A vacuum coating equipment

Abstract

This utility model relates to the field of vacuum coating machine technology, specifically a vacuum coating equipment. It involves installing an electric grid plate assembly at the air extraction port. The electric grid plate assembly includes a drive component, a transmission shaft mechanism, and a grid plate mechanism mounted on the transmission shaft mechanism. When the drive component operates, it drives the transmission shaft mechanism to rotate, and the grid plate mechanism rotates synchronously with the transmission shaft mechanism, thereby adjusting the rotation angle of the grid plate mechanism. This facilitates the adjustment of the air extraction port flow area and effectively solves the problem that existing vacuum coating equipment typically installs a gate valve at the air extraction port of the vacuum chamber to control the opening and closing of the air extraction channel. However, the gate valve's operating mode is relatively simple, often only supporting two fixed states: fully open or fully closed, making it difficult to achieve precise and stable control of the internal air pressure of the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, specifically a vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment is a core component in thin film preparation processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). Its main function is to provide a vacuum environment for the workpiece to be coated, reducing interference from gas molecules during the deposition process and ensuring the purity, uniformity, and adhesion of the thin film. The vacuum chamber within the vacuum coating equipment, serving as the main chamber for supporting the workpiece and carrying out the coating reaction, must work in conjunction with the pumping system to achieve the required vacuum level and maintain a stable vacuum environment during the coating process. This ensures consistent thin film quality and process repeatability.

[0003] Existing vacuum coating equipment typically installs a gate valve at the air extraction port of the vacuum chamber to control the opening and closing of the air extraction channel, thereby realizing the start and stop of the vacuuming process. However, the working mode of the gate valve is relatively simple, often only supporting two fixed states: fully open or fully closed. It does not have the ability to adjust the flow cross-sectional area, making it difficult to achieve precise and stable control of the air pressure inside the vacuum chamber according to process requirements.

[0004] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0005] The existing vacuum coating equipment mentioned above typically installs a gate valve at the air extraction port of the vacuum chamber to control the opening and closing of the air extraction channel. However, the gate valve has a relatively simple working mode, often only supporting two fixed states: fully open or fully closed. This makes it difficult to achieve precise and stable control of the air pressure inside the vacuum chamber. The technical solution adopted by this utility model to solve this problem is as follows:

[0006] A vacuum coating apparatus includes a coating chamber housing and a first housing connected to the coating chamber housing. The coating chamber housing has a coating cavity and an air extraction port. The first housing has a mounting part for mounting an air extraction device. The mounting part communicates with the coating cavity through the air extraction port. An electric grid plate assembly is provided at the air extraction port. The electric grid plate assembly includes a grid plate mechanism for controlling the opening and closing state of the air extraction port, a rotatably configured transmission shaft mechanism, and a drive assembly for driving the transmission shaft mechanism to rotate. The grid plate mechanism is mounted on the transmission shaft mechanism. When the drive assembly drives the transmission shaft mechanism to rotate, the grid plate mechanism rotates synchronously to adjust the flow area of ​​the air extraction port.

[0007] Furthermore, the air extraction port includes a first air extraction port and a second air extraction port spaced apart from the first air extraction port; the transmission shaft mechanism includes a first transmission shaft mechanism and a second transmission shaft mechanism; the grid plate mechanism includes a first grid plate mechanism mounted on the first transmission shaft mechanism and a second grid plate mechanism mounted on the second transmission shaft mechanism; one side of the first transmission shaft mechanism is connected to the drive assembly, and the other side of the first transmission shaft mechanism is connected to the second transmission shaft mechanism; under the drive of the drive assembly, the first transmission shaft mechanism drives the second transmission shaft mechanism to rotate synchronously, thereby causing the first grid plate mechanism and the second grid plate mechanism to rotate synchronously.

[0008] Furthermore, a first coupling is provided between the first transmission shaft mechanism and the second transmission shaft mechanism.

[0009] Furthermore, the first drive shaft mechanism includes a first main drive shaft connected to the drive assembly, and a first driven shaft and a second driven shaft located on both sides of the first main drive shaft. The first grating plate mechanism includes a first grating plate mounted on the first driven shaft, a second grating plate mounted on the first main drive shaft, and a third grating plate mounted on the second driven shaft. A hinge mechanism is provided between the first grating plate, the second grating plate, and the third grating plate.

[0010] Furthermore, the hinge mechanism includes a connecting rod arranged in a vertical direction and a connecting rod pin. The second grid plate is hinged to the middle position of the connecting rod through the connecting rod pin, the first grid plate is hinged to one side of the connecting rod through the connecting rod pin, and the third grid plate is hinged to the other side of the connecting rod through the connecting rod pin.

[0011] Furthermore, a second coupling is provided between the drive assembly and the first transmission shaft mechanism. The drive assembly includes a servo motor, a third coupling connected to the servo motor, a support seat located on the outer periphery of the third coupling, and a magnetohydrodynamic fluid located on the side of the support seat near the second coupling.

[0012] Furthermore, a first mounting frame is provided on the side of the first air extraction port away from the coating cavity, and a second mounting frame is provided on the side of the second air extraction port away from the coating cavity. Bearings are provided at the ends of both the first and second drive shaft mechanisms. The first drive shaft mechanism is mounted on the first mounting frame through the bearings, and the second drive shaft mechanism is mounted on the second mounting frame through the bearings.

[0013] Furthermore, the first mounting frame is provided with a dirt-proof plate to prevent contamination of the inner wall of the first mounting frame and the first air extraction port. The dirt-proof plate is located on the side of the first mounting frame near the first air extraction port and extends toward the coating cavity.

