Evaporation boat

Abstract

This application provides an evaporation boat, relating to the field of vacuum evaporation coating technology. The evaporation boat includes a lid and a hollow box. The box has an opening communicating with the interior, and the lid is positioned over the opening. The lid has multiple spaced-apart first evaporation holes for connecting the box interior to the outside. The side walls of the box have multiple spaced-apart second evaporation holes for connecting the box interior to the outside. In practical applications, the evaporation boat can be connected to an evaporation device, allowing the solid coating material inside the box to sublimate upon heating. The resulting molten coating material does not accumulate between the box and the lid but overflows from the first and second evaporation holes. After solidification, it can be recycled. This not only avoids waste of coating material but also prevents adhesion between the box and the lid, reducing the difficulty of opening the lid when refilling the box with coating material, preventing breakage during opening, and extending the service life of the evaporation boat.

Description

Technical Field

[0001] This application relates to the field of vacuum evaporation technology, and more particularly to an evaporation boat. Background Technology

[0002] An evaporation boat is a general term for all evaporation vessels used in vacuum evaporation to hold coating materials (such as metals and compounds). After the coating material is heated and evaporated, it diffuses onto the substrate surface to form a thin film. They are typically made of materials such as tungsten, molybdenum, tantalum, boron nitride, and titanium diboride. In related technologies, an evaporation boat includes an evaporation container and an evaporation cover plate that fits over it. The evaporation container holds the coating material to be evaporated. Taking zinc sulfide evaporation as an example, after the zinc sulfide evaporates, a large amount of zinc sulfide solidifies between the evaporation container and the evaporation cover plate, causing them to stick together. This not only wastes the zinc sulfide but also makes it difficult to open the evaporation cover plate when adding zinc sulfide back into the evaporation container. The evaporation cover plate is also prone to breakage, severely affecting the service life of the evaporation boat. Utility Model Content

[0003] This application provides an evaporation boat designed to address the problems in related technologies, such as the waste of coating materials and insufficient service life of evaporation boats.

[0004] To address the aforementioned drawbacks in related technologies, this application provides an evaporation boat, which includes a cover and a hollow box. The box has an opening that communicates with the interior, and the cover is placed over the opening. The cover has a plurality of first evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside. The side wall of the box has a plurality of second evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside.

[0005] In some implementations, the box body includes a bottom plate and multiple side plates surrounding the periphery of the bottom plate. The edges of the multiple side plates away from the bottom plate enclose the box opening, and multiple second evaporation holes are distributed on at least one side plate.

[0006] In some implementation schemes, multiple first evaporation holes are arranged in an array with a first preset shape on the cover, and multiple second evaporation holes on the same side plate are arranged in an array with a second preset shape.

[0007] In some implementations, both the box and the cover are rectangular, and the multiple side plates include two opposing long side plates and two opposing short side plates, with multiple second evaporation holes distributed on at least one long side plate.

[0008] In some implementations, the length of the cover is less than or equal to the length of the box.

[0009] In some implementation schemes, the cover is provided with a first connecting structure and the box is provided with a second connecting structure. The second connecting structure is used to cooperate with the first connecting structure so that the cover is placed on the opening of the box.

[0010] In some implementation schemes, the first connecting structure includes two first sliding members, which are respectively disposed on opposite sides of the cover in the width direction; the second connecting structure includes two second sliding members, which are respectively disposed on the outer side of the two long side plates and are adjacent to the box opening, for sliding cooperation with the two first sliding members to make the cover slide back and forth along the length direction of the box at the box opening.

[0011] In some implementations, the first sliding member includes a slide bar extending along the length of the cover, and the second sliding member includes an extension extending from the long side plate away from the box body and a limiting portion extending from the extension portion away from the bottom plate. The extension portion, the limiting portion, and the long side plate together form a slide groove for the slide bar to be inserted and slide in cooperation with the slide bar.

[0012] In some implementations, the evaporation boat also includes a handle, which is located on the box body.

