A structure for preventing partition displacement of a vacuum pump and a vacuum pump

Abstract

This utility model relates to the field of vacuum pump equipment technology, and discloses a vacuum pump anti-partitioning structure and a vacuum pump, including: a vacuum chamber, a partition, and a stepped surface. The partition is disposed within the vacuum chamber, and the stepped surface is disposed on the inner wall surface of the vacuum chamber. The side of the partition abuts against the stepped surface, and the stepped surface is used to limit the movement of the partition. This utility model, by having the stepped surface abut against the side of the partition, can effectively limit the movement of the partition within the vacuum chamber, preventing the partition from deviating from its designed position due to external forces such as vibration and airflow impact. This ensures the stability and reliability of the vacuum pump, helps maintain the accuracy of the gas flow channel structure inside the vacuum pump, and guarantees the normal operating performance of the vacuum pump.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pump equipment technology, and in particular to a vacuum pump anti-partitioning structure and a vacuum pump. Background Technology

[0002] A vacuum pump is a device used to extract gas from a specific space, creating a vacuum. It is widely used in various industries such as chemical, electronics, and pharmaceuticals. In the structure of a vacuum pump, the baffle plays a crucial role in separating the pump chamber, guiding airflow, and preventing leakage. The stability of its position directly affects the working efficiency and service life of the vacuum pump.

[0003] Currently, during long-term operation of vacuum pumps, the baffle is prone to displacement, which increases the gap in the low vacuum chamber, causes poor oil sealing, and reduces the pumping efficiency and vacuum level of the vacuum pump. At the same time, the gap in the high vacuum chamber decreases, and the high rotor rubs against the intermediate baffle or the front cover, damaging the surface of the parts and even causing jamming. In severe cases, it can also cause the baffle to collide with other components in the pump body, damaging the equipment. Utility Model Content

[0004] This application discloses a partition displacement prevention structure for a vacuum pump and a vacuum pump, in order to solve the problem in the prior art that the partition is prone to displacement, resulting in increased gaps, poor sealing, and reduced pumping efficiency and vacuum level of the vacuum pump.

[0005] To solve the above problems, the present invention adopts the following technical solution: A partition plate displacement prevention structure for a vacuum pump, comprising: Vacuum cavity; A partition is installed inside the vacuum chamber; The stepped surface is located on the inner wall of the vacuum chamber. The side of the partition plate abuts against the stepped surface, and the stepped surface is used to limit the movement of the partition plate.

[0006] Furthermore, the partition divides the vacuum chamber into a first chamber and a second chamber, with the stepped surface located at the separation point between the first and second chambers, and the partition disposed in the second chamber.

[0007] Furthermore, a first T-shaped hole is provided in the middle of the partition, and a bearing is provided in the end of the first T-shaped hole.

[0008] A vacuum pump includes the aforementioned anti-displacement structure for the vacuum pump. The vacuum pump also includes a pump casing located outside the vacuum chamber, with a front cover plate and a rear cover plate connected to its two ends respectively.

[0009] Furthermore, a front coupling is provided through the middle of the front cover plate. One end of the front coupling is located in the first chamber of the vacuum chamber and is connected to the first rotor. The other end of the front coupling is located outside the front cover plate and is connected to the pulley.

[0010] Furthermore, a rear coupling is provided through the middle of the partition plate. One end of the rear coupling is located in the first chamber of the vacuum chamber and is connected to the first rotor, while the other end of the rear coupling is located in the second chamber of the vacuum chamber and is connected to the second rotor.

[0011] Furthermore, one side of the pump casing is provided with an air intake port communicating with the first chamber of the vacuum chamber, and one side of the pump casing is provided with an exhaust port communicating with the second chamber of the vacuum chamber.

[0012] Furthermore, a heat dissipation cavity is provided between the pump casing and the vacuum chamber, and heat dissipation fins are installed inside the heat dissipation cavity. Heat dissipation holes communicating with the heat dissipation cavity are provided on the pump casing.

[0013] Furthermore, a second T-shaped hole is provided in the middle of the front cover plate, a bearing sleeved on the outside of the front coupling is provided in the end of the second T-shaped hole, and an oil seal sleeved on the outside of the front coupling is provided in the small diameter end of the second T-shaped hole.

