A high-purity germanium purification device

Abstract

This utility model discloses a high-purity germanium purification device, including an equipment box structure, a fixed frame structure, a movable structure, and a purification device structure. The fixed frame structure is fixedly connected to the surface of the equipment box structure, the movable structure is fixedly installed on the surface of the fixed frame structure, and the purification device structure is fixedly placed on the surface of the fixed frame structure. This high-purity germanium purification device facilitates connection to other equipment through the equipment box structure and fixed frame structure. It also allows for zoned heating via connecting copper heating tubes, enabling individual control and improved heating efficiency. The movable structure facilitates uniform movement of the high-frequency induction heating coil, ensuring stable movement. The purification device structure facilitates connection and heating of the device, and an internal silicon nitride coating prevents contamination of the internal materials.

Description

Technical Field

[0001] This utility model relates to the field of purification equipment, and in particular to a high-purity germanium purification equipment. Background Technology

[0002] Germanium, as an important semiconductor material, is widely used in fields such as nuclear radiation detection, infrared optical devices and electronic devices. At present, the zone melting method is the mainstream process for preparing high-purity germanium single crystals. Its principle is to achieve impurity separation and purification by moving the melting zone.

[0003] However, traditional melting zone equipment has the following problems: contact between the germanium melt and the quartz boat may cause contamination by impurities such as silicon; single melting zone design makes it difficult to achieve multi-stage gradient purification; and the melting zone efficiency is low. Therefore, a high-purity germanium purification equipment is proposed. Utility Model Content

[0004] The main objective of this invention is to provide a high-purity germanium purification device, which can effectively solve the problems in the background technology.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A high-purity germanium purification device includes an equipment box structure, a fixed frame structure, a movable structure, and a purification device structure. The fixed frame structure is fixedly connected to the surface of the equipment box structure, the movable structure is fixedly installed on the surface of the fixed frame structure, and the purification device structure is fixedly placed on the surface of the fixed frame structure. The equipment box structure includes a main box, a vacuum pump, a hydrogen purifier, a zone temperature control device, and connecting wires. The vacuum pump is fixedly connected to one side surface of the main box, the hydrogen purifier is fixedly installed on one side surface of the main box, the zone temperature control device is fixedly installed on the surface of the main box, and connecting wires are fixedly installed on the surface of the zone temperature control device. The fixed frame structure includes a fixed base plate, a bracket, a sliding groove bracket, and a mounting frame. The bracket is fixedly installed on the surface of the fixed base plate, the sliding groove bracket is fixedly installed on the surface of the fixed base plate, and the mounting frame is fixedly installed on the surface of the fixed base plate. The movable structure includes an electric push rod, a zone melting frame, pulleys, and a high-frequency induction heating coil. The output end of the electric push rod is fixedly connected to the zone melting frame. The pulleys are movably connected to the surface of the zone melting frame. The high-frequency induction heating coil is fixedly installed on the surface of the zone melting frame. The purification device structure includes a quartz tube, a silicon nitride coating, a quartz boat, and a copper heating tube. The inner wall of the quartz tube is fixedly coated with a silicon nitride coating, a quartz boat is placed on the inner surface of the quartz tube, and a copper heating tube is fixedly wound around the outer surface of the quartz tube.

[0006] Preferably, the quartz tube of the purification device structure is connected to the bracket, the electric push rod of the moving structure is connected to the mounting frame, the pulley is movably connected to the slide frame, the connecting line is connected to the copper heating tube, the fixed base plate is connected to the main body box, and the vacuum device and hydrogen purifier are conveniently connected to the two ends of the quartz tube.

[0007] Compared with the prior art, the present invention has the following beneficial effects: This utility model discloses a high-purity germanium purification device. The device features a box structure and a mounting frame structure for easy connection to other equipment. A copper heating tube is connected via a connecting line for zoned heating, allowing for individual control and improved heating efficiency. A movable structure facilitates uniform movement of the high-frequency induction heating coil, ensuring stable movement. The purification device structure allows for convenient connection and heating, and an internal silicon nitride coating prevents contamination of the internal materials. Attached Figure Description

[0008] Figure 1 This is an overall schematic diagram of a high-purity germanium purification device according to the present invention; Figure 2 This is a schematic diagram of the equipment box structure of a high-purity germanium purification device according to this utility model; Figure 3 This is a schematic diagram of the fixing frame structure of a high-purity germanium purification device according to this utility model; Figure 4 This is a schematic diagram of the moving structure of a high-purity germanium purification device according to the present invention; Figure 5 This is a schematic diagram of the purification device structure of a high-purity germanium purification equipment according to this utility model; In the diagram: 1. Equipment box structure; 101. Main box; 102. Vacuuming device; 103. Hydrogen purifier; 104. Zone temperature control device; 105. Connecting line; 2. Fixing frame structure; 201. Fixing base plate; 202. Bracket; 203. Slide rack; 204. Mounting frame; 3. Moving structure; 301. Electric push rod; 302. Zone melting cart frame; 303. Pulley; 304. High-frequency induction heating coil; 4. Purification device structure; 401. Quartz tube; 402. Silicon nitride coating; 403. Quartz boat; 404. Copper heating tube. Detailed Implementation

