Target tube self-detachment drainage device and coating equipment

Abstract

This application relates to a target tube self-detachment drainage device and a coating equipment. The target tube self-detachment drainage device includes a support sleeve, which is fitted onto the end of the target tube closest to the cathode device. The support sleeve has a drain port, and a pumping mechanism is connected to the drain port to extract cooling water from the support sleeve. A pushing mechanism is mounted on the support sleeve and drives the target tube to move away from the cathode device along the axial direction of the support sleeve. This target tube self-detachment drainage device automatically drains cooling water from the target tube, saving labor costs and improving the efficiency of coating equipment maintenance and repair.

Description

Technical Field

[0001] This application relates to the field of physical magnetron sputtering technology, and in particular to a target tube self-detachment drainage device and coating equipment. Background Technology

[0002] In the manufacturing process of solar cells, a coating is applied to the cells using physical magnetron sputtering technology. Within this coating equipment, the target material is connected to the cathode. To ensure the target material's normal lifespan and process temperature, circulating water cooling technology is required. However, considering factors such as vacuum leakage within the process chamber and the risk of water leakage in the process environment, the target tube used to house the target material does not have a direct drainage outlet. During maintenance of the coating equipment, the target material must be manually removed from the cathode for drainage. However, this drainage method is not only inefficient and labor-intensive, but also prone to causing some cooling water to leak into the cathode, potentially leading to equipment damage. Utility Model Content

[0003] Therefore, it is necessary to provide a target tube self-detachment drainage device and coating equipment to address the issue of how to more efficiently and safely drain the cooling water inside the target tube.

[0004] In a first aspect, this application provides a target tube self-detachment drainage device, comprising:

[0005] A support sleeve is provided, which is used to be fitted onto the end of the target tube near the cathode device, and the support sleeve is provided with a drain outlet.

[0006] A water pumping mechanism is connected to the drain outlet and is used to pump the cooling water in the support sleeve out from the drain outlet.

[0007] A pushing mechanism is disposed on the support sleeve, and the pushing mechanism is used to drive the target tube to move away from the cathode device along the axial direction of the support sleeve.

[0008] The technical solution will be further explained below:

[0009] In one embodiment, a retaining ring is provided at both ends of the support sleeve. The retaining ring is disposed on the inner wall of the support sleeve and protrudes inward along the radial direction of the support sleeve.

[0010] In one embodiment, the support sleeve includes a first semi-ring portion and a second semi-ring portion, one side of the first semi-ring portion is rotatably connected to one side of the second semi-ring portion, and the other side of the first semi-ring portion is detachably connected to the other side of the second semi-ring portion by a latch.

[0011] In one embodiment, the pumping mechanism includes:

[0012] A water pumping pipe, which is connected to the drain outlet;

[0013] A water pump, wherein the inlet of the water pump is connected to the water pumping pipe;

[0014] A water storage container, which is connected to the outlet of the water pump.

[0015] In one embodiment, the push mechanism includes:

[0016] A push block is slidably connected to the support sleeve, the push block is movable along the axial direction of the support sleeve, and the push block is used to abut against the end of the target tube near the cathode device.

[0017] A drive assembly connected to a pusher block, the drive assembly being used to drive the pusher block to move away from the cathode device.

[0018] In one embodiment, the driving component includes:

[0019] A lead screw, which is threadedly connected to the push block;

[0020] An electric motor is connected to the lead screw, and the motor is used to drive the lead screw to rotate.

[0021] In one embodiment, there are multiple push blocks, which are spaced apart circumferentially along the support sleeve.

[0022] In one embodiment, the target tube self-detachment drainage device further includes a sliding sleeve, which is fitted onto the end of the target tube away from the support sleeve, and the sliding sleeve is used to slide with the target tube.

[0023] In one embodiment, the target tube self-detachment drainage device further includes a bracket, and both the support sleeve and the sliding sleeve are suspended on the bracket.

[0024] Secondly, this application also provides a coating apparatus, including the aforementioned target tube self-detachment drainage device.

