Dual-diameter parallel right-angle valve integrated vacuum pumping module

Abstract

This utility model relates to an integrated vacuum pumping module with dual-diameter parallel right-angle valves: it includes a pumping base and at least two pumping valves. The pumping base has a gas passage chamber, an intake port, and an outlet port. The two pumping valves are installed on the side wall of the pumping base, and their pumping ends are connected to the gas passage chamber. The two pumping valves have different pumping rates. By integrating pumping valves of different diameters (different pumping rates), the pumping rate of the gas passage chamber can be switched in stages. During the ALD precursor power supply stage, a small-diameter pumping valve is used to reduce the pumping rate, prolong the residence time of the precursor in the chamber, promote full reaction, and improve the uniformity and conformability of the film. During the vacuuming and purging stages, a large-diameter pumping valve is switched to quickly exhaust the gas from the chamber, improving production efficiency.

Description

Technical Field

[0001] This utility model belongs to the technical field of atomic layer deposition equipment, specifically relating to an integrated vacuum pumping module with dual-diameter parallel right-angle valves. Background Technology

[0002] Atomic layer deposition (ALD) technology is widely used in advanced manufacturing fields such as semiconductors, displays, and micro / nano fabrication due to its excellent ability to precisely control film thickness and its high conformability on complex surface structures. The ALD process relies on the alternating introduction of different precursor gases to achieve single-atom-level film growth through self-limiting surface reactions. To obtain uniform, dense, and high-quality films, it is necessary to ensure that gas molecules have sufficient residence time within the cavity during the precursor inlet stage, thereby achieving complete surface reaction and excellent film conformability.

[0003] However, current ALD (Action Depression) equipment generally uses a single-diameter extraction valve or relies on continuously adjustable flow valves for pressure and extraction rate control. These existing technologies have the following shortcomings in practical applications: Limited process flexibility: Although a single-diameter valve can achieve high pumping speed during the pumping stage, shortening the vacuuming and purging time, the excessive pumping rate during the precursor inlet stage causes the precursor gas to be rapidly drawn away before it has fully reacted, affecting the uniformity and shape retention of the film thickness; if the valve is kept at a small opening for a long time, the pumping and purging efficiency will be low, affecting the overall production capacity.

[0004] Complex structure and difficult maintenance: Some equipment uses servo throttle valves, needle valves or multi-valve combinations for air extraction regulation, which not only makes the system structure complex and occupies a lot of installation space, but also increases the risk of air leakage due to the many connection parts, and increases the maintenance cost and difficulty.

[0005] Slow switching response and impact on process window: The mechanical switching of multiple valves or the adjustment of valve opening has a response delay, making it difficult to achieve rapid and accurate switching of the pumping rate, which is not conducive to meeting the ALD process's requirements for precise control of gas residence time and pumping rate at different stages.

[0006] Insufficient economy and universality: High-end servo control valves are expensive, have high maintenance and operation requirements, and are difficult to apply to small and medium-sized equipment.

[0007] Currently, ALD equipment lacks a multi-speed control valve module that is simple in structure, highly efficient in switching, highly reliable, and reasonably cost-effective in balancing pumping efficiency, precursor gas residence time, and improving film shape retention and uniformity. Developing a dual-diameter parallel valve pumping module suitable for the characteristics of the ALD process can effectively improve the control capability of chamber pressure and gas residence time, helping to optimize the ALD process window, improve film quality, and increase equipment production efficiency. Therefore, this solution was developed. Utility Model Content

[0008] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide an integrated vacuum pumping module with dual-diameter parallel right-angle valves, and proposes an integrated pumping pipeline module with dual-diameter parallel right-angle valves that is simple in structure, efficient in switching, and easy to integrate.

[0009] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a dual-diameter parallel right-angle valve integrated vacuum pumping module: including a pumping seat and at least two pumping valves, the pumping seat having an air passage chamber, the pumping seat having an air intake port and an air outlet, the two pumping valves being installed on the side wall of the pumping seat, the pumping ends of the two pumping valves being connected to the air passage chamber, and the two pumping valves having different pumping rates.

