Coating equipment

Abstract

This application relates to a coating apparatus. It includes a first coating device, a second coating device, and a clamping device. The clamping device is used to fix a component to be coated between the first and second coating devices, so that the first coating device performs coating treatment on a first surface of the component to be coated, and the second coating device performs coating treatment on a second surface of the component to be coated. Using this coating apparatus can improve coating efficiency.

Description

Technical Field

[0001] This application relates to the field of photovoltaic technology, and in particular to a coating device. Background Technology

[0002] With the development of photovoltaic technology, heterojunction solar cells have emerged. These cells have a symmetrical bifacial structure with N-type crystalline silicon in the middle. Intrinsic amorphous silicon thin films and P-type amorphous silicon thin films are deposited sequentially on the front side to form a PN junction; while intrinsic amorphous silicon thin films and N-type amorphous silicon thin films are deposited sequentially on the back side to form a back surface field.

[0003] In traditional technology, PVD (Physical Vapor Deposition Machine) equipment is used to deposit P-type and N-type amorphous silicon thin films separately. However, this greatly prolongs the production cycle of heterojunction cells and results in low deposition efficiency. Utility Model Content

[0004] Therefore, it is necessary to provide a coating equipment that improves coating efficiency.

[0005] In a first aspect, this application provides a coating apparatus. The coating apparatus includes a first coating device, a second coating device, and a clamping device;

[0006] The clamping device is used to fix the component to be coated between the first coating device and the second coating device, so that the first coating device performs coating treatment on the first surface of the component to be coated, and the second coating device performs coating treatment on the second surface of the component to be coated.

[0007] In one embodiment, the clamping device includes a carrier plate with multiple grooves formed along the longitudinal and transverse directions, and a movable clamping component is slidably connected in each groove.

[0008] In one embodiment, the clamping component includes a sliding block with a fixing unit for fixing the component to be coated.

[0009] In one embodiment, the carrier plate is provided with a sensor for detecting the position of the component to be coated.

[0010] In one embodiment, the first coating apparatus includes a chamber guard plate, in which a first target and a second target are disposed, and a baffle is disposed between the first target and the second target.

[0011] In one embodiment, both the first coating device and the second coating device are coffin lid type coating devices.

[0012] In one embodiment, both the first coating device and the second coating device are drawer-type coating devices.

[0013] In one embodiment, the first coating device is a coffin lid type coating device, and the second coating device is a drawer type coating device.

[0014] In one embodiment, the first coating device is a drawer-type coating device, and the second coating device is a coffin-lid-type coating device.

[0015] The aforementioned coating equipment includes a clamping device for fixing the component to be coated between a first coating device and a second coating device, so that the first coating device performs coating treatment on the first surface of the component to be coated, and the second coating device performs coating treatment on the second surface of the component to be coated, thereby achieving simultaneous coating on both sides of the component and improving coating efficiency. Attached Figure Description

[0016] Figure 1 This is a structural block diagram of a coating apparatus in one embodiment;

[0017] Figure 2 This is a structural block diagram of the coating apparatus in another embodiment;

[0018] Figure 3 This is a structural block diagram of the clamping device in one embodiment;

[0019] Figure 4 This is a structural block diagram of the clamping component in one embodiment;

[0020] Figure 5 This is a structural block diagram of the clamping device in another embodiment;

[0021] Figure 6 This is a structural block diagram of the first coating apparatus in one embodiment.

[0022] Reference numerals: 10-clamping device; 11-carrier plate; 12-slide groove; 13-clamping component; 131-sliding block; 132-fixing unit; 14-sensor; 20-first coating device; 21-chamber guard plate; 22-first target material; 23-second target material; 24-baffle; 30-second coating device; 40-elastic buffer device. Detailed Implementation

[0023] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0025] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0026] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. Furthermore, in the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if there is transmission of electrical signals or data between the connected objects.

[0027] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0028] As described in the background section, with the development of photovoltaic technology, heterojunction solar cells have emerged. These cells have a symmetrical bifacial structure with N-type crystalline silicon in the middle. Intrinsic amorphous silicon thin films and P-type amorphous silicon thin films are deposited sequentially on the front side to form a PN junction; while intrinsic amorphous silicon thin films and N-type amorphous silicon thin films are deposited sequentially on the back side to form a back surface field.

[0029] In traditional technology, PVD (Physical Vapor Deposition Machine) equipment is used to deposit P-type and N-type amorphous silicon thin films separately. However, this greatly prolongs the production cycle of heterojunction cells and results in low deposition efficiency.

