A silicon carbide CVD coating equipment for hoisting insulated crucibles

Abstract

This utility model relates to a hoisting fixture for insulated crucibles in silicon carbide CVD coating equipment, belonging to the field of carbon-based material production equipment. It solves the problems of difficult installation and safety hazards during the installation process of existing silicon carbide CVD coating equipment insulation systems. The technical solution includes a first lifting device comprising a first upper lifting rod and a second upper lifting rod. One end of the first and second upper lifting rods is rotatably connected to a lifting component. The other end of the first upper lifting rod is rotatably connected to a first middle lifting rod. The second upper lifting rod is rotatably connected to a second middle lifting rod. One end of the first middle lifting rod is rotatably connected to the first upper lifting rod. The other end of the first middle lifting rod is fixedly connected to a first slider. One end of the second middle lifting rod is rotatably connected to the second upper lifting rod. The other end of the second middle lifting rod is fixedly connected to a second slider. The first slider and the second slider are slidably connected. This utility model is applied to carbon-based material production.

Description

Technical Field

[0001] This utility model provides a hoisting fixture for a silicon carbide CVD coating equipment insulated crucible, belonging to the technical field of carbon-based material production equipment. Background Technology

[0002] Silicon carbide CVD coating equipment produces silicon carbide coated products with wide applications in many high-tech fields. These are primarily used for coating core components in silicon-based semiconductor crystal pulling equipment, silicon and silicon carbide chip oxidation equipment, annealing equipment, silicon epitaxy, silicon carbide epitaxy, MOCVD, ion implantation, and etching equipment. Silicon carbide coatings can improve the heat resistance, corrosion resistance, and wear resistance of devices, thereby extending their lifespan and improving their performance.

[0003] The insulation system of the silicon carbide coating equipment is the core component of the entire system. The insulation crucible provides a stable and reliable coating space for the CVD coated components and is equipped with an external heating system. Existing insulation crucibles consist of two parts: a first crucible and a second crucible. Previously, when installing the insulation crucible, the first crucible had to be placed on a support platform first, then the installer would lift the first crucible and lower the second crucible onto the support platform to align it with the first crucible. However, due to the large size and heavy weight of the insulation crucible, the installation process was quite difficult. Utility Model Content

[0004] To address the technical problem of difficult installation and potential safety hazards in the existing silicon carbide CVD coating equipment insulation system, this utility model proposes a hoisting fixture for the insulation crucible of silicon carbide CVD coating equipment.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a hoisting fixture for a silicon carbide CVD coating equipment insulated crucible, including a first hoisting device, the first hoisting device including a first upper hoisting rod and a second upper hoisting rod, one end of the first upper hoisting rod and the second upper hoisting rod being rotatably connected to the hoisting component; The other end of the first upper boom is rotatably connected to the first middle boom, and the other end of the second upper boom is rotatably connected to the second middle boom. The first middle section of the boom includes a first connector, one end of which is rotatably connected to the first upper section of the boom, and the other end of which is fixedly connected to a second connector. The second middle boom includes a third connector, one end of which is rotatably connected to the second upper boom, and the other end of which is fixedly connected to a fourth connector. The end of the first connector away from the first upper boom is rotatably connected to the end of the third connector away from the second upper boom; The second connecting member is fixedly connected to the first slider via the first sliding rod, and the fourth connecting member is fixedly connected to the second slider via the second sliding rod. The first slider and the second slider are slidably connected. When the first sliding rod and the second sliding rod move toward each other or move away from each other, they drive the first slider and the second slider to move away from each other or move toward each other. The first slider is also provided with a first clamping part, and the second slider is also provided with a second clamping part. Both the first clamping part and the second clamping part abut against the inner wall of the first crucible.

[0006] Furthermore, the first slider is provided with a first slide rail and a first slide groove. The first slide rail is slidably connected to the second slide rod. The second slider is sleeved in the first slide groove, and the second slider and the first slide groove are in clearance fit. The second slider can slide along the length direction of the first slide groove in the first slide groove. The second slider has a second slide rail, which is slidably connected to the first slide rod, and the first slide rail and the second slide rail cooperate with each other.

[0007] Furthermore, a first anti-slip component is detachably and fixedly connected to the first clamping part at the point where it mates with the inner wall of the first crucible, and a second anti-slip component is detachably and fixedly connected to the second clamping part at the point where it mates with the inner wall of the first crucible.