[0013] In some implementations, the handle includes two hand-held components, which are respectively located on the outer sides of the two short side panels, and both hand-held components are adjacent to the box opening.

[0014] The evaporation boat provided in this application consists of a cover and a hollow box. The box has an opening that communicates with the interior. The cover is placed over the opening. The cover has a plurality of first evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside. The side wall of the box has a plurality of second evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside. In practical applications, the solid coating material to be evaporated is located inside the box. After the evaporation boat is connected to the evaporation equipment, the solid coating material inside the box is heated and sublimated through the evaporation equipment, forming molten coating material and gaseous coating material successively. The gaseous coating material flows to the substrate to be coated through the evaporation holes (i.e., the first evaporation hole and the second evaporation hole) and is deposited on the surface of the substrate to form a thin film. The molten coating material does not accumulate between the box and the cover as in traditional solutions, but overflows from the evaporation holes and can be recycled after solidification. This not only avoids the waste of coating material, but also avoids the adhesion between the box and the cover in traditional solutions, thereby reducing coating costs. It also reduces the difficulty of opening the cover when adding coating material back into the box, avoiding the breakage of the cover when opening in traditional solutions, and improving the service life of the evaporation boat. Attached Figure Description

[0015] To more clearly illustrate the related technologies or the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the related technologies or the embodiments of this application will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application, and not all embodiments. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of the evaporation boat provided in an embodiment of this application;

[0017] Figure 2 This is a schematic diagram of the structure of the box provided in an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of the structure of the cover provided in an embodiment of this application.

[0019] The markings in the above figures represent: 1-lid, 2-box, 3-first evaporation hole, 4-second evaporation hole, 5-first connecting structure, 6-second connecting structure, 7-handle, 21-bottom plate, 22-side plate, 221-long side plate, 222-short side plate, 51-first sliding member, 511-sliding strip, 61-second sliding member, 611-extension, 612-limiting part, 613-sliding groove, 71-handheld part. Detailed Implementation

[0020] In related technologies, an evaporation boat includes an evaporation container and an evaporation cover plate placed on the evaporation container. The evaporation container is used to hold the coating material to be evaporated. Taking the evaporation of zinc sulfide as an example, after the zinc sulfide is evaporated, a large amount of zinc sulfide solidifies between the evaporation container and the evaporation cover plate, causing them to stick together. This not only wastes the zinc sulfide but also makes it difficult to open the evaporation cover plate when adding zinc sulfide back into the evaporation container. The evaporation cover plate is also prone to breakage, seriously affecting the service life of the evaporation boat, sometimes even limiting its use to a single use. In view of this, the present application proposes an evaporation boat in the embodiments below to solve the above-mentioned drawbacks of the related technologies.

[0021] To make the objectives, technical solutions, and advantages of this application more apparent and understandable, this application will be clearly and completely described below in conjunction with its embodiments and corresponding drawings. Throughout, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. It should be understood that the embodiments of this application described below are only for explaining this application and are not intended to limit this application. That is, all other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application. Furthermore, the technical features involved in the various embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0022] Please see Figure 1 , Figure 1 This is a schematic diagram of the evaporation boat, in which... Figure 1 (a) is a front view of the box. Figure 1 (b) is a top view of the cover. This embodiment provides an evaporation boat, which includes a cover 1 and a hollow box 2. The box 2 has an opening (not shown) communicating with the interior. The cover 1 is placed over the opening. The cover 1 has a plurality of first evaporation holes 3 that are spaced apart from each other and used to connect the interior of the box 2 with the external space. The side wall of the box 2 has a plurality of second evaporation holes 4 that are spaced apart from each other and used to connect the interior of the box 2 with the external space. In this embodiment, the shapes of the first evaporation holes 3 and the second evaporation holes 4 can be the same or different. The shapes involved can be any shape commonly used in the field of hole structures, such as rectangle, circle, triangle, ellipse, trapezoid, parallelogram, pentagon, and other polygons. The specific design can be based on actual needs, and this embodiment does not limit it to a single shape. Furthermore, the box body 2 and the cover body 1 are compatible in shape. The shape involved can be any shape commonly used in box-shaped structures in this field, such as rectangle, circle, ellipse, hexagon and other polygons. The specific design can be based on actual needs, and this embodiment does not limit it to a single shape.