[0030] For the reasons mentioned above, such as Figure 1 As shown, this application provides a coating apparatus, including a first coating device 20, a second coating device 30, and a clamping device 10; the clamping device 10 is used to fix the component to be coated between the first coating device 20 and the second coating device 30, so that the first coating device 20 performs coating treatment on the first surface of the component to be coated, and the second coating device 30 performs coating treatment on the second surface of the component to be coated.

[0031] The HJT heterojunction solar cell production process consists of four main steps: cleaning, CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), and screen printing. Currently, PVD uses sputtering technologies including DC sputtering, pulsed sputtering, RF sputtering, ion beam sputtering, and magnetron sputtering. This embodiment uses DC sputtering and pulsed sputtering. The sputtering principle is as follows: the sputtering target and the thin film deposition substrate are placed on the positive and negative electrodes, respectively. A high voltage is applied between the positive and negative electrodes to induce a glow discharge in argon gas. Under the influence of the electric field, the argon gas generates Ar ions and electrons. The Ar ions collide with the target, and Ar ions with appropriate energy bombard the target surface, causing atoms on the target surface to detach and uniformly deposit on the substrate to form a conductive film layer, completing the coating process.

[0032] The first coating apparatus 20 is used to deposit one or more thin films on the surface of an object, and typically includes a sputtering target for generating the coating material and related control and adjustment devices. Its function is to deposit the desired thin film on the first surface of the assembly to be coated. In sputter coating, the first coating apparatus 20 is a sputtering source with a target, where atoms are sputtered onto the first surface to be coated by bombarding the target with high-energy particles.

[0033] The second coating apparatus 30 is similar to the first coating apparatus 20, but it is a device for coating a second surface of the component to be coated. Its structure and function can be appropriately adjusted according to specific coating requirements and processes. For example, if it is necessary to deposit thin films of different materials or different thicknesses on two surfaces, the coating material source and control parameters of the second coating apparatus 30 will differ from those of the first coating apparatus 20. Exemplarily, the coating apparatus can be a drawer-type coating apparatus or a coffin-lid-type coating apparatus. In a drawer-type coating apparatus, the target material is placed in the drawer, and the target material is placed inside the drawer by pushing the drawer. In a coffin-lid-type coating apparatus, the coffin lid can be opened, the target material placed inside, and then the coffin lid closed for coating.

[0034] The target material is mainly used to prepare transparent conductive oxide (TCO) layers and amorphous silicon thin film layers, which are deposited onto the surface of silicon wafers (substrates) through physical vapor deposition (PVD) or magnetron sputtering processes.

[0035] The clamping device 10 is a component used to fix the assembly to be coated. It needs to ensure that the assembly remains in a stable position during the coating process and that the first coating device 20 and the second coating device 30 are aligned with the first and second surfaces of the assembly to be coated, respectively. The design of the clamping device 10 needs to consider factors such as the shape, size, material of the assembly to be coated, and the stress conditions during the coating process to avoid damage to the assembly or affecting the coating quality. Common clamping methods include mechanical clamping and vacuum adsorption.

[0036] The component to be coated is the object that needs to undergo coating treatment. It can be a simple planar substrate, such as a glass sheet, silicon wafer, or metal sheet. The material and surface condition of the component to be coated will affect the effect and quality of the coating, so pretreatment such as cleaning and polishing is usually required before coating.

[0037] The first surface to be coated is the surface of the assembly to be coated that requires coating treatment by the first coating apparatus 20. For example, in a double-sided coated substrate, the first surface to be coated may be the front or back of the substrate. The second surface to be coated is another surface of the assembly to be coated that requires coating treatment by the second coating apparatus 30, opposite to the first surface to be coated. For example, in a double-sided coated substrate, if the first surface to be coated is the front of the substrate, then the second surface to be coated is the back of the substrate.

[0038] Specifically, the main function of the coating equipment is to perform double-sided coating on the component to be coated. During the coating process, the clamping device 10 plays a crucial role, accurately and securely fixing the component to be coated at a specific position between the first coating device 20 and the second coating device 30. This fixing method must not only ensure that the component to be coated does not shift or shake during the coating process to avoid affecting the uniformity and quality of the coating, but also prevent any form of damage to the component to be coated. Before coating, the target material is placed in the first coating device 20 and the second coating device 30. Then, the first coating device 20 coats the first surface of the component to be coated, and the second coating device 30 coats the second surface of the component to be coated. Optionally, the target material of the first coating device 20 and the target material of the second coating device 30 can be the same or different.

[0039] With the first coating device 20 and the second coating device 30 working together and the clamping device 10 precisely fixing the component to be coated, this coating equipment can efficiently and with high quality complete the double-sided coating task of the component to be coated. It is widely used in various fields with strict requirements for thin film performance, such as optical coating and electronic device coating.

