Vacuum flap valve and motion conversion mechanism
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-10
- Publication Date
- 2026-08-14
AI Technical Summary
在镀膜工序中会使用到PECVD(Plasma Enhanced Chemical Vapor Deposition)、HWCVD(Hot WireChemical Vapor Deposition)等镀膜设备,该镀膜设备由多个镀膜腔室连接组成,为保证腔室内真空度,通常使用真空门阀进行连接,而真空门阀的开闭依赖于旋转气缸带动阀板转动,而传统的旋转气缸扭矩小,并且损耗大,同时旋转气缸的转动角度误差较大易造成阀板阀的运动姿态差异大,影响开闭阀的精准度
[0016] The beneficial effects of this utility model are that the vacuum flap valve uses a linear cylinder as a power source and achieves the conversion between linear motion and rotational motion through a motion conversion structure, thereby realizing the rotational opening and closing of the sealing valve plate. Furthermore, the stroke of the linear cylinder is stable, which improves the accuracy of the valve opening and closing.
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Figure CN224635045U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of lifting valve technology, specifically relating to a closed element mounted on a pivot, and more particularly to a vacuum flap valve and motion conversion mechanism. Background Technology
[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. The coating process utilizes equipment such as PECVD (Plasma Enhanced Chemical Vapor Deposition) and HWCVD (Hot Wire Chemical Vapor Deposition). This equipment consists of multiple interconnected coating chambers. To ensure the vacuum level within the chambers, vacuum valves are typically used for connection. The opening and closing of these vacuum valves relies on a rotary cylinder driving a valve plate. However, traditional rotary cylinders have low torque and high losses. Furthermore, the large rotation angle error of the rotary cylinder can easily cause significant differences in the movement posture of the valve plate, affecting the accuracy of valve opening and closing.
[0003] There is an urgent need to provide a vacuum flap valve to solve the technical problem of poor opening and closing accuracy of vacuum flap valves in related technologies.
[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0005] This disclosure provides at least one vacuum flap valve, including: a valve body, a sealing valve plate, and a linear cylinder; The sealing valve plate covers the sealing cavity of the valve body; The sealing valve plate and the linear cylinder are connected by a motion conversion mechanism; and The motion conversion mechanism converts the linear motion of the linear cylinder into the rotational motion required to drive the sealing valve plate through the drive shaft and crank-connecting rod assembly.
[0006] In one alternative embodiment, the motion conversion mechanism includes: a drive shaft and a crank-connecting rod assembly; wherein The drive shaft is connected to the cylinder shaft of the linear cylinder via a cylinder connecting rod; and The crank-connecting rod assembly is sleeved on the drive shaft; wherein The crank-connecting rod assembly is connected to the sealing valve plate; that is... The crank-connecting rod assembly is configured to drive the sealing valve plate to rotate under the action of the drive shaft rotation.
[0007] In one alternative embodiment, the crank-connecting rod assembly includes: a connecting block disposed on the valve body top cover; and A rotating rod mounted on the drive shaft, and a connecting rod connected to the sealing valve plate; wherein The connecting block is rotatably connected to the connecting rod, and the rotating rod is rotatably connected to the connecting rod; and The connecting rod is connected to the sealing valve plate.
[0008] In one alternative embodiment, the crank-connecting rod assembly further includes: a connecting rod cylinder; The connecting rod cylinder is located on the back of the connecting rod; and A V-shaped receiving groove is provided on the sealing valve plate at the position corresponding to the connecting rod cylinder; wherein The connecting rod cylinder is configured to be placed within a V-shaped receiving groove so that the connecting rod connects to the sealing valve plate.
[0009] In one alternative embodiment, a set of elastic springs is provided on the top of the V-shaped receiving groove; The elastic spring is configured to secure the connecting rod cylinder within a V-shaped receiving groove.
[0010] In one alternative embodiment, a fixing block is also provided on the valve body top cover; The fixing block has a through hole; The inner diameter of the through hole is matched with the outer diameter of the drive shaft.
[0011] In one alternative embodiment, a limiting block is also fitted onto the drive shaft; The limit block is configured to restrict the rotation path of the drive shaft so that the drive shaft is locked when the sealed valve is rotated to the closed position.
[0012] In one alternative embodiment, the cylinder shaft of the linear cylinder is arranged perpendicular to the drive shaft; and The cylinder connecting rod is rotatably connected to the drive shaft and the cylinder shaft, respectively.