[0014] Furthermore, a first annular boss is provided on the front coupling, and a space for placing a bearing is formed between the first annular boss and the end of the second T-shaped hole.

[0015] The technical solution adopted in this utility model can achieve the following beneficial effects: This invention provides a clear installation position reference for the partition through the stepped surface, ensuring the installation accuracy of the partition in the vacuum chamber. Moreover, the stepped surface abuts against the side of the partition, effectively restricting the movement of the partition in the vacuum chamber and preventing the partition from deviating from its designed position due to external forces such as vibration and airflow impact. This ensures the stability and reliability of the vacuum pump, helps maintain the accuracy of the gas flow channel structure inside the vacuum pump, ensures the normal operation performance of the vacuum pump, and better guarantees the sealing performance between the partition and the vacuum chamber, reducing the possibility of gas leakage and ensuring the pumping efficiency and vacuum level of the vacuum pump. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a top view schematic diagram of the vacuum pump disclosed in some embodiments of this application; Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure of AA; Figure 3 yes Figure 2 Enlarged structural diagram at point A; Figure 4 yes Figure 2 A magnified structural diagram at point B in the middle.

[0018] In the picture: 100 - Vacuum chamber; 110 - First chamber; 120 - Second chamber; 200 - partition; 210 - first T-shaped hole; 300-step surface; 400 - Pump housing; 410 - Front cover plate; 411 - Second T-shaped hole; 412 - Oil seal; 420 - Rear cover plate; 500 - Front coupling; 510 - First rotor; 520 - Pulley; 530 - First annular boss; 600 - Rear coupling; 610 - Second rotor; 620 - Second annular boss; 700 - Intake port; 800 - Exhaust port; 900 - Heat dissipation cavity; 910 - Heat sink; 920 - Heat dissipation hole; 10 - Bearing; 20 - Seal ring. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] The terms "first," "second," "third," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," "third," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0021] The inventive concept of this application is described here: Most vacuum pump baffles on the market are installed on the pump body using simple bolt fixing or snap-fit ​​methods. However, during long-term operation of a vacuum pump, continuous vibration occurs, and the temperature inside the pump chamber also changes, making the connection between the baffle and the pump body prone to loosening. In the bolt fixing method, the bolts may gradually loosen due to vibration, causing the baffle to lose its effective fixation. In the snap-fit ​​method, long-term wear or temperature changes may cause deformation at the snap-fit ​​point, leading to the displacement of the baffle. After the baffle is displaced, it will damage the normal structure of the pump chamber, causing the low vacuum chamber gap to increase, the oil seal to become unreliable, and the pumping efficiency and vacuum level to decrease. At the same time, the high vacuum chamber gap will decrease, causing the high rotor to rub against the intermediate baffle or the front cover, damaging the surface of the parts, and even causing jamming. In severe cases, it may also cause the baffle to collide with other components inside the pump body, damaging the equipment, increasing maintenance costs, and affecting production progress.

[0022] Based on this, the inventor provides a vacuum pump anti-partitioning structure and a vacuum pump to prevent the partition from moving, thereby ensuring the stability and reliability of the vacuum pump. This prevents the partition from deviating from its designed position due to external forces such as vibration and airflow impact, which could cause the partition to collide with other components in the pump body and damage the equipment. It also helps maintain the accuracy of the gas flow channel structure inside the vacuum pump and ensures the normal operation performance of the vacuum pump.

[0023] The following is in conjunction with the appendix Figures 1 to 4 The present application provides a detailed description of a vacuum pump anti-displacement structure and a vacuum pump through specific embodiments and application scenarios.

[0024] Reference Figure 2 and Figure 3 A structure for preventing partition displacement of a vacuum pump includes: a vacuum chamber 100, a partition 200, and a stepped surface 300. The partition 200 is disposed inside the vacuum chamber 100; The stepped surface 300 is disposed on the inner wall surface of the vacuum chamber 100, and the side of the partition 200 abuts against the stepped surface 300. The stepped surface 300 is used to limit the partition 200.