[0040] The aforementioned coating equipment includes a clamping device 10 for fixing the component to be coated between a first coating device 20 and a second coating device 30, so that the first coating device 20 performs coating treatment on the first surface of the component to be coated, and the second coating device 30 performs coating treatment on the second surface of the component to be coated, thereby achieving simultaneous coating on both sides of the component and improving coating efficiency.

[0041] In one embodiment, the first coating device 20 and the second coating device 30 are respectively connected to the clamping device 10 via the elastic buffer device 40.

[0042] The elastic buffer device 40 is a mechanical structural component used to provide cushioning and shock absorption between two parts, while allowing for a certain degree of relative displacement or angle adjustment. In the coating equipment, the elastic buffer device 40 connects the first coating device 20, the second coating device 30, and the clamping device 10, playing a role in stabilizing the coating process and improving the coating quality.

[0043] Specifically, the first coating device 20 and the second coating device 30 are respectively connected to the clamping device 10 through the elastic buffer device 40. The elastic buffer device 40 is used to absorb the vibration generated by the operation of the equipment during the coating process, to ensure the stability of the component to be coated during the coating process, and to avoid uneven coating or component damage caused by vibration.

[0044] In one embodiment, the clamping device 10 includes a carrier plate 11, on which multiple grooves 12 are formed along the longitudinal and transverse directions, and a movable clamping component 13 is slidably connected in each groove 12.

[0045] The carrier plate 11 is a flat plate that serves as a support component. It is typically made of a material with a certain strength and rigidity and is used to install and fix other components, providing a stable support platform for the entire device. The slide groove 12 is a groove with a certain depth and width opened on the carrier plate 11. Its function is to provide a sliding track for the clamping component 13, allowing the clamping component 13 to move along a specific direction within the slide groove 12. The clamping component 13 is the component that directly contacts the component to be coated, playing a role in clamping and fixing it. It can be designed and adjusted according to the shape, size, and other characteristics of the component to be coated.

[0046] Specifically, since the shape and size of the components to be coated are not unique, to ensure the stability of the clamping of the components, multiple sliding grooves 12 can be opened on the carrier plate 11 of the clamping device 10 along the longitudinal and transverse directions. Each sliding groove 12 is slidably connected to a movable clamping component 13. Each clamping component 13 is connected to the sliding groove 12 through a specific connection structure and can move freely along the longitudinal or transverse direction within the sliding groove 12. Therefore, the position of each clamping component 13 can be flexibly adjusted according to the size, shape, and position of the components to be coated, thereby achieving precise clamping of components of different shapes. This adjustable design greatly improves the versatility and practicality of the clamping device 10, enabling it to adapt to various complex clamping tasks. For example, the clamping component 13 can be a claw type, a slot type, etc.

[0047] The clamping device 10 of this embodiment can flexibly adjust the position of the clamping component 13 according to the size of the component to be coated, so as to accurately fix the components to be coated of different specifications and improve the adaptability of the coating equipment to different components.

[0048] In one embodiment, the clamping component 13 includes a sliding block 131, on which a fixing unit 132 for fixing the component to be coated is provided.

[0049] The sliding block 131, as an important component of the clamping component 13, is a block-shaped structure that can slide within a specific track (such as the slide groove 12). It provides the mounting base for the fixing unit 132, and through its sliding function, the position of the clamping component 13 can be adjusted according to the needs of the object to be clamped, achieving a flexible clamping layout. The fixing unit 132, located on the sliding block 131, is specifically designed to securely fix the component to be coated onto the sliding block 131. Through physical connections (such as bolt tightening, snap-fit ​​locking, clamping force, etc.), it ensures that the component to be coated remains relatively stationary with respect to the sliding block 131 during the coating process, preventing component displacement due to vibration, airflow, or other factors, which could affect the coating quality and effect.

[0050] Specifically, for regularly shaped components to be coated, such as circular or square planar substrates, the fixing unit 132 employs a bolt fastening structure with elastic washers. The elastic washers buffer the pressure between the component and the sliding block 131, preventing damage to the component surface due to over-tightening, and also accommodate minor dimensional changes in the component due to temperature variations. For complex, irregularly shaped components to be coated, the fixing unit 132 employs a multi-set adjustable gripper structure. These grippers can be adjusted manually or electrically to apply uniform clamping force to the component from different directions, ensuring the component is firmly fixed to the sliding block 131 and preventing deformation due to uneven clamping force.

[0051] In this embodiment, the clamping component 13 includes a sliding block 131, and a fixing unit 132 for fixing the component to be coated is provided on the sliding block 131, which can achieve a flexible clamping layout while ensuring that the component to be coated is firmly fixed.