[0014] Furthermore, the anti-fouling plate includes a first anti-fouling plate arranged in a horizontal direction and a second anti-fouling plate arranged in a vertical direction, both of which are detachably connected to the first mounting frame.

[0015] Furthermore, the first anti-fouling plate includes a first connecting plate threadedly connected to the first mounting frame and a first extension plate arranged parallel to the first connecting plate. The second anti-fouling plate includes a second connecting plate threadedly connected to the first mounting frame and a second extension plate arranged parallel to the second connecting plate. Both the first extension plate and the second extension plate extend toward the coating cavity and are located on the side close to the central axis of the first mounting frame.

[0016] The beneficial effects of this utility model are as follows:

[0017] This invention provides an electric grid plate assembly at the air extraction port. The electric grid plate assembly includes a drive assembly, a transmission shaft mechanism, and a grid plate mechanism mounted on the transmission shaft mechanism. When the drive assembly is working, it drives the transmission shaft mechanism to rotate, and the grid plate mechanism rotates synchronously with the transmission shaft mechanism, thereby adjusting the rotation angle of the grid plate mechanism. This facilitates the adjustment of the air flow area at the air extraction port and effectively solves the problem that existing vacuum coating equipment typically installs a gate valve at the air extraction port of the vacuum chamber to control the opening and closing of the air extraction channel. However, the gate valve has a relatively simple working mode, often only supporting two fixed states: fully open or fully closed, which makes it difficult to achieve precise and stable control of the air pressure inside the vacuum chamber.

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 This is one of the structural schematic diagrams of the vacuum coating equipment of this utility model;

[0020] Figure 2 for Figure 1 Cross-sectional view along line AA;

[0021] Figure 3 This is the second schematic diagram of the structure of the vacuum coating equipment of this utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the electric grille assembly of this utility model;

[0023] Figure 5 This is one of the structural schematic diagrams of the drive component of this utility model;

[0024] Figure 6 This is the second schematic diagram of the drive component of this utility model;

[0025] Figure 7 One of the structural schematic diagrams showing the connection between the first transmission shaft mechanism and the first grating plate mechanism of this utility model;

[0026] Figure 8 This is the second schematic diagram showing the connection between the first transmission shaft mechanism and the first grating plate mechanism of this utility model.

[0027] Figure 9 for Figure 8 Cross-sectional view along line BB;

[0028] Figure 10 This is the third schematic diagram showing the connection between the first transmission shaft mechanism and the first grating plate mechanism of this utility model.

[0029] Figure 11 for Figure 10 Cross-sectional view along line CC;

[0030] Figure 12 This is one of the structural schematic diagrams showing the connection between the first mounting frame and the anti-fouling plate of this utility model;

[0031] Figure 13 This is the second schematic diagram of the connection between the first mounting frame and the anti-fouling plate of this utility model;

[0032] Figure 14 for Figure 13 Schematic diagram of cross section along line DD. Detailed Implementation

[0033] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0034] like Figures 1 to 14A vacuum coating equipment is shown, including a coating chamber housing 1 and a first housing 2 connected to the coating chamber housing 1. The coating chamber housing 1 is provided with a coating cavity 11 and an air extraction port 12. The first housing 2 is provided with a mounting part 21 for installing an air extraction device. The mounting part 21 communicates with the coating cavity 11 through the air extraction port 12. An electric grid plate assembly is provided at the air extraction port 12. The electric grid plate assembly includes a grid plate mechanism 3 for controlling the opening and closing state of the air extraction port 12, a rotatably configured transmission shaft mechanism 4, and a drive component 5 for driving the transmission shaft mechanism 4 to rotate. The grid plate mechanism 3 is mounted on the transmission shaft mechanism 4. When the drive component 5 drives the transmission shaft mechanism 4 to rotate, the grid plate mechanism 3 rotates synchronously to adjust the flow area of ​​the air extraction port 12.

[0035] This invention provides an electric grid plate assembly at the air extraction port. The electric grid plate assembly includes a drive assembly, a transmission shaft mechanism, and a grid plate mechanism mounted on the transmission shaft mechanism. When the drive assembly is working, it drives the transmission shaft mechanism to rotate, and the grid plate mechanism rotates synchronously with the transmission shaft mechanism, thereby adjusting the rotation angle of the grid plate mechanism. This facilitates the adjustment of the air flow area at the air extraction port and effectively solves the problem that existing vacuum coating equipment typically installs a gate valve at the air extraction port of the vacuum chamber to control the opening and closing of the air extraction channel. However, the gate valve has a relatively simple working mode, often only supporting two fixed states: fully open or fully closed, which makes it difficult to achieve precise and stable control of the air pressure inside the vacuum chamber.

[0036] Preferably, the coating chamber 1 and the first housing 2 can be detachably connected by means of threaded connection, snap-fit ​​connection, slot connection, etc.

[0037] Optionally, in some embodiments, the mounting part 21 is an annular flange provided on the outer wall of the first housing 2. Multiple bolt holes are evenly distributed on the flange, and the central through hole of the flange is connected to the air extraction passage inside the first housing 2. The air extraction device is a rotary vane vacuum pump. The air inlet of the rotary vane vacuum pump is provided with a flange interface that matches the flange. It is fastened to the flange of the mounting part 21 by bolts to achieve the sealing and conduction of the air extraction passage.

