A piezoelectric hydraulic pump and cooling device

Abstract

This utility model relates to the field of piezoelectric hydraulic pump technology, and particularly to a piezoelectric hydraulic pump and cooling device. The piezoelectric hydraulic pump includes: a piezoelectric component; a compression chamber and a constant pressure chamber connected in series, the piezoelectric component being able to drive volume changes in the compression chamber; a first one-way valve assembly provided at the connection between the compression chamber and the constant pressure chamber, the first one-way valve assembly limiting the unidirectional flow of fluid to the constant pressure chamber; a medium inlet connecting the compression chamber and the outside, the medium inlet being provided with a second one-way valve assembly, the second one-way valve assembly limiting the unidirectional flow of fluid to the compression chamber; and at least two medium outlets, each connecting the constant pressure chamber and the outside. This utility model, by setting a constant pressure chamber between the medium outlets and the compression chamber, and placing the first one-way valve assembly at the connection between the constant pressure chamber and the compression chamber, can utilize the constant pressure chamber to buffer system pressure fluctuations, stabilize system pressure, and improve the synchronicity and consistency of multiple medium fluids output from different medium outlets.

Description

[0001] This application claims priority to Chinese Patent Application No. 202521860716.9, filed on August 29, 2025, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0002] This utility model relates to the field of piezoelectric hydraulic pump technology, and in particular to a piezoelectric hydraulic pump and cooling device. Background Technology

[0003] A piezoelectric hydraulic pump is a device used for pressurizing and transporting fluids. Common piezoelectric hydraulic pumps on the market usually include a variable volume compression chamber, an inlet and an outlet connected to the compression chamber, which is a single-inlet and single-outlet structure. The liquid enters the piezoelectric hydraulic pump from the inlet, is pressurized, and is output from the outlet.

[0004] In some scenarios, multiple output jets are required. The conventional method is to combine multiple single-inlet single-outlet liquid pumps, but this has disadvantages such as large space occupation, complex structure, and high power consumption. To solve this problem, in internal research, we chose to set up multiple liquid outlets connected to the compression chamber, which can simplify the structure to a certain extent. However, after further research, we found that the multiple jets output by the above structure have poor synchronization and consistency. Utility Model Content

[0005] This invention provides a piezoelectric hydraulic pump and cooling device, which aims to solve, at least to some extent, the problem of poor synchronization and consistency of multiple jets.

[0006] In a first aspect, the present invention provides a piezoelectric hydraulic pump, comprising: Piezoelectric components; A compression chamber and a constant pressure chamber are connected in a manner. The piezoelectric component can drive the volume change of the compression chamber. A first one-way valve assembly is provided at the connection between the compression chamber and the constant pressure chamber. The first one-way valve assembly limits the fluid to flow unidirectionally to the constant pressure chamber. A medium inlet connects the compression chamber to the outside. The medium inlet is provided with a second one-way valve assembly, which limits the fluid to flow unidirectionally to the compression chamber. There are at least two medium outlets, both of which are connected to the constant pressure chamber and the outside.

[0007] In some embodiments, the piezoelectric component is capable of driving periodic changes in the volume of the compression chamber.

[0008] In some embodiments, the compression chamber is connected to a constant pressure chamber, and at least two of the medium outlets are connected to the constant pressure chamber.

[0009] In some embodiments, the compression chamber is connected to at least two constant pressure chambers of equal volume, each constant pressure chamber having at least one medium outlet.

[0010] In some embodiments, all the constant pressure chambers connected to the same compression chamber have the same shape and size.

[0011] In some embodiments, the openings connecting each of the constant pressure chambers and the compression chambers have the same shape and size.

[0012] In some implementations, all of the media outlets have the same cross-sectional area.

[0013] In some embodiments, the volume of the constant pressure chamber is 15 times or more of the rated flow rate per second of the liquid pump.

[0014] More preferably, the volume of the constant pressure chamber is 20 times or more of the rated flow rate per second of the liquid pump.

[0015] In some embodiments, both the first one-way valve assembly and the second one-way valve assembly are diaphragm one-way valves. The diaphragm one-way valve includes a one-way diaphragm, a flexible connector, and a base frame. The flexible connector connects the one-way diaphragm and the base frame.

[0016] In some embodiments, the device includes a housing, the constant pressure chamber is disposed within the housing, the medium inlet and the medium outlet are disposed on the housing, and the piezoelectric component includes a dynamic diaphragm assembly, which, together with the housing, forms the compression chamber. The dynamic diaphragm assembly is capable of periodically vibrating to periodically change the volume of the compression chamber.