[0052] In one embodiment, the carrier plate 11 is provided with a sensor 14 for detecting the position of the component to be coated.

[0053] The sensor 14 is a device or apparatus capable of sensing a specified measurand and converting it into a usable output signal according to a certain rule. In applications that detect the position of an assembly to be coated, the sensor 14 can sense the position information of the assembly on the carrier plate 11 and convert it into an electrical signal or other easily processed signal form so that subsequent control or monitoring systems can identify and analyze it.

[0054] Specifically, a series of sensors 14 for detecting the position of the component to be coated are arranged on the carrier plate 11. These sensors 14 are of various types, including but not limited to photoelectric sensors 14 and proximity sensors 14. The photoelectric sensor 14 uses the principle of light reflection or blocking to detect the position of the component. When the component to be coated is placed on the carrier plate 11, it will block or reflect the light emitted by the photoelectric sensor 14. After receiving the change in the light signal, the sensor 14 converts it into an electrical signal output. The proximity sensor 14 determines the position of the component by detecting the change in distance between the component to be coated and the sensor 14. When the component to be coated approaches the sensor 14, the physical quantities such as the magnetic field or capacitance inside the sensor 14 will change, thereby generating a corresponding electrical signal.

[0055] These sensors 14 are installed at key locations on the carrier plate 11, with a reasonable and precise distribution, enabling comprehensive and accurate detection of the position of the components to be coated on the carrier plate 11. By setting these sensors 14 on the carrier plate 11 to detect the position of the components to be coated, the entire production process achieves a high degree of automation and intelligence, greatly reducing the need for manual intervention, minimizing human error, and providing a strong guarantee for producing high-quality coated products.

[0056] For example, after the position of the component to be coated is detected by the sensor 14, the sliding position of the clamping member 13 in the clamping device 10 can be determined based on the position, thereby ensuring the stability of the clamping of the component to be coated.

[0057] In one embodiment, the first coating apparatus 20 includes a chamber guard plate 21, in which a first target material 22 and a second target material 23 are disposed, and a baffle 24 is disposed between the first target material 22 and the second target material 23.

[0058] The chamber liner 21 is a key component constituting the enclosed space inside the coating apparatus. It is typically made of high-strength, high-temperature-resistant, and corrosion-resistant materials, such as stainless steel or special alloys. Its main functions include protecting the chamber, extending its service life, reducing contamination, and maintaining process stability. The chamber liner 21 ensures the long-term efficient operation of the sputtering equipment, indirectly guaranteeing the conversion efficiency of HJT cells (e.g., reducing passivation layer defects and improving TCO conductivity) and the yield of large-scale production. Furthermore, the chamber liner 21 protects the internal structure of the coating apparatus, maintains a vacuum or specific gas environment within the chamber, prevents external impurities from entering the chamber and affecting coating quality, and also provides a mounting base for other components (such as targets and baffles). The chamber, enclosed by the chamber liner 21, is the site where the coating reaction occurs. The environmental conditions within the chamber (such as vacuum level, temperature, and gas composition) play a decisive role in the coating process and film quality. During the coating process, the air inside the chamber is extracted using a vacuum system to create a high-vacuum environment, and then specific reactive gases are introduced as needed to meet the requirements of different coating processes.

[0059] The first target 22 and the second target 23 are solid bulk materials that serve as the source of thin film materials during the coating process. They are typically made of high-purity metals, alloys, or compounds. When the target is bombarded with energy (such as electron beams, ion beams, lasers, etc.), the atoms or molecules on its surface gain enough energy to detach from the target surface, fly towards the surface of the object to be coated, and deposit to form a thin film. Different target materials can produce thin films with different properties. For example, conductive thin films can be prepared using metal targets, while insulating or optical thin films can be prepared using ceramic targets.

[0060] The baffle 24 is a plate-shaped component disposed between the first target 22 and the second target 23, and is generally made of a material with certain strength and corrosion resistance. The main function of the baffle 24 is to adjust the particle distribution sputtered from the target material and control the area and thickness uniformity of the thin film deposition. By adjusting the position, angle, or shape of the baffle 24, the flight path of the sputtered particles from the target material can be changed, preventing particles from directly sputtering onto areas that do not need coating, while making the thin film deposition more uniform across the surface of the object to be coated.

[0061] Specifically, one of the core structures of the first coating device 20 is the chamber liner 21. These chamber liner 21 are made of high-quality stainless steel and are formed into a highly airtight chamber through precision processing and welding. Stainless steel not only has high strength, capable of withstanding various pressure and stress changes that may occur inside the chamber, but also has excellent high-temperature resistance and corrosion resistance. It can work stably for a long time in high-temperature and various chemical atmospheres, effectively protecting other precision components inside the coating device from the influence of the external environment.