[0013] Secondly, this disclosure also provides at least one motion conversion mechanism for a vacuum flap valve, comprising: a drive shaft and a crank-connecting rod assembly; wherein The drive shaft is connected to the cylinder shaft of the linear cylinder via a cylinder connecting rod; and The crank-connecting rod assembly is sleeved on the drive shaft; wherein The crank-connecting rod assembly is connected to the sealing valve plate; that is... The crank-connecting rod assembly is configured to drive the sealing valve plate to rotate under the action of the drive shaft rotation.
[0014] In one alternative embodiment, the crank-connecting rod assembly includes: a connecting block disposed on the valve body top cover; and A rotating rod mounted on the drive shaft, and a connecting rod connected to the sealing valve plate; wherein The connecting block is rotatably connected to the connecting rod, and the rotating rod is rotatably connected to the connecting rod; and The connecting rod is connected to the sealing valve plate.
[0015] In one alternative embodiment, the crank-connecting rod assembly further includes: a connecting rod cylinder; The connecting rod cylinder is located on the back of the connecting rod; and A V-shaped receiving groove is provided on the sealing valve plate at the position corresponding to the connecting rod cylinder; wherein The connecting rod cylinder is configured to be placed within a V-shaped receiving groove so that the connecting rod connects to the sealing valve plate.
[0016] The beneficial effects of this utility model are that the vacuum flap valve uses a linear cylinder as a power source and achieves the conversion between linear motion and rotational motion through a motion conversion structure, thereby realizing the rotational opening and closing of the sealing valve plate. Furthermore, the stroke of the linear cylinder is stable, which improves the accuracy of the valve opening and closing.
[0017] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.
[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0019] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0020] Figure 1 A three-dimensional structural schematic diagram of the vacuum flap valve provided in an embodiment of this disclosure is shown; Figure 2 A schematic diagram showing the sealing valve plate connection relationship of the vacuum flap valve provided in this embodiment is shown; Figure 3 for Figure 2 A magnified diagram showing the relationship at point A in the middle; Figure 4 A schematic diagram of the sealing valve plate of the vacuum flap valve provided in this embodiment is shown; Figure 5 A schematic diagram of the structure of a linear cylinder provided in an embodiment of this disclosure is shown; Figure 6 A schematic diagram of the structure of the elastic spring provided in an embodiment of this disclosure is shown; Figure 7 A schematic diagram of the opening structure of the V-shaped receiving groove provided in an embodiment of this disclosure is shown.
[0021] In the picture: 1. Valve body; 10. Sealing cavity; 11. Lifting hook; 2. Sealing valve plate; 20. V-shaped receiving groove; 3. Linear cylinder; 31. Cylinder shaft; 32. Cylinder connecting rod; 4. Motion conversion mechanism; 41. Transmission shaft; 42. Crank connecting rod assembly; 421. Connecting block; 422. Rotating rod; 423. Connecting rod; 424. Fixing block; 425. Limiting block; 426. Sealing groove; 427. Elastic spring; 428. Connecting rod cylinder. Detailed Implementation
[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0023] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.
[0024] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0025] See Figure 1 , Figure 1 A vacuum flap valve is shown, comprising: a valve body 1, a sealing valve plate 2, and a linear cylinder 3; the sealing valve plate 2 covers the sealing cavity 10 of the valve body 1; the sealing valve plate 2 and the linear cylinder 3 are connected by a motion conversion mechanism 4; and the motion conversion mechanism 4 is configured to convert the linear motion of the linear cylinder 3 into the rotational motion required to drive the sealing valve plate 2 to rotate.
[0026] In some embodiments, the motion conversion mechanism 4 includes: a drive shaft 41 and a crank-connecting rod assembly 42; wherein the drive shaft 41 is connected to the cylinder shaft 31 of the linear cylinder 3 via the cylinder connecting rod 32; and the crank-connecting rod assembly 42 is sleeved on the drive shaft 41; wherein the crank-connecting rod assembly 42 is connected to the sealing valve plate 2; that is, the crank-connecting rod assembly 42 is configured to drive the sealing valve plate 2 to rotate under the rotation of the drive shaft 41.