[0038] Optionally, in some embodiments, the mounting part 21 includes an annular chuck fixed on the first housing 2 and elastic buckles evenly distributed along the circumference of the chuck. The inner side of the chuck is provided with a sealing groove, and a sealing ring is built into the sealing groove. The pumping device is a Roots vacuum pump. The inlet end of the Roots vacuum pump is provided with an annular flange that matches the chuck. The edge of the flange is provided with a groove corresponding to the elastic buckle. During installation, the flange of the vacuum pump is aligned with the chuck, and after pressing, the elastic buckle is engaged into the groove to complete the fixation. The sealing ring ensures that there is no gas leakage.

[0039] Optionally, in some embodiments, the mounting part 21 includes a base opening on the first housing 2, a flange is provided in the base opening, and a plurality of bolt holes are evenly distributed on the flange for connecting and fixing with the air extraction device. At the same time, a sealing groove is provided at the connection between the flange and the first housing 2 for installing a sealing ring to ensure the airtightness of the connection. The air extraction device is a molecular pump, and the air inlet end of the molecular pump is provided with a connecting flange that matches the flange on the first housing 2. The connecting flange also has a corresponding number of bolt holes.

[0040] Optionally, in some embodiments, the transmission shaft mechanism 4 includes a first main transmission shaft 411 connected to the drive assembly 5, and the grid plate mechanism 3 includes a grid plate. The cross-section of the single grid plate corresponds to the cross-section of the air extraction port 12. The grid plate is mounted on the first main transmission shaft 411. When the first main transmission shaft 411 drives the grid plate to rotate, the blocking area between the grid plate and the air extraction port changes linearly. The adjustment accuracy of the flow area is determined only by the rotation angle of the grid plate. With the precise drive of the drive assembly 5, the air extraction volume can be stabilized and controllable, avoiding the synchronization error that may occur when multiple grid plates work together.

[0041] Optionally, in some embodiments, the drive shaft mechanism 4 includes a first main drive shaft 411 connected to the drive assembly 5, and the grating plate mechanism 3 includes several identical grating plates. The several identical grating plates are installed side by side in the horizontal direction on the first main drive shaft 411, and the total cross-section of the several grating plates corresponds to the cross-section of the air extraction port 12. The several identical grating plates are installed side by side in the horizontal direction, and the air extraction port 12 of different sizes can be adapted by increasing or decreasing the number of grating plates. There is no need to design large grating plates separately for a specific air extraction port 12, which helps to reduce the processing difficulty and customization cost.

[0042] Furthermore, as a preferred embodiment of this utility model, and not a limitation thereof, the transmission shaft mechanism 4 includes a first main transmission shaft 411 connected to the drive assembly 5, and a plurality of driven transmission shafts. The grille assembly includes a plurality of identical grille plates. The sum of the number of the first main transmission shaft 411 and the number of driven transmission shafts is equal to the number of grille plates. One grille plate is mounted on the first main transmission shaft 411, and the remaining grille plates are correspondingly mounted on each driven transmission shaft. The plurality of grille plates are arranged side by side in a vertical direction, and a hinge mechanism is provided between the plurality of grille plates. When the first main transmission shaft 411 rotates, the grille plates mounted on the first main transmission shaft 411... The grid plates on drive shaft 1 rotate synchronously, and under the action of the hinge mechanism, the remaining grid plates on the drive shaft also rotate synchronously. This helps to ensure that the rotation angle of all grid plates is highly consistent, avoiding the action deviation that may be caused by independent control of multiple drive sources, and helps to significantly improve the accuracy of the airflow area adjustment. Secondly, only one drive component 5 is needed to drive the first main drive shaft 411 to achieve synchronous rotation of all grid plates. There is no need to configure a separate drive component for each drive shaft, which greatly simplifies the transmission structure, reduces energy loss and equipment manufacturing costs, and reduces the complexity of multi-motor coordinated control.

[0043] like Figures 1 to 14 The exhaust port 12 shown includes a first exhaust port 121 and a second exhaust port 122 spaced apart from the first exhaust port 121. The transmission shaft mechanism 4 includes a first transmission shaft mechanism 41 and a second transmission shaft mechanism 42. The grid plate mechanism 3 includes a first grid plate mechanism 31 mounted on the first transmission shaft mechanism 41 and a second grid plate mechanism 32 mounted on the second transmission shaft mechanism 42. One side of the first transmission shaft mechanism 41 is connected to the drive assembly 5, and the other side of the first transmission shaft mechanism 41 is connected to the second transmission shaft mechanism 42. Under the drive of the drive assembly 5, the first transmission shaft mechanism 41 drives the second transmission shaft mechanism 42 to rotate synchronously, so that the first grid plate mechanism 31 and the second grid plate mechanism 32 rotate synchronously.

[0044] Specifically, existing coating chamber housings 1 often have several air extraction ports 12 communicating with the coating chamber 11. In this case, the user needs to use several independent drive devices to control the corresponding grille plates of the air extraction ports to adjust the opening and closing degree. However, the setting of several independent drive devices makes the overall structure of the equipment more complex. In this utility model, one end of the first drive shaft mechanism 41 is connected to the drive assembly 5, and the other end is connected to the second drive shaft mechanism 42. The first grille plate mechanism 31 is installed on the first drive shaft mechanism 41, and the second grille plate mechanism 32 is installed on the second drive shaft mechanism 42. Driven by the drive assembly 5, the first drive shaft mechanism 41 can drive the second drive shaft mechanism 42 to rotate synchronously, so that the first grid plate mechanism 31 and the second grid plate mechanism 32 rotate synchronously. Compared with using several independent drive devices to control the grid plates on several air extraction ports 12 respectively, the setting of a single drive assembly 5 reduces the number of drive devices, thereby making the overall structure layout of the equipment simpler. Moreover, the synchronous rotation of the first drive shaft mechanism 41 and the second drive shaft mechanism 42 helps to avoid the situation where the adjustment of several air extraction ports 12 is not synchronized due to the difference in operation of several independent drive devices.