[0025] Specifically, the partition 200 is slidably disposed within the vacuum chamber 100. However, because the stepped surface 300 abuts against the side of the partition 200, it limits the partition 200 to prevent movement. In this embodiment, the stepped surface 300 is a surface perpendicular to the inner wall of the vacuum chamber 100. The stepped surface 300 provides a clear installation position reference for the partition 200, ensuring the accuracy of the partition 200's installation position within the vacuum chamber 100. This helps maintain the accuracy of the gas flow channel structure inside the vacuum pump, ensuring the normal operating performance of the vacuum pump. The precise positioning of the partition 200 allows the gas to flow along the designed path, improving pumping efficiency and vacuum level. During vacuum pump operation, vibrations and airflow impacts are generated, which may cause the partition 200 to shift. The stepped surface 300... The step surface 300 abuts against the side of the partition 200, effectively limiting the movement of the partition 200 within the vacuum chamber 100 and preventing it from deviating from its designed position due to external forces, thus ensuring the stability and reliability of the vacuum pump. If the partition 200 shifts within the vacuum chamber 100, it may rub and collide with other components, leading to wear and reducing the service life of the vacuum pump. By limiting the partition 200 with the step surface 300, unnecessary contact between the partition 200 and other components can be avoided, reducing wear and extending the overall service life of the vacuum pump, thus reducing maintenance costs. Furthermore, when the partition 200 abuts against the step surface 300, the sealing performance between the partition 200 and the vacuum chamber 100 can be better guaranteed, reducing the possibility of gas leakage.

[0026] Reference Figure 2 and Figure 3 In this embodiment, the partition 200 divides the vacuum chamber 100 into a first chamber 110 and a second chamber 120, the step surface 300 is located at the separation between the first chamber 110 and the second chamber 120, and the partition 200 is disposed in the second chamber 120.

[0027] Specifically, the first chamber 110 is a low-vacuum chamber, and the second chamber 120 is a high-vacuum chamber. The partition 200 is disposed in the second chamber 120, allowing it to directly withstand higher pressure. The reverse force generated by the pressure difference presses the partition 200 against the stepped surface 300. That is, when the pressure in the second chamber 120 increases, the direction of the gas thrust on the partition 200 is consistent with the limiting direction of the stepped surface 300, forming a mechanical coupling, which significantly improves the partition 200's anti-displacement capability under high-pressure conditions. The stepped surface 300 is located at the separation between the first chamber 110 and the second chamber 120, forming a knife-edge sealing structure with the partition 200. This design allows the contact stress between the edge of the partition 200 and the stepped surface 300 to be more than three times that of ordinary planar seals, effectively blocking the leakage path of gas along the gap between the partition 200 and the chamber wall, and reducing the gas leakage rate.

[0028] Reference Figure 2 and Figure 3 In this embodiment, a first T-shaped hole 210 is provided in the middle of the partition 200, and a bearing 10 is provided in the end of the first T-shaped hole 210.

[0029] Specifically, the end of the first T-shaped hole 210 (the horizontal bar portion of the T-shape) can provide a natural axial limit for the bearing 10, and the outer ring of the bearing 10 can directly abut against the stepped surface of the first T-shaped hole 210 to form a rigid contact between the hole shoulder and the bearing 10; the diameter of the small-diameter end (the longitudinal portion of the T-shape) of the first T-shaped hole 210 is smaller than the diameter of the end of the first T-shaped hole 210.

[0030] Reference Figure 1 and Figure 2 A vacuum pump includes the aforementioned anti-displacement structure for the vacuum pump. The vacuum pump also includes a pump housing 400, which is located outside the vacuum chamber 100. A front cover plate 410 and a rear cover plate 420 are respectively connected to both ends of the pump housing 400.

