Single crystal furnace

Abstract

This utility model relates to a single crystal furnace. The single crystal furnace includes: a main furnace chamber; an auxiliary furnace chamber, spaced apart from the main furnace chamber; a rotary valve assembly, arranged between the main furnace chamber and the auxiliary furnace chamber, and having a valve compartment and a valve body rotatably arranged within the valve compartment; wherein the valve compartment includes a central cavity communicating with the main furnace chamber and the auxiliary furnace chamber, and an extension cavity located on one side of the central cavity and communicating with the central cavity; wherein the valve body is configured to switch between a closed position located within the central cavity to isolate the main furnace chamber and the auxiliary furnace chamber, and an open position located within the extension cavity to allow communication between the main furnace chamber and the auxiliary furnace chamber; and an isolation assembly, the isolation assembly including a movable isolation cylinder, wherein when the valve body is in the open position, the isolation cylinder is positioned in an isolation position between the central cavity and the extension cavity, such that the extension cavity is isolated from the central cavity, the auxiliary furnace chamber, and the main furnace chamber. This utility model's single crystal furnace can optimize the path of inert airflow and reduce the risk of wire breakage in single crystal silicon rods.

Description

Technical Field

[0001] This utility model relates to the field of crystal processing technology, and more specifically to a single crystal furnace. Background Technology

[0002] A monocrystalline furnace is an important piece of equipment for preparing monocrystalline silicon. It can heat and melt polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment (such as argon or helium), and then produce high-purity, low-defect monocrystalline silicon rods by sequentially going through a series of pulling processes, including temperature adjustment, crystal pulling, shoulder formation, shoulder rotation, equal diameter setting, tailing, and furnace shutdown.

[0003] Existing single-crystal furnaces typically include components such as a main furnace chamber, a rotary valve assembly, and an auxiliary furnace chamber. The rotary valve assembly comprises a valve chamber located between the main and auxiliary furnace chambers, and a valve body rotatably arranged within the valve chamber. By controlling the different positions of the valve body within the valve chamber, the connection and disconnection between the main and auxiliary furnace chambers can be easily achieved. Figure 1 This is a schematic diagram of an embodiment in a prior art single-crystal furnace where the shoulder of the single-crystal silicon rod is located near the valve chamber. Figure 1 As shown, when the shoulder of the monocrystalline silicon rod is near the valve chamber, the path of the inert gas flow inside the furnace will change, and some of the inert gas flow will flow into the epitaxial space of the valve chamber, causing fluctuations in the temperature of the crystal surface of the monocrystalline silicon rod. This can easily lead to thermal stress runaway, making the monocrystalline silicon rod susceptible to wire breakage. This not only wastes raw materials, increases production costs, and reduces production efficiency, but also easily leads to safety accidents.

[0004] Therefore, a new technical solution is needed in this field to solve the above problems. Utility Model Content

[0005] In order to solve or alleviate to some extent the technical problem of wire breakage caused by single crystal furnaces in the prior art when pulling single crystal silicon rods, this utility model provides a single crystal furnace. The single crystal furnace includes: a main furnace chamber; an auxiliary furnace chamber, the auxiliary furnace chamber being arranged at intervals from the main furnace chamber; a rotary valve assembly, the rotary valve assembly being disposed between the main furnace chamber and the auxiliary furnace chamber, and having a valve chamber and a valve body rotatably disposed within the valve chamber; wherein the valve chamber includes a central cavity communicating with the main furnace chamber and the auxiliary furnace chamber, and an extension cavity located on one side of the central cavity and communicating with the central cavity; wherein the valve body is configured to switch between a closed position located within the central cavity to isolate the main furnace chamber and the auxiliary furnace chamber and an open position located within the extension cavity to allow communication between the main furnace chamber and the auxiliary furnace chamber; and an isolation assembly, the isolation assembly including a movable isolation cylinder, wherein when the valve body is in the open position, the isolation cylinder is positioned in an isolation position between the central cavity and the extension cavity, such that the extension cavity is isolated from the central cavity, the auxiliary furnace chamber, and the main furnace chamber.

