Rotors, rotor assemblies and vacuum pumps

Abstract

This application provides a rotor, rotor assembly, and vacuum pump, belonging to the field of vacuum equipment technology. The rotor includes a body with multiple blade valleys along its circumference and a first end face located at one axial end. A flow channel is provided on the first end face, connecting the multiple blade valleys. By providing a flow channel connecting the multiple blade valleys on the first end face of the rotor facing the gear cavity, this application increases the channel area for process gas flow between the inlet and outlet ends. This allows high-pressure process gas that does not exit through the exhaust port to flow towards the inlet end under the guidance of pressure difference and flow channel, preventing this portion of high-pressure process gas from flowing towards the sealing device. This improves the pressure difference on both sides of the sealing device, thereby enhancing the sealing performance of the sealing device and ultimately improving the reliability and service life of the vacuum pump.

Description

Technical Field

[0001] This application relates to the field of vacuum equipment technology, and in particular to a rotor, rotor assembly and vacuum pump. Background Technology

[0002] In high-end manufacturing fields such as semiconductors, panels, and photovoltaics, dry vacuum pumps are core equipment for achieving precision processes. These industries have stringent requirements for the vacuum environment achieved by vacuum pumps. They not only need vacuum pumps to ensure sufficient vacuum levels but also require reliable operation to ensure smooth production. There are various types of vacuum pumps, such as rotary vane vacuum pumps, screw vacuum pumps, and Roots vacuum pumps.

[0003] In related technologies, a vacuum pump includes a housing defining an exhaust chamber and a gear chamber, two rotor assemblies housing the exhaust chamber, a gear set disposed in the gear chamber, and a motor driving the two rotor assemblies to rotate synchronously in opposite directions via the gear set. Each rotor assembly includes a rotating shaft rotatably disposed within the housing and rotors mounted on the shaft; the rotors of the two rotor assemblies cooperate with each other. By synchronously rotating the two rotors in opposite directions, the working volume is periodically changed, thereby achieving intake, compression, and exhaust to continuously extract gas and create a vacuum environment. One end of the rotating shaft extends from the exhaust chamber into the gear chamber for transmission connection with the gear set. When the process gas in the exhaust chamber enters the gear chamber through the connection between the exhaust chamber and the gear chamber, it reduces the reliability of the vacuum pump. For example, it causes wear on moving parts such as bearings, a decrease in the vacuum level of the vacuum pump, and a decrease in the reliability of parts such as shaft seals and bearings. Furthermore, the process gas entering the oil tank causes emulsification of the gear lubricating oil, further aggravating the wear of parts such as shaft seals and bearings. Therefore, a sealing device is needed at this connection point to seal and isolate the gas chamber and gear chamber, preventing the process gas in the gas chamber from entering the gear chamber. However, this sealing device has poor sealing performance and is prone to failure, resulting in poor reliability of the vacuum pump. Utility Model Content

[0004] This application provides a rotor, rotor assembly, and vacuum pump to at least solve the above-mentioned technical problems.

[0005] To achieve the above objectives, according to a first aspect of this application, a rotor is provided, the rotor including a body having a plurality of blade valleys, the body also having a first end face located at one end in the axial direction, and a flow channel provided on the first end face, the flow channel communicating with the plurality of blade valleys.

[0006] Optionally, the flow channel includes a first flow channel and a second flow channel. There are multiple first flow channels, one end of each of the multiple first flow channels is connected to a leaf valley, and the second flow channel is connected to the other end of the multiple first flow channels.

[0007] Optionally, the number of first channels is the same as the number of leaf valleys, and multiple first channels correspond one-to-one with multiple leaf valleys, with one end of each first channel connected to the corresponding leaf valley.

[0008] Optionally, the second flow channel extends in an annular shape around the rotor's axis.

[0009] Optionally, the first flow channel extends radially along the rotor.

[0010] Optionally, the part of the blade valley closest to the rotor's axis is the blade bottom, and the flow channel is connected to the part of the blade valley near the blade bottom.

[0011] Optionally, a Tesla valve structure is also provided on the first end face, and the Tesla valve structure is connected to the flow channel.

[0012] Optionally, the Tesla valve structure is located at the point where the flow channel connects two adjacent leaf valleys.