[0008] Furthermore, the mating parts between the first anti-slip component and the inner wall of the first crucible, as well as the mating parts between the second anti-slip component and the inner wall of the first crucible, are arc-shaped structures, and the radius of the arc-shaped structure is the same as the radius of the first crucible.

[0009] Furthermore, a limiting block is fixedly connected to the first upper boom and / or the second upper boom, and the limiting block is positioned close to the first middle boom and / or the second middle boom.

[0010] Furthermore, one end of the first upper boom and the second upper boom are rotatably connected to the lifting component via a first pin. The first upper boom and the first middle boom are rotatably connected by a second pin, and the other end of the second upper boom is rotatably connected to the second middle boom by a third pin. The first connector and the third connector are rotatably connected by the fourth pin.

[0011] Furthermore, it also includes a second lifting device, one end of the first upper rod of the second lifting device and one end of the first lifting device are rotatably connected by a first pin; the first upper rod of the second lifting device and the first middle rod of the second lifting device are rotatably connected by a second pin, and the second upper rod of the second lifting device and the second middle rod of the second lifting device are rotatably connected by a third pin; the end of the first connecting member of the second lifting device away from the first upper rod of the second lifting device and the end of the third connecting member of the second lifting device away from the second upper rod of the second lifting device are rotatably connected by a fourth pin.

[0012] Furthermore, the lifting component is a lifting ring.

[0013] Furthermore, the limiting block has a triangular structure.

[0014] Furthermore, the first connector and the second connector form an integrally molded structure; the third connector and the fourth connector form an integrally molded structure.

[0015] The advantages of this utility model over the prior art are as follows: 1. This utility model uses the cooperation of a first upper lifting rod, a second upper lifting rod, a first middle lifting rod, a second middle lifting rod, a first slider, a second slider, a first clamping part, and a second clamping part to easily lift the first crucible; 2. By providing a first anti-slip component on the first clamping part and a second anti-slip component on the second clamping part, this utility model can prevent the first crucible from detaching from the first clamping part and the second clamping part when lifting the first crucible, thus ensuring the stability and safety of the lifting. 3. By setting limiting blocks on the first upper lifting rod and / or the second upper lifting rod, this utility model can prevent the included angle between the first upper lifting rod and the first middle lifting rod and / or the included angle between the second upper lifting rod and the second middle lifting rod from being too small, which would result in an excessively large relative distance between the first clamping part and the second clamping part, thereby damaging the first crucible. It also prevents interference between the joint between the first upper lifting rod and the first middle lifting rod and / or the joint between the second upper lifting rod and the second middle lifting rod and the heater inside the CVD coating equipment during the lifting of the first crucible, thus preventing damage to the heater. 4. This utility model has a simple structure, high efficiency in lifting the first crucible, and is economical. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the structure of this utility model without the second lifting device; Figure 3 This is a schematic diagram of the structure of the second slider and the first slider of this utility model in cooperation with each other; Figure 4 This is a schematic diagram of the structure of the first slider and the second slider of this utility model in cooperation with each other; Figure 5 A schematic diagram of the structure of the silicon carbide CVD coating equipment for this utility model before lifting the first crucible using the insulated crucible hoisting tool. Figure 6A schematic diagram of the structure of the insulated crucible hoisting tooling used for the silicon carbide CVD coating of this utility model when lifting the first crucible; Figure 7 for Figure 6 The main view; Figure 8 for Figure 6 Side view; Figure 9 for Figure 6 Top view; Figure 10 For along Figure 9 Sectional view of line AA in the middle; Figure 11 This is a schematic diagram of the structure of the silicon carbide CVD coating equipment, specifically the insulated crucible hoisting fixture and the heater, in cooperation with each other. In the diagram: 1 is the first upper lifting rod, 2 is the second upper lifting rod, 3 is the lifting part, 4 is the first connecting piece, 5 is the second connecting piece, 6 is the third connecting piece, 7 is the fourth connecting piece, 8 is the first sliding rod, 9 is the first slider, 10 is the second sliding rod, 11 is the second slider, 12 is the first slide rail, 13 is the first slide groove, 14 is the second slide rail, 15 is the first clamping part, 16 is the second clamping part, 17 is the first anti-slip part, 18 is the second anti-slip part, 19 is the first crucible, 20 is the first pin, 21 is the second pin, 22 is the third pin, 23 is the fourth pin, 24 is the bolt connection hole, 25 is the heater, and 26 is the limiting block. Detailed Implementation