[0010] Furthermore, it includes an air extraction seat and at least two air extraction valves. The air extraction seat has an air passage chamber, an air intake port, and an air outlet. The two air extraction valves are installed on the side wall of the air extraction seat, and the air extraction ends of the two air extraction valves are connected to the air passage chamber. The two air extraction valves have the same air extraction rate.

[0011] Furthermore, the air extraction base includes a front cover plate, a middle frame, and a rear cover plate. The front cover plate and the middle frame are detachably and sealed together, and the middle frame and the rear cover plate are detachably and sealed together.

[0012] Furthermore, an air intake pipe is provided on the front cover plate, an exhaust pipe is provided below the middle frame, and an air extraction valve is provided on the rear cover plate.

[0013] Furthermore, the two sides of the middle frame with openings have closed-loop sealing grooves, and a first sealing ring is provided in the sealing grooves.

[0014] Furthermore, the exhaust pipe and the exhaust port are detachably and sealably connected.

[0015] Furthermore, a convex ring is provided at the end of the exhaust pipe, and an insertion ring is provided at the opening on the upper surface of the convex ring. A second sealing ring is fitted on the insertion ring, and the convex ring is connected to the lower surface of the middle frame through a connector.

[0016] Furthermore, the connector includes a connecting block and a screw. A through-hole is formed in the middle of the connecting block, and a notch is formed on one side of the upper surface of the connecting block. The depth of the notch is equal to or less than the thickness of the convex ring, and the outer edge of the convex ring is located inside the notch. The screw passes through the connecting hole and connects to the middle frame.

[0017] Furthermore, a retrieval opening is formed on any side wall of the sealing groove.

[0018] Furthermore, the retrieval port is an arc-shaped port, and there are two arc-shaped ports arranged opposite each other on the two side walls of any location in the sealing groove.

[0019] Compared with the prior art, the present invention has the following beneficial effects: 1. Enhanced process flexibility and film quality: By integrating suction valves of different diameters (with different suction rates), the suction rate of the gas passage chamber can be switched in stages. During the ALD precursor inlet stage, a small-diameter suction valve is used to reduce the suction rate, prolong the residence time of the precursor in the chamber, promote full reaction, and improve the uniformity and conformability of the film. During the vacuuming and purging stages, a large-diameter suction valve is switched to quickly exhaust the gas from the chamber, improving production efficiency.

[0020] 2. Alternatively, multiple extraction valves of the same diameter (same extraction rate) can be integrated. By controlling the number of extraction valves opened, they can be adapted to different stages of the reaction. For example, when the precursor needs to stay in the cavity for a long time to promote a full reaction, one extraction valve can be opened. During the vacuuming and purging stages, two or more extraction valves can be opened to quickly exhaust the cavity and improve production efficiency.

[0021] 3. Simplified structure and reduced cost: This solution integrates two types of vacuum valves (or two valves of the same diameter) into a single module, reducing the number of pipe interfaces and connectors, reducing system complexity and leakage risk, facilitating the integration and maintenance of the vacuum system, and significantly reducing equipment manufacturing and operating costs.

[0022] 4. Improve switching efficiency and process window controllability: This module can achieve rapid and seamless switching of multiple gas extraction paths through simple mechanical or electrical control methods (opening two gas extraction valves of different diameters or opening a number of gas extraction valves of the same diameter), meeting the precise control requirements of ALD and other processes for gas residence time and chamber pressure at different stages, optimizing the process window, and improving equipment automation and production cycle time.

[0023] 5. High versatility and scalability: This solution has a compact structure and can be used in new ALD equipment or integrated into existing vacuum systems as a modular component. It is adaptable to reaction chambers of different specifications and sizes. The structure can also be expanded to multiple calibers (or multiple calibers of the same caliber) to meet the pumping requirements of more complex processes. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of Embodiment 1 of the present utility model; Figure 2 This is a front view structural diagram of Embodiment 1 of the present utility model; Figure 3 This is a side view of the structure of Embodiment 1 of the present invention with the front cover panel hidden. Figure 4 This is a front view structural diagram of the retrieval port position in this utility model; Figure 5 This is a three-dimensional structural diagram of the exhaust pipe interface location in this utility model; Figure 6 This is a front view structural diagram of Embodiment 2 of this utility model.