[0013] Optionally, the first end face is configured to be located on the side of the body facing the gear cavity.

[0014] Optionally, flow channels are provided on the end faces of the rotor at both ends of the axial direction.

[0015] According to a second aspect of this application, a rotor assembly is provided, the rotor assembly including a rotating shaft and a plurality of drive rotors; the plurality of drive rotors are all sleeved on the rotating shaft; wherein, among the plurality of drive rotors, one drive rotor configured to be disposed near the gear cavity is the aforementioned rotor.

[0016] According to a third aspect of this application, a vacuum pump is provided, comprising a housing, a motor, a gear set, a sealing device, and the aforementioned rotor assembly; the housing has an air chamber and a gear chamber, the air chamber comprising a plurality of sequentially arranged sub-cavities; the motor is disposed on one side of the housing; the gear set is disposed in the gear chamber and is drively connected to the output shaft of the motor; the rotor assembly is disposed in the air chamber, a plurality of drive rotors are respectively disposed in a sub-cavity, the end of the rotating shaft is rotatably engaged with the housing, and one end of the rotating shaft is inserted into the gear chamber and drively connected to the gear set; the sealing device is annularly disposed between the end of the rotating shaft and the housing; wherein, the rotor having a flow channel is disposed close to the gear chamber.

[0017] In the rotor of this application embodiment, by providing a flow channel connecting multiple blade valleys on the first end face of the rotor facing the gear cavity, the channel area for process gas flow between the inlet end and the outlet end can be increased. This allows the high-pressure process gas that is not discharged through the outlet to flow towards the inlet end under the guidance of the pressure difference and the flow channel, so as to prevent this part of the high-pressure process gas from flowing towards the sealing device, thereby improving the pressure difference on both sides of the sealing device, thereby improving the sealing performance of the sealing device, and thus improving the reliability and service life of the vacuum pump.

[0018] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0021] Figure 1 This is a schematic diagram of the internal structure of the vacuum pump in the related technology provided in this application;

[0022] Figure 2 This is a schematic diagram of the rotor provided in an exemplary embodiment of this application;

[0023] Figure 3 This is a side view of the rotor provided in an exemplary embodiment of this application;

[0024] Figure 4 This is a schematic diagram of the internal structure of a rotor applied to a vacuum pump according to an exemplary embodiment of this application;

[0025] Figure 5 This is a schematic diagram of the rotor assembly provided in an exemplary embodiment of this application;

[0026] Figure 6 This is a schematic diagram of the structure of the vacuum pump provided in an exemplary embodiment of this application.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1000-Vacuum Pump;

[0029] 100 - Rotor assembly;

[0030] 10-Rotor;

[0031] 11-Body; 111-First end face; 112-Leaf valley; 113-Leaf blade; 114-Leaf tip; 115-Leaf base;

[0032] 12-Flow channel; 121-First flow channel; 122-Second flow channel;

[0033] 13-Process gases;

[0034] 141 - Intake end; 142 - Exhaust end;

[0035] 15 - Exhaust port; 151 - First port; 152 - Second port; 153 - Third port; 154 - Fourth port;

[0036] 16-Tesla valve structure;

[0037] 21-Shaft; 22-Drive rotor;

[0038] 30 - Outer shell; 31 - Air cavity; 311 - Sub-cavity; 32 - Gear cavity; 33 - Gearbox;

[0039] 34-Pump housing assembly; 341-First perforation; 342-Second perforation; 343-Pump body; 344-First end plate; 345-Second end plate; 346-Stator;

[0040] 35-Cover plate; 351-First cavity;

[0041] 36 - Sealing device; 37 - Exhaust pipe;

[0042] 40 - Motor;

[0043] 50-Gear set. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0045] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0046] The terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a product that comprises a list of elements includes not only those elements but also other elements not expressly listed or inherent to such a product.

[0047] In the description of the embodiments of this application, the words "example" or "for example" are used to indicate exemplification, illustration, or description. Any embodiment or design described as "example" or "for example" in the embodiments of this application is not to be construed as being more preferred or having more advantages than another embodiment or design. The use of the words "example" or "for example" is intended to present relative concepts in a clear manner.

[0048] Before introducing a rotor, rotor assembly and vacuum pump provided in the embodiments of this application, the relevant technologies of this application will be introduced first.