[0017] In some embodiments, the housing includes an intermediate partition for separating the compression chamber and the constant pressure chamber, the intermediate partition having a connecting through hole, and the first one-way valve assembly disposed on the side of the intermediate partition near the constant pressure chamber; the first one-way valve assembly includes a first one-way diaphragm and a first flexible connector, the first flexible connector connecting the first one-way diaphragm and the intermediate partition, the first one-way diaphragm being able to move away from or near the intermediate partition to open or close the connecting through hole.

[0018] In some embodiments, the housing has a first surface portion near the inner wall of the compression chamber, and the medium inlet and the second one-way valve assembly are both disposed on the first surface portion; the second one-way valve assembly includes a second one-way diaphragm and a second flexible connector, the second flexible connector connecting the second one-way diaphragm and the first surface portion, and the second one-way diaphragm can move away from or near the first surface portion to open or close the medium inlet.

[0019] In some embodiments, the dynamic membrane assembly includes a piezoelectric ceramic sheet assembly, a fiber membrane, and a metal membrane stacked sequentially.

[0020] In some embodiments, the piezoelectric ceramic sheet assembly includes at least two piezoelectric ceramic sheets stacked and connected in parallel.

[0021] In some embodiments, the medium inlet is connected to a liquid inlet pipe that protrudes from the housing.

[0022] In some embodiments, the medium outlet is connected to a liquid outlet pipe that protrudes from the housing.

[0023] In some embodiments, the housing includes a frame and a cover. The frame has a first cavity and a second cavity. The power diaphragm assembly covers the first cavity to form the compression chamber, and the cover covers the second cavity to form the constant pressure chamber. The medium outlet is located on the cover.

[0024] In some embodiments, the compression chamber has only one medium inlet.

[0025] In a second aspect, the present invention provides a cooling device, including a drive power supply and a piezoelectric pump as described above, wherein the drive power supply is used to provide alternating voltage to the piezoelectric pump.

[0026] Compared with the prior art, the beneficial effects of this utility model are as follows: The piezoelectric hydraulic pump of this invention utilizes a piezoelectric component to drive the volume of the compression chamber to periodically increase and decrease. Combined with a first and second one-way valve assembly, it can continuously draw in and pump out fluid. Multiple medium outlets are connected to the same compression chamber, facilitating the formation of multiple fluid streams and meeting multi-point heat dissipation requirements. Compared to existing technologies that use multiple single-inlet, single-outlet pump combinations, this solution significantly reduces device size and power consumption. By setting a constant-pressure chamber between the medium outlet and the compression chamber, and placing the first one-way valve assembly at the connection between the constant-pressure chamber and the compression chamber, the constant-pressure chamber can buffer the fluid stream, buffering system pressure fluctuations, stabilizing system pressure, and improving the synchronicity and consistency of multiple fluid streams output from different medium outlets. Attached Figure Description

[0027] Figure 1 This is a front view of the first structure of the liquid pump described in the embodiments of this application; Figure 2 for Figure 1 Sectional view of section AA; Figure 3 for Figure 1 Side view of the liquid pump; Figure 4 for Figure 1 The schematic diagram of the liquid pump is omitted (the power diaphragm assembly and the second check valve assembly are omitted). Figure 5 This is a schematic diagram of the diaphragm check valve described in the embodiments of this application; Figure 6 This is an explosion diagram of the liquid pump described in an embodiment of this application; Figure 7 This is a schematic diagram (spherical) of the second structure of the liquid pump described in the embodiments of this application. Figure 8 This is a schematic diagram (cylindrical) of the third structure of the liquid pump described in the embodiments of this application. Figure 9 This is a schematic diagram (frustum-shaped) of the fourth structure of the liquid pump described in the embodiments of this application.

[0028] Marked in the image: 1-Shell; 11-First surface portion; 12-Intermediate partition plate; 13-Connecting through hole; 14-Frame body; 15-Cover body; 16-Rear cover plate; 2-Media inlet; 21-Inlet pipe; 3-Media outlet; 31-Discharge pipe; 4-Dynamic membrane module; 41 - Piezoelectric ceramic sheet assembly; 411 - First piezoelectric ceramic sheet; 412 - Second piezoelectric ceramic sheet; 42-Fiber membrane; 43-Metallic diaphragm; 44-Wire; 5-Compression chamber; 6-Constant pressure chamber; 7-First check valve assembly; 8-Second check valve assembly; 9-Diaphragm check valve; 91-One-way diaphragm; 92-Flexible connector; 93-Base frame. Detailed Implementation

[0029] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0030] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0031] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0032] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0033] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0034] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0035] Example In a first aspect, embodiments of this application provide a liquid pump, including a compression chamber 5 whose volume can periodically increase and decrease, and a medium inlet 2 and a medium outlet 3 connecting the compression chamber 5 to the outside. A first check valve assembly 7 is provided at the medium outlet 3, and a second check valve assembly 8 is provided at the medium inlet 2. The first check valve assembly 7 limits the fluid to flow out of the compression chamber 5 in one direction, and the second check valve assembly 8 limits the fluid to flow into the compression chamber 5 in one direction.