[0023] In this embodiment, when the cover 1 is opened, the solid coating material can be placed into the box 2 (the height of the solid coating material inside the box 2 needs to be lower than the opening of the box). Then, the cover 1 can be closed, and the evaporation boat can be connected to the evaporation equipment (such as an evaporation stage, which mainly uses electron beam energy to achieve the vapor deposition of metal or compound materials). The evaporation equipment is used to heat the solid coating material inside the box 2, thereby achieving vacuum vapor deposition of the substrate. When it is necessary to add solid coating material to the box 2 again, the evaporation boat can be removed from the evaporation equipment and the cover 1 can be opened. It should be noted that the evaporation boat can be made of any material commonly used in evaporation vessels in the art, such as tungsten, molybdenum, tantalum, boron nitride, titanium diboride, etc. The specific material can be selected according to actual needs, and this embodiment does not limit it to a single material. It should also be noted that the coating material can be any material suitable for forming a thin film on the substrate surface, such as zinc sulfide, magnesium fluoride, silicon nitride, lanthanum titanate, magnesium oxide, indium tin oxide, aluminum, copper, chromium, zinc selenide, etc. The specific material can be selected according to actual needs, and this embodiment does not limit it to a single material.

[0024] Understandably, the solid coating material to be evaporated is located inside the box 2. After the evaporation boat is connected to the evaporation equipment, the solid coating material inside the box 2 can be heated and sublimated through the evaporation equipment, forming molten coating material and gaseous coating material successively. The gaseous coating material will flow to the substrate to be coated through the first evaporation hole 3 and the second evaporation hole 4, and deposit on the surface of the substrate to form a thin film. The molten coating material will not accumulate between the box 2 and the cover 1 as in the traditional solution, but will overflow from the first evaporation hole 3 and the second evaporation hole 4. After solidification, it can be recycled and reused. This not only avoids the waste of coating material, but also avoids the adhesion between the box 2 and the cover 1 in the traditional solution, thereby reducing the coating cost. At the same time, it also reduces the difficulty of opening the cover 1 when adding coating material back into the box 2, avoiding the breakage of the cover 1 when opening in the traditional solution, and improving the service life of the evaporation boat.

[0025] In some embodiments, please refer to Figure 2 , Figure 2 This is a structural diagram of the box, in which, Figure 2 (a) is a front view of the box. Figure 2 (b) is the rear view of the box. Figure 2 (c) is a top view of the box. Figure 2(d) is a side view of the box body. The box body 2 includes a base plate 21 and a plurality of side plates 22 surrounding the periphery of the base plate 21. The edges of the plurality of side plates 22 away from the base plate 21 form a box opening. A plurality of second evaporation holes 4 are distributed on at least one side plate 22. The plurality of first evaporation holes 3 are arranged in an array of a first preset shape on the cover body 1, and the plurality of second evaporation holes 4 on the same side plate 22 are arranged in an array of a second preset shape. It should be noted that the first preset shape and the second preset shape can be the same shape or different shapes. The shapes involved include rectangles, circles, trapezoids, triangles, ellipses, parallelograms and other polygons. Of course, in other embodiments, the plurality of first evaporation holes 3 on the cover body 1 and the plurality of second evaporation holes 4 on the same side plate 22 can also be irregularly distributed. The specific design can be based on actual needs, and this application does not limit it in this way.

[0026] In at least one embodiment, both the box body 2 and the lid 1 are rectangular, and the length of the lid 1 is less than or equal to the length of the box body 2 (i.e., Figure 1 (where L1≤L2). Based on this, the multiple side plates 22 include two opposing long side plates 221 and two opposing short side plates 222, and multiple second evaporation holes 4 are distributed on at least one long side plate 221 or at least one short side plate 222. In the following description, the multiple second evaporation holes 4 are distributed on at least one long side plate 221.