[0049] In related technologies, vacuum pumps are used to extract, transport, or process process gases. Process gases refer to gases that need to be pumped by a vacuum pump during specific processes (i.e., "processes") in industrial production or scientific experiments; their composition and properties vary depending on the specific application. To prevent process gases from entering the gear cavity from the vacuum pump's gas chamber, a shaft seal is primarily used as a sealing device to seal the connection between the gas chamber and the gear cavity. During the start-up, shutdown, and operation of the vacuum pump, the pressure within the gas chamber changes. Specifically, in the vacuum pump's gas chamber, the pressure at the inlet is low, the pressure at the outlet is high, and the pressure in the gear cavity is relatively lower and more stable than the pressure at the outlet. The gear cavity is located close to the outlet, creating a significant pressure difference between the two sides of the shaft seal located between the gas chamber and the gear cavity (the side closer to the gas chamber and the side closer to the gear cavity). Prolonged exposure to this large pressure difference can damage the shaft seal, leading to seal failure. Furthermore, the high pressure at the outlet of the gas chamber can cause process gases to flow into the lower-pressure gear cavity. When the process gas flows through the shaft seal, it accumulates on the seal lip and damages it, causing the seal lip to wear and fail. This can lead to the process gas from the gas chamber entering the gear chamber, reducing the reliability of the vacuum pump.

[0050] Specifically, such as Figure 1 The above, Figure 1 This is a schematic diagram of the internal structure of a vacuum pump according to the related technology provided in this application. It can be understood that the gas chamber has an inlet and an outlet. From the inlet to the outlet, the gas chamber contains multiple sequentially arranged sub-cavities. The sub-cavity closest to the inlet is the first-stage cavity, and the sub-cavity closest to the outlet is the final-stage cavity. Figure 1The diagram shows the final stage chamber. The top of the final stage chamber is its inlet. The process gas is compressed by a pair of synchronously rotating, counter-rotating rotors from the previous stage chamber and fed into the final stage chamber through this inlet. After entering the final stage chamber, the process gas is compressed by the synchronously rotating, counter-rotating rotors to the exhaust end at the bottom of the final stage chamber and discharged from the exhaust port. In the final stage chamber, the pressure at the inlet is lower than the pressure at the exhaust end, resulting in a large pressure difference between the exhaust end and the gear cavity. Process gas that does not exit through the exhaust port will flow towards the sealing device due to this pressure difference, causing uneven pressure distribution on both sides of the sealing device located between the gas cavity and the gear cavity. This reduces the lifespan of the sealing device and decreases its sealing performance.

[0051] Based on this, embodiments of this application provide a rotor, a rotor assembly, and a vacuum pump, which improve the stress state of the sealing device by improving the pressure difference on both sides of the sealing device, thereby improving the reliability of the sealing device and consequently improving the reliability of the vacuum pump.

[0052] The following combination Figures 2 to 6 The present application provides a detailed description of a rotor 10, a rotor assembly 100, and a vacuum pump 1000 provided in the embodiments of this application.

[0053] Please see Figure 2 and Figure 3 In a first aspect, embodiments of this application provide a rotor 10. The rotor 10 includes a body 11. The body 11 has a plurality of blade valleys 112, and the body 11 also has a first end face 111 located at one axial end. A flow channel 12 is provided on the first end face 111. The flow channel 12 communicates with the plurality of blade valleys 112.

[0054] It is understood that the rotor 10 can be a two-lobe rotor 10, a three-lobe rotor 10, a four-lobe rotor 10, a five-lobe rotor 10, etc. The embodiments of this application are mainly illustrated by the five-lobe rotor 10.

[0055] It can be understood that the rotor 10 has multiple blades 113. The part of each blade 113 furthest from the axis of the rotor 10 is the blade tip 114, and the part of each blade 113 closest to the axis is the blade base 115. The recessed area defined between two adjacent blades 113 is the blade valley 112. The blade valley 112 is a space for storing gas and cooperating with the blades 113 of another rotor 10 to compress the gas. That is, the blade valley 112 participates in the gas intake, sealing and discharge process of the vacuum pump 1000.