[0036] During the periodic increase and decrease of the volume of the compression chamber 5, the internal air pressure of the compression chamber 5 changes periodically relative to the external air pressure. Under the action of the internal and external pressure difference, the compression chamber 5 can inhale and exhale gas. The first one-way valve assembly 7 limits the one-way flow of the medium outlet 3, and the second one-way valve assembly 8 limits the one-way flow of the medium inlet 2, so that the medium fluid can flow in a direction. That is, the medium fluid enters the compression chamber 5 from the medium inlet 2, and is output from the medium outlet 3 after being pressurized.

[0037] The medium can be a liquid cooling medium, such as water, aqueous solution, ethylene glycol, oil, etc.

[0038] In some embodiments, the liquid pump also includes a piezoelectric component that uses the piezoelectric effect to convert electrical energy into mechanical energy. The piezoelectric component can be used to drive the periodic change of the volume of the compression chamber 5. The piezoelectric component is usually high-frequency, which can help form a continuous jet.

[0039] In some embodiments, the compression chamber 5 is connected to at least two medium outlets 3. By setting multiple medium outlets 3, multiple output fluids can be formed. The multiple medium fluids can flow to different heat dissipation areas respectively, thereby meeting the needs of multi-point heat dissipation. Compared with using multiple single-inlet single-outlet liquid pumps to form multiple output fluids, the above structure can reduce space occupation, simplify the installation structure and reduce power consumption.

[0040] Further research revealed that the structure with multiple media outlets 3 directly connected to the compression chamber 5 has problems with poor output fluid stability and poor synchronization and consistency of multiple output fluids. It is speculated that the reason may be that the piezoelectric component drives the flow of the media fluid through periodic vibration, so the pressure of the media fluid entering the constant pressure chamber 6 from the compression chamber 5 fluctuates continuously. It may also be that the first one-way valve assembly 7 disturbs the media fluid, resulting in turbulence and eddies.

[0041] To solve the above problems, combined with Figures 1 to 6 In some embodiments, the pump further includes a constant pressure chamber 6, which is connected to the compression chamber 5. The medium outlet 3 is connected to the constant pressure chamber 6 and the outside. The first check valve assembly 7 is disposed at the connection between the compression chamber 5 and the constant pressure chamber 6.

[0042] The constant pressure chamber 6 can buffer pressure fluctuations and stabilize system pressure. The constant pressure chamber 6 has a relatively large volume. After the liquid pump starts, the medium fluid will first fill the constant pressure chamber 6 and maintain a stable pressure in the constant pressure chamber 6. Under the action of this pressure, the medium fluid can be output uniformly and stably. Since the flow velocity of the medium fluid in the constant pressure chamber 6 is relatively small, the pressure at various points in the constant pressure chamber 6 is similar, so that multiple medium outlets 3 connected to the same constant pressure chamber 6 can output multiple jets with good synchronization and consistency.

[0043] In some embodiments, in order to enable the constant pressure chamber 6 to work efficiently, the volume of the constant pressure chamber 6 is set to 15 times or more of the rated flow rate per second of the liquid pump; more preferably 20 times or more.

[0044] Rated flow rate per second refers to the amount of liquid that can be delivered per second when operating under rated conditions. It can be understood that the number of constant pressure chambers 6 connected to the same compression chamber 5 can be one or more, and the number of medium outlets 3 on each constant pressure chamber 6 can also be one or more. The volume of the constant pressure chamber 6 is preferably 15 times or more the output flow rate per second of all the medium outlets 3 on it; more preferably 20 times or more.

[0045] In some embodiments, the compression chamber 5 is connected to a constant pressure chamber 6, and at least two medium outlets 3 are connected to the constant pressure chamber 6. In this structure, multiple jets with uniformity, stability and good synchronization and consistency can be obtained through the constant pressure chamber 6.

[0046] In some embodiments, the compression chamber 5 is connected to two or more constant pressure chambers 6, each constant pressure chamber 6 having one or more media outlets 3.

[0047] To improve the synchronicity and consistency of the fluid output from all media outlets 3, preferably, all constant pressure chambers 6 connected to the same compression chamber 5 have the same volume; more preferably, all constant pressure chambers 6 connected to the same compression chamber 5 are obtained from the same chamber through rigid body changes such as translation, rotation, and mirroring, that is, all constant pressure chambers 6 have the same shape and size.