[0017] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0019] like Figures 1 to 11As shown, this utility model provides a hoisting fixture for a silicon carbide CVD coating equipment insulated crucible, including a first lifting device. The first lifting device includes a first upper lifting rod 1 and a second upper lifting rod 2. The first upper lifting rod 1 and the second upper lifting rod 2 are of the same size. One end of the first upper lifting rod 1 and the second upper lifting rod 2 are rotatably connected to a lifting part 3 via a first pin 20. In this embodiment, the lifting part 3 is a lifting ring. The other end of the first upper lifting rod 1 is rotatably connected to a first middle lifting rod via a second pin 21, and the other end of the second upper lifting rod 2 is rotatably connected to a second middle lifting rod via a third pin 22.

[0020] The first middle suspension rod includes a first connector 4, one end of which is rotatably connected to the first upper suspension rod 1, and the other end of which is fixedly connected to a second connector 5; in this embodiment, the first connector 4 and the second connector 5 form an integrally formed structure. The second middle suspension rod includes a third connector 6, one end of which is rotatably connected to the second upper suspension rod 2, and the other end of which is fixedly connected to a fourth connector 7; in this embodiment, the third connector 6 and the fourth connector 7 form an integrally formed structure. The first connector 4 and the second connector 5, as well as the third connector 6 and the fourth connector 7, can also be fixedly connected by welding or other methods.

[0021] The end of the first connecting member 4 furthest from the first upper rod 1 and the end of the third connecting member 6 furthest from the second upper rod 2 are rotatably connected via a fourth pin 23. The first upper rod 1, the second upper rod 2, the first connecting member 4, and the third connecting member 6 form a parallelogram-shaped frame structure. The second connecting member 5 is fixedly connected to the first slider 9 via the first sliding rod 8, and the fourth connecting member 7 is fixedly connected to the second slider 11 via the second sliding rod 10. The first slider 9 and the second slider 11 are slidably connected. The second connecting member 5 is fixedly connected to the first sliding rod 8, and the fourth connecting member 7 is fixedly connected to the second sliding rod 10.

[0022] Specifically, the first slider 9 is provided with a first slide rail 12 and a first slide groove 13. The first slide rail 12 is slidably connected to the second slide rod 10. The second slider 11 is sleeved in the first slide groove 13, and the second slider 11 and the first slide groove 13 are in clearance fit. The second slider 11 can slide in the first slide groove 13 along the length direction of the first slide groove 13.

[0023] The second slider 11 has a second slide rail 14, which is slidably connected to the first slide rod 8. The first slide rail 12 and the second slide rail 14 cooperate with each other. Specifically, the first slide rail 12 and the second slide rail 14 are parallel to each other and have the same structural size. The first slide rod 8 moves along the second slide groove, and the second slide rod 10 moves along the first slide groove 13, which can move towards each other or away from each other.

[0024] When the first slider 8 and the second slider 10 move toward each other or away from each other, they drive the first slider 9 and the second slider 11 to move away from each other or toward each other. That is, when the first slider 8 and the second slider 10 move toward each other, the first slider 9 and the second slider 11 move away from each other; when the first slider 8 and the second slider 10 move away from each other, the first slider 9 and the second slider 11 move toward each other.

[0025] A first clamping part 15 is fixedly connected to the first slider 9, and a second clamping part 16 is fixedly connected to the second slider 11. Both the first clamping part 15 and the second clamping part 16 fit into the inner wall of the first crucible 19, and both abut against the inner wall of the first crucible 19. In this embodiment, the first slider 9 and the first clamping part 15 form an integrally formed structure, and the second slider 11 and the second clamping part 16 form an integrally formed structure. The first slider 9 and the first clamping part 15, as well as the second slider 11 and the second clamping part 16, can also be fixedly connected by other means such as adhesive bonding, as long as it can be ensured that the first slider 9 and the first clamping part 15 are fixedly connected, and the second slider 11 and the second clamping part 16 are fixedly connected, and they cooperate with the inner wall of the first crucible 19 to smoothly lift the first crucible 19.

[0026] To prevent the first crucible 19 from detaching from the first clamping part 15 and the second clamping part 16 during hoisting, a first anti-slip member 17 is detachably and fixedly connected to the first clamping part 15 at its mating point with the inner wall of the first crucible 19 via a fixing device. Similarly, a second anti-slip member 18 is detachably and fixedly connected to the second clamping part 16 at its mating point with the inner wall of the first crucible 19 via a fixing device. In this embodiment, the fixing device is a bolt. Both the first clamping part 15 and the second clamping part 16 have two bolt connection holes 24.