[0045] Optionally, in some embodiments, the end of the first transmission shaft mechanism 41 is provided with a driving gear, and the corresponding end of the second transmission shaft mechanism 42 is provided with a driven gear that meshes with the driving gear. The driving gear and the driven gear have the same number of teeth. When the first transmission shaft mechanism 41 rotates, the driving gear drives the driven gear to rotate synchronously. Since the number of teeth is the same, the rotation speed of the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42 can be kept consistent, thereby achieving synchronous rotation.

[0046] Furthermore, as a preferred embodiment of the present invention and not a limitation thereof, the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42 are connected by a rigid coupling. The rigid coupling can be a rigid sleeve coupling or a flange coupling. The rigid coupling has the characteristics of simple structure and large torque transmission, which is beneficial to ensure that the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42 have no relative displacement during rotation, thereby achieving strict synchronous rotation.

[0047] like Figures 1 to 14 A first coupling 43 is provided between the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42 shown;

[0048] Furthermore, the first coupling 43 can firmly connect the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42, ensuring that power is stably transmitted from the first transmission shaft mechanism 41 to the second transmission shaft mechanism 42, effectively avoiding problems such as loosening or slippage during transmission, thereby stably achieving synchronous rotation of the two, which is conducive to ensuring the synchronous adjustment of the opening and closing degree of the first air extraction port 121 and the second air extraction port 122 by the first grid plate mechanism 31 and the second grid plate mechanism 32 respectively.

[0049] Furthermore, during actual installation, the axes of the first drive shaft mechanism 41 and the second drive shaft mechanism 42 may have a certain coaxiality error, or relative displacement may occur due to factors such as vibration and temperature changes during equipment operation. The first coupling 43 can compensate for these errors and displacements through its own elastic deformation or structural characteristics.

[0050] Furthermore, by connecting the first drive shaft mechanism 41 and the second drive shaft mechanism 42 through the first coupling 43, there is no need to perform high-precision alignment and installation of the first drive shaft mechanism 41 and the second drive shaft mechanism 42, which reduces the installation difficulty and cost. Secondly, during equipment maintenance, the first drive shaft mechanism 41 and the second drive shaft mechanism 42 can be easily separated by disassembling the first coupling 43, which helps to improve the convenience of maintenance.

[0051] like Figures 1 to 14 The first drive shaft mechanism 41 shown includes a first main drive shaft 411 connected to the drive assembly 5, and a first driven shaft 412 and a second driven shaft 413 located on both sides of the first main drive shaft 411. The first grid plate mechanism 31 includes a first grid plate 311 mounted on the first driven shaft 412, a second grid plate 312 mounted on the first main drive shaft 411, and a third grid plate 313 mounted on the second driven shaft 413. A hinge mechanism 6 is provided between the first grid plate 311, the second grid plate 312, and the third grid plate 313.

[0052] Specifically, the structure of the first drive shaft mechanism 41 is the same as that of the second drive shaft mechanism 42, and the structure of the first grating plate mechanism 31 is the same as that of the second grating plate mechanism 32. Furthermore, the connection method between the first drive shaft mechanism 41 and the first grating plate mechanism 31 is the same as that between the second drive shaft mechanism 42 and the second grating plate mechanism 32. The identical structure of the two grating plate mechanisms and the two drive shaft mechanisms facilitates the interchangeability of parts, significantly reduces the types of molds, tooling, and processing procedures, helps improve processing efficiency, and effectively reduces production costs. In addition, the structures of the first grating plate 311, the second grating plate 312, and the third grating plate 313 are also identical.

[0053] Furthermore, the first grid plate 311, the second grid plate 312 and the third grid plate 313 are connected by the hinge mechanism 6, which helps to ensure that the three plates rotate strictly synchronously when they are arranged side by side in the vertical direction. This avoids action delays caused by differences in their respective forces or installation errors, helps to ensure the consistency of the flow area adjustment of the air extraction port 12, and effectively improves the air pressure control accuracy.

[0054] Furthermore, the articulation mechanism 6 can evenly transmit the power of a single drive source to the three grid plates, eliminating the need for a separate drive component for each grid plate. This simplifies the overall structure, reduces energy loss, and provides a clear power transmission path, facilitating later inspection and maintenance.

[0055] Optionally, in some embodiments, the hinge mechanism 6 includes several swing arms fixed to the grid plate and short connecting rods connected to the swing arms. One end of the swing arm is welded or screwed to each grid plate, and the other end is hinged to the short connecting rod through a pin. Multiple swing arms and short connecting rods form a "Z" or "N" shaped transmission chain, thereby realizing the step-by-step pushing of the grid plate.

[0056] Furthermore, as a preferred embodiment of this utility model and not a limitation thereof, the hinge mechanism 6 includes a connecting rod 61 and a connecting rod pin 62. The connecting rod 61 has hinge lugs at both ends and the middle position. The connecting rod 61 is arranged vertically. The first grid plate 311 is hinged to the top position of the connecting rod 61 via the connecting rod pin 62 and the hinge lugs. The second grid plate 312 is hinged to the middle position of the connecting rod 61 via the connecting rod pin 62 and the hinge lugs. The third grid plate 313 is hinged to the bottom position of the connecting rod 61 via the connecting rod pin 62 and the hinge lugs. When the drive assembly 5 operates, the second grid plate 312 rotates synchronously. At this time, the position of the connecting rod 61 moves relative to each other in the vertical direction, thereby driving the first grid plate 311 and the third grid plate 313 to rotate around the drive shaft, so as to achieve synchronous rotation of the three grid plates.