[0006] Those skilled in the art will understand that the single crystal furnace of this invention includes a main furnace chamber, an auxiliary furnace chamber, a rotary valve assembly, and an isolation assembly. The main furnace chamber and the auxiliary furnace chamber are arranged at intervals between each other. The rotary valve assembly is arranged between the main furnace chamber and the auxiliary furnace chamber to control the opening and closing of the main furnace chamber and the auxiliary furnace chamber. Specifically, the rotary valve assembly includes a valve chamber and a valve body rotatably arranged within the valve chamber. The valve chamber includes a central cavity and an extension cavity connected to each other, wherein the central cavity is used to connect the main furnace chamber and the auxiliary furnace chamber, and the extension cavity is located on one side of the central cavity. The valve body has a relatively closed position and an open position. When the valve body is in the closed position, the valve body rotates into the central cavity to isolate the main furnace chamber and the auxiliary furnace chamber. Correspondingly, when the valve body is in the open position, the valve body rotates into the extension cavity, allowing the main furnace chamber to connect with the auxiliary furnace chamber through the central cavity. Importantly, the isolation assembly includes a movable isolation cylinder that, when the valve body is in the open position, is positioned between the central cavity and the extension cavity, thus separating the extension cavity from the central cavity, the main furnace chamber, and the auxiliary furnace chamber. Therefore, this novel single-crystal furnace optimizes the path of the inert gas flow, preventing it from flowing into the extension cavity of the valve chamber, reducing turbulence, ensuring the stability of the crystallization surface temperature of the single-crystal silicon rod, and lowering the risk of wire breakage in the single-crystal silicon rod.

[0007] In the preferred embodiment of the single crystal furnace described above, when the valve body is in the closed position, the isolation cylinder is positioned in a connecting position away from the valve chamber to avoid the valve body. When the valve body is in the closed position, the isolation cylinder being positioned in a connecting position away from the valve chamber effectively avoids the valve body, ensuring that the valve body smoothly isolates the main furnace chamber and the auxiliary furnace chamber.

[0008] In the preferred embodiment of the single crystal furnace described above, the outer diameter of the isolation cylinder is equal to or smaller than the diameter of the central cavity. This arrangement allows the isolation cylinder to move smoothly up and down within the central cavity, enabling flexible adjustment of its position.

[0009] In the preferred embodiment of the single crystal furnace described above, the height of the isolation cylinder is greater than or equal to the height of the extension cavity. This arrangement allows the isolation cylinder to have suitable dimensions, thereby effectively isolating the extension cavity.

[0010] In the preferred embodiment of the single crystal furnace described above, the isolation assembly further includes: a driving member; and a connecting member, one end of which is connected to the driving member, and the other end of which is connected to the isolation cylinder, such that under the drive of the driving member, the connecting member can drive the isolation cylinder to switch between the isolation position and the communication position. Through the above arrangement, the switching of the isolation cylinder between the relative isolation position and the communication position can be conveniently controlled.

[0011] In the preferred embodiment of the above-mentioned single crystal furnace, the driving component is a pneumatic cylinder and the connecting component is a pneumatic rod; or the driving component is a hydraulic cylinder and the connecting component is a hydraulic rod; or the driving component is a motor and the connecting component is a lead screw, wherein the lead screw is a trapezoidal lead screw, a ball screw, or a worm gear lead screw. These configurations can enrich the types of products available.

[0012] In the preferred embodiment of the single crystal furnace described above, when the isolation cylinder is in the communicating position, the isolation cylinder is positioned within the main furnace chamber. Positioning the isolation cylinder within the main furnace chamber, rather than the auxiliary furnace chamber, when in the communicating position allows the larger space of the main furnace chamber to conveniently accommodate the isolation cylinder.

[0013] In the preferred embodiment of the single crystal furnace described above, the connecting members include a first connecting member and a second connecting member arranged opposite to each other on both sides of the isolation cylinder, and the driving members include a first driving member that mates with the first connecting member and a second driving member that mates with the second connecting member. This arrangement allows the isolation cylinder to experience more uniform force, thereby enabling stable and smooth transitions between the isolation position and the communication position.

[0014] In the preferred embodiment of the single crystal furnace described above, the driving element is arranged within the extension cavity. This arrangement not only facilitates the arrangement of the driving element but also improves the utilization rate of the extension cavity.