[0025] The aforementioned target tube, detached from the drainage device, is fitted with a support sleeve at the end of the target tube closest to the cathode device. A drain port is opened in the support sleeve, and a pumping mechanism is connected to the drain port. A pushing mechanism is also installed on the support sleeve, which drives the target tube to move axially away from the cathode device. Thus, when it is necessary to drain the cooling water from the target tube, the pushing mechanism drives the target tube axially away from the cathode device, separating the target material from the cathode device. This allows the cooling water in the target tube to flow into the support sleeve through the port closest to the cathode device. The pumping mechanism then extracts the cooling water from the support sleeve through the drain port, achieving automatic drainage of the cooling water from the target tube. This saves labor costs and improves the efficiency of coating equipment maintenance and repair. Furthermore, by using the support sleeve to catch the cooling water flowing out of the target tube, and then having the pumping mechanism extract the cooling water, a closed-loop drainage system is achieved, preventing cooling water leakage into the cathode device and thus avoiding damage to the coating equipment and affecting coating quality. Attached Figure Description

[0026] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Furthermore, the accompanying drawings are not drawn to a 1:1 scale, and the relative dimensions of the various components are shown as examples only and not necessarily to scale. In the accompanying drawings:

[0029] Figure 1 This is a schematic diagram of the structure of a target tube self-detachment drainage device according to an embodiment.

[0030] Figure 2 This is a cross-sectional view of the support sleeve along the axial direction of one embodiment.

[0031] Figure 3 This is a radial cross-sectional view of the support sleeve according to one embodiment.

[0032] Explanation of reference numerals in the attached figures:

[0033] 10. Support sleeve; 11. Drain outlet; 12. Retaining ring; 131. First half-ring; 132. Second half-ring; 14. Lock; 20. Pushing mechanism; 21. Drive assembly; 22. Push block; 30. Pumping mechanism; 31. Pumping pipe; 32. Pump; 33. Water storage container; 40. Sliding sleeve; 50. Cathode device; 61. Target tube; 62. Target material; 70. Support. Detailed Implementation

[0034] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0035] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0036] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0037] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0038] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0039] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0040] See Figure 1 , Figure 1 The present application illustrates a target tube self-detachment drainage device according to an embodiment of the present application. Specifically, the target tube self-detachment drainage device of one embodiment includes a support sleeve 10, which is used to be sleeved on the end of the target tube 61 near the cathode device 50. The support sleeve 10 has a drain port 11. A pumping mechanism 30 is connected to the drain port 11 and is used to pump the cooling water in the support sleeve 10 out of the drain port 11. A pushing mechanism 20 is disposed on the support sleeve 10 and is used to drive the target tube 61 to move away from the cathode device 50 along the axial direction of the support sleeve 10.

[0041] Specifically, the target tube detaches from the drainage device by fitting a support sleeve 10 on one end of the target tube 61 near the cathode device 50, opening a drain port 11 on the support sleeve 10, connecting a pumping mechanism 30 to the drain port 11, and simultaneously providing a pushing mechanism 20 on the support sleeve 10. The pushing mechanism 20 can drive the target tube 61 to move away from the cathode device 50 along the axial direction of the support sleeve 10. Thus, when it is necessary to drain the cooling water in the target tube 61, the pushing mechanism 20 drives the target tube 61 to move away from the cathode device 50 along the axial direction of the support sleeve 10, which separates the target material 62 in the target tube 61 from the cathode device 50. This allows the cooling water in the target tube 61 to flow into the support sleeve 10 through the port of the target tube 61 near the cathode device 50. The cooling water in the support sleeve 10 is then pumped out from the drain port 11 by the pumping mechanism 30, thus automatically draining the cooling water in the target tube 61. This saves labor costs and improves the efficiency of maintenance and repair of the coating equipment. At the same time, the support sleeve 10 receives the cooling water flowing out of the target tube 61, and the pumping mechanism 30 pumps the cooling water out, achieving closed drainage and avoiding problems such as damage to the coating equipment and impact on coating quality caused by cooling water leakage into the cathode device 50.

[0042] See Figure 2 In one embodiment, retaining rings 12 are provided at both ends of the support sleeve 10. The retaining rings 12 are disposed on the inner wall of the support sleeve 10 and protrude inward along the radial direction of the support sleeve 10. By using the retaining rings 12 to block the cooling water, the cooling water can be effectively prevented from flowing out from the two ends of the support sleeve 10, and the problem of cooling water leakage can be further avoided.