[0031] Specifically, the pump housing 400 surrounds the vacuum chamber 100, isolating it from external environmental interference with the displacement of the internal partition 200; the pump housing 400 provides rigid support, enhancing overall stability; the vacuum chamber 100 is the core area of ​​the vacuum pump for generating and maintaining vacuum. The vacuum chamber 100 and the pump housing 400 form an inner-outer double-layer structure. The pump housing 400 is responsible for load-bearing and protection, while the vacuum chamber 100 focuses on maintaining a high vacuum environment. This isolation prevents the pump housing 400 from being directly affected by vibration, temperature deformation, or changes in external air pressure, thus avoiding direct impact on the vacuum. The vacuum chamber 100 reduces fluctuations in the vacuum level within the chamber. The vacuum chamber 100 isolates external air, dust, and oil, preventing impurities from entering the interior of the vacuum chamber 100. The front cover plate 410 is connected to one end of the pump housing 400 by bolts, and the rear cover plate 420 is connected to the other end of the pump housing 400 by bolts. This allows for the application of uniform preload to both ends of the vacuum chamber 100, fixing the vacuum chamber 100 inside the pump housing 400 and preventing the contact position between the stepped surface 300 and the partition plate 200 from shifting due to axial movement when the vacuum pump starts or stops.

[0032] A sealing ring 20 is provided between the front cover plate 410 and the rear cover plate 420 and the pump housing 400 to reduce the leakage rate of the vacuum pump.

[0033] It should be noted that, in this embodiment, the vacuum pump is a rotary vane vacuum pump.

[0034] Reference Figure 1 and Figure 2 In this embodiment, a front coupling 500 is provided through the middle of the front cover plate 410. One end of the front coupling 500 is located in the first chamber 110 of the vacuum chamber 100 and is connected to the first rotor 510. The other end of the front coupling 500 is located outside the front cover plate 410 and is connected to the pulley 520.

[0035] Specifically, the front coupling 500 is connected to the first rotor 510 via a key or interference fit, achieving a transmission efficiency of over 98%. The pulley 520 is connected to a small pulley via a belt, and the motor drives the small pulley to rotate, thereby transmitting power. When the vacuum pump is running, the first rotor 510 and the front coupling 500 rotate in a low-pressure environment, which can significantly reduce the wind resistance loss of the first rotor 510. At the same time, the low-pressure environment can reduce the scouring of the mating surfaces of the front coupling 500 and the bearing 10 by the gas, prevent the lubricant from being squeezed out by the high-pressure gas, and extend the life of the bearing 10. The first rotor 510 has an annular groove on its side near the partition 200. A sealing ring is installed in the annular groove. The annular groove provides radial floating space for the sealing ring, allowing it to remain in contact with the end face of the partition 200 even when the sealing ring moves slightly radially with the rotor (≤0.03mm). This prevents leakage due to the widening of the gap. The end face of the sealing ring is in close contact with the side of the partition 200, forming a line seal or surface seal. The contact pressure reaches 0.5-1.0MPa, reducing the leakage rate of gas in the gap between the first rotor 510 and the partition 200.

[0036] Among them, reference Figure 2 and Figure 4 In this embodiment, a second T-shaped hole 411 is provided in the middle of the front cover plate 410. A bearing 10 sleeved on the outside of the front coupling 500 is provided in the end of the second T-shaped hole 411. An oil seal 412 sleeved on the outside of the front coupling 500 is provided in the small diameter end of the second T-shaped hole 411.

[0037] Specifically, the end of the second T-shaped hole 411 is designed with an annular stepped surface, which can directly abut against the outer ring of the bearing 10 to form an axial rigid limit, preventing axial movement of the bearing and ensuring the coaxiality of the first rotor 510; the inner ring of the bearing 10 is interference-fitted with the front coupling 500 to prevent the entry of external air and to prevent the bearing grease from being sucked into the vacuum chamber 100 due to the negative pressure of the first chamber 110, or from leaking to the outside of the front cover plate 410 due to the external pressure difference; the diameter of the small-diameter end (the longitudinal part of the T-shape) of the second T-shaped hole 411 is smaller than The diameter of the end of the second T-shaped hole 411; the oil seal 412 is set at the small diameter end of the second T-shaped hole 411, and the lip is tightly fitted with the outer periphery of the front coupling 500 to further prevent gas leakage. The low pressure of the first chamber 110 will cause the lip of the oil seal 412 to be subjected to inward suction, further enhancing the contact pressure between the lip and the front coupling 500. The second T-shaped hole 411 is directly opened in the front cover plate 410, without the need for additional processing of the bearing seat. The bearing 10 and the oil seal 412 can be installed from the same side, reducing assembly errors and facilitating maintenance.