[0025] The markings in the diagram are: 1. Suction seat; 11. Front cover plate; 12. Middle frame; 121. First sealing ring; 122. Removal port; 13. Rear cover plate; 14. Suction pipe; 15. Exhaust pipe; 151. Raised ring; 152. Insertion ring; 153. Second sealing ring; 16. Connector; 161. Notch; 17. Screw; 2. Suction valve. Detailed Implementation

[0026] To make the above-mentioned features and advantages of this utility model more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings for detailed explanation.

[0027] Example 1 like Figures 1-5 As shown, this embodiment provides an integrated vacuum pumping module with dual-diameter parallel right-angle valves, including a pumping base 1 and two pumping valves 2.

[0028] The air extraction seat 1 has an air passage chamber. The air extraction seat 1 includes a front cover plate 11, a middle frame 12, and a rear cover plate 13. The front cover plate 11 and the middle frame 12 are detachably and sealed together, and the middle frame 12 and the rear cover plate 13 are detachably and sealed together. Specifically, the middle frame 12 has two open sides forming a closed-loop sealing groove. A first sealing ring 121 is provided in the sealing groove. The front cover plate 11 or the rear cover plate 13 is connected to the middle frame 12 by screws 17. By screwing in the screws 17, the front cover plate 11 and the rear cover plate 13 fit against the middle frame 12, achieving the purpose of connection and ensuring a tight seal.

[0029] Preferably, as shown in the figure, the sealing groove has a retrieval opening 122, which is an arc-shaped opening. There are two arc-shaped openings, which are arranged opposite each other on the two side walls of the sealing groove, so as to facilitate the replacement of the first sealing ring 121.

[0030] The air extraction base 1 has an air intake and an air outlet. Specifically, the air intake is located on the surface of the front cover plate 11, and an air intake pipe 14 is provided on the front cover plate 11, with the end of the air intake pipe 14 serving as the air intake. The air outlet is located on the lower surface of the middle frame 12, and an exhaust pipe 15 is provided below the middle frame 12. The exhaust pipe 15 is a corrugated pipe, and the exhaust pipe 15 is detachably and sealably connected to the air outlet. A convex ring 151 is provided at the end of the exhaust pipe 15, and an insertion ring 152 is provided at the opening on the upper surface of the convex ring 151. A second sealing ring 153 is fitted on the insertion ring 152. The convex ring 151 is connected to the lower surface of the middle frame 12 via the connector 16. The connector 16 includes a connecting block and a screw 17. A through-hole is formed in the middle of the connecting block, and a notch 161 is formed on one side of the upper surface of the connecting block. The depth of the notch 161 is equal to or less than the thickness of the convex ring 151. The outer edge of the convex ring 151 is located inside the notch 161. The screw 17 passes through the connecting hole and connects to the middle frame 12. Because setting the diameter of the convex ring 151 too large would increase the production cost, it is more convenient to fasten the convex ring 151 by using the connection block and the screw 17.

[0031] In another embodiment, the connector 16 can also be a screw 17, which passes directly through the convex ring 151 and locks into the lower surface of the middle frame 12 for fixation.

[0032] Two suction valves 2 are installed on the side wall of the suction seat 1. The suction valves 2 are located on the rear cover plate 13. The suction ends of the two suction valves 2 are connected to the air passage chamber. The suction rates of the two suction valves 2 are different (the diameters are different). The suction valves 2 are right-angle suction valves.

[0033] By integrating suction valves 2 with different diameters (and different suction rates), the suction rate of the gas passage chamber can be switched in stages. During the ALD precursor power supply stage, a small-diameter suction valve 2 is used to reduce the suction rate, prolong the residence time of the precursor in the chamber, promote full reaction, and improve the uniformity and conformability of the film. During the vacuuming and purging stages, a large-diameter suction valve 2 is switched to quickly exhaust the gas from the chamber and improve production efficiency.