[0043] See Figure 3 The support sleeve 10 includes a first semi-ring portion 131 and a second semi-ring portion 132. One side of the first semi-ring portion 131 is rotatably connected to one side of the second semi-ring portion 132, and the other side of the first semi-ring portion 131 is detachably connected to the other side of the second semi-ring portion 132 via a latch 14. Specifically, when the latch 14 is unlocked, the first semi-ring portion 131 can be flipped open relative to the second semi-ring portion 132 to allow the support sleeve 10 to be fitted onto the target tube 61. When the latch 14 is locked, the support sleeve 10 can grip the target tube 61 tightly. Exemplarily, the latch 14 can be a pin-type latch 14 or a bolt-type latch 14, and there is no limitation herein.

[0044] See Figure 1In one embodiment, the pumping mechanism 30 includes a pumping pipe 31, a pumping pump 32, and a water storage container 33. The pumping pipe 31 is connected to the drain outlet 11; the inlet of the pumping pump 32 is connected to the pumping pipe 31, and the water storage container 33 is connected to the outlet of the pumping pump 32. Specifically, the pumping pump 32 can provide negative pressure to the pumping pipe 31 through the inlet, thereby drawing the cooling water in the support sleeve 10 out of the drain outlet 11. After entering the pumping pipe 31, the cooling water is discharged into the water storage container 33 through the drain outlet 11 of the pumping pipe 31. The discharged cooling water is stored in the water storage container 33, which facilitates the recycling and treatment of cooling water and avoids leakage and pollution of cooling water.

[0045] See Figure 1 Optionally, a pushing mechanism 20 includes a pushing block 22 and a driving assembly 21. The pushing block 22 is slidably connected to the support sleeve 10. The pushing block 22 can move along the axial direction of the support sleeve 10 and is used to abut against the end of the target tube 61 near the cathode device 50. The driving assembly 21 is connected to the pushing block 22 and is used to drive the pushing block 22 to move away from the cathode device 50, thereby enabling the pushing block 22 to push the target tube 61 away from the cathode device 50, thereby separating the target material 62 in the target tube 61 from the cathode device 50.

[0046] For example, the inner wall of the support sleeve 10 is provided with a groove that extends along the axial direction of the support sleeve 10. The push block 22 is slidably disposed in the groove, thereby ensuring that the push block 22 can move along the axial direction of the support sleeve 10 under the drive of the drive assembly 21.

[0047] See Figure 3 For example, in one embodiment, there are multiple push blocks 22, which are spaced apart circumferentially along the support sleeve 10. The multiple push blocks 22 work together to move the target tube 61, ensuring balanced force and smooth movement of the target tube 61. Optionally, in one embodiment, the number of drive components 21 corresponds one-to-one with the number of push blocks 22, allowing each push block 22 to independently drive the target tube 61. In another embodiment, all push blocks 22 can be driven synchronously by a single drive component 21, thus saving costs.

[0048] In one embodiment, the drive assembly 21 includes a lead screw and a motor, wherein the lead screw is threadedly connected to the push block 22, and the motor is connected to the lead screw. Thus, by driving the lead screw to rotate via the motor, the push block 22 can be moved, which in turn pushes the target tube 61. Further, in one embodiment, the lead screw is housed in a groove to prevent it from colliding with the target tube 61.

[0049] It is worth noting that in other embodiments, the drive component 21 can also be an electric push block 22 or a cylinder, as long as it can drive the push block 22 to move, and there are no restrictions here.

[0050] See Figure 1 In one embodiment, the target tube self-detachment drainage device further includes a sliding sleeve 40, which is sleeved on the end of the target tube 61 away from the support sleeve 10. The sliding sleeve 40 is used for sliding engagement with the target tube 61. By using the support sleeve 10 and the sliding sleeve 40 to support the two ends of the target tube 61 respectively, the stability of the target tube 61 during movement is ensured.

[0051] Furthermore, in one embodiment, the target tube self-detachment drainage device also includes a bracket 70, on which the support sleeve 10 and the sliding sleeve 40 are both suspended, thus saving installation space on the bottom surface.

[0052] This application also provides a coating apparatus in one embodiment. Specifically, the coating apparatus of one embodiment includes the target tube self-detachment drainage device of any of the above embodiments. In one embodiment, the coating apparatus further includes a cathode device 50, and an emergency device for connecting the target material 62 in the target tube 61.