[0057] like Figures 1 to 14 The hinge mechanism 6 shown includes a connecting rod 61 arranged in a vertical direction and a connecting rod pin 62. The second grid plate 312 is hinged to the middle position of the connecting rod 61 through the connecting rod pin 62. The first grid plate 311 is hinged to one side of the connecting rod 61 through the connecting rod pin 62. The third grid plate 313 is hinged to the other side of the connecting rod 61 through the connecting rod pin 62.

[0058] Furthermore, the second grid plate 312 is hinged to the middle of the connecting rod 61 as a "reference point" for linkage, while the first grid plate 311 and the third grid plate 313 are distributed on both sides of the connecting rod 61, forming a "middle drive, both sides follow" structure. When the first main drive shaft 411 drives the second grid plate 312 to rotate, the connecting rod 61 will swing synchronously with the middle as the fulcrum, and the motion is precisely transmitted through the connecting rod pins 62 on both sides, so that the rotation angle and speed of the first grid plate 311 and the third grid plate 313 are exactly the same.

[0059] Furthermore, the distribution of the first grid plate 311 and the third grid plate 313 balances the forces on both sides of the connecting rod 61, reducing the bending or deformation of the connecting rod 61 caused by excessive force on one side.

[0060] Furthermore, the connecting rod 61 is set in the vertical direction, and the hinge structure of the connecting rod pin 62 helps to strictly constrain the movement direction of each grid plate and avoid lateral deviation or jamming.

[0061] Furthermore, multiple connecting rods 61 are provided, and several connecting rods 61 are spaced apart along the length direction of the first grid plate mechanism 31. When a single connecting rod 61 transmits motion on a long grid plate, the movements on both sides may be asynchronous due to deformation of the connecting rod 61 or installation deviation. By setting multiple connecting rods 61 spaced apart along the length direction of the grid plate, a multi-point linkage mechanism is formed, which can effectively ensure that the three grid plates rotate synchronously, avoid the phenomenon of one side moving first and the other side lagging behind, and ensure the smoothness and repeatability of the opening and closing action.

[0062] like Figures 1 to 14 A second coupling 44 is provided between the drive assembly 5 and the first transmission shaft mechanism 41 shown. The drive assembly 5 includes a servo motor 51, a third coupling 52 connected to the servo motor 51, a support seat 53 located on the outer periphery of the third coupling 52, and a magnetohydrodynamic fluid 54 located on the side of the support seat 53 near the second coupling 44.

[0063] Furthermore, the second coupling 44 can reliably transmit the power of the drive assembly 5 to the first transmission shaft mechanism 41, ensuring a tight power connection between the two and avoiding power transmission interruption or slippage, which helps to ensure that the first transmission shaft mechanism 41 can rotate stably with the drive assembly 5.

[0064] Furthermore, the servo motor 51 is a motor that can precisely control speed and position, and features high precision, fast response and high dynamic performance. Using the servo motor 51 as a drive source can achieve precise control of the transmission system, which is beneficial to ensuring the synchronous rotation accuracy of the first transmission shaft mechanism 41 and the second transmission shaft mechanism 42.

[0065] Furthermore, the third coupling 52 is used to connect the servo motor 51 and subsequent transmission components, which can ensure smooth power transmission and absorb some vibration and shock, thus protecting the servo motor 51 and the transmission system.

[0066] Furthermore, the support base 53 is located on the outer periphery of the third coupling 52, which can provide rigid support for the third coupling 52 and the connected shaft components, reduce component shaking or displacement caused by torque fluctuation or vibration during transmission, improve the structural stability of the entire drive assembly 5, avoid the decrease in transmission accuracy caused by component loosening, and reduce vibration noise, effectively ensuring the smooth operation of the equipment.

[0067] Furthermore, the coating equipment needs to operate in a vacuum environment, and the connection between the rotating shaft of the drive component 5 and the first housing 2 must be strictly sealed to prevent gas leakage from damaging the vacuum environment. The magnetic fluid 54 can utilize the magnetic control principle to form a dynamic seal between the rotating shaft and the fixed housing, effectively maintaining the vacuum environment required for coating.

[0068] like Figures 1 to 14 The first exhaust port 121 shown is provided with a first mounting frame 71 on the side away from the coating cavity 11, and the second exhaust port 122 is provided with a second mounting frame 72 on the side away from the coating cavity 11. The ends of the first drive shaft mechanism 41 and the second drive shaft mechanism 42 are both provided with bearings 45. The first drive shaft mechanism 41 is mounted on the first mounting frame 71 through the bearings 45, and the second drive shaft mechanism 42 is mounted on the second mounting frame 72 through the bearings 45.

[0069] Furthermore, the first mounting frame 71 and the second mounting frame 72 provide a unified and robust mounting base for the first drive shaft mechanism 41 and the second drive shaft mechanism 42, respectively. The first drive shaft mechanism 41 is mounted on the first mounting frame 71 via bearings 45, and the second drive shaft mechanism 42 is mounted on the second mounting frame 72 via bearings 45. This effectively limits the radial and axial displacement of the first drive shaft mechanism 41 and the second drive shaft mechanism 42, preventing swaying or offset during rotation, ensuring that the first grid plate mechanism 31 and the second grid plate mechanism 32 always maintain a precise relative position, and guaranteeing the stability of the air extraction flow area adjustment.