[0056] When the rotor 10 provided in this embodiment is applied to a vacuum pump 1000 (which may be a Roots vacuum pump), the rotors 10 near the gear cavity 32 on both rotor assemblies 100 of the vacuum pump 1000 can both be provided with the rotor 10 provided in this embodiment. The rotation directions of the two rotor assemblies 100 are opposite, and the blade bottom 115 on the rotor 10 of one rotor assembly 100 cooperates with the blade tip 114 on the rotor 10 of the other rotor assembly 10, such as... Figure 4 As shown, with the two rotor assemblies 100 rotating synchronously and in opposite directions, the rotor assembly 100 drives the gas at the upper inlet end 141 downwards and compresses it near the exhaust end 142. This results in a higher gas pressure near the exhaust end 142 within the gas chamber 31, while the pressure at the inlet end 141 is lower. Under the action of the flow channel 12, the flow channel 12 connects with the blade valley 112 near the exhaust end 142 and with the blade valley 112 away from the exhaust end 142. This allows the high-pressure gas 13 that has not been discharged through the exhaust port 15 to flow towards the lower-pressure blade valley 112 away from the exhaust end 142 under the pressure difference and the guiding effect of the flow channel 12, thus preventing this portion of the high-pressure gas 13 from flowing towards the sealing device 36.

[0057] like Figure 4 As shown, the port 151 connecting the flow channel 12 on the left rotor 10 to the exhaust end 142 is the first port, and the port 152 connecting to the intake end 141 is the second port. The port 153 connecting the right rotor 10 to the exhaust end 142 is the third port, and the port above the third port 153 is the fourth port 154. When there is high-pressure gas 13 at the exhaust end 142 that has not been discharged through the exhaust port 15, a portion of this high-pressure gas can flow from the first port 151 into the flow channel 12 of the left rotor 10, and under the guidance of the pressure difference and the flow channel 12, it flows towards the second port 152 and other parts of the flow channel 12 away from the exhaust end 142; at the same time, another portion of this high-pressure gas can flow from the third port 153 into the flow channel 12 of the right rotor 10, and under the guidance of the pressure difference and the flow channel 12, it flows towards the fourth port 154 and other parts of the flow channel 12 away from the exhaust end 142.

[0058] In this embodiment, by providing a flow channel 12 connecting multiple blade valleys 112 on the first end face 111 of the rotor 10 facing the gear cavity 32, the channel area for the flow of process gas 13 between the inlet end 141 and the outlet end 142 can be increased. This allows the high-pressure process gas 13 that is not discharged through the outlet 15 to flow towards the inlet end 141 under the guidance of the pressure difference and the flow channel 12, so as to prevent this part of the high-pressure process gas 13 from flowing towards the sealing device 36, thereby improving the pressure difference on both sides of the sealing device 36, thereby improving the sealing performance of the sealing device 36, and thus improving the reliability and service life of the vacuum pump 1000.

[0059] The first end face 111 is the end face of the rotor 10 perpendicular to the circumferential direction of rotation of the rotor 10. Since the main function of the flow channel 12 is to connect the inlet end 141 and the exhaust end 142, thereby increasing the channel surface between the inlet end 141 and the exhaust end 142 for the process gas 13 to flow, the high-pressure process gas 13 that is not discharged through the exhaust port 15 is smoothly introduced into the inlet end 141. Therefore, the first end face 111 can be the end face of the rotor 10 facing the gear cavity 32, or it can be the end face away from the gear cavity 32.

[0060] Please see Figure 2 and Figure 3 In some embodiments, the flow channel 12 includes a first flow channel 121 and a second flow channel 122. There are multiple first flow channels 121, and one end of each of the multiple first flow channels 121 is connected to a leaf valley 112. The second flow channel 122 connects to the other end of the multiple first flow channels 121. In this way, the leaf valleys 112 can be connected, and the flow channel 12 has a simple structure and is easy to form.

[0061] Please see Figure 2 and Figure 3 In some embodiments, the number of first flow channels 121 is the same as the number of leaf valleys 112. Each of the multiple first flow channels 121 corresponds one-to-one with a single leaf valley 112. One end of each first flow channel 121 is connected to its corresponding leaf valley 112. This improves the efficiency of the flow channels 12 in guiding the high-pressure gas 13 to the exhaust end 142, effectively preventing the high-pressure gas 13 from flowing towards the sealing device 36, thereby improving the pressure difference across the sealing device 36.

