A fluorine-nitrogen mixed gas distribution device

Abstract

This utility model provides a fluorine-nitrogen mixed gas distribution device, including a nitrogen input system, a vacuum processing system, a mixed gas distribution system, an exhaust monitoring group, a fire sprinkler system, and a high-temperature switch; the nitrogen input system includes a low-pressure nitrogen input pipeline (100) and a high-pressure nitrogen input pipeline (200), and the low-pressure nitrogen input pipeline is sequentially provided with a first pneumatic micro-leakage valve (1), a first pneumatic isolation valve (2), a first check valve (3), and a first pressure gauge (4); the high-pressure nitrogen input pipeline (200) is connected in parallel between the first check valve (3) and the first pressure gauge (4), and a second pneumatic isolation valve (5) is provided on the high-pressure nitrogen input pipeline (200); applying this technical solution can improve the safety of the gas flow control process.

Description

Technical Field

[0001] This utility model relates to the field of mixed gas distribution technology, and in particular to a fluorine-nitrogen mixed gas distribution device. Background Technology

[0002] Gas mixing devices (such as valve box systems, VMBs) are core equipment in high-end industries such as semiconductor manufacturing, photovoltaic coating, and LED epitaxy. They are responsible for accurately distributing high-purity gases or mixed gases from a single gas source to multiple process reaction chambers. As process precision moves towards the nanometer level, the stability and safety of gas flow control have become key factors affecting yield. Traditional VMBs use a series split-flow structure, resulting in numerous blind ends and bends in the gas flow path. This not only increases dead volume but also induces turbulence and backflow, disrupting laminar flow. Utility Model Content

[0003] In view of this, the purpose of this utility model is to provide a fluorine-nitrogen mixed gas distribution device, which improves the safety of the gas flow control process.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a fluorine-nitrogen mixed gas distribution device, comprising a nitrogen input system, a vacuum processing system, a mixed gas distribution system, an exhaust monitoring group, a fire sprinkler system, and a high-temperature switch;

[0005] The gas mixing distribution system includes at least one set of gas cylinders (400) and one set of delivery branch pipelines (500). One end of the delivery branch pipeline (500) is connected to the cylinder valve of the gas cylinder (400), and the other end of the delivery branch pipeline (500) is connected to one end of the delivery pipeline (600), which is sequentially connected to a second pressure sensor (13), a gasket filter (14), a fourth pneumatic isolation valve (15), a first pressure regulating valve (16), a second pressure regulating valve (17), a fifth pneumatic isolation valve (18), a second manual isolation valve (19), and the delivery pipeline (600).

[0006] The other end of the delivery pipeline (600) is provided with a terminal filter (20), an overcurrent protection switch (21) and a third manual isolation valve (22), which is connected to the output port;

[0007] The nitrogen input system and vacuum processing system are connected to the gas mixing and distribution system.

[0008] Furthermore, the nitrogen input system includes a low-pressure nitrogen input pipeline (100), on which a first pneumatic micro-leakage valve (1), a first pneumatic isolation valve (2), a first check valve (3) and a first pressure gauge (4) are sequentially provided.

[0009] Furthermore, the nitrogen input system also includes a high-pressure nitrogen input pipeline (200), which is connected in parallel between the first check valve (3) and the first pressure gauge (4), and a second pneumatic isolation valve (5) is provided on the high-pressure nitrogen input pipeline (200).

[0010] Furthermore, the nitrogen input system also includes a first mixing connection pipe (700), one end of which is connected to the first pressure gauge (4), and the other end of which is connected to the second pressure sensor (13). A third one-way valve (23) and a sixth pneumatic isolation valve (24) are sequentially provided on the first mixing connection pipe (700).

[0011] Furthermore, the vacuum processing system includes a gas output pipeline connected to a vacuum generator (6), the inlet of which is connected to a nitrogen input pipe, and a second pneumatic micro-leak valve (7) and a second one-way valve (8) are sequentially arranged on the nitrogen input pipe (300); the vacuum generator (6) is connected to a gas mixing distribution system through a branch pipeline, and at least a first manual isolation valve (9), a second pressure gauge (10), and a third pneumatic isolation valve (11) are respectively arranged on the branch pipeline; the third pneumatic isolation valve (11) is connected in parallel with a first pressure sensor (12).

[0012] Furthermore, the vacuum processing system also includes a second gas mixing connection pipeline (800), and the gas mixing distribution system also includes a seventh pneumatic isolation valve (25), a fourth check valve (26), and an eighth pneumatic isolation valve (27); the two ends of the seventh pneumatic isolation valve (25) are respectively connected to the second pressure sensor (13) and the second gas mixing connection pipeline (800); the two ends of the fourth check valve (26) are respectively connected to the eighth pneumatic isolation valve (27) and the second gas mixing connection pipeline (800); the eighth pneumatic isolation valve (27) is also connected to the delivery branch pipeline (500).