[0027] The mating parts of the first anti-slip component 17 and the inner wall of the first crucible 19, as well as the mating parts of the second anti-slip component 18 and the inner wall of the first crucible 19, are arc-shaped structures, and the radius of the arc-shaped structure is the same as the radius of the first crucible 19.

[0028] In this embodiment, both the first anti-slip component 17 and the second anti-slip component 18 are made of rubber.

[0029] By replacing the first anti-slip part 17 and the second anti-slip part 18 with different specifications and sizes, it can be applied to the first crucible 19 with different specifications and sizes.

[0030] Limiting blocks 26 are fixedly connected to the first upper lifting rod 1 and / or the second upper lifting rod 2. The limiting blocks 26 have a triangular structure. The limiting blocks 26 are located near the first middle lifting rod and / or the second middle lifting rod. They are used to limit the range of motion between the first upper lifting rod 1 and the first middle lifting rod and / or the second upper lifting rod 2 and the second middle lifting rod, to prevent the included angle between the first upper lifting rod 1 and the first middle lifting rod and / or the included angle between the second upper lifting rod 2 and the second middle lifting rod from being too small, which would result in an excessively large relative distance between the first clamping part 15 and the second clamping part 16, thereby damaging the first crucible 19. They also prevent the included angle between the first upper lifting rod 1 and the first middle lifting rod and / or the included angle between the second upper lifting rod 2 and the second middle lifting rod from being too small, which would cause interference between the mating points of the first upper lifting rod 1 and the first middle lifting rod and / or the mating points of the second upper lifting rod 2 and the second middle lifting rod and the heater 25 inside the CVD coating equipment during the lifting process, thereby damaging the heater 25.

[0031] To ensure the stability of lifting the first crucible 19, this embodiment also includes a second lifting device, which has the same structure and size as the first lifting device. One end of the first upper rod of the second lifting device is rotatably connected to one end of the first lifting device via a first pin 20; the first upper rod of the second lifting device is rotatably connected to the first middle rod of the second lifting device via a second pin 21; the second upper rod of the second lifting device is rotatably connected to the second middle rod of the second lifting device via a third pin 22; the end of the first connecting member 4 of the second lifting device away from the first upper lifting rod 1 of the second lifting device is rotatably connected to the end of the third connecting member 6 of the second lifting device away from the second upper lifting rod 2 of the second lifting device via a fourth pin 23. The second connecting member 5 of the second lifting device is fixedly connected to the first sliding block 9 via a first sliding rod 8; and the fourth connecting member 7 of the second lifting device is fixedly connected to the second sliding block 11 via a second sliding rod 10.

[0032] The working process of this utility model: In use, first place the first crucible 19 on the support platform. Move the three lifting parts towards the first crucible 19, causing the first upper lifting rod 1 and the first middle lifting rod to move towards each other, and the second upper lifting rod 2 and the second middle lifting rod to move towards each other. This causes the first clamping part 15 and the second clamping part 16 to move towards each other, lowering the first clamping part 15 and the second clamping part 16 into the first crucible 19, so that the lower end face of the first slider 9 and the lower end face of the second slider 11 contact the upper end face of the first crucible 19, i.e., the first slider 9 and the second slider 11 are engaged with the first crucible 19. Then, the lifting... After the equipment is fixedly connected to the three lifting parts of this utility model, the three lifting parts are moved away from the first crucible 19, causing the first upper lifting rod 1 and the first middle lifting rod to move in opposite directions, and the second upper lifting rod 2 and the second middle lifting rod to move in opposite directions, so that the first clamping part 15 and the second clamping part 16 move in opposite directions. Even if the first clamping part 15 and the second clamping part 16 both move towards the inner wall of the first crucible 19, the first clamping part 15 and the second clamping part 16 will both abut against the inner wall of the first crucible 19. The lifting equipment continues to drive the three lifting parts to move upward, so that the first crucible 19 can be lifted smoothly. After the lifting equipment moves the first crucible 19 to a preset position (i.e., when the lifting equipment moves the first crucible 19 to a distance greater than that of the second crucible from the support platform, the second crucible is placed below the first crucible 19, and then the first crucible 19 is lowered onto the second crucible, so that the first crucible 19 and the second crucible are kept coaxial), the lifting equipment drives the three lifting parts to move towards the first crucible 19, thereby causing the first clamping part 15 and the second clamping part 16 to move towards each other, so that the first clamping part 15 and the second clamping part 16 move away from the inner sidewall of the first crucible 19, thereby causing the silicon carbide CVD coating equipment heat-insulating crucible lifting fixture of this utility model to detach from the first crucible 19, completing the lifting operation.