[0027] See Figure 1 , Figure 2 and Figure 3 The working process of the vacuum flap valve is as follows: The cylinder shaft 31 of the linear cylinder 3 extends outward to drive the transmission shaft 41 to rotate clockwise through the cylinder connecting rod 32. The transmission shaft 41 is connected to the crank connecting rod assembly 42. When the transmission shaft 41 rotates clockwise, the rotating rod 422 rotates clockwise, and at the same time the connecting rod 423 rotates clockwise, thereby causing the sealing valve plate 2 to swing from a horizontal position to a vertical position, thus achieving valve closure.
[0028] Specifically, the crank-connecting rod assembly 42 includes: a connecting block 421 disposed on the top cover of the valve body 1; a rotating rod 422 disposed on the drive shaft 41; and a connecting rod 423 connected to the sealing valve plate 2; wherein the connecting block 421 is rotatably connected to the connecting rod 423, and the rotating rod 422 is rotatably connected to the connecting rod 423; and the connecting rod 423 is connected to the sealing valve plate 2. Since the connecting block 421 is fixedly disposed, when the drive shaft 41 rotates, the point where the connecting block 421 is connected to the connecting rod 423 will serve as the rotation point, thereby achieving rotation.
[0029] See Figure 3 and Figure 4 In some embodiments, the crank-connecting rod assembly 42 further includes: a connecting rod cylinder 428; the connecting rod cylinder 428 is disposed on the back of the connecting rod 423; and a V-shaped receiving groove 20 is provided on the sealing valve plate 2 at a position corresponding to the connecting rod cylinder 428; wherein the connecting rod cylinder 428 is configured to be placed in the V-shaped receiving groove 20 so that the connecting rod 423 is connected to the sealing valve plate 2.
[0030] See Figure 6 and Figure 7 Specifically, this method allows the connecting rod 423 to have a certain amount of deformation recovery, enabling it to slide with a small gap within the V-shaped receiving groove 20, thereby reducing starting resistance and preventing jamming. Similarly, a set of elastic springs 427 are provided at the top of the V-shaped receiving groove 20; the elastic springs 427 are configured to secure the connecting rod cylinder 428 within the V-shaped receiving groove 20. The use of elastic springs 427 also utilizes the elasticity of the springs to achieve angle alignment of the sealing valve plate 2.
[0031] See Figure 2 and Figure 3In some embodiments, a fixing block 424 is also provided on the top cover of the valve body 1; a through hole is provided on the fixing block 424; the inner diameter of the through hole is adapted to the outer diameter of the transmission shaft 41.
[0032] In some embodiments, a limiting block 425 is also sleeved on the drive shaft 41; the limiting block 425 is configured to restrict the rotation path of the drive shaft 41 so that the drive shaft 41 is locked when the sealing valve is rotated to the valve closed state.
[0033] As an optional implementation, the limiting block 425 is configured with a cam, that is, when the drive shaft 41 rotates at a certain angle, the protruding end of the cam will abut against the top cover of the valve body 1, thereby limiting the further displacement of the drive shaft 41.
[0034] See Figure 5 In some embodiments, the cylinder shaft 31 of the linear cylinder 3 is arranged perpendicular to the drive shaft 41; and the cylinder connecting rod 32 is rotatably connected to the drive shaft 41 and the cylinder shaft 31 respectively.
[0035] In some embodiments, a sealing groove 426 is provided around the edge of the sealing valve plate 2; a sealing ring is provided on the valve body 1 at a position corresponding to the sealing groove 426.
[0036] In some embodiments, the valve body 1 is also provided with a lifting hook 11.
[0037] At least one other embodiment also provides a motion conversion mechanism for a vacuum flap valve, comprising: a drive shaft and a crank-connecting rod assembly; wherein the drive shaft is connected to the cylinder shaft of a linear cylinder via a cylinder connecting rod; and the crank-connecting rod assembly is sleeved on the drive shaft; wherein the crank-connecting rod assembly is connected to a sealing valve plate; that is, the crank-connecting rod assembly is configured to drive the sealing valve plate to rotate under the rotation of the drive shaft.
[0038] In some embodiments, the crank-connecting rod assembly includes: a connecting block disposed on the top cover of the valve body; a rotating rod disposed on the drive shaft; and a connecting rod connected to the sealing valve plate; wherein the connecting block is rotatably connected to the connecting rod, the rotating rod is rotatably connected to the connecting rod; and the connecting rod is connected to the sealing valve plate.