[0048] Preferably, all constant pressure chambers 6 are connected to an equal number of medium outlets 3, and all medium outlets 3 have the same cross-sectional area; more preferably, all medium outlets 3 have the same shape and size; more preferably, all constant pressure chambers 6 are connected to two or more medium outlets 3.

[0049] Preferably, the cross-sectional area of ​​the connection port between each constant pressure chamber 6 and the compression chamber 5 is equal; more preferably, the shape and size of the connection port between each constant pressure chamber 6 and the compression chamber 5 are the same; more preferably, there is only one connection port between each constant pressure chamber 6 and the compression chamber 5.

[0050] Based on manufacturing errors, the volume, area, or size error of two parts within 5% can be considered equal or the same.

[0051] To increase the flow rate of the medium fluid output and obtain a jet, the cross-sectional area of ​​the medium outlet 3 can be appropriately reduced. In the example, the cross-section of the medium outlet 3 is circular with a diameter of 0.6 mm, and the diameter of the medium inlet 2 can be 0.8 mm.

[0052] In some implementations, to achieve centralized liquid intake and reduce the pressure difference of the medium fluid in the compression chamber 5, the compression chamber 5 has only one medium inlet 2.

[0053] In some embodiments, the first check valve assembly 7 and the second check valve assembly 8 are both diaphragm check valves 9. The diaphragm check valve 9 has a small thickness and volume, which can occupy less chamber space and help reduce the volume of the liquid pump.

[0054] Combination Figure 5 , Figure 5 This is an exemplary structural diagram of a diaphragm check valve 9. In some embodiments, the diaphragm check valve 9 includes a one-way diaphragm 91, a flexible connector 92, and a base 93. The flexible connector 92 connects the one-way diaphragm 91 and the base 93. Preferably, the base 93 can be a rectangular frame and can be connected to a specific surface. The one-way diaphragm 91 can be circular, petal-shaped, etc. The flexible connector 92 is a flexible structure. By connecting the one-way diaphragm 91 and the base 93 through the flexible connector 92, the one-way diaphragm 91 can move relative to the base 93, thereby allowing the one-way diaphragm 91 to move closer to or away from the specific surface. A connecting hole can be provided on the specific surface. When the one-way diaphragm 91 moves closer to the specific surface, the one-way diaphragm 91 can cover and close the connecting hole. When the one-way diaphragm 91 moves away from the specific surface, the connecting hole is in an open state. The movement of the one-way diaphragm 91 relative to the specific surface can be achieved by passive vibration and / or airflow.

[0055] Combination Figure 5In some embodiments, to further improve the connection strength between the one-way diaphragm 91 and the base frame 93, the flexible connector 92 has an arc-shaped structure, and both ends of the flexible connector 92 are connected to the base frame 93, while the middle part of the flexible connector 92 is connected to the one-way diaphragm 91. This can increase the connection strength between the flexible connector 92 and the base frame 93 while reducing the number of flexible connectors 92, and enable the flexible connector 92 to stretch the one-way diaphragm 91 in more directions, which helps to reduce the probability of deformation of the one-way diaphragm 91 and improve the structural reliability of the diaphragm one-way valve 9.

[0056] Combination Figure 5 In some embodiments, the one-way diaphragm 91 is further shaped as a petal, and the petal-shaped one-way diaphragm 91 has multiple outwardly convex arc-shaped edges, which makes the one-way diaphragm 91 have multiple outwardly convex arc-shaped portions. In this way, the circular through hole can be better covered and closed with less increase in the area of ​​the one-way diaphragm 91, thereby improving the sealing effect of the one-way diaphragm 91 on the through hole.

[0057] In some embodiments, the liquid pump includes a housing 1, a constant pressure chamber 6 disposed inside the housing 1, a medium inlet 2 and a medium outlet 3 disposed on the housing 1, and a piezoelectric component including a dynamic diaphragm assembly 4, which, together with the housing 1, forms a compression chamber 5. The dynamic diaphragm assembly 4 is capable of periodically vibrating to periodically change the volume of the compression chamber 5.