[0053] The target tube is detached from the drainage device. A support sleeve 10 is fitted on one end of the target tube 61 near the cathode device 50, and a drain port 11 is opened on the support sleeve 10. A pumping mechanism 30 is connected to the drain port 11. At the same time, a pushing mechanism 20 is provided on the support sleeve 10. The pushing mechanism 20 can drive the target tube 61 to move away from the cathode device 50 along the axial direction of the support sleeve 10. Thus, when it is necessary to drain the cooling water in the target tube 61, the pushing mechanism 20 drives the target tube 61 to move away from the cathode device 50 along the axial direction of the support sleeve 10, which separates the target material 62 in the target tube 61 from the cathode device 50. This allows the cooling water in the target tube 61 to flow into the support sleeve 10 through the port of the target tube 61 near the cathode device 50. The cooling water in the support sleeve 10 is then pumped out from the drain port 11 by the pumping mechanism 30, thus automatically draining the cooling water in the target tube 61. This saves labor costs and improves the efficiency of maintenance and repair of the coating equipment. At the same time, the support sleeve 10 receives the cooling water flowing out of the target tube 61, and the pumping mechanism 30 pumps the cooling water out, achieving closed drainage and avoiding problems such as damage to the coating equipment and impact on coating quality caused by cooling water leakage into the cathode device 50.

[0054] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A target pipe self-detaching drain device, characterized by, include: A support sleeve (10) is used to be fitted onto one end of the target tube (61) near the cathode device (50), and the support sleeve (10) has a drain port (11). A water pumping mechanism (30) is connected to the drain outlet (11) and is used to pump the cooling water in the support sleeve (10) out of the drain outlet (11). Pushing mechanism (20) is disposed on the support sleeve (10) and is used to drive the target tube (61) to move away from the cathode device (50) along the axial direction of the support sleeve (10).

2. The target pipe self-detaching drain device according to claim 1, characterized in that, Both ends of the support sleeve (10) are provided with retaining rings (12), which are disposed on the inner wall of the support sleeve (10) and protrude inward along the radial direction of the support sleeve (10).

3. The target tube self-detaching drain device according to claim 1, characterized in that, The support sleeve (10) includes a first semi-ring (131) and a second semi-ring (132). One side of the first semi-ring (131) is rotatably connected to one side of the second semi-ring (132), and the other side of the first semi-ring (131) is detachably connected to the other side of the second semi-ring (132) by a latch (14).

4. The target tube self-detaching drain device according to claim 1, characterized in that, The pumping mechanism (30) includes: A water pumping pipe (31) is connected to the drain outlet (11); A water pump (32) is connected to the water pump pipe (31) through its inlet. A water storage container (33) is connected to the outlet of the water pump (32).

5. The target tube self-detaching drain device according to claim 1, wherein The push mechanism (20) includes: Push block (22), which is slidably connected to the support sleeve (10), the push block (22) is axially movable along the support sleeve (10), and the push block (22) is used to abut against the end of the target tube (61) near the cathode device (50); A drive assembly (21) is connected to a pusher block (22) and is used to drive the pusher block (22) to move away from the cathode device (50).

6. The target tube self-detaching drain device according to claim 5, characterized in that, The driving component (21) includes: A lead screw, which is threadedly connected to the push block (22); An electric motor is connected to the lead screw, and the motor is used to drive the lead screw to rotate.

7. The target tube self-detaching drain device according to claim 5, wherein The number of push blocks (22) is multiple, and the multiple push blocks (22) are arranged at intervals along the circumference of the support sleeve (10).

8. The target tube self-detaching drain device according to claim 5, wherein, The target tube self-detachment drainage device also includes a sliding sleeve (40), which is sleeved on the end of the target tube (61) away from the support sleeve (10) and is used to slide with the target tube (61).

9. The target tube self-detaching drain device according to claim 8, characterized in that, The target tube self-detachment drainage device also includes a bracket (70), and the support sleeve (10) and the sliding sleeve (40) are both suspended on the bracket (70).

10. A coating apparatus, characterized by, The target tube self-detachment drainage device includes any one of claims 1-9.

Images