[0015] In the preferred embodiment of the single crystal furnace described above, the isolation cylinder and the valve body are linked. By configuring the isolation cylinder and valve body to work in tandem (i.e., when the valve body rotates from the closed position to the open position, the isolation cylinder synchronously changes from the connected position to the isolated position; when the valve body rotates from the open position to the closed position, the isolation cylinder synchronously changes from the isolated position to the connected position), the timing of the isolation cylinder's movement can be precisely controlled, further ensuring the stability of the inert airflow path.

[0016] In the preferred embodiment of the above-mentioned single crystal furnace, a high-temperature resistant material is provided on the inner circumferential surface of the isolation cylinder, and the high-temperature resistant material is Teflon, polysilazane, polyimide, or organosilicon. The use of this high-temperature resistant material can improve the overall high-temperature resistance of the isolation cylinder and extend its service life. Attached Figure Description

[0017] The preferred embodiments of this utility model are described below with reference to the accompanying drawings, in which:

[0018] Figure 1 This is a schematic diagram of an embodiment in which the shoulder of a single-crystal silicon rod is located near the valve chamber in a conventional single-crystal furnace.

[0019] Figure 2 This is a schematic diagram of the structure of an embodiment of the single crystal furnace of this utility model;

[0020] Figure 3 This is a partial structural schematic diagram of an embodiment of the single crystal furnace of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of an embodiment of the isolation cylinder in the single crystal furnace of this utility model;

[0022] Figure 5 This is a schematic diagram of an embodiment where the shoulder of the single crystal silicon rod in the single crystal furnace of this utility model is located near the valve chamber.

[0023] List of reference numerals in the attached diagram:

[0024] 1. Existing single crystal furnace; 11. Existing main furnace chamber; 12. Existing auxiliary furnace chamber; 13. Existing valve chamber; 2. Existing single crystal silicon rod;

[0025] 100. Single crystal furnace; 110. Main furnace chamber; 120. Auxiliary furnace chamber; 130. Rotary valve assembly; 131. Valve chamber; 1311. Central cavity; 1312. Extension cavity; 132. Valve body; 140. Isolation assembly; 141. Isolation cylinder; 142. Drive component; 143. Connector; 150. Quartz crucible; 160. Water-cooled pipe; 170. Tungsten wire rope; 200. Single crystal silicon rod. Detailed Implementation

[0026] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0027] It should be noted that in the description of this utility model, the terms "upper," "lower," "left," "right," "inner," and "outer," which indicate directional or positional relationships, are based on the directional or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "setting," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection, an indirect connection through an intermediate medium, or a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] To address or mitigate to some extent the technical problem of wire breakage during the pulling of single-crystal silicon rods in existing single-crystal furnaces, this invention provides a single-crystal furnace 100. The single-crystal furnace 100 includes: a main furnace chamber 110; an auxiliary furnace chamber 120, spaced apart from the main furnace chamber 110; and a rotary valve assembly 130, arranged between the main furnace chamber 110 and the auxiliary furnace chamber 120, and having a valve housing 131 and a valve body 132 rotatably arranged within the valve housing 131. The valve housing 131 includes a central cavity 1311 connecting the main furnace chamber 110 and the auxiliary furnace chamber 120, and an extension cavity 1312 located on one side of the central cavity 1311 and communicating with it. The valve body 132 is configured to... The valve body 132 can switch between a closed position located within the central cavity 1311 to isolate the main furnace chamber 110 and the auxiliary furnace chamber 120 and an open position located within the extension cavity 1312 to allow communication between the main furnace chamber 110 and the auxiliary furnace chamber 120; and an isolation assembly 140, which includes a movable isolation cylinder 141, wherein, when the valve body 132 is in the open position, the isolation cylinder 141 is positioned in an isolation position between the central cavity 1311 and the extension cavity 1312, such that the extension cavity 1312 is isolated from the central cavity 1311, the auxiliary furnace chamber 120 and the main furnace chamber 110.

