A PECVD device

Abstract

This utility model discloses a PECVD device, relating to the field of PECVD equipment. The PECVD device includes a chamber with a top cover mounted above it. Two first sliding rods are symmetrically fixed to the outer wall of the top cover, and each first sliding rod is slidably connected to the side wall of the chamber through a first sliding hole. The spray plate of this PECVD device is connected to the top cover via a detachable clamping structure, and a support groove supports the plate. During maintenance, the clamping is released, the spray plate falls into the support groove, and the top cover is lifted for quick removal and cleaning. The movable plug-in insulating sheet allows for quick replacement, significantly improving maintenance efficiency.

Description

Technical Field

[0001] This utility model relates to the field of PECVD equipment, and in particular to a PECVD device. Background Technology

[0002] PECVD equipment can perform chemical vapor deposition on the surface of wafers to coat the wafer surface. The spray head on the top cover of this equipment sprays gas. Since it also serves as the anode electrode, it needs to be insulated from the top cover. Traditional technology connects the two through an insulating sheet. However, the insulating sheet needs to be replaced and maintained regularly, and the spray head also needs to be positioned and cleaned for maintenance. Traditional technology uses bolts to connect the insulating sheet to the top cover and the insulating sheet to the spray head, which is cumbersome to disassemble and inconvenient to maintain. Utility Model Content

[0003] To overcome the shortcomings of existing technologies, the purpose of this utility model is to provide a PECVD device that solves the problem of inconvenient replacement of spray heads and insulating sheets in traditional PECVD devices.

[0004] To address the problems in the existing technology, the technical solution of this utility model is as follows: A PECVD device includes a chamber, a top cover that is liftably mounted on the top of the chamber, a spray plate provided on the inner side of the top cover, and an insulating joint fixed at the axis of the top cover, the insulating joint penetrating the top cover; Two clamping blocks are symmetrically slidably installed on the inner side of the top cover. Insulating sheets are detachably installed on the opposite side of the two clamping blocks. The opposite side of the two insulating sheets is set with an incline. The clamping assembly drives the two clamping blocks to move closer to each other, pushing the two insulating sheets to abut against the outer wall of the spray plate from both sides. The lower edge of the spray plate near the insulating sheet is set with an incline that matches the shape of the insulating sheet, forcing the spray plate to move upward. This causes the top air inlet pipe of the spray plate to press against the bottom of the insulating joint. A sealing ring is provided between the top of the air inlet pipe and the bottom surface of the insulating joint to improve the airtightness between the air inlet pipe and the insulating joint.

[0005] Optionally, the lower end of the clamping block has two symmetrically opened third sliding holes, and two insert rods are symmetrically fixed on opposite sides of the two insulating sheets. The insert rods are inserted into one of the opposite third sliding holes, and the opposite sides of the two insulating sheets are attached to the outer wall of the clamping block.

[0006] Optionally, two second sliding rods are symmetrically fixed to the inner wall of the top cover. The insulating joint and the air inlet pipe are located between the two second sliding rods. The clamping blocks are slidably connected to the ends of the two second sliding rods through the second sliding holes. The clamping assembly includes a bidirectional screw rod rotatably connected to the side wall of the top cover through a sealed bearing. A servo motor is fixed to the outer wall of the top cover. The end of the bidirectional screw rod near the servo motor passes through the top cover and is fixed to the output end of the servo motor. The two clamping blocks are respectively threaded to the two ends of the bidirectional screw rod through threaded holes.

[0007] Optionally, support bars are symmetrically fixed to the upper end of the inner wall of the cavity, and support seats are fixed to the upper end of the support bars. Support grooves matching the shape of the spray plate are formed on the opposite side of the two support seats, and the support seats are made of ceramic material.

[0008] Compared with the prior art, the advantages of this utility model are as follows: This invention connects the spray plate to the top cover using a clamping structure and a support bar. When cleaning the air jets on the spray plate is required, the clamping structure can be driven to engage with the spray plate, causing it to fall into the support groove. Then, the top cover opens and rises, enabling quick disassembly of the spray plate. This facilitates cleaning, and the movable insulating sheet allows for easy replacement. Compared to traditional technologies, this invention greatly simplifies maintenance operations. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0010] Figure 2 This is a schematic diagram of the internal structure of the top cover of this utility model.