[0070] Furthermore, the bearing 45 can convert the sliding friction between the drive shaft and the mounting frame into rolling friction, which greatly reduces the rotational resistance, allowing the drive assembly 5 to drive the drive shaft to rotate more easily, reducing energy loss, and making the adjustment of the grille plate smoother and more stable, avoiding adjustment jamming caused by excessive friction.

[0071] Furthermore, the first mounting frame 71 and the second mounting frame 72 can ensure the parallelism and spacing accuracy of the three drive shafts in the first drive shaft mechanism 41 and the second drive shaft mechanism 42, reduce the tilting or misalignment of the drive shafts caused by installation errors, thereby ensuring the synchronous rotation of the first grid plate 311, the second grid plate 312 and the third grid plate 313, and avoiding the problem of inconsistent grid plate movement caused by drive shaft position deviation.

[0072] like Figures 1 to 14 The first mounting frame 71 shown is provided with a dirt-proof plate 8 for preventing the inner wall of the first mounting frame 71 and the first air extraction port 121 from being contaminated. The dirt-proof plate 8 is located on the side of the first mounting frame 71 near the first air extraction port 121 and extends toward the coating cavity 11.

[0073] Specifically, existing coating equipment often generates splashed coating materials or volatile impurities during the coating process. After long-term operation, these contaminants accumulate on the inner walls of the mounting frame and the exhaust port, resulting in a reduction in the flow area of ​​the exhaust port and affecting the exhaust efficiency. However, this utility model, by setting up an anti-fouling plate 8, which is located on the side of the first mounting frame 71 near the first exhaust port 121 and extends towards the coating cavity 11, can prevent splashed coating materials or volatile impurities from directly adhering to the inner walls of the first mounting frame 71 and the first exhaust port 121, significantly reducing the accumulation of contaminants in the area of ​​the first exhaust port 121 and avoiding the reduction of the flow area of ​​the first exhaust port 121.

[0074] Furthermore, the first mounting frame 71 and the second mounting frame 72 have the same structural configuration, and the connection method between the first mounting frame 71 and the first air extraction port 121 is the same as the connection method between the second mounting frame 72 and the second air extraction port 122; furthermore, the second mounting frame 72 is also provided with a dirt-proof plate 8, and the structural configuration of the first mounting frame 71 and the dirt-proof plate 8 is the same as the structural configuration of the second mounting frame 72 and the dirt-proof plate 8.

[0075] Optionally, in some embodiments, the anti-fouling plate 8 is integrally formed, and the cross-section of the anti-fouling plate 8 corresponds to the cross-section of the first mounting frame 71. The integrally formed structure avoids splicing gaps, reduces the possibility of pollutants seeping into the inner wall of the first mounting frame 71 and the first air extraction port 121 from the gaps, and the integral forming makes the anti-fouling plate 8 itself stronger and less likely to be damaged by airflow impact or slight collision during the coating operation.

[0076] Furthermore, as a preferred embodiment of the present invention and not a limitation thereof, the anti-fouling plate 8 is provided in a split manner. The anti-fouling plate 8 includes a first anti-fouling plate 81 arranged in the horizontal direction and a second anti-fouling plate 82 arranged in the vertical direction. There are two first anti-fouling plates 81 and two second anti-fouling plates 82. The cross-section enclosed by the two first anti-fouling plates 81 and the two second anti-fouling plates 82 corresponds to the cross-section of the first mounting frame 71.

[0077] like Figures 1 to 14 The anti-fouling plate 8 shown includes a first anti-fouling plate 81 arranged in the horizontal direction and a second anti-fouling plate 82 arranged in the vertical direction. Both the first anti-fouling plate 81 and the second anti-fouling plate 82 are detachably connected to the first mounting frame 71.

[0078] Furthermore, both the first anti-fouling plate 81 and the second anti-fouling plate 82 are detachably connected to the first mounting frame 71. When a first anti-fouling plate 81 or a second anti-fouling plate 82 is damaged or needs cleaning, the user can disassemble it individually without dismantling the whole unit, which helps to reduce maintenance difficulty and cost.

[0079] Furthermore, compared to the large, one-piece molded anti-fouling panel 8, the separate first anti-fouling panel 81 and second anti-fouling panel 82 are smaller and lighter, making them easier to transport and store, and helping to reduce the risk of damage from bumps during transportation.

[0080] Furthermore, the cross-section enclosed by the two first anti-fouling plates 81 and the two second anti-fouling plates 82 corresponds to the cross-section of the first mounting frame 71, which helps to form a complete protective barrier, avoids blind spots in protection, and effectively ensures comprehensive anti-fouling of the inner wall of the first mounting frame 71 and the first exhaust port 121.

[0081] Optionally, the first anti-fouling plate 81 and the second anti-fouling plate 82 can be connected to the first mounting frame 71 by means of threaded connection, snap-fit ​​connection, slot connection, etc.

[0082] like Figures 1 to 14 The first anti-fouling plate 81 shown includes a first connecting plate 811 threadedly connected to the first mounting frame 71, and a first extension plate 812 arranged parallel to the first connecting plate 811. The second anti-fouling plate 82 includes a second connecting plate 821 threadedly connected to the first mounting frame 71, and a second extension plate 822 arranged parallel to the second connecting plate 821. Both the first extension plate 812 and the second extension plate 822 extend toward the coating cavity 11 and are located on the side close to the central axis of the first mounting frame 71.