[0062] Please see Figure 2 and Figure 3 In some embodiments, the second flow channel 122 extends in an annular shape around the axis of the rotor 10. This improves the structural symmetry of the rotor 10, which helps to improve the stress state of the rotor 10, thereby improving the rotational balance of the rotor 10 and enhancing the reliability of the vacuum pump 1000.

[0063] Please see Figure 2 and Figure 3 In some embodiments, the first flow channel 121 extends radially along the rotor 10. This improves the structural symmetry of the rotor 10, thereby improving the stress state of the rotor 10 and enhancing the rotational balance of the rotor 10, thus improving the reliability of the vacuum pump 1000.

[0064] Please see Figure 2 and Figure 3In some embodiments, the part of the blade valley 112 closest to the axis of the rotor 10 is the blade bottom 115, and the flow channel 12 is connected to the part of the blade valley 112 near the blade bottom 115. In this way, the smoothness of the flow of the process gas 13 between the blade valley 112 and the flow channel 12 can be improved, and the structural symmetry of the rotor 10 can be improved, so as to improve the stress state of the rotor 10, thereby improving the rotational balance of the rotor 10 and improving the reliability of the vacuum pump 1000.

[0065] Please see Figure 2 and Figure 3 In some embodiments, a Tesla valve structure 16 is also provided on the first end face 111, and the Tesla valve structure 16 is connected to the flow channel 12. In this way, the backflow of the process gas 13 in the flow channel 12 can be avoided, thereby improving the efficiency of the flow channel 12 in guiding the high-pressure process gas 13 at the exhaust end 142, and quickly guiding the high-pressure process gas 13 at the exhaust end 142 to the inlet end 141, so as to effectively prevent the high-pressure process gas 13 from flowing to the sealing device 36, thereby improving the pressure difference on both sides of the sealing device 36, preventing damage to the sealing device 36, and extending the service life of the sealing device 36 and the vacuum pump 1000.

[0066] It is understandable that the Tesla valve guides the process gas 13 flowing in from the exhaust end 142 and obstructs the gas flowing in the opposite direction from the flow channel 12 into the exhaust end 142.

[0067] It is understandable that if the rotor 10 rotates counterclockwise, then the forward intake port 141 and the forward exhaust port 142 of the Tesla valve structure 16 are also arranged in a counterclockwise direction, such as... Figure 4 As shown. Correspondingly, if the rotor 10 rotates clockwise, the forward intake port 141 and the forward exhaust port 142 of the Tesla valve structure 16 are also arranged in a clockwise direction, as shown. Figure 4 As shown.

[0068] Please see Figure 2 and Figure 3 In some embodiments, the Tesla valve structure 16 is disposed at the location where the flow channel 12 connects two adjacent leaf valleys 112. This effectively prevents the backflow of process gas 13 in the flow channel 12, thereby improving the smoothness of the flow channel 12 in guiding the process gas 13 and reducing the impact of the rotor 10 rotation on the flow channel 12.

[0069] Please see Figure 2 and Figure 3In some embodiments, the flow channel 12 includes a first flow channel 121 and a second flow channel 122. There are multiple first flow channels 121, and one end of each of the multiple first flow channels 121 is connected to a leaf valley 112. The second flow channel 122 connects to the other end of the multiple first flow channels 121. A Tesla valve structure 16 is provided at the location where the second flow channel 122 connects to two adjacent first flow channels 121.

[0070] Specifically, multiple Tesla valve structures 16 can be provided in the part where the second flow channel 122 connects to the two adjacent first flow channels 121. The multiple Tesla valve structures 16 are divided into two groups, which are located on both sides of the second flow channel 122 and are staggered along the extension direction of the second flow channel 122.

[0071] In some embodiments, the first end face 111 is configured to be located on the side of the body 11 facing the gear cavity 32. This allows the flow channel 12 to be positioned closer to the gear cavity 32, facilitating the flow channel 12 to more quickly introduce the high-pressure range gas 13 near the gear cavity 32 to the inlet end 141, thereby quickly balancing the pressure difference on both sides of the sealing device 36, improving the stress state of the sealing device 36, and enhancing sealing reliability.