[0038] Reference Figure 2 and Figure 4In this embodiment, a first annular boss 530 is provided on the front coupling 500, and a space for placing the bearing 10 is formed between the first annular boss 530 and the end of the second T-shaped hole 411.

[0039] Specifically, the first annular boss 530 is located inside the end of the second T-shaped hole 411. The first annular boss 530 is an integrally formed annular structure on the front coupling 500. Its end face is tightly fitted with the inner ring of the bearing 10, forming a rigid axial barrier to prevent the inner ring of the bearing 10 from moving axially with the front coupling 500 and to ensure the coaxiality of the inner and outer rings of the bearing 10. The end stepped surface of the second T-shaped hole 411 is tightly fitted with the outer ring of the bearing 10, forming a bidirectional clamping between the inner and outer rings with the first annular boss 530. The outer ring does not move, ensuring that the rolling elements are subjected to uniform force.

[0040] The axial force on the front coupling 500 can be transmitted to the inner ring of the bearing 10 through the end face of the first annular boss 530, and then to the end step surface of the second T-shaped hole 411 through the outer ring of the bearing 10. Finally, it is received by the front cover plate 410 and distributed to the pump housing 400 to prevent the bearing 10 from failing due to axial overload.

[0041] It should be noted that in this embodiment, bearing 10 is a rolling bearing, and the same applies below.

[0042] By using rolling bearings, transmission energy consumption can be reduced, and some high-frequency vibrations can be absorbed through rolling friction.

[0043] Reference Figure 2 and Figure 3 In this embodiment, a rear coupling 600 is provided through the middle of the partition 200. One end of the rear coupling 600 is located in the first chamber 110 of the vacuum chamber 100 and is connected to the first rotor 510. The other end of the rear coupling 600 is located in the second chamber 120 of the vacuum chamber 100 and is connected to the second rotor 610.

[0044] Specifically, the first rotor 510 is a low-profile rotor, and the second rotor 610 is a high-profile rotor; the rear coupling 600 is connected to both the first rotor 510 and the second rotor 610 via spline connection or interference fit; the inner ring of the bearing 10 is interference-fitted with the rear coupling 600, and the outer ring of the bearing 10 is tightly fitted with the stepped surface of the first T-shaped hole 210, forming radial rigid support + primary seal. The bearing 10 can reduce the radial runout of the rear coupling 600, preventing the sealing gap at the through-hole from expanding due to shaft runout, and the precise fit between the inner and outer rings of the bearing 10 can block most of the high-pressure gas from leaking along the shaft diameter, reducing the leakage amount; the first rotor 510 and the second rotor 610 are respectively located in the low-pressure chamber and the high-pressure chamber. During operation, axial forces in opposite directions are generated. The rear coupling 600 can balance these forces through rigid transmission, avoiding excessive unilateral force that could cause the partition to shift or damage components. Furthermore, the first rotor 510 and the second rotor 610 generate radial forces when rotating. If the vacuum chamber 100 is the only support, it can easily cause radial deformation of the vacuum chamber 100, which would compromise the fit between the stepped surface 300 and the partition 200. The rear coupling 600 is connected to the partition 200 through the bearing 10, which can transmit 50%-60% of the radial force to the partition 200. Then, through the contact between the partition 200 and the stepped surface 300, the force is transmitted to the pump casing 400, preventing the expansion of the limiting gap of the partition 200 due to chamber deformation.

[0045] The pressure difference between the first chamber 110 and the second chamber 120 will exert a thrust on the partition 200 towards the low-pressure side. The bearing 10 in the first T-shaped hole 210 can transmit a portion of the radial force to the partition 200 in the opposite direction through the supporting coupling 600, forming a torque opposite to the direction of the pressure difference. This indirectly reduces the clamping stress between the partition 200 and the step surface 300, and avoids plastic deformation of the edge of the partition 200 under long-term high pressure.