[0083] Furthermore, the first anti-fouling plate 81 is threadedly connected to the first mounting frame 71 via the first connecting plate 811 and the second anti-fouling plate 82 via the second connecting plate 821. The threaded connection has high connection strength and self-locking properties, which can effectively resist external forces such as airflow impact during the coating operation, and prevent the first anti-fouling plate 81 and the second anti-fouling plate 82 from loosening or falling off, thus ensuring the stability of the anti-fouling structure.

[0084] Furthermore, the first extension plate 812 and the second extension plate 822 extend toward the coating cavity 11 and are located on the side close to the central axis of the first mounting frame 71, which can more accurately block contaminants approaching the inner wall of the first mounting frame 71 and the first exhaust port 121, especially for contaminants that diffuse from the central area of ​​the coating cavity 11 to the first exhaust port 121, forming a more direct interception barrier and improving the effectiveness of anti-fouling.

[0085] Furthermore, the first extension plate 812 is parallel to the first connecting plate 811, and the second extension plate 822 is parallel to the second connecting plate 821, so that the overall structure of the anti-fouling plate 8 is more regular. The two first extension plates 812 and the two second extension plates 822 can form a continuous protective area around the central axis of the first mounting frame 71, reducing anti-fouling dead corners.

[0086] Furthermore, since the first connecting plate 811 and the second connecting plate 821 typically have screw holes, solder joints or steps, they are prone to forming local electric field concentration or airflow vortices, leading to preferential deposition of pollutants. The arrangement of the first extension plate 812 and the second extension plate 822, so that the first connecting plate 811 and the second connecting plate 821 are located on the "leeward side" or in a low particle flux area, is beneficial to reducing the risk of pollution.

[0087] Furthermore, the first anti-fouling plate 81 includes a first transition plate 813, and the first extension plate 812 is connected to the first connecting plate 811 through the first transition plate 813; the second anti-fouling plate 82 includes a second transition plate 823, and the second extension plate 822 is connected to the second connecting plate 821 through the second transition plate 823. The first transition plate 813 and the second transition plate 823 respectively serve as connecting bridges between the first extension plate 812 and the first connecting plate 811, and between the second extension plate 822 and the second connecting plate 821, which can effectively disperse the stress at the connection points, avoid local stress concentration caused by the direct connection between the extension plate and the connecting plate, enhance the overall structural stability and deformation resistance of the first anti-fouling plate 81 and the second anti-fouling plate 82, and extend their service life.

[0088] Furthermore, the two sides of the first transition plate 813 are inclinedly connected to the first connecting plate 811 and the first extension plate 812 respectively, and are rounded at the corners; the two sides of the second transition plate 823 are inclinedly connected to the second extension plate 822 and the second connecting plate 821 respectively, and are rounded at the corners. The inclined connection between the first transition plate 813 and the second transition plate 823 makes the force transmission between the connecting plate and the extension plate smoother. Combined with the rounded corner setting, the sharp angle stress concentration point at the connection part can be completely eliminated, which greatly reduces the risk of fatigue damage caused by vibration, airflow impact and other factors during long-term use. This is conducive to significantly improving the overall structural strength and durability of the first anti-fouling plate 81 and the second anti-fouling plate 82.

[0089] The working mode of this utility model is as follows:

[0090] The first grid plate mechanism 31 consists of a first grid plate 311, a second grid plate 312, and a third grid plate 313 arranged side-by-side in a vertical direction. The first grid plate 311 is mounted on a first main drive shaft 411 in the first drive shaft mechanism 41, the second grid plate 312 is mounted on a first driven drive shaft 412 in the first drive shaft mechanism 41, and the third grid plate 313 is mounted on a second driven drive shaft 413 in the first drive shaft mechanism 41. One end of the first main drive shaft 411 is connected to the drive assembly 5, and the other end is connected to the second drive shaft mechanism 42. A connecting rod 61 arranged in a vertical direction is provided between the first grid plate 311, the second grid plate 312, and the third grid plate 313. The first grille plate 311 is hinged to the top of the connecting rod 61 via the connecting rod pin 62. The second grille plate 312 is hinged to the middle of the connecting rod 61 via the connecting rod pin 62. The third grille plate 313 is hinged to the bottom of the connecting rod 61 via the connecting rod pin 62. In the closed state, the cross-sections of the three grille plates correspond to the cross-sections of the first exhaust port 121. When the drive assembly 5 is working normally, the drive assembly 5 drives the first main drive shaft 411 to rotate counterclockwise. The second grille plate 312 is mounted on the first main drive shaft 411 so that the second grille plate 312 rotates synchronously with the first main drive shaft 411. At the same time, the second grille plate 312 is hinged to the middle of the connecting rod 61, thereby driving... When the connecting rod 61 moves upward in the vertical direction, the first grid plate 311 and the third grid plate 313 rotate around the first drive shaft 412 and the second drive shaft 413 respectively, thereby achieving synchronous rotation of the first grid plate 311, the second grid plate 312, and the third grid plate 313, and the first air extraction port 121 is in the open state. When it is necessary to close the first air extraction port 121, the drive assembly 5 rotates in the opposite direction. Under the action of the first main drive shaft 411, the second grid plate 312 folds in the opposite direction. At this time, the second grid plate 312 drives the connecting rod 61 to move downward in the vertical direction, and the first grid plate 311 and the third grid plate 313 fold downward in the opposite direction. The second grating plate 312 and the third grating plate 313 work together to cover the first air extraction port 121. Similarly, the structure of the second drive shaft mechanism 42 is the same as that of the first drive shaft mechanism 41, and the structure of the first grating plate mechanism 31 is the same as that of the second grating plate mechanism 32. The connection method of the first grating plate mechanism 31, the first drive shaft mechanism 41 and the hinge mechanism 6 is the same as that of the second drive shaft mechanism 42, the second grating plate mechanism 32 and the hinge mechanism 6. The first drive shaft mechanism 41 can drive the second drive shaft mechanism 42 to rotate synchronously, and the opening and closing method of the second grating plate mechanism 32 is the same as that of the first grating plate mechanism 31.