[0058] The housing 1 can be a rigid component, and a cavity can be provided inside the housing 1. One side of the cavity is open, and the power diaphragm 4 can be covered at the opening of the cavity to form a compression chamber 5. The edge of the power diaphragm 4 can be fixedly connected to the housing 1. When the power diaphragm 4 vibrates periodically, the position of its middle part relative to the opening of the cavity changes continuously, which causes the volume of the compression chamber 5 to increase and decrease periodically, thereby causing the compression chamber 5 to periodically draw in and expel fluid. In the drawing state, the liquid pump can absorb external medium fluid into the compression chamber 5, and in the expelling state, the liquid pump can squeeze the medium fluid in the compression chamber 5 outward. Furthermore, the constant pressure chamber 6 is located inside the shell 1. The constant pressure chamber 6 can be connected to the compression chamber 5 through the communication port, and the medium outlet 3 can be connected to the constant pressure chamber 6 and the outside. Under the action of the internal and external pressure difference, when the volume of the compression chamber 5 increases, the medium fluid from the outside can flow into the compression chamber 5 through the medium inlet 2. When the volume of the compression chamber 5 decreases, the medium fluid in the compression chamber 5 can enter the constant pressure chamber 6 through the communication port, and then be output through the medium outlet 3.

[0059] By setting a constant pressure chamber 6, the magnitude of pressure change during the vibration process of the dynamic membrane module 4 can be reduced, thereby reducing fatigue damage to the dynamic membrane module 4 and extending its service life.

[0060] In the example, the shape of the shell 1 can be as follows: Figure 1 The plate-like shape shown, such as Figure 7 The spherical shape shown is as follows: Figure 8 The cylindrical or similar shape shown Figure 9 The diagram shows a frustum shape. To ensure that the fluid states of the media output from the multiple media outlets 3 are similar, the multiple constant pressure chambers 6 are preferably arranged axially or centrally symmetrically, and the number of media outlets 3 corresponding to each constant pressure chamber 6 is equal. For example, for Figure 1 The plate-shaped structure shown can be configured with two constant-pressure chambers 6 symmetrically arranged along its central axis, each constant-pressure chamber 6 having two media outlets 3; for Figure 7 The spherical shape shown can be configured with six constant-pressure chambers 6 symmetrically arranged along its central axis, each constant-pressure chamber 6 having two media outlets 3; for Figure 8 The cylindrical shape shown can be configured with three constant-pressure chambers 6 symmetrically arranged along its central axis, and each constant-pressure chamber 6 has three medium outlets 3; for Figure 9 The frustum shape shown can be equipped with a constant pressure chamber 6 inside, and the constant pressure chamber 6 has seven medium outlets 3.

[0061] Combination Figure 2 In some embodiments, the housing 1 includes an intermediate partition 12 for separating the compression chamber 5 and the constant pressure chamber 6. The intermediate partition 12 is provided with a connecting through hole 13 (i.e., the communication port mentioned above). The first one-way valve assembly 7 is disposed on the side of the intermediate partition 12 near the constant pressure chamber 6. Further, the first one-way valve assembly 7 is a diaphragm one-way valve 9, specifically including a first one-way diaphragm and a first flexible connector. The first one-way diaphragm corresponds to the connecting through hole 13. The first flexible connector connects the first one-way diaphragm and the intermediate partition 12. The first one-way diaphragm can move away from or near the intermediate partition 12 to open or close the connecting through hole 13.

[0062] The first flexible connector is a flexible connection structure. Its flexibility allows the first one-way diaphragm to move closer to or further away from the intermediate partition 12, thereby switching the opening and closing state of the connecting through-hole 13. Specifically, when the volume of the compression chamber 5 increases, its internal pressure decreases. Under the influence of the internal and external pressure difference, the first one-way diaphragm moves towards the compression chamber 5. Since the first one-way diaphragm is located on the side of the intermediate partition 12 away from the compression chamber 5, its movement causes it to adhere to the intermediate partition 12 and cover the connecting through-hole 13. At this time, the connecting through-hole 13 is sealed. When the volume of the compression chamber 5 decreases, its internal pressure increases. Under the action of the internal and external pressure difference, the first one-way diaphragm will move away from the compression chamber 5. Since the first one-way diaphragm is located on the side of the intermediate partition 12 away from the compression chamber 5, the movement of the first one-way diaphragm will move it away from the intermediate partition 12. At this time, the connecting through hole 13 is unobstructed. That is to say, the process of increasing and decreasing the volume of the compression chamber 5 corresponds to the two states of the connecting through hole 13 being closed and unobstructed, respectively. The connecting through hole 13 is always in a state that only allows the medium fluid to be output from the compression chamber 5, which realizes the one-way flow of the medium fluid.

[0063] Preferably, the cross-sectional area of ​​the constant pressure chamber 6 is larger than the cross-sectional area of ​​the connecting through hole 13 and the medium outlet 3.

[0064] Combination Figure 2 In some embodiments, the inner wall of the housing 1 near the compression chamber 5 has a first surface portion 11, which is preferably a plane. The hole of the medium inlet 2 near the compression chamber 5 is located on the first surface portion 11, and the second one-way valve assembly 8 is also provided on the first surface portion 11. The second one-way valve assembly 8 is a diaphragm one-way valve 9, which specifically includes a second one-way diaphragm and a second flexible connector. The second flexible connector connects the second one-way diaphragm and the first surface portion 11. The second one-way diaphragm can move away from or near the first surface portion 11 to open or close the medium inlet 2.