[0046] Reference Figure 2 and Figure 3 The rear coupling 600 is provided with a second annular boss 620, and a space for placing the bearing 10 is formed between the second annular boss 620 and the end of the first T-shaped hole 210. The second annular boss 620 is an integrally formed annular structure on the rear coupling 600. Its end face is tightly fitted with the inner ring of the bearing 10, forming a rigid axial barrier to prevent the inner ring of the bearing 10 from moving axially with the coupling 600 and to ensure the coaxiality of the inner and outer rings of the bearing 10. The stepped surface at the end of the first T-shaped hole 210 is tightly fitted with the outer ring of the bearing 10, forming a bidirectional clamping between the inner and outer rings with the second annular boss 620. The outer ring does not move, ensuring that the rolling elements are subjected to uniform force.

[0047] The axial force on the rear coupling 600 can be transmitted to the inner ring of the bearing 10 through the end face of the second annular boss 620, and then to the end step surface of the first T-shaped hole 210 through the outer ring of the bearing 10. Then, it is received by the partition plate 200 and distributed to the second rotor 610, and then transmitted to the rear cover plate 420 and the pump housing 400, so as to avoid the bearing 10 from failing due to axial overload.

[0048] The second rotor 610 has an annular groove on its side near the partition 200. A sealing ring is installed in the annular groove. The annular groove provides radial floating space for the sealing ring, allowing it to remain in contact with the end face of the partition 200 even when the sealing ring moves slightly radially with the rotor (≤0.03mm). This prevents leakage due to the widening of the gap. The end face of the sealing ring is in close contact with the side of the partition 200, forming a line seal or surface seal with a contact pressure of 0.5-1.0MPa, reducing the leakage rate of gas in the gap between the second rotor 610 and the partition 200.

[0049] Reference Figure 1 and Figure 2 In this embodiment, a suction port 700 communicating with the first chamber 110 of the vacuum chamber 100 is provided on one side of the pump housing 400, and an exhaust port 800 communicating with the second chamber 120 of the vacuum chamber 100 is provided on one side of the pump housing 400.

[0050] Specifically, the suction port 700 and the exhaust port 800 provide a directional flow path for gas from the outside → first chamber 110 (low-pressure suction side) → second chamber 120 (high-pressure exhaust side) → outside, solving the problem of disordered gas flow and directly ensuring the integrity of the pumping cycle; the suction port 700 connects to the first chamber 110, and the first chamber 110 is formed by negative pressure due to the rotation of the first rotor 510, so the gas to be pumped from the outside can be actively drawn into the low-pressure area through the suction port 700, avoiding gas stagnation or backflow; the exhaust port 800 connects to the second chamber 120, and the second chamber 120 is formed by high pressure due to compression by the second rotor 610, so the compressed gas can be actively discharged to the outside through the exhaust port 800 to complete the complete suction-compression-exhaust cycle; in this embodiment, the exhaust port 800 is opened at the bottom of the pump casing 400.

[0051] The first rotor 510 is responsible for initial air intake and low-pressure delivery, while the second rotor 610 is responsible for deep compression and high-pressure exhaust to achieve the vacuum level of the vacuum pump. The intake port 700 and exhaust port 800 are usually used in conjunction with a one-way valve to prevent gas backflow from interfering with the first rotor 510 and the second rotor 610.

[0052] Reference Figure 2 In this embodiment, a heat dissipation cavity 900 is provided between the pump housing 400 and the vacuum chamber 100, and a heat dissipation fin 910 is provided inside the heat dissipation cavity 900. A heat dissipation hole 920 communicating with the heat dissipation cavity 900 is provided on the pump housing 400.

[0053] Specifically, the vacuum chamber 100 generates heat due to gas compression in contact with the high-pressure side (second chamber 120), friction between the dual rotors (first rotor 510 and second rotor 610), and operation of the bearing 10. This heat is transferred through the wall of the vacuum chamber 100 to the heat dissipation chamber 900, preventing heat from being directly retained inside the vacuum chamber 100. In this embodiment, multiple heat sinks 910 are provided to improve heat exchange efficiency. Heat is discharged through the heat dissipation holes 920, reducing the temperature of the heat dissipation chamber 900, thereby reducing the heat generated in the vacuum chamber 100, preventing the high-pressure side gas from overheating and expanding, and ensuring exhaust efficiency.