[0039] Specifically, the crank-connecting rod assembly also includes: a connecting rod cylinder; the connecting rod cylinder is disposed on the back of the connecting rod; and a V-shaped receiving groove is provided on the sealing valve plate at the position corresponding to the connecting rod cylinder; wherein the connecting rod cylinder is configured to be placed in the V-shaped receiving groove so that the connecting rod is connected to the sealing valve plate.
[0040] In summary, this vacuum flap valve uses a linear cylinder 3 as a power source and a motion conversion structure to convert linear motion into rotational motion, thereby realizing the rotational opening and closing of the sealing valve plate 2. Furthermore, the stroke of the linear cylinder 3 is stable, which improves the accuracy of the valve opening and closing.
[0041] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.
[0042] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0043] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0044] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0045] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A vacuum flap valve, characterized in that include: Valve body, sealing valve plate, and linear cylinder; The sealing valve plate covers the sealing cavity of the valve body; The sealing valve plate and the linear cylinder are connected by a motion conversion mechanism; and The motion conversion mechanism converts the linear motion of the linear cylinder into rotational motion through a transmission shaft and crank-connecting rod assembly, thereby driving the sealing valve plate to rotate.
2. The vacuum flap valve as described in claim 1, characterized in that, The drive shaft is connected to the cylinder shaft of the linear cylinder via a cylinder connecting rod; and The crank-connecting rod assembly is sleeved on the drive shaft; wherein The crank connecting rod assembly is connected to the sealing valve plate; that is... The crank-connecting rod assembly is adapted to drive the sealing valve plate to rotate under the rotation of the drive shaft.
3. The vacuum flap valve of claim 2, wherein, include: The crank-connecting rod assembly includes: a connecting block disposed on the top cover of the valve body; and A rotating rod mounted on the drive shaft, and a connecting rod connected to the sealing valve plate; wherein The connecting block is rotatably connected to the connecting rod, and the rotating rod is rotatably connected to the connecting rod; and The connecting rod is connected to the sealing valve plate.
4. The vacuum flap valve as described in claim 3, characterized in that, The crank-connecting rod assembly further includes: a connecting rod cylinder; The connecting rod cylinder is disposed on the back side of the connecting rod; and A V-shaped receiving groove is provided on the sealing valve plate at the position corresponding to the connecting rod cylinder; wherein The connecting rod cylinder is configured to be placed in a V-shaped receiving groove so that the connecting rod is connected to the sealing valve plate.
5. The vacuum flap valve as described in claim 4, characterized in that, A set of elastic springs is provided on the top of the V-shaped receiving groove; The elastic spring is adapted to fasten the connecting rod cylinder within the V-shaped receiving groove.
6. The vacuum flap valve as described in claim 3, characterized in that, A fixing block is also provided on the top cover of the valve body; The fixing block is provided with a through hole; The inner diameter of the through hole is adapted to the outer diameter of the drive shaft.
7. The vacuum flap valve as described in claim 6, characterized in that, A limiting block is also fitted onto the drive shaft; The limiting block is used to restrict the rotation path of the drive shaft so that the drive shaft is locked when the sealing valve rotates to the valve closed state.
8. A motion conversion mechanism for a vacuum flap valve, characterized by include: Drive shaft and crank-connecting rod assembly; among which The drive shaft is connected to the cylinder shaft of the linear cylinder via a cylinder connecting rod; and The crank-connecting rod assembly is sleeved on the drive shaft; wherein The crank-connecting rod assembly is connected to the sealing valve plate; that is... The crank-connecting rod assembly is configured to drive the sealing valve plate to rotate under the rotation of the drive shaft.
9. The motion conversion mechanism as described in claim 8, characterized in that, The crank-connecting rod assembly includes: a connecting block disposed on the top cover of the valve body; and A rotating rod mounted on the drive shaft, and a connecting rod connected to the sealing valve plate; wherein The connecting block is rotatably connected to the connecting rod, and the rotating rod is rotatably connected to the connecting rod; and The connecting rod is connected to the sealing valve plate.
10. The motion conversion mechanism as described in claim 9, characterized in that, The crank-connecting rod assembly further includes: a connecting rod cylinder; The connecting rod cylinder is disposed on the back side of the connecting rod; and The sealing valve plate is provided with a V-shaped accommodating groove corresponding to the position of the connecting rod cylinder; wherein The connecting rod cylinder is configured to be placed in the V-shaped accommodating groove, so that the connecting rod is connected with the sealing valve plate.