[0011] Figure 3 This is a schematic diagram of the top structure of the spray disc of this utility model.

[0012] Figure 4 This is a schematic diagram of the insulating sheet structure of this utility model.

[0013] Figure 5 This is a schematic diagram of the baffle structure of this utility model.

[0014] Figure 6 This is a schematic diagram of the support structure of this utility model.

[0015] Reference numerals: 1. Chamber; 2. Top cover; 3. Insulating joint; 4. Spray plate; 401. Air inlet pipe; 5. Second slide rod; 6. Clamping block; 7. Insulating sheet; 8. Third sliding hole; 9. Insert rod; 10. Bidirectional screw; 11. Servo motor; 12. Support bar; 13. Support base; 14. Baffle plate. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0017] Please see Figures 1 to 6 This embodiment provides a PECVD device, including a chamber 1, a top cover 2 installed on the top of the chamber 1, two first sliding rods symmetrically fixed on the outer wall of the top cover 2, and the two first sliding rods are slidably connected to the side wall of the chamber 1 through first sliding holes. Two electric push rods are symmetrically fixed on the outer wall of the chamber 1, and the extended ends of the electric push rods are fixed to the outer edge of the top cover 2. By driving the electric push rods to extend, the top cover 2 can be opened, and the wafer can be placed or removed into the chamber 1 after opening the top cover 2.

[0018] The inner side of the top cover 2 is provided with a spray plate 4. An insulating joint 3 is fixed at the axis of the top cover 2. The insulating joint 3 penetrates the top cover 2. In order to ensure that the air inlet pipe is insulated from the cover, the air outlet of the external air supply device is connected to the upper end of the insulating joint 3, so that the gas can enter the insulating joint 3 and penetrate the cover. The air inlet pipe 401 at the top of the spray plate 4 is connected to the insulating joint 3. The gas enters the spray plate 4 and then sprays vertically downward from multiple micro-holes on the bottom surface of the spray plate 4.

[0019] Two second sliding rods 5 are symmetrically fixed to the inner wall of the top cover 2. The insulating joint 3 and the air inlet pipe 401 are located between the two second sliding rods 5. Two clamping blocks 6 are symmetrically arranged on the inner side of the top cover 2. The clamping blocks 6 are slidably connected to the ends of the two second sliding rods 5 through the second sliding holes. An insulating sheet 7 is provided on the opposite side of the two clamping blocks 6. Two third sliding holes 8 are symmetrically opened at the lower end of the clamping blocks 6. Insert rods 9 are symmetrically fixed on the opposite side of the two insulating sheets 7. The insert rods 9 are inserted into the opposite third sliding hole 8. The opposite side of the two insulating sheets 7 are attached to the outer wall of the clamping block 6. The opposite side of the two insulating sheets 7 is set at an angle. The insert rods 9 have a certain friction with the inner wall of the third sliding hole 8 to ensure that the insulating sheet 7 is stably inserted into the clamping block 6.

[0020] By driving the two clamping blocks 6 closer together, the two insulating sheets 7 are pushed from both sides of the spray plate 4 to abut against the outer wall of the spray plate 4. The lower edge of the spray plate 4 near the insulating sheet 7 is inclined to match the shape of the insulating sheet 7, which forces the spray plate 4 to move upward, so that the top air inlet pipe 401 of the spray plate 4 is pressed against the bottom of the insulating joint 3. A sealing ring is provided between the top of the air inlet pipe 401 and the bottom surface of the insulating joint 3 to ensure the airtightness between the air inlet pipe 401 and the insulating joint 3. In this way, the connection between the spray plate 4 and the cover is completed.

[0021] A bidirectional screw 10 is rotatably connected to the side wall of the top cover 2 via a sealed bearing. A servo motor 11 is fixed to the outer wall of the top cover 2. The end of the bidirectional screw 10 near the servo motor 11 passes through the top cover 2 and is fixed to the output end of the servo motor 11. Two clamping blocks 6 are threaded to the two ends of the bidirectional screw 10 through threaded holes. For the relative movement of the two clamping blocks 6, the servo motor 11 is driven to work, which drives the bidirectional screw 10 to rotate, thereby driving the two clamping blocks 6 to move closer to each other. This causes the insulating sheet 7 to abut against the inclined surface of the spray plate 4, forcing the spray plate 4 to press upward against the sealing ring under the insulating joint 3, and communicate with the insulating joint 3, thus completing the quick installation of the spray plate 4.