[0013] Furthermore, the first pressure regulating valve (16) is connected to a third pressure gauge (28).

[0014] Furthermore, the second pressure regulating valve (17) is connected to a third pressure sensor (29).

[0015] Compared with the prior art, the present invention has the following advantages: the mixed gas distribution device of the present invention improves the precise flow control of fluorine-nitrogen mixed gas by connecting and coordinating the various valve devices between the nitrogen input system, vacuum processing system and mixed gas distribution system; and improves the safety of the gas flow control process by setting up fire sprinklers, high temperature switches, inlet and outlet pipe shut-off devices. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a preferred embodiment of the present invention. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0019] It should be noted that the terminology used herein is for the purpose of describing particular implementations only and is not intended to limit the exemplary implementations according to this application; as used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise; furthermore, it should be understood that when the terms “comprising” and / or “including” are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0020] A fluorine-nitrogen mixed gas distribution device, reference Figure 1 It includes a nitrogen input system, a vacuum processing system, a gas mixing and distribution system, an exhaust monitoring group 30, a fire sprinkler system 31, and a high-temperature switch 32; the exhaust monitoring group EXHAUST is equipped with multiple groups;

[0021] The nitrogen input system includes a low-pressure nitrogen input pipeline 100 and a high-pressure nitrogen input pipeline 200. The low-pressure nitrogen input pipeline is sequentially equipped with a first pneumatic micro-leakage valve 1, a first pneumatic isolation valve 2, a first check valve 3, and a first pressure gauge 4.

[0022] The high-pressure nitrogen input pipeline 200 is connected in parallel between the first one-way valve 3 and the first pressure gauge 4. A second pneumatic isolation valve 5 is provided on the high-pressure nitrogen input pipeline 200. The nitrogen input system is used to clean the main pipeline of the distribution device.

[0023] The vacuum processing system includes a gas output pipeline connected to a vacuum generator 6. The inlet of the vacuum generator 6 is connected to a nitrogen input pipe. A second pneumatic micro-leakage valve 7 and a second one-way valve 8 are sequentially installed on the nitrogen input pipe 300. The vacuum generator 6 is connected to a gas mixing distribution system through a branch pipeline. At least a first manual isolation valve 9, a second pressure gauge 10, and a third pneumatic isolation valve 11 are respectively installed on the branch pipeline. A first pressure sensor 12 is connected in parallel to the third pneumatic isolation valve 11. The vacuum generator 6 is used to generate a vacuum. When its pneumatic valve is opened, high-purity nitrogen flows through the vacuum generator to generate a vacuum, which is used to evacuate the process panel.

[0024] The gas mixing and distribution system includes at least one set of gas cylinders 400 and one set of delivery branch pipelines 500; Figure 1 The displayed gas mixing and distribution system includes two sets of gas cylinders 400 and two sets of delivery branch lines 500. One end of each delivery branch line 500 is connected to the cylinder valve of the gas cylinder 400, and the other end is connected sequentially to a second pressure sensor 13, a gasket filter 14, a fourth pneumatic isolation valve 15, a first pressure regulating valve 16, a second pressure regulating valve 17, a fifth pneumatic isolation valve 18, a second manual isolation valve 19, and one end of the delivery line 600. The gasket filter 14 is used to remove particles that may be present in the gas cylinders to protect the first pressure regulating valve 16 and the second pressure regulating valve 17 from damage. The second pressure sensor 13 is used to display the pressure of the delivery branch line 500. The fourth pneumatic isolation valve 15 is used to control the gas supply to the control circuit. The fifth pneumatic isolation valve 18 is used to control the gas supply to the delivery branch line 500.

[0025] At the other end of the delivery pipeline 600, a terminal filter 20, an overcurrent protection switch 21, and a third manual isolation valve 22 are sequentially provided, and the third manual isolation valve 22 is connected to the output port.

[0026] The nitrogen input system is connected to the gas mixing distribution system;

[0027] Circuit breakers are installed at the low-pressure nitrogen input line 100, the high-pressure nitrogen input line 200, the nitrogen input line 300, the delivery branch line 500, and the delivery line 600.

[0028] The nitrogen input system also includes a first gas mixing connection pipe 700, one end of which is connected to the first pressure gauge 4, and the other end of which is connected to the second pressure sensor 13. A third one-way valve 23 and a sixth pneumatic isolation valve 24 are sequentially arranged on the first gas mixing connection pipe 700.