[0054] In summary, this utility model provides a clear installation position reference for the partition 200 through the stepped surface 300, ensuring the installation position accuracy of the partition 200 within the vacuum chamber 100. Furthermore, the stepped surface 300 abuts against the side of the partition 200, effectively restricting the movement of the partition 200 within the vacuum chamber 100 and preventing it from deviating from its designed position due to external forces such as vibration and airflow impact. This ensures the stability and reliability of the vacuum pump, helps maintain the accuracy of the gas flow channel structure inside the vacuum pump, guarantees the normal operating performance of the vacuum pump, and better ensures the sealing performance between the partition 200 and the vacuum chamber 100, reducing the possibility of gas leakage and ensuring the pumping efficiency and vacuum level of the vacuum pump.

[0055] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0056] Furthermore, it should be noted that the scope of the methods and apparatus in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. In addition, features described with reference to certain examples may be combined in other examples.

[0057] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A structure for preventing partition plate displacement in a vacuum pump, characterized in that, include: Vacuum chamber (100); A partition (200) is disposed within a vacuum chamber (100); A stepped surface (300) is provided on the inner wall of the vacuum cavity (100), and the side of the partition (200) abuts against the stepped surface (300). The stepped surface (300) is used to limit the partition (200).

2. The anti-displacement structure for the vacuum pump according to claim 1, characterized in that, The partition (200) divides the vacuum chamber (100) into a first chamber (110) and a second chamber (120), the stepped surface (300) is located at the separation between the first chamber (110) and the second chamber (120), and the partition (200) is disposed in the second chamber (120).

3. The anti-displacement structure for the vacuum pump according to claim 2, characterized in that, The partition (200) has a first T-shaped hole (210) in the middle, and a bearing (10) is provided in the end of the first T-shaped hole (210).

4. A vacuum pump, characterized in that, The vacuum pump includes a partition displacement prevention structure for any one of claims 1-3, and the vacuum pump further includes a pump housing (400), the pump housing (400) being located outside the vacuum chamber (100), and the two ends of the pump housing (400) being respectively connected to a front cover plate (410) and a rear cover plate (420).

5. The vacuum pump according to claim 4, characterized in that, A front coupling (500) is provided through the middle of the front cover plate (410). One end of the front coupling (500) is located in the first chamber (110) of the vacuum chamber (100) and is connected to the first rotor (510). The other end of the front coupling (500) is located outside the front cover plate (410) and is connected to the pulley (520).

6. The vacuum pump according to claim 5, characterized in that, A rear coupling (600) is provided through the middle of the partition (200). One end of the rear coupling (600) is located in the first chamber (110) of the vacuum chamber (100) and is connected to the first rotor (510). The other end of the rear coupling (600) is located in the second chamber (120) of the vacuum chamber (100) and is connected to the second rotor (610).

7. The vacuum pump according to claim 6, characterized in that, The pump housing (400) has an air intake hole (700) on one side that communicates with the first chamber (110) of the vacuum chamber (100), and an exhaust hole (800) on one side that communicates with the second chamber (120) of the vacuum chamber (100).

8. The vacuum pump according to claim 7, characterized in that, A heat dissipation cavity (900) is provided between the pump housing (400) and the vacuum chamber (100). A heat dissipation fin (910) is provided in the heat dissipation cavity (900). A heat dissipation hole (920) communicating with the heat dissipation cavity (900) is provided on the pump housing (400).

9. The vacuum pump according to claim 8, characterized in that, The front cover plate (410) has a second T-shaped hole (411) in the middle. A bearing (10) sleeved on the outside of the front coupling (500) is provided in the end of the second T-shaped hole (411). An oil seal (412) sleeved on the outside of the front coupling (500) is provided in the small diameter end of the second T-shaped hole (411).

10. The vacuum pump according to claim 9, characterized in that, The front coupling (500) is provided with a first annular boss (530), and a space for placing a bearing (10) is formed between the first annular boss (530) and the end of the second T-shaped hole (411).

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