[0022] Support bars 12 are symmetrically fixed to the upper end of the inner wall of chamber 1. Support seats 13 are fixed to the upper end of the support bars 12. Support grooves matching the shape of the spray plate 4 are formed on the opposite side of the two support seats 13. The support seats 13 are made of ceramic material. Two baffles 14 are symmetrically formed on the inclined surface of the spray plate 4. The two baffles 14 are respectively facing the two sides of the insulating sheet 7.

[0023] When installing the spray plate 4, first open the top cover 2, place the spray plate 4 nested in the two support slots, and then close the top cover 2. By rotating the bidirectional screw 10, the two clamping blocks 6 are brought closer together, and the insulating sheet 7 enters between the two baffles 14 and adheres to the inclined surface of the spray plate 4. Then, the clamping blocks 6 continue to move closer, pushing the spray plate 4 to slide upward and press until the air inlet pipe 401 presses against the bottom surface of the insulating joint 3. During the upward sliding of the spray plate 4, due to the presence of the baffles 14, the spray plate 4 will not move horizontally between the two clamping blocks 6, but will be guided to move upward. Finally, the spray plate 4 separates from the support slots, completing the installation. When disassembling, drive the two clamping blocks 6 away from each other, and the spray plate 4 will enter the support slot vertically downward. Then open the top cover 2, and the operator can directly remove the spray plate 4 for maintenance and cleaning, and can directly pull off the insulating sheet 7 for replacement or maintenance.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A PECVD apparatus, comprising a chamber (1), wherein a top cover (2) is retractably mounted above the chamber (1), characterized in that, The inner side of the top cover (2) is provided with a spray plate (4), and an insulating joint (3) is fixed at the axis of the top cover (2), and the insulating joint (3) penetrates the top cover (2). Two clamping blocks (6) are symmetrically slidably installed on the inner side of the top cover (2). Insulating sheets (7) are detachably installed on the opposite side of the two clamping blocks (6). The opposite side of the two insulating sheets (7) is set at an angle. By driving the clamping assembly, the two clamping blocks (6) are brought closer to each other, and the two insulating sheets (7) are pushed from both sides of the spray plate (4) to abut against the outer wall of the spray plate (4), forcing the spray plate (4) to move upward, so that the top air inlet pipe (401) of the spray plate (4) is pressed against the bottom of the insulating joint (3).

2. The PECVD equipment according to claim 1, characterized in that, The lower end of the clamping block (6) has two symmetrically opened third sliding holes (8). The two insulating sheets (7) are symmetrically fixed with insert rods (9) on opposite sides. The insert rods (9) are inserted into one of the opposite third sliding holes (8). The opposite sides of the two insulating sheets (7) are attached to the outer wall of the clamping block (6).

3. The PECVD equipment according to claim 2, characterized in that, The lower edge of the spray plate (4) near the insulating sheet (7) is an inclined surface that matches the shape of the insulating sheet (7).

4. The PECVD equipment according to claim 1, characterized in that, The upper end of the inner wall of the chamber (1) is symmetrically fixed with support bars (12), and the upper end of the support bars (12) is fixed with support seats (13). The two support seats (13) have support grooves that match the shape of the spray plate (4) on opposite sides. The support seats (13) are made of ceramic material.

5. The PECVD equipment according to claim 3, characterized in that, The inner wall of the top cover (2) is symmetrically fixed with two second slide rods (5), the insulating joint (3) and the air inlet pipe (401) are located between the two second slide rods (5), and the clamp (6) is slidably connected to the ends of the two second slide rods (5) through the second sliding hole.

6. The PECVD equipment according to claim 5, characterized in that, The clamping assembly includes a bidirectional screw (10) rotatably connected to the side wall of the top cover (2) via a sealed bearing. A servo motor (11) is fixed to the outer wall of the top cover (2). One end of the bidirectional screw (10) near the servo motor (11) passes through the top cover (2) and is fixed to the output end of the servo motor (11). Two clamping blocks (6) are respectively threaded to the two ends of the bidirectional screw (10) through threaded holes.

7. The PECVD equipment according to claim 1, characterized in that, A sealing ring is provided between the top of the air intake pipe (401) and the bottom surface of the insulating joint (3).

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