[0062] To ensure the deposition of a uniform, high-quality thin film on the surface of the object to be coated, a baffle 24 is installed between the first target 22 and the second target 23. The baffle 24 resists the scouring of sputtered particles from the target, extending its service life. During the coating process, when the target is bombarded by an ion beam, the sputtered particles scatter in all directions at a certain angle and with a certain amount of energy. The presence of the baffle 24 effectively blocks some of the sputtered particles, ensuring that the particles only fly towards the surface of the object to be coated along a predetermined path, thereby achieving precise control over the film deposition area and thickness uniformity. By precisely adjusting the position and angle of the baffle 24, thin films meeting specific performance requirements can be prepared according to different coating needs, greatly improving the flexibility of the coating process and the consistency of product quality.

[0063] In one embodiment, both the first coating device 20 and the second coating device 30 are coffin lid type coating devices.

[0064] Specifically, both the first coating device 20 and the second coating device 30 are coffin-type coating devices. Before coating, the coffin can be opened, and the corresponding target materials of the first coating device 20 and the second coating device 30 can be placed into the first coating device 20 and the second coating device 30 respectively. Then the coffin can be closed and coating can be carried out, thereby achieving double-sided coating of the component to be coated.

[0065] In one embodiment, both the first coating device 20 and the second coating device 30 are drawer-type coating devices.

[0066] Specifically, both the first coating device 20 and the second coating device 30 are drawer-type coating devices. Before coating, the target materials corresponding to the first coating device 20 and the second coating device 30 can be placed into the drawers of the first coating device 20 and the second coating device 30 respectively. By pushing the drawers, the target materials are placed in the first coating device 20 and the second coating device 30 for coating, thereby achieving double-sided coating of the component to be coated.

[0067] In one embodiment, the first coating device 20 is a coffin lid type coating device, and the second coating device 30 is a drawer type coating device.

[0068] Specifically, before coating, the coffin lid can be opened, the target material of the first coating device 20 can be placed into the first coating device 20, the coffin lid can be closed, and the target material of the second coating device 30 can be placed into the drawer of the second coating device 30. By pushing the drawer, the target material is placed in the second coating device 30 for coating, thereby achieving double-sided coating of the component to be coated.

[0069] In one embodiment, the first coating device 20 is a drawer-type coating device, and the second coating device 30 is a coffin-lid-type coating device.

[0070] Specifically, before coating, the target material of the first coating device 20 can be placed into the drawer of the first coating device 20, the target material can be placed in the first coating device 20 by pushing the drawer, the coffin lid can be opened, the target material of the second coating device 30 can be placed into the second coating device 30, the coffin lid can be closed, and coating can be performed, thereby achieving double-sided coating of the component to be coated.

[0071] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0072] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A coating apparatus, characterized by, The coating equipment includes a first coating device, a second coating device, and a clamping device; The clamping device is used to fix the component to be coated between the first coating device and the second coating device, so that the first coating device performs coating treatment on the first surface of the component to be coated, and the second coating device performs coating treatment on the second surface of the component to be coated.

2. The coating apparatus according to claim 1, wherein The first coating device and the second coating device are respectively connected to the clamping device through an elastic buffer device.

3. The coating apparatus according to claim 2, wherein The clamping device includes a carrier plate with multiple grooves opened along the longitudinal and transverse directions, and a movable clamping component is slidably connected in each groove.

4. The coating apparatus according to claim 3, wherein The clamping component includes a sliding block, on which a fixing unit for fixing the component to be coated is provided.

5. The coating apparatus according to claim 3, wherein The carrier plate is equipped with a sensor for detecting the position of the component to be coated.

6. The coating apparatus of claim 1, wherein, The first coating apparatus includes a chamber guard plate, in which a first target and a second target are disposed, and a baffle is disposed between the first target and the second target.

7. The coating apparatus according to any one of claims 1 to 6, characterized in that, Both the first coating device and the second coating device are coffin lid type coating devices.

8. The coating apparatus according to any one of claims 1 to 6, characterized in that, Both the first coating device and the second coating device are drawer-type coating devices.

9. The coating apparatus according to any one of claims 1 to 6, characterized in that, The first coating device is a coffin lid type coating device, and the second coating device is a drawer type coating device.

10. The coating apparatus according to any one of claims 1 to 6, wherein The first coating device is a drawer-type coating device, and the second coating device is a coffin-lid-type coating device.

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