[0065] The first surface portion 11 is part of the inner wall of the housing 1. The second flexible connector is a flexible connection structure. Through the flexibility of the second flexible connector, the second one-way diaphragm can move relative to the first surface portion 11, thereby switching the opening and closing state of the medium inlet 2. Specifically, when the volume of the compression chamber 5 increases, its internal pressure decreases. Under the action of the airflow around the medium inlet 2, the second one-way diaphragm will move away from the first surface portion 11, and the medium inlet 2 is unobstructed. When the volume of the compression chamber 5 decreases, its internal pressure increases. Under the action of the airflow around the medium inlet 2, the second one-way diaphragm will move towards the first surface portion 11 until it fits against the first surface portion 11 to cover the medium inlet 2, and the medium inlet 2 is closed. That is to say, the process of increasing and decreasing the volume of the compression chamber 5 corresponds to the two states of the medium inlet 2 being unobstructed and closed, respectively. The medium inlet 2 is always in a state that only allows the medium fluid to enter the compression chamber 5, that is, the one-way flow of the medium fluid is realized.

[0066] Combination Figure 1 and Figure 2 In some embodiments, to reduce the molding difficulty of the constant pressure chamber 6 and facilitate the installation of the first one-way valve assembly 7, the housing 1 includes a frame body 14 and a cover body 15. The frame body 14 has a first recess and a second recess. The power diaphragm assembly 4 covers the first recess to form a compression chamber 5, and the cover body 15 covers the second recess to form a constant pressure chamber 6. More preferably, the medium outlet 3 is disposed on the cover body 15.

[0067] Combination Figure 2 In some embodiments, to reduce the thickness of the liquid pump, the first surface portion 11 may be flush with one side surface of the intermediate partition 12, for example, the first surface portion 11 may be flush with the surface of the intermediate partition 12 near the compression chamber 5.

[0068] Combination Figure 6 In some embodiments, the housing 1 further includes a rear cover plate 16, which is disposed on the side of the power diaphragm assembly 4 away from the compression chamber 5. The edge of the rear cover plate 16 can be connected to the housing 1 to cover the power diaphragm assembly 4, thereby protecting the power diaphragm assembly 4. There is a gap between the rear cover plate 16 and the power diaphragm assembly 4 to allow the power diaphragm assembly 4 to vibrate.

[0069] Combination Figure 2 and Figure 3 In some embodiments, for convenient connection to external pipelines, the medium inlet 2 is connected to an inlet pipe 21, which protrudes from the housing 1; and / or, the medium outlet 3 is connected to an outlet pipe 31, which protrudes from the housing 1.

[0070] External pipelines can be fitted onto the inlet pipe 21 and the outlet pipe 31. The external pipeline connected to the inlet pipe 21 can be an inlet pipe, and the external pipeline connected to the outlet pipe 31 can be an outlet pipe. The inlet pipe can connect to the liquid cooling medium's storage chamber, and the outlet pipe can connect to the liquid cooling flow channel. Alternatively, the outlet pipe 31 can be directly connected to the liquid cooling flow channel. Preferably, the cross-section of the outer surface of both the inlet pipe 21 and the outlet pipe 31 is circular.

[0071] In some embodiments, to achieve periodic vibration of the dynamic diaphragm assembly 4, the dynamic diaphragm assembly 4 includes a moving diaphragm and a piezoelectric ceramic sheet. The piezoelectric ceramic sheet is a functional ceramic element that utilizes the piezoelectric effect to convert electrical energy and mechanical energy into each other. In an exemplary embodiment, the piezoelectric ceramic sheet includes a central piezoelectric ceramic material and electrode materials on both sides. The electrode material can be silver, and the piezoelectric ceramic sheet can be made by depositing silver layers on both surfaces of the sheet-like piezoelectric ceramic material. The piezoelectric ceramic sheet can be attached to the side of the moving diaphragm away from the compression chamber 5. By applying an alternating voltage to the piezoelectric ceramic sheet, it can vibrate at a specific frequency, thereby driving the attached moving diaphragm to vibrate periodically, causing the volume of the compression chamber 5 to periodically increase and decrease. The vibration frequency of the piezoelectric ceramic sheet is typically high, making the intake and expulsion of the medium fluid in the compression chamber 5 continuous, thus achieving a continuous and stable outflow.

