An observation window device for a chemical vapor deposition furnace

Abstract

This utility model discloses an observation window device for a chemical vapor deposition furnace, relating to the field of chemical vapor deposition furnace technology. It includes an observation channel, a baffle box, quartz glass, and a gas connector. An observation channel is provided on the outer wall of the furnace body, and the furnace body is connected to the observation channel. One end of the observation channel, away from the furnace body, is connected to one side of the baffle box. The other side of the baffle box is connected to the quartz glass, and the observation channel and the quartz glass are on the same axis. The baffle box has a pull-out structure, which is used to connect or isolate the observation channel from the quartz glass. A gas connector is connected to the observation channel, located between the furnace body and the quartz glass, and is used to introduce protective gas into the observation channel. This utility model solves the problems of unsatisfactory heat radiation protection and deposition contamination prevention in existing observation windows for chemical vapor deposition furnaces.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition furnace technology, specifically to an observation window device for a chemical vapor deposition furnace. Background Technology

[0002] A chemical vapor deposition (CVD) furnace is a heat treatment device that utilizes gaseous substances to undergo a chemical reaction on a solid surface, depositing a thin film or coating. To ensure the stability of the deposition process and to monitor the reaction progress and optimize deposition efficiency, an observation window is typically used to monitor the production status inside the reaction chamber or to transmit light. The observation window material for transmitting light can be optical glass or quartz glass, among others.

[0003] In chemical vapor deposition (CVD) furnaces, because the observation window is connected to the reaction chamber, deposits often adhere to the inside of the observation window, affecting observation. Furthermore, the high temperature inside the furnace can radiate to the glass surface, causing the glass to overheat and affecting the sealing performance of the sealing ring, or even causing the glass to crack and resulting in a safety accident. Utility Model Content

[0004] This invention overcomes the shortcomings of the prior art by proposing an observation window device for a chemical vapor deposition furnace, which solves the problems of unsatisfactory heat radiation protection and deposition contamination prevention in existing observation windows for chemical vapor deposition furnaces.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: An observation window device for a chemical vapor deposition furnace includes an observation channel, a baffle box, a quartz glass, and a gas connector. The observation channel is located on the outer wall of the furnace body, and the furnace body is connected to the observation channel. One end of the observation channel, away from the furnace body, is connected to one side of the baffle box. The other side of the baffle box is connected to the quartz glass, and the observation channel and the quartz glass are coaxial. The baffle box has a pull-out structure for connecting or isolating the observation channel from the quartz glass. A gas connector is connected to the observation channel, located between the furnace body and the quartz glass, and is used to introduce a protective gas into the observation channel.

[0006] Furthermore, the baffle box includes a box body, a graphite baffle, and a polytetrafluoroethylene slider; the box body is a rectangular hollow structure, and the box body is provided with a circular through hole corresponding to the position and size of the observation channel; the graphite baffle is sealed and slidably connected to the box body, the polytetrafluoroethylene slider is connected to the graphite baffle, and the cross-section of the graphite baffle is larger than the area of ​​the circular through hole.

[0007] Furthermore, the baffle box also includes magnets, with two magnets arranged on the inner and outer sides of the box. The inner magnet is placed inside the polytetrafluoroethylene slider, and the inner magnet attracts the outer magnet.

[0008] Furthermore, it also includes a glass cover, with quartz glass placed between the outside of the box and the glass cover.

[0009] Furthermore, flanges are connected to both outer walls of the box. The flange on one side of the box is screwed to the flange on the observation channel, and the flange face is sealed by a sealing ring; the flange on the other side of the box is screwed to the glass cover.

[0010] Furthermore, the glass cap has a ring structure, with the outer edge of the quartz glass snapped onto the glass cap. A groove is provided on the inner side of the glass cap that contacts the inner surface of the quartz glass, and another sealing ring is provided in the groove. A rubber pad is pressed between the outer side of the glass cap and the outer surface of the quartz glass.

[0011] Furthermore, a pair of magnetically adsorbed glass cleaners are provided on the inner and outer sides of the quartz glass. The glass cleaners are strong magnetic magnets with cotton pads, and the inner glass cleaner is moved by moving the position of the outer glass cleaner.

[0012] The beneficial effects of this utility model compared to the prior art are as follows: 1. This utility model, by setting quartz glass and a sealing structure, can achieve the purpose of observing the production situation inside the vacuum furnace reaction chamber or transmitting light sources.

[0013] 2. This utility model utilizes magnetic transmission inside and outside the baffle box to ensure vacuum sealing while allowing the baffle to be opened when observation of the furnace interior is needed and closed after observation. This prevents the quartz glass from being damaged by prolonged exposure to high-temperature radiation inside the furnace. In addition, the graphite baffle can also prevent reactive gases from depositing on the inner surface of the quartz glass and affecting observation.

