A monochromatic light source device

Abstract

This utility model belongs to the field of semiconductor optical sensing and detection technology, specifically relating to a monochromatic light source device. A monochromatic light source device includes an electrically connected light-emitting component and a light source control component: the light-emitting component includes a mounting housing and a light source element, a collimating lens, an attenuator, and a microlens array arranged sequentially along the optical path within the mounting housing. The light source element emits ultraviolet light; the collimating lens corrects the light beam emitted by the light source element; the attenuator outputs light emitted from the collimating lens as light of a specific wavelength, which is then emitted by the microlens array; wherein the light-emitting component further includes a beam splitter disposed between the attenuator and the microlens array, the beam splitter dividing the light emitted from the collimating lens into reflected light and transmitted light, and emitting the transmitted light to the microlens array; the light source control component calculates the power density value of the reflected light based on the reflected light.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor optical sensing and detection technology, and specifically relates to a monochromatic light source device. Background Technology

[0002] 248 nm wavelength ultraviolet light sources are special and important light sources in the field of semiconductor optical sensing and detection. Currently, 248 nm excimer lasers are commonly used. However, excimer laser systems are complex and expensive, and the power density of pulsed lasers fluctuates greatly under long-term operating conditions, affecting sensing and detection accuracy. In addition, large-area beam expansion and beam shaping of excimer lasers are difficult, resulting in high costs for obtaining large-area uniform light sources.

[0003] In existing technologies, ultraviolet light is mainly generated using a deuterium lamp and a monochromator. However, since the light emitted by hydrogen or deuterium lamps covers both the ultraviolet and visible light regions, a monochromator is needed to decompose the composite light emitted by the continuous light source, from which 248 nm monochromatic light can be separated. However, the existing technology has several problems. First, highly stable deuterium lamps are expensive and have limited power, resulting in extremely low power density of the separated 248 nm monochromatic light, which cannot meet the needs of large-range power density control. Second, monochromators and light sources typically require precision assembly, resulting in numerous components during design and installation, leading to a large, costly, and inconvenient system.

[0004] In other words, the problems with existing 248 nm wavelength ultraviolet light sources are their low uniformity, small adjustable power density range, and large and expensive system size. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a monochromatic light source device, especially a portable 248 nm wavelength ultraviolet uniform light source device, to solve the problems of low uniformity, small adjustable power density range and large and expensive system size in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a monochromatic light source device, comprising an electrically connected light-emitting component and a light source control component; the light-emitting component includes a mounting housing and a light source element, a collimating lens, an attenuator, and a microlens array arranged sequentially along the optical path within the mounting housing; the light source element is used to emit ultraviolet light; the collimating lens is used to correct the light beam emitted by the light source element; the attenuator is used to output light emitted from the collimating lens as light of a specific wavelength, which is then emitted by the microlens array; wherein the light-emitting component further includes a beam splitter disposed between the attenuator and the microlens array, the beam splitter being used to split the light emitted from the collimating lens into reflected light and transmitted light, and to emit the transmitted light to the microlens array; the light source control component calculates the power density value of the reflected light based on the reflected light.

[0007] As one embodiment of this utility model, it also includes a light source control component electrically connected to the light-emitting component. The light-emitting component further includes a beam splitter and an optical power meter probe. The beam splitter is disposed between the attenuator and the focusing lens and is used to split the light emitted from the collimating lens into reflected light and transmitted light. The focusing lens is used to focus the incident transmitted light. The optical power meter probe is used to calculate the beam power density value of the light emitted from the microlens array based on the reflected light.

[0008] In one embodiment of this utility model, the light-emitting component further includes a focusing lens, which is disposed between the beam splitter and the optical power meter probe, and is used to focus the reflected light emitted from the beam splitter and then emit it to the optical power meter probe.

[0009] In one embodiment of this utility model, the reflectivity of the incident surface of the beam splitter is 5%.