[0030] Figure 2 This is a schematic diagram of the structure of an embodiment of the single crystal furnace of this utility model. Figure 2As shown, in one or more embodiments, the single crystal furnace 100 of this utility model includes components such as a main furnace chamber 110, an auxiliary furnace chamber 120, a rotary valve assembly 130, and an isolation assembly 140. The main furnace chamber 110 and the auxiliary furnace chamber 120 are arranged alternately. The main furnace chamber 110 is the core area for single crystal growth, used for high-temperature melting, crystal growth, and thermal field control. The auxiliary furnace chamber 120 serves as an auxiliary cavity, undertaking functions such as crystal removal, vacuum transition, and gas management. Based on... Figure 2 As shown, the auxiliary furnace chamber 120 is located above the main furnace chamber 110. A rotary valve assembly 130 is positioned between the main furnace chamber 110 and the auxiliary furnace chamber 120 to control the flow between them. An isolation assembly 140 can isolate the extension chamber 1312 of the rotary valve assembly 130 from both the main furnace chamber 110 and the auxiliary furnace chamber 120 as needed, thereby optimizing the path of the inert airflow and reducing the risk of wire breakage during the pulling process of the monocrystalline silicon rod 200.

[0031] like Figure 2 As shown, in one or more embodiments, the main furnace chamber 110 has a generally cylindrical furnace body and a furnace cover located on top of the furnace body. The furnace body of the main furnace chamber 110 may adopt a double-layer structure to maintain the stability of the thermal field. The main furnace chamber 110 may be made of stainless steel (e.g., 304L stainless steel) or other suitable metal materials to give it good mechanical strength and structural stability to meet the requirements of high-temperature, inert gas environment. In one or more embodiments, a quartz crucible 150 is provided in the main furnace chamber 110 to contain polycrystalline silicon raw materials. A heater (not shown) for heating the quartz crucible 150 is also provided in the main furnace chamber 110 to promote the rapid melting of the silicon material in the quartz crucible 150. In one or more embodiments, a water-cooled pipe 160 is also provided in the main furnace chamber 110 to allow cooling water to circulate therein. The water-cooled pipe 160 can be matched with high-temperature components such as the heater, quartz crucible 150, and main furnace chamber 110. By forming a heat dissipation channel, it controls the temperature of the components within a safe range, preventing overheating and deformation, and extending the service life of the components. Furthermore, the water-cooled pipe 160 optimizes the temperature field within the main furnace chamber 110, reduces temperature fluctuations, and improves the quality of the single-crystal silicon rod 200. Preferably, at least a portion of the water-cooled pipe 160 is arranged between the two furnace layers. Further, a water-blocking strip (not shown in the figure) is also provided between the two furnace layers to optimize the circulation path of the cooling water and improve cooling efficiency and effect.

[0032] It should be noted that the main furnace chamber 110 also includes, but is not limited to, components such as thermometer windows, observation windows, and vacuum interfaces (not shown in the figure), which will not be described in detail here.

[0033] like Figure 2As shown, in one or more embodiments, the auxiliary furnace chamber 120 has a generally cylindrical shape. The auxiliary furnace chamber 120 may employ a double-layer structure to maintain the stability of the thermal field. The auxiliary furnace chamber 120 may be made of stainless steel (e.g., 304L stainless steel) or other suitable metal materials to provide good mechanical strength and structural stability. In one or more embodiments, an inlet (not shown in the figure) is provided at the top of the auxiliary furnace chamber 120, allowing inert gases (including but not limited to argon) to enter the auxiliary furnace chamber 120 through the inlet to form an inert gas environment. Preferably, a flow divider ring (not shown in the figure) is provided at the inlet to uniformly distribute the inert gas within the auxiliary furnace chamber 120, reducing turbulence interference with single crystal growth.

[0034] It should be noted that the auxiliary furnace chamber 120 also includes, but is not limited to, components such as observation windows, vacuum interfaces, and vacuum gauge interfaces (not shown in the figure), which will not be described in detail here.

[0035] In one or more embodiments, the single crystal furnace 100 of this invention further includes a frame and a pulling assembly (not shown) arranged on the frame. One end of a tungsten wire rope 170 is connected to the pulling assembly, and the other end of the tungsten wire rope 170 is connected to a seed crystal. The pulling assembly is configured to drive the seed crystal to rise, fall, and rotate via the tungsten wire rope 170, thereby effectively promoting single crystal growth.