[0072] In some embodiments, the dynamic membrane assembly 4 includes a piezoelectric ceramic sheet assembly 41, a fiber membrane 42, and a metal membrane 43 stacked sequentially. The fiber membrane 42 can be made of one or more layers of fiber material. Piezoelectric ceramic sheets are generally brittle; attaching the fiber membrane 42 to one side of the piezoelectric ceramic sheet can protect it and reduce the probability of breakage. The metal membrane 43 can be made of a metal material, such as stainless steel or a metal with a composition close to stainless steel. The metal membrane 43 can increase the rigidity of the dynamic membrane assembly 4. The piezoelectric ceramic sheet assembly 41, the fiber membrane 42, and the metal membrane 43 can be bonded together. To improve the bonding quality and better address the differences in thermal expansion coefficients between different materials, a differential pressure, stepped curing bonding process can be used.

[0073] Combination Figure 6 In some embodiments, to increase the velocity and flow rate of the output medium fluid and form a high-speed jet, the piezoelectric ceramic sheet assembly 41 includes at least two piezoelectric ceramic sheets stacked and connected in parallel. This parallel connection allows multiple piezoelectric ceramic sheets to vibrate at the same frequency, thereby increasing the overall amplitude. In an exemplary example, such as... Figure 6 As shown, the piezoelectric ceramic sheet group 41 includes two piezoelectric ceramic sheets, which can be defined as the first piezoelectric ceramic sheet 411 and the second piezoelectric ceramic sheet 412, respectively.

[0074] Combination Figure 1 , Figure 3 and Figure 6In some embodiments, the device also includes a wire 44, which includes a first wire and a second wire. The first wire and the second wire can be connected to both sides of the piezoelectric ceramic sheet and can be connected to a driving power supply for applying alternating voltage to the piezoelectric ceramic sheet.

[0075] In some embodiments, the pump includes a plate-shaped frame 14. One side of the frame 14 has a first recess, which is covered by a power diaphragm assembly 4 to form a compression chamber 5. The other side of the frame 14 has at least two second recesses, and at least two covers 15 respectively cover the second recesses to form at least two constant pressure chambers 6. All constant pressure chambers 6 are identical in shape and size and are connected to the same compression chamber 5. Each cover 15 has two or more media outlets 3, which are identical in shape and size, and the number of media outlets 3 on each cover 15 is the same. A liquid outlet pipe 31 is also provided at each media outlet 3, connecting the constant pressure chamber 6 to the outside through the media outlet 3. The liquid outlet pipe 31 at least partially protrudes from the surface of the cover 15. The frame 14 is also provided with a media inlet 2 and a... The inlet pipe 21 connects the compression chamber 5 and the outside through the medium inlet 2. Part of the inlet pipe 21 protrudes from the side of the frame body 14. The frame body 14 includes a middle partition 12, which is a flat plate. The middle partition 12 is located between the compression chamber 5 and the constant pressure chamber 6. The middle partition 12 is provided with a connecting through hole 13 for connecting the compression chamber 5 and the constant pressure chamber 6. The inner wall of the frame body 14 near the compression chamber 5 has a first surface portion 11, which can be flush with one side surface of the middle partition 12. The medium inlet 2 is located on the first surface portion 11. The second one-way valve assembly 8 is located on the first surface portion 11, and the first one-way valve assembly 7 is located on the side of the middle partition 12 near the constant pressure chamber 6. Both the second one-way valve assembly 8 and the first one-way valve assembly 7 are diaphragm one-way valves 9.

[0076] Currently, both small electromagnetic and piezoelectric hydraulic pumps on the market are single-inlet, single-outlet pumps. These pumps are almost always vertical, large in size, complex in structure, unstable in fluid delivery, have poor long-term reliability, and short lifespan. When multiple fluid streams are required, combining multiple single-inlet, single-outlet pumps presents numerous drawbacks, including large space occupation, complex installation, high power consumption, poor synchronization, limited heat dissipation space, and decreased consistency and long-term reliability. Therefore, the market application of such products is relatively limited. The piezoelectric hydraulic pump described in this embodiment can effectively solve the above problems and meet market needs.

[0077] In a second aspect, embodiments of this application provide a cooling device, including a drive power supply and a liquid pump as described above, wherein the drive power supply is used to provide an alternating voltage to the liquid pump to drive the dynamic diaphragm assembly 4 to vibrate periodically.

[0078] In some embodiments, the cooling device further includes a liquid storage chamber containing a liquid cooling medium, and a medium inlet 2 is connected to the liquid storage chamber to draw in the liquid cooling medium.