[0010] In one embodiment of this utility model, the attenuator is used to output ultraviolet light with a wavelength of 248 nm; and / or, the attenuator includes multiple sub-attenuators with different attenuation levels and a switching device, the multiple sub-attenuators are arranged to form a disk, and the switching device is used to control the rotation of the disk to selectively adjust the placement of the set sub-attenuators in the optical path of the light emitted from the collimating lens; optionally, the attenuator is used to output ultraviolet light with a wavelength of 248 nm.

[0011] In one embodiment of this utility model, the light source control component further includes a circuit board, which is connected to the switching device of the attenuator and / or the light source component, and is used to control the switching device to switch the sub-attenuator and / or adjust the power of the light source component.

[0012] In one embodiment of this utility model, the light source is an LED light source with a wavelength range of 245~255nm and a power greater than 1.5 mW.

[0013] In one embodiment of this utility model, the light-emitting component includes a heat sink fixed on the mounting shell, and the light source is encapsulated on the heat sink.

[0014] In one embodiment of this utility model, the light-emitting component includes a field stop, which is fixedly set on the mounting shell to constrain the beam profile shape and field size, wherein the collimating lens is located inside the field stop.

[0015] As one embodiment of the present invention, the light-emitting component further includes a dust cover that can be detachably fixed on the mounting housing, and the dust cover is disposed at the light path of the light emitted by the corresponding self-imaging lens on the mounting housing.

[0016] In summary, compared with the prior art, this utility model has at least one of the following beneficial technical effects: The ultraviolet light source device provided by this utility model uses a high-power ultraviolet LED chip as the light source, with a narrow wavelength range and concentrated energy, which is conducive to outputting a high-power-density 248 nm wavelength ultraviolet light source, significantly improving the power density control range and control freedom of the uniform ultraviolet light source; the high-power ultraviolet LED chip of this ultraviolet light source device is packaged on a finned heat dissipation substrate, which has high stability during long-term operation; the ultraviolet light source device is designed with a highly sensitive power density metering device, which can realize accurate autonomous feedback and real-time reading of the output light power density value; the ultraviolet light source device is designed to combine a field stop, a collimating lens, a microlens array and an imaging lens to achieve beam shaping and homogenization, resulting in high uniformity of the light source; the ultraviolet light source optical components are compactly designed and fixed on a mounting base, and no additional space is required to install a monochromator, which has the advantages of small size and portability. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a monochromatic light source device provided in a specific embodiment of the present invention; Figure 2 This is a front view of a light source control component provided in a specific embodiment of this utility model; Figure 3This is a rear view of a light source control component provided in a specific embodiment of this utility model.

[0019] Explanation of reference numerals in the attached figures: 1. Light source; 2. Field stop; 3. Collimating lens; 4. Focusing lens; 5. Beam splitter; 6. Microlens array; 7. Optical power meter probe; 8. Imaging lens; 9. Attenuator; 10. Cable tie; 11. High-power resistor; 12. Mounting housing; 13. Dust cover; 14. Drive line outlet hole; 15. Display device; 16. Switch; 17. Power adapter interface; 18. High-sensitivity power meter interface; 19. Aviation connector interface; 20. Heat sink. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model. In addition, it should be understood that the specific embodiments described herein are only used for illustration and explanation of the present utility model, and are not intended to limit the present utility model. In the present utility model, unless otherwise stated, directional terms such as "up," "down," "left," "right," "front," and "back" generally refer to up, down, left, and right in the actual use or working state of the device, specifically the drawing directions in the accompanying drawings.

[0021] It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of embodiments of this utility model. Furthermore, the descriptions of each embodiment in the following embodiments have their own emphasis; for parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0022] See Figure 1-3 As shown, this utility model provides a power density adjustable light source device, particularly suitable for emitting uniform ultraviolet light with a wavelength of 248 nm. The light source device includes a light source control component and a light-emitting component. The light source control component is electrically connected to the light-emitting component and is used to control the light-emitting component. The light-emitting component has a mounting housing 12, and an accommodating space is provided inside the mounting housing 12. The light-emitting component also includes a light source element 1, an aperture, a collimating lens 3, a focusing lens 4, a beam splitter 5, a microlens array 6, an optical power meter probe 7, an imaging lens 8, and an attenuator 9, all housed within the accommodating space of the mounting housing 12. The light source control component includes the optical power meter probe 7, a display device, and a circuit board. The optical power meter probe is also housed within the mounting housing 12.