[0036] Figure 3 This is a partial structural schematic diagram of an embodiment of the single crystal furnace of this utility model. (See attached diagram.) Figure 2 and Figure 3 As shown, the rotary valve assembly 130 includes a valve chamber 131 and a valve body 132 rotatably arranged within the valve chamber 131 to control the opening and closing between the main furnace chamber 110 and the auxiliary furnace chamber 120. The valve chamber 131 includes a central cavity 1311 and an extension cavity 1312 connected to each other. The central cavity 1311 is located between the main furnace chamber 110 and the auxiliary furnace chamber 120, providing communication between them. Preferably, the diameter of the central cavity 1311 is equal to the inner diameter of the auxiliary furnace chamber 120, ensuring a straight path for the inert airflow through the central cavity 1311. The extension cavity 1312 is located on one side of the central cavity 1311 and is used to receive the valve body 132 as needed. The valve body 132 has a closed position and an open position. When valve body 132 is in the closed position, it is positioned within the central cavity 1311 to isolate the main furnace chamber 110 and the auxiliary furnace chamber 120. Correspondingly, when valve body 132 is in the open position, it is positioned within the extension cavity 1312 to allow communication between the main furnace chamber 110 and the auxiliary furnace chamber 120 through the central cavity 1311. Figure 2 and Figure 3 As shown, valve body 132 has a rotation axis (not shown) that extends generally in the vertical direction.

[0037] It should be noted that the rotary valve assembly 130 also includes, but is not limited to, a valve opening cylinder for controlling the forward or reverse rotation of the rotating shaft, a connecting rod connected to the valve opening cylinder and the rotating shaft respectively, and a limiting block for constraining the rotation angle of the valve body 132, etc. (all of which are not shown in the figure), and will not be described in detail here.

[0038] Figure 5 This is a schematic diagram of an embodiment of the single crystal furnace 100 of this utility model, in which the shoulder of the single crystal silicon rod 200 is located near the valve chamber 131. Figure 2 , Figure 3 and Figure 5 As shown, in one or more embodiments, the isolation assembly 140 includes a movable isolation sleeve 141. When the valve body 132 is in the open position, the isolation sleeve 141 is configured to be positioned in an isolation position between the central cavity 1311 and the extension cavity 1312 (see [link to diagram]). Figure 5 This design isolates the extension cavity 1312 from the central cavity 1311, the auxiliary furnace chamber 120, and the main furnace chamber 110. Therefore, when the inert gas flows from the auxiliary furnace chamber 120 through the valve chamber 131 to the main furnace chamber 110, the present invention effectively isolates the extension cavity 1312 using the isolation cylinder 141. This ensures that the inert gas in the auxiliary furnace chamber 120 can only flow straight along the central cavity 1311 to the main furnace chamber 110, optimizing the flow path of the inert gas. This prevents fluctuations in the crystal surface temperature of the single crystal silicon rod 200 caused by the inert gas flowing into the extension cavity 1312, reduces thermal stress runaway, and lowers the risk of wire breakage in the single crystal silicon rod 200.

[0039] Figure 4 This is a schematic diagram of the structure of an embodiment of the isolation cylinder in the single crystal furnace of this utility model. Figure 4As shown, in one or more embodiments, the isolation cylinder 141 is a hollow cylindrical tube. Alternatively, the isolation cylinder 141 can also be configured in other suitable shapes, as long as it can effectively isolate the extension cavity 1312. For example, the isolation cylinder 141 can also be configured as an arc-shaped wall (not shown in the figure) that matches the opening connecting the extension cavity 1312 and the central cavity 1311. The isolation cylinder 141 can be made of stainless steel or other suitable metal materials to give it good mechanical properties and structural stability. In one or more embodiments, a high-temperature resistant material is provided on the inner circumferential surface of the isolation cylinder 141 to improve the high-temperature resistance of the entire isolation cylinder 141. The high-temperature resistant material can be, but is not limited to, Teflon, polysilazane, polyimide, or silicone. Alternatively, a high-temperature resistant material is provided on both the outer and inner circumferential surfaces of the isolation cylinder 141 to further improve the high-temperature resistance of the isolation cylinder 141. In one or more embodiments, the outer diameter of the isolation cylinder 141 is equal to the diameter of the central cavity 1311, so that the isolation cylinder 141 can fully isolate the extension cavity 1312. Alternatively, the outer diameter of the isolation cylinder 141 can be set to be smaller than the diameter of the central cavity 1311, thereby reducing the resistance encountered by the isolation cylinder 141 during movement while effectively isolating the extension cavity 1312. It should be noted that the difference between the outer diameter of the isolation cylinder 141 and the diameter of the central cavity 1311 can be adjusted according to actual needs, for example, 0.5mm, 1mm, 1.5mm, etc. In one or more embodiments, the height of the isolation cylinder 141 is equal to the height of the extension cavity 1312. Alternatively, the height of the isolation cylinder 141 can be set to be greater than the height of the extension cavity 1312, so that the isolation cylinder 141 has a larger shielding area, thereby ensuring the isolation effect. It should be noted that the difference between the height of the isolation cylinder 141 and the height of the extension cavity 1312 can also be adjusted according to actual needs, for example, 1mm, 2mm, 3mm, etc.