[0027] In some embodiments, please further combine Figure 3 , Figure 3 A schematic diagram of the cover structure is shown, in which, Figure 3 (a) is a top view of the cover. Figure 3 (b) is a side view of the cover. The cover 1 is provided with a first connecting structure 5, and the box 2 is provided with a second connecting structure 6. The second connecting structure 6 is used to cooperate with the first connecting structure 5 to cover the box opening with the cover 1; that is, this application realizes the opening and closing of the cover 1 through the cooperation between the first connecting structure 5 and the second connecting structure 6, and fixes the cover 1 relative to the box 2 when the cover 1 is closed, so as to carry out the subsequent evaporation of solid coating material.

[0028] As at least one embodiment, the first connecting structure 5 includes two first sliding members 51, which are respectively disposed on opposite sides of the cover 1 in the width direction; the second connecting structure 6 includes two second sliding members 61, which are respectively disposed on the outer side of the two long side plates 221 and are adjacent to the box opening. The two second sliding members 61 are used to slide and cooperate with the two first sliding members 51 respectively, so that the cover 1 slides back and forth along the length direction of the box 2 at the box opening. Of course, in other embodiments, the sliding cooperation between the second sliding member 61 and the first sliding member 51 can also make the cover 1 slide back and forth along the width direction of the box body 2 at the box opening. The specific design can be based on actual needs. This application does not limit this only. However, this application will use the sliding of the cover 1 back and forth along the length direction of the box body 2 at the box opening as an example for relevant description. When the cover 1 slides back and forth along the width direction of the box body 2 at the box opening, the two first sliding members 51 should be respectively provided at the opposite ends of the cover 1 in the length direction, and the two second sliding members 61 should be respectively provided on the outside of the two short side plates 222 and both adjacent to the box opening.

[0029] For example, the first sliding member 51 includes a slide bar 511 extending along the length direction of the cover 1, and the second sliding member 61 includes an extension portion 611 extending from the long side plate 221 in a direction away from the box body 2 (i.e., in a direction away from the other long side plate 221) and a limiting portion 612 extending from the extension portion 611 in a direction away from the bottom plate 21. The extension portion 611, the limiting portion 612 and the long side plate 221 surround to form a slide groove 613. The slide bar 511 can be inserted into the slide groove 613 along the length direction of the box body 2, and the slide bar 511 can slide back and forth in the slide groove 613 along the length direction of the box body 2. Furthermore, it should be noted that in other embodiments, in addition to the sliding engagement of the second sliding member 61 and the first sliding member 51, other commonly used engagement methods in the art can also be used between the cover 1 and the box 2, such as snap-fit, hinge, threaded, plug-in, etc. The specific design can be based on actual needs, as long as the cover 1 can be easily opened before and after the solid coating material evaporates. This application does not limit this to a single method.

[0030] In some embodiments, please refer to Figures 1 to 3In addition to the structure described above, the evaporation boat also includes a handle 7, which is located on the box body 2. In practical applications, the user can hold the handle 7 to move the evaporation boat. As at least one embodiment, the handle 7 includes two grip pieces 71, which are respectively located on the outer sides of the two short side plates 222 or the two long side plates 221 and are both adjacent to the box opening. The grip pieces 71 should be located on the side plate 22 without the second evaporation hole 4 to avoid injury from the molten coating material overflowing from the second evaporation hole 4 when the user grasps the grip piece 71. Furthermore, it should be noted that the shape of the grip piece 71 in this application can be ring-shaped, plate-shaped, block-shaped, strip-shaped, etc., and can be designed according to actual needs. This application does not impose a unique limitation on this.