[0029] The vacuum processing system further includes a second gas mixing connection pipeline 800, and the gas mixing distribution system further includes a seventh pneumatic isolation valve 25, a fourth one-way valve 26, and an eighth pneumatic isolation valve 27; the two ends of the seventh pneumatic isolation valve 25 are respectively connected to the second pressure sensor 13 and the second gas mixing connection pipeline 800; the two ends of the fourth one-way valve 26 are respectively connected to the eighth pneumatic isolation valve 27 and the second gas mixing connection pipeline 800; the eighth pneumatic isolation valve 27 is also connected to the delivery branch pipeline 500.

[0030] The first pressure regulating valve 16 is connected to a third pressure gauge 28. The second pressure regulating valve 17 is connected to a third pressure sensor 29, which is used to display the gas delivery pressure value after pressure regulation. The first pressure regulating valve 16 and the second pressure regulating valve 17 are used to regulate the pressure of the gas cylinder.

[0031] Gas supply process: Gas flows from the gas cylinder valve to the second pressure sensor 13, gasket filter 14, fourth pneumatic isolation valve 15, first pressure regulating valve 16, second pressure regulating valve 17, fifth pneumatic isolation valve 18, second manual isolation valve 19, terminal filter 20, overcurrent protection switch 21, third manual isolation valve 22, and then to PORCESS OUT.

Claims

1. A fluorine-nitrogen mixed gas dispensing apparatus characterized by comprising: This includes a nitrogen input system, a vacuum processing system, a gas mixing and distribution system, an exhaust monitoring system, a fire sprinkler system, and a high-temperature switch; The gas mixing distribution system includes at least one set of gas cylinders (400) and one set of delivery branch pipelines (500). One end of the delivery branch pipeline (500) is connected to the cylinder valve of the gas cylinder (400), and the other end of the delivery branch pipeline (500) is connected to one end of the delivery pipeline (600), which is sequentially connected to a second pressure sensor (13), a gasket filter (14), a fourth pneumatic isolation valve (15), a first pressure regulating valve (16), a second pressure regulating valve (17), a fifth pneumatic isolation valve (18), a second manual isolation valve (19), and the delivery pipeline (600). The other end of the delivery pipeline (600) is provided with a terminal filter (20), an overcurrent protection switch (21) and a third manual isolation valve (22), which is connected to the output port; The nitrogen input system and vacuum processing system are connected to the gas mixing and distribution system.

2. The apparatus according to claim 1, wherein The nitrogen input system includes a low-pressure nitrogen input pipeline (100), on which a first pneumatic micro-leak valve (1), a first pneumatic isolation valve (2), a first check valve (3) and a first pressure gauge (4) are sequentially provided.

3. The apparatus of claim 2, wherein The nitrogen input system also includes a high-pressure nitrogen input pipeline (200), which is connected in parallel between the first check valve (3) and the first pressure gauge (4). A second pneumatic isolation valve (5) is provided on the high-pressure nitrogen input pipeline (200).

4. The apparatus according to claim 3, wherein The nitrogen input system also includes a first gas mixing connection pipe (700), one end of which is connected to the first pressure gauge (4), and the other end of which is connected to the second pressure sensor (13). A third one-way valve (23) and a sixth pneumatic isolation valve (24) are sequentially provided on the first gas mixing connection pipe (700).

5. The apparatus of claim 1 wherein, The vacuum processing system includes a gas output pipeline connected to a vacuum generator (6). The inlet of the vacuum generator (6) is connected to a nitrogen input pipe. A second pneumatic micro-leakage valve (7) and a second one-way valve (8) are sequentially installed on the nitrogen input pipe (300). The vacuum generator (6) is connected to a gas mixing distribution system through a branch pipeline. At least a first manual isolation valve (9), a second pressure gauge (10), and a third pneumatic isolation valve (11) are respectively installed on the branch pipeline. A first pressure sensor (12) is connected in parallel to the third pneumatic isolation valve (11).

6. The apparatus of claim 5 wherein, The vacuum processing system further includes a second gas mixing connection pipeline (800), and the gas mixing distribution system further includes a seventh pneumatic isolation valve (25), a fourth check valve (26), and an eighth pneumatic isolation valve (27); the two ends of the seventh pneumatic isolation valve (25) are respectively connected to the second pressure sensor (13) and the second gas mixing connection pipeline (800); the two ends of the fourth check valve (26) are respectively connected to the eighth pneumatic isolation valve (27) and the second gas mixing connection pipeline (800); the eighth pneumatic isolation valve (27) is also connected to the delivery branch pipeline (500).

7. The apparatus of claim 1 wherein, The first pressure regulating valve (16) is connected with a third pressure gauge (28).

8. The apparatus of claim 1 wherein, The second pressure regulating valve (17) is connected with a third pressure sensor (29).

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