[0040] In one or more embodiments, the isolation cylinder 141 also has a communicating position (not shown) opposite to the isolation position. Specifically, when the valve body 132 is in the closed position, the isolation cylinder 141 is positioned in the communicating position away from the valve chamber 131, allowing the valve body 132 to smoothly rotate from the open position to the closed position without being obstructed by the isolation cylinder 141, thereby effectively avoiding the valve body 132. In one or more embodiments, when the isolation cylinder 141 is in the communicating position, the isolation cylinder 141 is positioned within the main furnace chamber 110, so that the larger main furnace chamber 110 can conveniently accommodate the isolation cylinder 141. Alternatively, when the isolation cylinder 141 is in the communicating position, the isolation cylinder 141 may also be positioned within the auxiliary furnace chamber 120.

[0041] like Figure 4As shown, in one or more embodiments, the isolation assembly 140 further includes a driving member 142 and a connecting member 143 that mate with each other. One end of the connecting member 143 is connected to the driving member 142, and the other end of the connecting member 143 is connected to the isolation cylinder 141, so that under the drive of the driving member 142, the connecting member 143 can drive the isolation cylinder 141 to switch between an isolation position and a communication position. Through the cooperation of the driving member 142 and the connecting member 143, the relative position of the isolation cylinder 141 can be easily adjusted to achieve its switching between the isolation position and the communication position. The specific forms of the driving member 142 and the connecting member 143 are not limited. For example, the driving member 142 is a pneumatic cylinder, and the connecting member 143 is a pneumatic rod; or, the driving member 142 is a hydraulic cylinder, and the connecting member 143 is a hydraulic rod; or, the driving member 142 is a motor, and the connecting member 143 is a lead screw. The lead screw can be, but is not limited to, a trapezoidal lead screw, a ball screw, or a worm gear screw. Furthermore, the arrangement of the drive member 142 can be adjusted according to actual needs. For example, the drive member 142 can be arranged within the extension cavity 1312 to improve the utilization rate of the extension cavity 1312. Alternatively, the drive member 142 can also be arranged within the main furnace chamber 110. The fixing method of the drive member 142 can be, but is not limited to, screwing, snap-fitting, welding, etc. In one or more embodiments, the connector 143 includes a first connector 143 and a second connector 143 (not shown in the figure) arranged at intervals on both sides of the isolation cylinder 141, and the drive member 142 includes a first drive member 142 that mates with the first connector 143 and a second drive member 142 that mates with the second connector 143. Through the above arrangement, the uniformity of force on the isolation cylinder 141 can be improved, so that the isolation cylinder 141 can switch between the isolation position and the communication position more stably and smoothly. Alternatively, the number of connectors 143 and drive members 142 can also be set to three, four, or other suitable numbers.

[0042] In one or more embodiments, the isolation cylinder 141 and the valve body 132 are linked. In other words, when the valve body 132 rotates from the closed position to the open position, the isolation cylinder 141 synchronously changes from the connected position to the isolated position. Correspondingly, when the valve body 132 rotates from the open position to the closed position, the isolation cylinder 141 also synchronously changes from the isolated position to the connected position. This allows for precise control of the movement timing of the isolation cylinder 141, further ensuring the stability of the inertial airflow path. In one or more embodiments, the present invention also includes a controller (not shown in the figure) that is communicatively connected to the valve opening cylinder for controlling the rotation of the valve body 132 and the drive component 142 for controlling the lifting and lowering of the isolation cylinder 141. The controller can precisely control the movement timing of the valve body 132 and the isolation cylinder 141 to achieve their coordinated operation. It should be noted that the controller can be wired or wirelessly connected to the valve opening cylinder and the drive component 142.