[0014] 3. This utility model allows protective gas to be introduced into the observation channel through a gas connector, which prevents the diffusion of reaction gas in the furnace and ensures the cleanliness of the inner surface of the quartz glass.

[0015] 4. This utility model achieves the purpose of cleaning the glass at any time during the process by setting magnetically adsorbed glass cleaners on both the inner and outer sides of the quartz glass.

[0016] In summary, this invention can monitor the production status inside the reaction chamber or transmit light sources. It also has advantages such as using graphite baffles to isolate heat radiation and reaction gas diffusion, introducing protective gas, and using magnetic erasers to clean the glass. It has good vacuum sealing and is safe and reliable. Attached Figure Description

[0017] Figure 1 This is a side view cross-sectional structural diagram of the observation window device described in this utility model.

[0018] Figure 2 This is a front view of the observation window device described in this utility model.

[0019] Figure 3 This is an internal sectional view of the baffle box in the open state.

[0020] Figure 4 This is an internal sectional view of the baffle box in its closed state.

[0021] In the picture: 1 is the observation channel, 2 is the baffle box, 3 is the sealing ring, 4 is the quartz glass, 5 is the rubber pad, 6 is the glass wiper, 7 is the glass cover, 8 is the gas connector, 9 is the furnace body, 21 is the box body, 22 is the graphite baffle, 23 is the polytetrafluoroethylene slider, and 24 is the magnet. Detailed Implementation

[0022] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0023] See Figures 1 to 4 This embodiment proposes an observation window device for a chemical vapor deposition furnace, including an observation channel 1, a baffle box 2, a sealing ring 3, a quartz glass 4, a rubber pad 5, a glass wiper 6, a glass cover 7, and a gas connector 8. An observation channel 1 is provided on the outer wall of the furnace body 9 of the chemical vapor deposition furnace, and the furnace body 9 is connected to the observation channel 1. The end of the observation channel 1 away from the furnace body 9 is connected to one side of the baffle box 2. The other side of the baffle box 2 is connected to the quartz glass 4, and the observation channel 1 and the quartz glass 4 are on the same axis. The baffle box 2 is provided with a pull-out structure. When the baffle box 2 is pulled up, the observation channel 1 is connected to the quartz glass 4. When the baffle box 2 is pushed down, the observation channel 1 and the quartz glass 4 are separated by the baffle box 2. This structure allows the baffle box 2 to be opened when it is necessary to observe the situation inside the furnace, and closed after the observation is completed. This can prevent the quartz glass 4 from being damaged by the high temperature radiation inside the furnace for a long time. In addition, it can also prevent the reaction gas from depositing on the inner surface of the quartz glass 4 and affecting the observation.

[0024] Specifically, the baffle box 2 includes a box body 21, a graphite baffle 22, a polytetrafluoroethylene slider 23, and a magnet 24. The box body 21 is completely sealed on all sides and is made of magnetically conductive martensitic stainless steel. The box body 21 has a rectangular hollow structure, and circular through holes corresponding to the position and size of the observation channel 1 are provided on the lower inner and outer walls of the box body 21. The graphite baffle 22 is slidably connected inside the box body 21, and the polytetrafluoroethylene slider 23 is connected below the graphite baffle 22. The cross-section of the graphite baffle 22 is larger than the area of ​​the circular through hole. Under the action of the graphite baffle 22, the graphite baffle 22 can block or open the circular through hole. Two magnets 24 are installed on the inner and outer sides of the box body 21. The inner magnet 24 is placed inside the polytetrafluoroethylene (PTFE) slider 23. By moving the position of the outer magnet 24, the inner magnet 24, the PTFE slider 23, and the graphite baffle 22 can be driven, realizing the opening and closing action of the graphite baffle 22. The graphite baffle 22 can withstand high-temperature radiation of over 2000℃ in the furnace. The PTFE slider 23 is made of high-temperature resistant plastic and has extremely low coefficient of friction and resistance to acid and alkali corrosion. Both the graphite baffle 22 and the PTFE slider 23 are existing materials.

[0025] In terms of the connection structure, flanges are connected to both outer walls of the box body 21. The flange on one side of the box body 21 is screwed to the flange on the observation channel 1, and the flange face is sealed by the sealing ring 3. The flange on the other side of the box body 21 is screwed to the glass cover 7. The glass cover 7 has a ring structure, and the outer edge of the quartz glass 4 is snapped onto the glass cover 7. A groove is provided on the inner side of the glass cover 7 that contacts the inner surface of the quartz glass 4. Another sealing ring 3 is provided in the groove. A rubber gasket 5 is pressed between the outer side of the glass cover 7 and the outer surface of the quartz glass 4. The sealing between the glass cover 7 and the quartz glass 4 is achieved by the sealing ring 3 and the rubber gasket 5.