[0034] The number of air extraction valves 2 can be set according to the actual situation.

[0035] Example 2 like Figures 4-6 As shown, the difference between this embodiment and embodiment 1 is that the two suction valves 2 have the same suction rate (same diameter). By integrating two suction valves 2 with the same diameter (same suction rate), the number of suction valves 2 that are opened can be controlled to make them suitable for different stages of the reaction. For example, when the precursor needs to stay in the cavity for a long time to promote a full reaction, one suction valve 2 is opened. During the vacuuming and purging stages, both suction valves 2 are opened to quickly exhaust the cavity and improve production efficiency.

[0036] The number of air extraction valves 2 can be set according to the actual situation.

[0037] The foregoing has shown and described the basic principles and main features of this invention, as well as its advantages. Those skilled in the art should understand that this invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this invention. Various changes and modifications can be made to this invention without departing from its spirit and scope. All such changes and modifications fall within the scope of this invention as defined by the appended claims and their equivalents.

Claims

1. A dual-bore parallel right-angle valve integrated vacuum pumping module, characterized in that: It includes a suction seat and at least two suction valves. The suction seat has an air passage chamber, an air inlet and an air outlet. The two suction valves are installed on the side wall of the suction seat. The suction ends of the two suction valves are connected to the air passage chamber. The two suction valves have different suction rates.

2. A dual-bore parallel right-angle valve integrated vacuum pumping module, characterized in that: It includes a suction seat and at least two suction valves. The suction seat has an air passage chamber, an air inlet and an air outlet. The two suction valves are installed on the side wall of the suction seat. The suction ends of the two suction valves are connected to the air passage chamber. The two suction valves have the same suction rate.

3. The dual-bore parallel direct valve integrated vacuum air- evacuation module according to claim 1 or 2, characterized in that: The air extraction base includes a front cover plate, a middle frame, and a rear cover plate. The front cover plate and the middle frame are detachably and sealed together, and the middle frame and the rear cover plate are detachably and sealed together.

4. The dual-bore parallel right-angle valve integrated vacuum air- evacuation module according to claim 3, characterized in that: An air intake pipe is provided on the front cover plate, an exhaust pipe is provided below the middle frame, and an air extraction valve is provided on the rear cover plate.

5. The dual-bore parallel right-angle valve integrated vacuum air- evacuation module according to claim 3, characterized in that: The middle frame has two open sides forming closed-loop sealing grooves, and a first sealing ring is provided in the sealing groove.

6. The dual-bore parallel right-angle valve integrated vacuum air-pumping module of claim 4, wherein: The exhaust pipe and the exhaust port are detachably and resealably connected.

7. The dual-bore parallel right-angle valve-integrated vacuum air-ejecting module according to claim 6, characterized in that: The exhaust pipe end is provided with a convex ring, and an insertion ring is provided at the opening on the upper surface of the convex ring. A second sealing ring is fitted on the insertion ring, and the convex ring is connected to the lower surface of the middle frame through a connector.

8. The dual-bore parallel right-angle valve integrated vacuum air- evacuation module according to claim 7, characterized in that: The connector includes a connecting block and a screw. A through-hole is formed in the middle of the connecting block. A notch is formed on one side of the upper surface of the connecting block. The depth of the notch is equal to or less than the thickness of the convex ring. The outer edge of the convex ring is located inside the notch. The screw passes through the connecting hole and connects to the middle frame.

9. The dual-bore parallel right-angle valve-integrated vacuum air-ejecting module according to claim 5, characterized in that: A retrieval opening is formed on any side wall of the sealing groove.

10. The dual-bore parallel right-angle valve integrated vacuum air- evacuation module according to claim 9, characterized in that: The retrieval port is an arc-shaped port, and there are two arc-shaped ports, which are arranged opposite each other on the two side walls of any one location in the sealing groove.

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