[0031] The above embodiments are merely preferred implementations of this application and are not the only limitation on the content related to the evaporation boat. Those skilled in the art can make flexible settings based on the above embodiments and according to actual application scenarios. It is understood that through the implementation of the above embodiments of this application, an evaporation boat is constructed using a cover 1 and a hollow box 2. The box 2 has an opening communicating with the interior, and the cover 1 is placed over the opening. The cover 1 has multiple first evaporation holes 3 spaced apart from each other, connecting the interior of the box 2 to the outside. The side wall of the box 2 has multiple second evaporation holes 4 spaced apart from each other, connecting the interior of the box 2 to the outside. In practical applications, the solid coating material to be evaporated is located inside the box 2. After the evaporation boat is connected to the evaporation equipment, the solid coating material inside the box 2 can be heated and sublimated through the evaporation equipment, forming molten coating material and gaseous coating material successively. The gaseous coating material flows to the substrate to be coated through the evaporation holes (i.e., the first evaporation hole 3 and the second evaporation hole 4) and is deposited on the surface of the substrate to form a thin film. The molten coating material does not accumulate between the box 2 and the cover 1 as in the traditional solution, but overflows from the evaporation holes and can be recycled after solidification. This not only avoids the waste of coating material, but also avoids the adhesion between the box 2 and the cover 1 in the traditional solution, thereby reducing the coating cost. At the same time, it also reduces the difficulty of opening the cover 1 when adding coating material back into the box 2, avoiding the breakage of the cover 1 when opening in the traditional solution, and improving the service life of the evaporation boat.

[0032] It should be noted that the several embodiments shown above in this application are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. It should also be noted that in the textual description of this application, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply such an actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements may include not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus; and, without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0033] Furthermore, those skilled in the art can implement or use this application by practicing the several embodiments shown above. Various modifications to the embodiments shown above will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments not shown without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the several embodiments shown above, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An evaporation boat, characterized in that, The device includes a lid and a hollow box. The box has an opening that communicates with the interior. The lid is placed over the opening. The lid has a plurality of first evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside. The side wall of the box has a plurality of second evaporation holes that are spaced apart from each other and used to connect the inside of the box with the outside.

2. The evaporation boat according to claim 1, characterized in that, The box body includes a bottom plate and a plurality of side plates surrounding the periphery of the bottom plate. The edges of the plurality of side plates away from the bottom plate form the box opening, and the plurality of second evaporation holes are distributed on at least one of the side plates.

3. The evaporation boat according to claim 2, characterized in that, The plurality of first evaporation holes are arranged in an array of a first preset shape on the cover; The multiple second evaporation holes on the same side plate are arranged in an array with a second preset shape.

4. The evaporation boat according to claim 2, characterized in that, Both the box body and the cover body are rectangular, and the plurality of side plates include two opposing long side plates and two opposing short side plates, with the plurality of second evaporation holes distributed on at least one of the long side plates.

5. The evaporation boat according to claim 4, characterized in that, The length of the cover is less than or equal to the length of the box.

6. The evaporation boat according to claim 4, characterized in that, The cover is provided with a first connecting structure, and the box is provided with a second connecting structure. The second connecting structure is used to cooperate with the first connecting structure so that the cover is placed on the opening of the box.

7. The evaporation boat according to claim 6, characterized in that, The first connecting structure includes two first sliding members, which are respectively disposed on opposite sides of the cover in the width direction. The second connecting structure includes two second sliding members, which are respectively disposed on the outer side of the two long side plates and are adjacent to the box opening. The two second sliding members are used to slide and engage with the two first sliding members respectively, so that the cover slides back and forth along the length of the box at the opening of the box.

8. The evaporation boat according to claim 7, characterized in that, The first sliding member includes a slide bar extending along the length direction of the cover body, and the second sliding member includes an extension portion extending from the long side plate in a direction away from the box body and a limiting portion extending from the extension portion in a direction away from the bottom plate. The extension portion, the limiting portion and the long side plate surround to form a sliding groove, which is used for the slide bar to be inserted and slide in cooperation with the slide bar.

9. The evaporation boat according to claim 4, characterized in that, It also includes a handle, which is provided on the box body.

10. The evaporation boat according to claim 9, characterized in that, The handle includes two hand-held components, which are respectively located on the outside of the two short side plates and are adjacent to the box opening.

Images