[0023] A light source 1 is disposed within the receiving space and located at one end of the receiving space, for emitting ultraviolet light. An imaging lens 8 is located at the other end of the receiving space, and the mounting housing 12 has an opening in the path of the light emitted from the imaging lens to allow light to exit from the mounting housing 12. The light source 1 is preferably a high-power ultraviolet chip to better emit the intended ultraviolet light source. Figure 1 In this specific embodiment, the high-power ultraviolet chip is connected to the power supply line of the light source control unit via the drive line outlet hole 14, and then driven by the high-power resistor 11. The high-power ultraviolet chip can be an LED light source with a wavelength range of 245-255 nm and a rated power of 1.8mW.

[0024] Preferably, the light-emitting component further includes a heat sink 20, which is fixedly disposed within the mounting housing 12 and fixedly connected to the light source component 1. The heat sink 20 is preferably a finned heat sink 20. The advantage of this arrangement is that by encapsulating the light source component 1 on the finned heat sink 20, good heat dissipation of the entire light source component 1, especially the high-power ultraviolet chip, is ensured.

[0025] The collimating lens 3 is positioned directly opposite the light-emitting surface of the light source 1 and is fixedly mounted on the mounting housing 12 with a field stop 2, thereby allowing the light emitted from the light source 1 to be emitted onto the collimating lens 3, and the emitted beam to be corrected and adjusted by the collimating lens 3.

[0026] The field stop 2 is fixedly mounted on the mounting housing 12. The field stop 2 is used to constrain the beam profile shape and field size. Figure 1 In this embodiment, the output light source is square in shape. At a distance of 38 mm from the light outlet, the uniform beam spot size is not less than 25 mm × 25 mm.

[0027] Attenuator 9 is positioned in the optical path after the collimating lens 3 exits, and is used to modulate the light to output a light source of a specific wavelength. Figure 1 In this specific embodiment, the ultraviolet beam is incident on the attenuator 9 after passing through the collimating lens 3. The attenuator 9 is used to adjust the power density of the output 248 nm wavelength ultraviolet light source, and is preferably set to be an adjustable attenuator 9, so that the switching of 9 levels from 0 to 8 can be achieved by coaxially rotating the attenuator 9.

[0028] Specifically, the attenuator 9 includes nine fan-shaped sub-attenuators of equal size. These nine sub-attenuators have different attenuation levels to adjust the output light source to different power densities. The nine sub-attenuators are arranged to form a disk. When it is necessary to adjust the power density, simply control the disk to rotate to the corresponding sub-attenuator to adjust the power density of the output light.

[0029] Preferably, the attenuator 9 is further provided with a switching device, which drives the disk formed by the sub-attenuators to rotate, so that the disk rotates to the corresponding sub-attenuator, allowing the light emitted from the collimating lens 3 to pass through, thereby selectively adjusting the placement of the set sub-attenuators in the optical path of the light emitted from the collimating lens. There are many implementations of the switching device in the prior art, which will not be described in detail here.

[0030] Beam splitter 5 is positioned in the optical path after the attenuator 9, and it separates the incident light into reflected and transmitted light. The present invention does not limit the specific ratio of reflected to transmitted light; it can be 50% reflected and 50% transmitted, or 60% reflected and 40% transmitted. Further details are omitted. Preferably, the reflectivity of the incident surface of beam splitter 5 is 5%.

[0031] A focusing lens 4 is positioned in the optical path of the reflected light emitted from the beam splitter 5 to radially focus the reflected light. The focusing lens 4 then transmits the focused reflected light to the optical power meter probe 7, which is positioned in the optical path of the reflected light emitted from the focusing lens 4 to read the optical power density of the reflected light. This reading serves as the basis for autonomously calculating the optical power density of the refracted light portion in real time. In other words, by establishing a functional relationship between the beam power density value measured by an external optical power meter at the light port (i.e., the light emitted from the microlens array 6) and the power density value read by the optical power meter probe 7, the output optical power density can be obtained in real time by reading the measured value from the power meter. The optical power density value obtained from the optical power meter probe 7 is then sent to the display device 15 to display the power density of the emitted light (i.e., the transmitted light). It is understood that the optical power meter probe 7 and the display device 15 are electrically connected and can transmit data via wired or wireless communication, details of which will not be elaborated further.