[0079] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A piezoelectric liquid pump characterized by comprising: include: Piezoelectric components; The compression chamber (5) and the constant pressure chamber (6) are connected. The piezoelectric component can drive the volume change of the compression chamber (5). A first one-way valve assembly (7) is provided at the connection between the compression chamber (5) and the constant pressure chamber (6). The first one-way valve assembly (7) limits the fluid to flow unidirectionally to the constant pressure chamber (6). The medium inlet (2) connects the compression chamber (5) to the outside. The medium inlet (2) is provided with a second one-way valve assembly (8), which limits the fluid to flow unidirectionally to the compression chamber (5). At least two media outlets (3) are connected to the constant pressure chamber (6) and the outside.

2. The piezoelectric liquid pump according to claim 1, characterized by The compression chamber (5) is connected to a constant pressure chamber (6), and at least two media outlets (3) are connected to the constant pressure chamber (6).

3. The piezoelectric liquid pump according to claim 1, wherein The compression chamber (5) is connected to at least two constant pressure chambers (6) of equal volume, and each constant pressure chamber (6) is provided with at least one medium outlet (3).

4. The piezoelectric liquid pump according to claim 3, characterized in that, All the constant pressure chambers (6) connected to the same compression chamber (5) have the same shape and size; the communication port of each constant pressure chamber (6) with the compression chamber (5) has the same shape and size; and all the media outlets (3) have the same cross-sectional area.

5. The piezoelectric hydraulic pump according to claim 1, characterized in that: The volume of the constant pressure chamber (6) is 15 times or more of the rated flow rate per second of the liquid pump; And / or, the piezoelectric component is capable of driving periodic changes in the volume of the compression chamber (5).

6. The piezoelectric liquid pump of claim 1, wherein, The first one-way valve assembly (7) and the second one-way valve assembly (8) are both diaphragm one-way valves (9). The diaphragm one-way valve (9) includes a one-way diaphragm (91), a flexible connector (92) and a base frame (93). The flexible connector (92) connects the one-way diaphragm (91) and the base frame (93).

7. The piezoelectric liquid pump according to any one of claims 1 to 6, wherein The device includes a housing (1), a constant pressure chamber (6) located inside the housing (1), a medium inlet (2) and a medium outlet (3) located on the housing (1), and a piezoelectric assembly including a dynamic membrane assembly (4). The dynamic membrane assembly (4) and the housing (1) enclose the compression chamber (5). The dynamic membrane assembly (4) is capable of periodically vibrating to periodically change the volume of the compression chamber (5).

8. The piezoelectric liquid pump according to claim 7, characterized in that, The housing (1) includes an intermediate partition (12) for separating the compression chamber (5) and the constant pressure chamber (6). The intermediate partition (12) is provided with a connecting through hole (13). The first one-way valve assembly (7) is disposed on the side of the intermediate partition (12) near the constant pressure chamber (6). The first one-way valve assembly (7) includes a first one-way diaphragm and a first flexible connector. The first flexible connector connects the first one-way diaphragm and the intermediate partition (12). The first one-way diaphragm can move away from or near the intermediate partition (12) to open or close the connecting through hole (13).

9. The piezoelectric liquid pump of claim 7, wherein, The housing (1) has a first surface portion (11) near the inner wall of the compression chamber (5), and the medium inlet (2) and the second one-way valve assembly (8) are both located on the first surface portion (11); the second one-way valve assembly (8) includes a second one-way diaphragm and a second flexible connector, the second flexible connector connecting the second one-way diaphragm and the first surface portion (11), and the second one-way diaphragm can move away from or near the first surface portion (11) to open or close the medium inlet (2).

10. The piezoelectric liquid pump of claim 7, wherein, The dynamic membrane assembly (4) includes a piezoelectric ceramic sheet assembly (41), a fiber membrane (42), and a metal membrane (43) stacked in sequence.

11. The piezoelectric liquid pump of claim 10, wherein, The piezoelectric ceramic sheet group (41) includes at least two piezoelectric ceramic sheets that are stacked and connected in parallel.

12. The piezoelectric hydraulic pump according to claim 7, characterized in that: The medium inlet (2) is connected to a liquid inlet pipe (21), which protrudes from the housing (1). And / or, the medium outlet (3) is connected to a liquid outlet pipe (31), which protrudes from the housing (1).

13. The piezoelectric hydraulic pump according to claim 7, characterized in that: The housing (1) includes a frame (14) and a cover (15). The frame (14) is provided with a first cavity and a second cavity. The power diaphragm assembly (4) covers the first cavity to form the compression chamber (5). The cover (15) covers the second cavity to form the constant pressure chamber (6). The medium outlet (3) is located on the cover (15). And / or, the compression chamber (5) has only one medium inlet (2).

14. Cooling device, characterized in that It includes a drive power supply and a piezoelectric pump as described in any one of claims 1-13, wherein the drive power supply is used to provide an alternating voltage to the piezoelectric pump.

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