[0026] A pair of magnetically attached glass cleaners 6 are provided on the inner and outer sides of the quartz glass 4. The glass cleaners 6 are strong magnetic magnets with cotton pads. The inner cleaner can be moved by moving the position of the outer cleaner, thereby achieving the purpose of cleaning the quartz glass 4.

[0027] A gas connector 8 is connected to the observation channel 1. The gas connector 8 is located between the furnace body 9 and the quartz glass 4. The gas connector 8 can introduce a protective gas, such as argon, into the observation channel 1 to prevent the reaction gas in the furnace body 9 from diffusing into the quartz glass 4.

[0028] The principle of the observation window device for a chemical vapor deposition furnace proposed in this embodiment is as follows: By incorporating quartz glass 4 and a sealing structure, the production process inside the vacuum furnace reaction chamber can be observed, or a light source can be transmitted. Through magnetic drive inside and outside the baffle box 2, while ensuring a vacuum seal, the baffle can be opened when observation of the furnace is needed and closed after observation. This prevents the quartz glass from being damaged by prolonged exposure to high-temperature radiation inside the furnace. Additionally, the graphite baffle can prevent reactive gases from depositing on the inner surface of the quartz glass, thus avoiding interference with observation. Protective gas can be introduced into the observation channel 1 through the gas connector 8, preventing the diffusion of reactive gases inside the furnace and ensuring the cleanliness of the inner surface of the quartz glass. Magnetic glass cleaners 6 are installed on both the inner and outer sides of the quartz glass, allowing for cleaning of the glass at any time during the process.

[0029] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. An observation window device for a chemical vapor deposition furnace, characterized in that, The apparatus includes an observation channel (1), a baffle box (2), a quartz glass (4), and a gas connector (8). An observation channel (1) is provided on the outer wall of the furnace body (9) of the chemical vapor deposition furnace, and the furnace body (9) is connected to the observation channel (1). One end of the observation channel (1) away from the furnace body (9) is connected to one side of the baffle box (2). The other side of the baffle box (2) is connected to the quartz glass (4), and the observation channel (1) and the quartz glass (4) are on the same axis. The baffle box (2) is provided with a pull-out structure, which is used to connect or isolate the observation channel (1) from the quartz glass (4). A gas connector (8) is connected to the observation channel (1), and the gas connector (8) is located between the furnace body (9) and the quartz glass (4). The gas connector (8) is used to introduce protective gas into the observation channel (1).

2. The observation window device for a chemical vapor deposition furnace according to claim 1, characterized in that, The baffle box (2) includes a box body (21), a graphite baffle (22), and a polytetrafluoroethylene slider (23). The box body (21) is a rectangular hollow structure, and the box body (21) is provided with a circular through hole corresponding to the position and size of the observation channel (1). The graphite baffle (22) is sealed and slidably connected inside the box body (21), and the polytetrafluoroethylene slider (23) is connected to the graphite baffle (22). The cross-section of the graphite baffle (22) is larger than the area of ​​the circular through hole.

3. The observation window device for a chemical vapor deposition furnace according to claim 2, characterized in that, The baffle box (2) also includes a magnet (24). Two magnets (24) are set on the inner and outer sides of the box body (21). The inner magnet (24) is placed inside the polytetrafluoroethylene slider (23), and the inner magnet (24) attracts the outer magnet (24).

4. The observation window device for a chemical vapor deposition furnace according to claim 2, characterized in that, It also includes a glass cover (7), with a quartz glass (4) disposed between the outside of the box body (21) and the glass cover (7).

5. The observation window device for a chemical vapor deposition furnace according to claim 4, characterized in that, Flanges are connected to both sides of the outer wall of the box (21). The flange on one side of the box (21) is screwed to the flange on the observation channel (1), and the flange face is sealed by the sealing ring (3). The flange on the other side of the box (21) is screwed to the glass cover (7).

6. The observation window device for a chemical vapor deposition furnace according to claim 5, characterized in that, The glass cap (7) is a ring structure. The outer edge of the quartz glass (4) is attached to the glass cap (7). The inner side of the glass cap (7) that contacts the inner surface of the quartz glass (4) has a groove. Another sealing ring (3) is installed in the groove. A rubber pad (5) is pressed between the outer side of the glass cap (7) and the outer surface of the quartz glass (4).

7. The observation window device for a chemical vapor deposition furnace according to claim 1, characterized in that, A pair of magnetically adsorbed glass wipers (6) are provided on the inner and outer sides of the quartz glass (4). The glass wipers (6) are strong magnetic magnets with cotton wiping. The inner glass wipers (6) can be moved by moving the position of the outer glass wipers (6).

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