[0032] A microlens array 6 is positioned in the optical path of the transmitted light from the beam splitter 5 to homogenize the transmitted light. An imaging lens 8 is positioned in the optical path of the light emitted from the microlens array 6 to output a uniform beam. Figure 1 In this specific embodiment, after most of the light beam passes through the beam splitter 5, it is incident on the microlens array 6. After being homogenized by the microlens array 6, the uniform ultraviolet light beam is incident on the imaging lens 8 and output from the other side of the imaging lens 8. Preferably, the microlens array 6 is used to homogenize the light beam transmitted through the beam splitter 5, and the uniformity of the homogenized beam after passing through the imaging lens 8 is ≥92%. More preferably, the uniformity of the uniform beam with a size of 25 mm × 25 mm is 92.08%.

[0033] It is understandable that, compared to existing technologies, the solution provided by this invention can provide more uniform monochromatic light of a specific size. Compared to the existing hydrogen lamp or deuterium lamp + monochromator solution, the solution of this invention, because it directly emits light through a monochromatic light-emitting element of a specific size, can effectively ensure the power density of the monochromatic light and achieve a wide range of power density control. Furthermore, compared to traditional monochromator and light source solutions, the solution provided by this invention, due to its redesigned optical path structure, eliminates the need for multiple monochromators for light dispersion, significantly reducing the size and volume requirements of the entire light-emitting device. Through the cooperation of multiple components, the stability of the output light source can be ensured while reducing the precision requirements of assembly.

[0034] Therefore, the solution provided by this utility model, by setting up a light source 1, a collimating lens 3, a field stop 2, an attenuator 9, a beam splitter 5, a focusing lens 4, and a microlens array 6, can effectively achieve free adjustment of the power density of the light source while ensuring the uniformity of the output light. Furthermore, this arrangement results in a compact overall structure, significantly reducing the space requirements and making it more portable.

[0035] Specifically, in this invention, by using a high-power ultraviolet LED chip as the light source, the narrow wavelength range and concentrated energy of the LED chip can be fully utilized, thereby facilitating the output of a high-power-density 248nm wavelength ultraviolet light source. This significantly improves the power density control range and degree of freedom of the uniform ultraviolet light source. Furthermore, by using a high-power ultraviolet LED chip as the light source, the power and density of the emitting tube can be effectively controlled. Additionally, by encapsulating the high-power ultraviolet LED chip on a finned heat sink substrate, high stability during long-term operation can be ensured. Moreover, by combining the field stop 2, collimating lens 3, microlens array 6, and imaging lens 8, beam shaping and homogenization can be effectively achieved, resulting in a highly uniform light source. Furthermore, by designing the beam splitter 5 and a high-sensitivity power density metering device, accurate autonomous feedback and real-time reading of the output optical power density value can be achieved. In addition, this ultraviolet light source device features a compact optical design and is fixed on a mounting base, eliminating the need for additional space to install a monochromator, thus offering advantages in size and portability.

[0036] Optionally, the dust cover 13 can be detachably mounted on the mounting housing 12, specifically at a position corresponding to the imaging lens 8. That is, the dust cover 13 can be detachably mounted on the mounting housing 12 in the optical path of the light emitted from the imaging lens 8, in order to protect the imaging lens 8 and prevent dust contamination.

[0037] Furthermore, the solution provided by this utility model can achieve an output power density as low as 0.250 μW / cm² when the output light source area is 25 mm × 25 mm. 2 The highest value was 57.549 μW / cm. 2 .