[0091] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A vacuum coating apparatus comprising a coating chamber box (1) and a first housing (2) connected to the coating chamber box (1), characterized in that: The coating chamber housing (1) is provided with a coating cavity (11) and an air extraction port (12). The first housing (2) is provided with a mounting part (21) for installing an air extraction device. The mounting part (21) is connected to the coating cavity (11) through the air extraction port (12). An electric grid plate assembly is provided at the air extraction port (12). The electric grid plate assembly includes a grid plate mechanism (3) for controlling the opening and closing state of the air extraction port (12), a rotatably configured transmission shaft mechanism (4), and a drive assembly (5) for driving the transmission shaft mechanism (4) to rotate. The grid plate mechanism (3) is mounted on the transmission shaft mechanism (4). When the drive assembly (5) drives the transmission shaft mechanism (4) to rotate, the grid plate mechanism (3) rotates synchronously to adjust the flow area of ​​the air extraction port (12).

2. The vacuum coating apparatus of claim 1, wherein: The air extraction port (12) includes a first air extraction port (121) and a second air extraction port (122) spaced apart from the first air extraction port (121). The transmission shaft mechanism (4) includes a first transmission shaft mechanism (41) and a second transmission shaft mechanism (42). The grid plate mechanism (3) includes a first grid plate mechanism (31) mounted on the first transmission shaft mechanism (41) and a second grid plate mechanism (32) mounted on the second transmission shaft mechanism (42). One side of the first transmission shaft mechanism (41) is connected to the drive assembly (5), and the other side of the first transmission shaft mechanism (41) is connected to the second transmission shaft mechanism (42). Under the drive of the drive assembly (5), the first transmission shaft mechanism (41) drives the second transmission shaft mechanism (42) to rotate synchronously, so that the first grid plate mechanism (31) and the second grid plate mechanism (32) rotate synchronously.

3. The vacuum coating machine of claim 2, wherein: A first coupling (43) is provided between the first transmission shaft mechanism (41) and the second transmission shaft mechanism (42).

4. The vacuum coating equipment according to claim 2, characterized in that: The first drive shaft mechanism (41) includes a first main drive shaft (411) connected to the drive assembly (5), and a first driven shaft (412) and a second driven shaft (413) located on both sides of the first main drive shaft (411). The first grid plate mechanism (31) includes a first grid plate (311) mounted on the first driven shaft (412), a second grid plate (312) mounted on the first main drive shaft (411), and a third grid plate (313) mounted on the second driven shaft (413). A hinge mechanism (6) is provided between the first grid plate (311), the second grid plate (312), and the third grid plate (313).

5. The vacuum coating machine of claim 4, wherein: The hinge mechanism (6) includes a connecting rod (61) arranged in a vertical direction and a connecting rod pin (62). The second grid plate (312) is hinged to the middle position of the connecting rod (61) through the connecting rod pin (62). The first grid plate (311) is hinged to one side of the connecting rod (61) through the connecting rod pin (62). The third grid plate (313) is hinged to the other side of the connecting rod (61) through the connecting rod pin (62).

6. The vacuum coating machine of claim 2, wherein: A second coupling (44) is provided between the drive assembly (5) and the first transmission shaft mechanism (41). The drive assembly (5) includes a servo motor (51), a third coupling (52) connected to the servo motor (51), a support seat (53) located on the outer periphery of the third coupling (52), and a magnetohydrodynamic fluid (54) located on the side of the support seat (53) near the second coupling (44).

7. The vacuum coating machine of claim 2, wherein: A first mounting frame (71) is provided on the side of the first air extraction port (121) away from the coating cavity (11), and a second mounting frame (72) is provided on the side of the second air extraction port (122) away from the coating cavity (11). Bearings (45) are provided at the ends of the first drive shaft mechanism (41) and the second drive shaft mechanism (42). The first drive shaft mechanism (41) is mounted on the first mounting frame (71) through the bearings (45), and the second drive shaft mechanism (42) is mounted on the second mounting frame (72) through the bearings (45).

8. The vacuum coating machine of claim 7, wherein: The first mounting frame (71) is provided with a dirt-proof plate (8) for preventing the inner wall of the first mounting frame (71) and the first air extraction port (121) from being contaminated. The dirt-proof plate (8) is located on the side of the first mounting frame (71) near the first air extraction port (121) and extends toward the coating cavity (11).

9. The vacuum coating machine of claim 8, wherein: The anti-fouling panel (8) includes a first anti-fouling panel (81) arranged in the horizontal direction and a second anti-fouling panel (82) arranged in the vertical direction. The first anti-fouling panel (81) and the second anti-fouling panel (82) are detachably connected to the first mounting frame (71).

10. The vacuum coating machine of claim 9, wherein: The first anti-fouling plate (81) includes a first connecting plate (811) threadedly connected to the first mounting frame (71) and a first extension plate (812) arranged parallel to the first connecting plate (811). The second anti-fouling plate (82) includes a second connecting plate (821) threadedly connected to the first mounting frame (71) and a second extension plate (822) arranged parallel to the second connecting plate (821). The first extension plate (812) and the second extension plate (822) both extend toward the coating cavity (11) and are located on the side close to the central axis of the first mounting frame (71).

Images