[0072] In some embodiments, flow channels 12 are provided on the end faces of the rotor 10 at both axial ends. This increases the channel area for the flow of process gas 13 between the inlet end 141 and the outlet end 142, allowing the flow channels 12 to more quickly introduce high-pressure process gas 13 into the inlet end 141. This rapidly balances the pressure difference on both sides of the sealing device 36, improving the stress state of the sealing device 36 and enhancing sealing reliability.

[0073] Please see Figure 5 Secondly, embodiments of this application provide a rotor assembly 100. The rotor assembly 100 includes a shaft 21 and a plurality of drive rotors 22. The plurality of drive rotors 22 are all sleeved on the shaft 21. One of the drive rotors 22 configured close to the gear cavity 32 is the aforementioned rotor 10.

[0074] The rotor 10 can be welded to the shaft 21, or the rotor 10 and the shaft 21 can be integrated into one piece.

[0075] It is understood that the rotor assembly 100 includes the rotor 10 described above. The rotor assembly 100 has all the beneficial effects of the rotor 10 described above, which will not be repeated here.

[0076] Please see Figure 6According to a third aspect of this application, a vacuum pump 1000 is provided. The vacuum pump 1000 includes a housing 30, a motor 40, a gear set 50, a sealing device 36, and the aforementioned rotor assembly 100. The housing 30 has an air chamber 31 and a gear chamber 32. The air chamber 31 includes a plurality of sequentially arranged sub-chambers 311. The motor 40 is disposed on one side of the housing 30. The gear set 50 is disposed in the gear chamber 32 and is drive-connected to the output shaft of the motor 40. The rotor assembly 100 is disposed in the air chamber 31. A plurality of drive rotors 22 are respectively disposed in a sub-chamber 311. The end of a rotating shaft 21 is rotatably engaged with the housing 30, and one end of the rotating shaft 21 is inserted into the gear chamber 32 and drive-connected to the gear set 50. The sealing device 36 is annularly disposed between the end of the rotating shaft 21 and the housing 30. The rotor 10, which has a flow channel 12, is disposed close to the gear chamber 32.

[0077] Specifically, the first end face 111 is positioned facing the gear cavity 32.

[0078] It is understood that the housing 30 is provided with an air inlet (not shown in the figure) and an exhaust port 15, and the exhaust port 15 is connected to other components through the exhaust pipe 37.

[0079] For example, the vacuum pump 1000 is a Roots vacuum pump.

[0080] It can be understood that, when a Roots vacuum pump is used, the vacuum pump 1000 includes two rotor assemblies 100, and the gear set 50 includes two meshing gears. The two gears are respectively mounted on the shaft 21 of one rotor assembly 100. A motor 40 drives one gear to rotate, thereby driving the rotor assembly 100 connected to that gear to rotate, and drives the other rotor assembly 100 to rotate via the other gear meshing with that gear.

[0081] It is understood that the vacuum pump 1000 includes the rotor 10 described above. The vacuum pump 1000 has all the beneficial effects of the rotor 10 described above, which will not be repeated here.

[0082] Please see Figure 6 In some embodiments, the housing 30 includes a gearbox 33 and a pump housing assembly 34. The gearbox 33 is connected to one end of the pump housing assembly 34 to define a gear cavity 32. The pump housing assembly 34 is provided with an air chamber 31, a first through hole 341, and a second through hole 342. Both ends of the rotating shaft 21 are rotatably engaged with the walls of the first through hole 341 and the second through hole 342, respectively. A sealing device 36 is annularly disposed between the rotating shaft 21 and the wall of the first through hole 341. Another sealing device 36 is annularly disposed between the rotating shaft 21 and the wall of the second through hole 342. This design simplifies the structure of the housing 30 and facilitates assembly, thereby improving the assembly efficiency and maintainability of the vacuum pump 1000.

[0083] It is understood that one end of the rotating shaft 21 is rotatably engaged with the wall of the first through hole 341 through a bearing, and the other end of the rotating shaft 21 is rotatably engaged with the wall of the second through hole 342 through a bearing.

[0084] Please see Figure 6 In some embodiments, the housing 30 further includes a cover plate 35, which is connected to one end of the pump housing assembly 34 to define a first cavity 351. This protects the end of the shaft 21 away from the motor 40, effectively preventing dust and other impurities from entering the vacuum pump 1000.