[0033] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A hoisting fixture for a silicon carbide CVD coating equipment insulated crucible, characterized in that: It includes a first lifting device, which includes a first upper lifting rod (1) and a second upper lifting rod (2), one end of the first upper lifting rod (1) and the second upper lifting rod (2) being rotatably connected to the lifting part (3); The other end of the first upper boom (1) is rotatably connected to the first middle boom, and the other end of the second upper boom (2) is rotatably connected to the second middle boom. The first middle section of the boom includes a first connector (4), one end of which is rotatably connected to the first upper section of the boom (1), and the other end of which is fixedly connected to a second connector (5). The second middle boom includes a third connector (6), one end of which is rotatably connected to the second upper boom (2), and the other end of which is fixedly connected to a fourth connector (7). The end of the first connector (4) away from the first upper rod (1) is rotatably connected to the end of the third connector (6) away from the second upper rod (2); The second connector (5) is fixedly connected to the first slider (9) via the first slide rod (8), and the fourth connector (7) is fixedly connected to the second slider (11) via the second slide rod (10). The first slider (9) and the second slider (11) are slidably connected. When the first slide rod (8) and the second slide rod (10) move toward each other or move away from each other, they drive the first slider (9) and the second slider (11) to move away from each other or move toward each other. The first slider (9) is also provided with a first clamping part (15), and the second slider (11) is also provided with a second clamping part (16). The first clamping part (15) and the second clamping part (16) both abut against the inner wall of the first crucible (19).

2. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: The first slider (9) is provided with a first slide rail (12) and a first slide groove (13). The first slide rail (12) is slidably connected to the second slide rod (10). The second slider (11) is sleeved in the first slide groove (13) and the second slider (11) is in clearance fit with the first slide groove (13). The second slider (11) can slide along the length direction of the first slide groove (13) in the first slide groove (13). The second slider (11) has a second slide rail (14) which is slidably connected to the first slide rod (8). The first slide rail (12) and the second slide rail (14) cooperate with each other.

3. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: A first anti-slip component (17) is detachably and fixedly connected to the first clamping part (15) at the point where it cooperates with the inner wall of the first crucible (19), and a second anti-slip component (18) is detachably and fixedly connected to the second clamping part (16) at the point where it cooperates with the inner wall of the first crucible (19).

4. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 3, characterized in that: The mating parts of the first anti-slip component (17) and the inner wall of the first crucible (19) and the mating parts of the second anti-slip component (18) and the inner wall of the first crucible (19) are arc-shaped structures, and the radius of the arc-shaped structure is the same as the radius of the first crucible (19).

5. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: A limiting block (26) is fixedly connected to the first upper rod (1) and / or the second upper rod (2), and the limiting block (26) is set close to the first middle rod and / or the second middle rod.

6. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: One end of the first upper lifting rod (1) and the second upper lifting rod (2) are rotatably connected to the lifting part (3) via the first pin (20); The first upper rod (1) is rotatably connected to the first middle rod through the second pin (21), and the other end of the second upper rod (2) is rotatably connected to the second middle rod through the third pin (22). The first connector (4) and the third connector (6) are rotatably connected by the fourth pin (23).

7. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 6, characterized in that: It also includes a second lifting device, one end of the first upper rod of the second lifting device and one end of the first lifting device are rotatably connected by a first pin (20); the first upper rod of the second lifting device and the first middle rod of the second lifting device are rotatably connected by a second pin (21); the second upper rod of the second lifting device and the second middle rod of the second lifting device are rotatably connected by a third pin (22); the end of the first connecting piece (4) of the second lifting device away from the first upper lifting rod (1) of the second lifting device and the end of the third connecting piece (6) of the second lifting device away from the second upper lifting rod (2) of the second lifting device are rotatably connected by a fourth pin (23).

8. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: The lifting part (3) is a lifting ring.

9. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 5, characterized in that: The limiting block (26) has a triangular structure.

10. The silicon carbide CVD coating equipment insulated crucible hoisting fixture according to claim 1, characterized in that: The first connector (4) and the second connector (5) form an integral molded structure; the third connector (6) and the fourth connector (7) form an integral molded structure.

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