[0009] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0010] like Figure 1-5As shown, a high-purity germanium purification device includes an equipment box structure 1, a fixed frame structure 2, a movable structure 3, and a purification device structure 4. The fixed frame structure 2 is fixedly connected to the surface of the equipment box structure 1, the movable structure 3 is fixedly installed on the surface of the fixed frame structure 2, and the purification device structure 4 is fixedly placed on the surface of the fixed frame structure 2. The equipment box structure 1 and the fixed frame structure 2 facilitate docking of components and control of other components. The movable structure 3 ensures the stability of the heating device, and the purification device structure 4 stores and purifies other materials. The equipment box structure 1 includes a main box 101, a vacuum device 102, a hydrogen purifier 103, a zone temperature control device 104, and connecting wires 105. The vacuum device 102 is fixedly connected to one side surface of the main box 101, the hydrogen purifier 103 is fixedly installed on one side surface of the main box 101, the zone temperature control device 104 is fixedly installed on the surface of the main box 101, and the connecting wires 105 are fixedly installed on the surface of the zone temperature control device 104. The vacuum device 102 and the hydrogen purifier 103 operate the internal air, the zone temperature control device 104 is convenient to display, and the internal control module is convenient to correspond to the copper heating tubes 404 in different zones. The fixed frame structure 2 includes a fixed base plate 201, a bracket 202, a sliding groove frame 203, and a mounting frame 204. The bracket 202 is fixedly mounted on the surface of the fixed base plate 201, the sliding groove frame 203 is fixedly mounted on the surface of the fixed base plate 201, and the mounting frame 204 is fixedly mounted on the surface of the fixed base plate 201. The sliding groove frame 203 ensures the smooth movement of the pulley 303, and the bracket 202 is used to place the quartz tube 401. The movable structure 3 includes an electric push rod 301, a zone melting frame 302, a pulley 303, and a high-frequency induction heating coil 304. The output end of the electric push rod 301 is fixedly connected to the zone melting frame 302. The pulley 303 is movably connected to the surface of the zone melting frame 302. The high-frequency induction heating coil 304 is fixedly installed on the surface of the zone melting frame 302. The electric push rod 301 pushes the zone melting frame 302 to move, so that the heating of its high-frequency induction heating coil 304 is uniform and stable. The purification device structure 4 includes a quartz tube 401, a silicon nitride coating 402, a quartz boat 403, and a copper heating tube 404. The inner wall of the quartz tube 401 is fixedly coated with the silicon nitride coating 402. The quartz boat 403 is placed on the inner surface of the quartz tube 401. The copper heating tube 404 is fixedly wound around the outer surface of the quartz tube 401. The silicon nitride coating 402 is provided to prevent contamination. The copper heating tube 404 is wound in sections on the surface and connected to a zone temperature control device 104 through a connecting wire 105, so that it can be heated individually or incrementally.

[0011] Furthermore, the quartz tube 401 of the purification device structure 4 is connected to the bracket 202, the electric push rod 301 of the moving structure 3 is connected and fixed to the mounting frame 204, the pulley 303 is movably connected to the slide rail frame 203, the connecting line 105 is connected to the copper heating tube 404, the fixed base plate 201 is connected and installed to the main body box 101, and the vacuum device 102 and the hydrogen purifier 103 are conveniently connected to the two ends of the quartz tube 401. The whole device adopts zoned temperature control to improve heating efficiency and stability, and optimizes the internal structure to avoid material contamination and improve the purity of the material.

[0012] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A high purity germanium purification apparatus, characterized by: It includes an equipment box structure (1), a fixed frame structure (2), a moving structure (3) and a purification device structure (4). The fixed frame structure (2) is fixedly connected to the surface of the equipment box structure (1), the moving structure (3) is fixedly installed on the surface of the fixed frame structure (2), and the purification device structure (4) is fixedly placed on the surface of the fixed frame structure (2). The equipment box structure (1) includes a main box (101), a vacuum device (102), a hydrogen purifier (103), a zone temperature control device (104), and a connecting line (105). The vacuum device (102) is fixedly connected to one side surface of the main box (101), the hydrogen purifier (103) is fixedly installed on one side surface of the main box (101), the zone temperature control device (104) is fixedly installed on the surface of the main box (101), and the connecting line (105) is fixedly installed on the surface of the zone temperature control device (104). The fixed frame structure (2) includes a fixed base plate (201), a bracket (202), a slide rail (203), and a mounting frame (204). The bracket (202) is fixedly installed on the surface of the fixed base plate (201), the slide rail (203) is fixedly installed on the surface of the fixed base plate (201), and the mounting frame (204) is fixedly installed on the surface of the fixed base plate (201). The movable structure (3) includes an electric push rod (301), a zone melting frame (302), a pulley (303), and a high-frequency induction heating coil (304). The output end of the electric push rod (301) is fixedly connected to the zone melting frame (302). The pulley (303) is movably connected to the surface of the zone melting frame (302). The high-frequency induction heating coil (304) is fixedly installed on the surface of the zone melting frame (302). The purification device structure (4) includes a quartz tube (401), a silicon nitride coating (402), a quartz boat (403), and a copper heating tube (404). The inner wall of the quartz tube (401) is fixedly coated with a silicon nitride coating (402). A quartz boat (403) is placed on the inner surface of the quartz tube (401). A copper heating tube (404) is fixedly wound around the outer surface of the quartz tube (401).

2. The high purity germanium purification apparatus of claim 1, wherein: The quartz tube (401) of the purification device structure (4) is connected to the bracket (202) and placed therein. The electric push rod (301) of the moving structure (3) is connected to the mounting frame (204) and fixed. The pulley (303) is movably connected to the slide frame (203). The connecting line (105) is connected to the copper heating tube (404). The fixed base plate (201) is connected to the main body box (101) and installed therein. The vacuum device (102) and the hydrogen purifier (103) are conveniently docked on both ends of the quartz tube (401).

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