[0043] It should be noted that the specific positions of the valve body 132 and the isolation cylinder 141 can be flexibly adjusted according to the actual needs of the drawing process. For example, during processes such as melting and section taking, the valve body 132 is in the closed position, while the isolation cylinder 141 is in the connected position; during processes such as temperature adjustment, crystal pulling, shoulder forming, equal diameter forming, and finishing, the valve body 132 is in the open position, while the isolation cylinder 141 is in the isolated position.

[0044] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A single crystal furnace (100), characterized in that, The single crystal furnace (100) includes: Main furnace chamber (110); A secondary furnace chamber (120) is arranged at intervals from the main furnace chamber (110); A rotary valve assembly (130) is arranged between the main furnace chamber (110) and the auxiliary furnace chamber (120), and has a valve chamber (131) and a valve body (132) rotatably arranged in the valve chamber (131); The valve chamber (131) includes a central cavity (1311) that connects the main furnace chamber (110) and the auxiliary furnace chamber (120), and an extension cavity (1312) located on one side of the central cavity (1311) and connected to the central cavity (1311). The valve body (132) is configured to switch between a closed position located within the central cavity (1311) to isolate the main furnace chamber (110) and the auxiliary furnace chamber (120) and an open position located within the extension cavity (1312) to allow communication between the main furnace chamber (110) and the auxiliary furnace chamber (120); and An isolation assembly (140) comprising a movable isolation cylinder (141), When the valve body (132) is in the open position, the isolation cylinder (141) is positioned in an isolation position between the central cavity (1311) and the extension cavity (1312), so that the extension cavity (1312) is isolated from the central cavity (1311), the auxiliary furnace chamber (120) and the main furnace chamber (110).

2. The single crystal furnace (100) according to claim 1, characterized in that, When the valve body (132) is in the closed position, the isolation cylinder (141) is positioned in a communicating position away from the valve chamber (131) to avoid the valve body (132).

3. The single crystal furnace (100) according to claim 1 or 2, characterized in that, The outer diameter of the isolation cylinder (141) is equal to or smaller than the diameter of the central cavity (1311).

4. The single crystal furnace (100) according to claim 1 or 2, characterized in that, The height of the isolation cylinder (141) is greater than or equal to the height of the extension cavity (1312).

5. The single crystal furnace (100) according to claim 2, characterized in that, The isolation component (140) also includes: Drive unit (142); and A connector (143) is provided, one end of which is connected to the drive member (142), and the other end of which is connected to the isolation cylinder (141), such that under the drive of the drive member (142), the connector (143) can drive the isolation cylinder (141) to switch between the isolation position and the communication position.

6. The single crystal furnace (100) according to claim 5, characterized in that, The driving component (142) is a pneumatic cylinder, and the connecting component (143) is a pneumatic rod; or The driving component (142) is a hydraulic cylinder, and the connecting component (143) is a hydraulic rod; or The driving component (142) is a motor, and the connecting component (143) is a lead screw, wherein the lead screw is a trapezoidal lead screw, a ball screw, or a worm gear lead screw.

7. The single crystal furnace (100) according to claim 5, characterized in that, When the isolation cylinder (141) is in the communicating position, the isolation cylinder (141) is positioned inside the main furnace chamber (110).

8. The single crystal furnace (100) according to claim 5, characterized in that, The connector (143) includes a first connector (143) and a second connector (143) arranged opposite to each other on both sides of the isolation cylinder (141), and the drive (142) includes a first drive (142) that mates with the first connector (143) and a second drive (142) that mates with the second connector (143); and / or The drive unit (142) is arranged inside the extension cavity (1312).

9. The single crystal furnace (100) according to claim 2, characterized in that, The isolation cylinder (141) and the valve body (132) are linked together.

10. The single crystal furnace (100) according to claim 1, characterized in that, The inner circumferential surface of the isolation cylinder (141) is provided with a high-temperature resistant material, and the high-temperature resistant material is Teflon, polysilazane, polyimide or organosilicon.

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