[0085] Please see Figure 6 In some embodiments, the pump housing assembly 34 includes a pump body 343, a first end plate 344, and a second end plate 345. The pump body 343 is annular. Both ends of the pump body 343 are connected to the first end plate 344 and the second end plate 345, respectively, to define an outlet chamber 31. A first through hole 341 and a second through hole 342 are respectively provided on the first end plate 344 and the second end plate 345. The pump body 343 has multiple stators 346 inside, which divide the outlet chamber 31 into multiple sub-chambers 311. A gearbox 33 is connected to the second end plate 345 to define a gear cavity 32. This design simplifies the structure of the pump housing assembly 34 and facilitates assembly, thereby improving the assembly efficiency and maintainability of the vacuum pump 1000.

[0086] The stator 346 is integrally formed with the pump body 343. Specifically, the pump body 343 includes two opposing semi-annular bodies. Each stator 346 includes two semi-annular plates, and the two semi-annular plates of each stator 346 are respectively connected to the two semi-annular bodies integrally.

[0087] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0088] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0089] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0090] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A rotor (10), characterized in that, Includes a body (11) having a plurality of leaf valleys (112) along the circumferential direction, and the body (11) also having a first end face (111) located at one end in the axial direction, and a flow channel (12) is provided on the first end face (111), the flow channel (12) connecting the plurality of leaf valleys (112).

2. The rotor (10) according to claim 1, characterized in that, The flow channel (12) includes a first flow channel (121) and a second flow channel (122). There are multiple first flow channels (121), one end of each of the multiple first flow channels (121) is connected to a leaf valley (112), and the second flow channel (122) is connected to the other end of the multiple first flow channels (121).

3. The rotor (10) according to claim 2, characterized in that, The number of the first flow channels (121) is the same as the number of the leaf valleys (112), and the multiple first flow channels (121) correspond one-to-one with the multiple leaf valleys (112). One end of the first flow channel (121) is connected to the corresponding leaf valley (112).

4. The rotor (10) according to claim 2, characterized in that, The second flow channel (122) extends in an annular shape around the axis of the rotor (10).

5. The rotor (10) according to claim 2, characterized in that, The first flow channel (121) extends radially along the rotor (10).

6. The rotor (10) according to any one of claims 1-5, characterized in that, The part of the blade valley (112) closest to the axis of the rotor (10) is the blade bottom (115), and the flow channel (12) is connected to the part of the blade valley (112) near the blade bottom (115).

7. The rotor (10) according to any one of claims 1-5, characterized in that, A Tesla valve structure (16) is also provided on the first end face (111), and the Tesla valve structure (16) is connected to the flow channel (12).

8. The rotor (10) according to claim 7, characterized in that, The Tesla valve structure (16) is located at the part of the flow channel (12) that connects two adjacent leaf valleys (112).

9. The rotor (10) according to any one of claims 1-5, characterized in that, The first end face (111) is configured to be located on the side of the body (11) facing the gear cavity (32).

10. The rotor (10) according to any one of claims 1-5, characterized in that, The flow channels (12) are provided on the end faces of the rotor (10) at both ends of the axial direction.

11. A rotor assembly (100), characterized in that, include: Shaft (21); as well as Multiple drive rotors (22) are sleeved on the rotating shaft (21); Among the plurality of drive rotors (22), one of the drive rotors (22) configured to be located near the gear cavity (32) is the rotor (10) as described in any one of claims 1-10.

12. A vacuum pump (1000), characterized in that, include: The outer casing (30) has an air cavity (31) and a gear cavity (32), wherein the air cavity (31) includes a plurality of sub-cavities (311) arranged in sequence; A motor (40) is disposed on one side of the housing (30); A gear set (50) is disposed in the gear cavity (32) and is connected to the output shaft of the motor (40) for transmission. The rotor assembly (100) as claimed in claim 11 is disposed in the air chamber (31), the plurality of drive rotors (22) are respectively disposed in one of the sub-cavities (311), the end of the rotating shaft (21) is rotatably engaged with the outer casing (30), and one end of the rotating shaft (21) is inserted into the gear cavity (32) and is drively connected to the gear set (50); and A sealing device (36) is arranged in a ring between the end of the rotating shaft (21) and the outer casing (30); in, The rotor (10) with the flow channel (12) is positioned close to the gear cavity (32).

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