base 181 can be mounted on the first On one side of frame 120 or second frame 130, baffle 182 is rotatably mounted in fourth mounting base 181, and baffle 182 can rotate relative to fourth mounting base 181 to approach or move away from receiving cavity 140. In practical applications, after substrate holder 200 is loaded in conveying device 100, baffle 182 can be driven to rotate close to receiving cavity 140 to be opposite to receiving cavity 140, so that baffle 182 is opposite to substrate holder 200. During the conveying process of substrate holder 200, baffle 182 can stop substrate holder 200, thereby preventing substrate holder 200 from accidentally rushing out of receiving cavity 140 during the conveying process.

[0059] Further optionally, the limiting component 180 can be configured as a manual limiting component or an electric limiting component, which is not specifically limited in this utility model; wherein, if the limiting component 180 is configured as a manual limiting component, an unlockable locking component can be provided between the baffle 182 and the fourth mounting base 181, and the baffle 182 is fixed at the stop position by the locking component to prevent the baffle 182 from rotating relative to the fourth mounting base 181 under external force, thereby ensuring the stopping effect of the limiting component 180 on the substrate holder 200; further optionally, the locking component includes a locking member provided on the fourth mounting base 181 and a locking hole provided on the baffle 182 and corresponding to the locking member, and the locking member can be configured as a pin, bolt, etc., which is not specifically limited in this utility model.

[0060] Optionally, the limiting components 180 can be provided at both ends of the receiving cavity 140 to further enhance the stopping effect on the substrate holder 200, thereby further improving the conveying stability of the substrate holder 200.

[0061] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A substrate holder transport apparatus, characterized by, include: The base (110) is provided with a first frame (120) and a second frame (130) opposite to each other, and a receiving cavity (140) disposed between the first frame (120) and the second frame (130). A moving mechanism (150) is provided at the lower part of the receiving cavity (140), and the moving mechanism (150) is used to drive the substrate holder to move within the receiving cavity (140); A guiding mechanism (160) is provided on at least one side of the receiving cavity (140), and the guiding mechanism (160) is used to guide the substrate holder to move within the receiving cavity (140).

2. A substrate holder transport apparatus as claimed in claim 1, wherein, The moving mechanism (150) includes a first driving device (151) connected to the base (110). The first driving device (151) includes a motor module (1511) and a drive wheel module (1512) disposed on the base (110). The drive wheel module (1512) includes a first mounting seat (15121) disposed on the base (110) and a drive gear (15122) rotatably disposed in the first mounting seat (15121). The motor module (1511) drives the drive gear (15122) to rotate in the first mounting seat (15121). The drive gear (15122) is located at the lower part of the receiving cavity (140) and is connected to the substrate frame through meshing transmission via the drive gear (15122).

3. A substrate holder transport apparatus as claimed in claim 2, wherein, The moving mechanism (150) further includes a second driving device (152) disposed on the base (110). The second driving device (152) includes a plurality of support wheel modules (1521). Each support wheel module (1521) is spaced apart along the moving direction of the substrate frame. The driving wheel module (1512) is disposed on one side of any of the support wheel modules (1521) and assists the substrate frame in moving within the receiving cavity (140) through the support wheel module (1521).

4. A substrate holder transport apparatus as claimed in claim 3, wherein, Each of the support wheel modules (1521) includes a second mounting base (15211) disposed on the base (110) and a support wheel (15212) rotatably disposed on the second mounting base (15211). The support wheel (15212) is provided with a relief groove (15213) on its outside and a rotating surface (15214) located on at least one side of the relief groove (15213) and in contact with the substrate holder. The relief groove (15213) is located at the lower part of the receiving cavity (140).

5. A substrate holder transport apparatus as claimed in claim 3, wherein, The moving mechanism (150) further includes a positioning device (153) connected to the second driving device (152). The positioning device (153) includes a plurality of baffle wheel modules (1531). Each of the support wheel modules (1521) has a baffle wheel module (1531) on both sides opposite to it. The baffle wheel module (1531) includes an assembly bracket (15311) connected to the support wheel module (1521) and a baffle wheel (15312) connected to the assembly bracket (15311). The baffle wheel (15312) is rotatably disposed on the side of the assembly bracket (15311) facing the support wheel module (1521), and the baffle wheel (15312) is in contact with the substrate frame.

6. A substrate holder transport apparatus as claimed in claim 1, wherein, The guiding mechanism (160) includes a first guiding device (160a) disposed on the upper part of the first frame (120) and a second guiding device (160b) disposed on the upper part of the second frame (130). The first guiding device (160a) and the second guiding device (160b) are respectively located on both sides of the receiving cavity (140), and the substrate frame is guided to move within the receiving cavity (140) by the first guiding device (160a) and the second guiding device (160b).

7. A substrate holder transport apparatus as claimed in claim 6, wherein, The first guide device (160a) and the second guide device (160b) both include a telescopic drive device (161), a connecting bracket (162) connected to the telescopic drive device (161), a guide wheel module (163) disposed on the connecting bracket (162), and a slide rail module (164) disposed at the lower part of the connecting bracket (162). The guide wheel module (163) is provided in a plurality of units and is spaced apart along the connecting bracket (162). The telescopic drive device (161) drives the connecting bracket (162) to telescopically move relative to the receiving cavity (140), thereby driving the guide wheel module (163) to telescopically move synchronously.

8. A substrate holder transport apparatus as claimed in claim 7, wherein, Each of the guide wheel modules (163) includes a third mounting base (1631) connected to the connecting bracket (162) and a guide wheel (1632) rotatably connected to the third mounting base (1631). The guide wheel (1632) is located at one end of the third mounting base (1631) facing the receiving cavity (140). The guide wheel (1632) can contact the substrate holder and guide the substrate holder to move within the receiving cavity (140).

9. A substrate holder transport apparatus as claimed in any one of claims 1 to 8, wherein, It also includes a first position detector (171) and a second position detector (172) disposed on at least one side of the receiving cavity (140). The first position detector (171) and the second position detector (172) are spaced apart along the moving direction of the substrate holder and are respectively disposed near the two ends of the receiving cavity (140).

10. A substrate holder transport apparatus as claimed in any one of claims 1 to 8, wherein, The application further comprises a limiting assembly (180) arranged at at least one end of the accommodating cavity (140), which limits the substrate rack from being separated from the accommodating cavity (140), and the limiting assembly (180) comprises a fourth mounting base (181) and a baffle (182) rotatably arranged in the fourth mounting base (181), and the baffle (182) can rotate towards or away from the accommodating cavity (140) relative to the fourth mounting base (181).

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