[0038] Please continue reading. Figure 1-3 The light source device also includes a control box, which contains a circuit board. The circuit board is electrically connected to the switching device of the light source component and the attenuator of the light-emitting component. It is used to adjust the power density setting of the attenuator and adjust the power of the light source component by controlling the switching device.

[0039] Preferably, the light source control unit also includes a display device 15, a control box power switch 16, a power adapter interface 17, a high-sensitivity power meter interface 18, and an aviation plug interface 19. The display device 15 can switch the LED light source on and off, select and set the power density level as needed, and read the output power density value.

[0040] The present invention has been described in detail above. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

[0041] Throughout this specification, references to "an embodiment," "an embodiment," or "a specific embodiment" mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of the present invention, but not necessarily in all embodiments. Therefore, the various representations of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout the specification do not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic of any specific embodiment of the present invention can be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the embodiments of the present invention described and illustrated herein may be based on the teachings herein and will be considered part of the spirit and scope of the present invention.

[0042] It should also be understood that one or more of the elements shown in the figures may be implemented in a more separate or more integrated manner, or may even be removed because they are inoperable in certain circumstances or provided because they may be useful for a particular application.

[0043] Furthermore, unless otherwise expressly stated, any arrows in the accompanying drawings should be considered illustrative only and not limiting. Additionally, unless otherwise stated, the term "or" as used herein is generally intended to mean "and / or". Where a term is anticipated to provide a separation or combination capability that is unclear, a combination of components or steps will also be considered as indicated.

Claims

1. A light source device of monochromatic light, characterized by, The light-emitting component includes an electrically connected light-emitting assembly and a light source control component: the light-emitting assembly includes a mounting housing and a light source element, a collimating lens, an attenuator, and a microlens array arranged sequentially along the optical path within the mounting housing. The light source element is used to emit ultraviolet light, the collimating lens is used to correct the light beam emitted by the light source element, and the attenuator is used to output light emitted from the collimating lens as light of a specific wavelength, which is then emitted by the microlens array. in The light-emitting component further includes a beam splitter disposed between the attenuator and the microlens array. The beam splitter is used to split the light emitted from the collimating lens into reflected light and transmitted light, and to emit the transmitted light to the microlens array. The light source control component calculates the power density value of the reflected light based on the reflected light.

2. The monochromatic light source device according to claim 1, wherein The light source control unit includes an optical power meter probe and a display device that are electrically connected. The optical power meter probe is disposed in the optical path of the reflected light and is used to calculate the beam power density value of the reflected light emitted from the microlens array based on the reflected light. The display device is used to display the beam power density value.

3. The monochromatic light source device according to claim 2, wherein The light-emitting component also includes a focusing lens, which is disposed between the beam splitter and the optical power meter probe, and is used to focus the reflected light emitted from the beam splitter and then emit it to the optical power meter probe.

4. The monochromatic light source apparatus according to claim 1, wherein The reflectivity of the incident surface of the beam splitter is 5%.

5. The monochromatic light source apparatus according to claim 1, wherein The attenuator includes multiple sub-attenuators with different attenuation levels and a switching device. The multiple sub-attenuators are arranged to form a disk. The switching device is used to control the rotation of the disk to selectively adjust the placement of a set sub-attenuator in the optical path of the light emitted from the collimating lens; and / or The attenuator is used to output ultraviolet light at a wavelength of 248 nm.

6. The monochromatic light source device according to claim 5, wherein The light source control device also includes a circuit board, which is connected to the attenuator switching device and / or the light source element, and is used to control the switching device to switch the sub-attenuator and / or adjust the power of the light source element.

7. The monochromatic light source apparatus according to any one of claims 1 to 6, wherein The light source is an LED light source with a wavelength range of 245~255 nm and a power greater than 1.5 mW.

8. The monochromatic light source apparatus according to claim 7, wherein The light-emitting component includes a heat sink fixed on a mounting housing, and the light source is encapsulated on the heat sink.

9. The monochromatic light source apparatus according to any one of claims 1 to 6, wherein The light-emitting component includes a field stop, which is fixedly mounted on the mounting housing to constrain the beam profile shape and field size, wherein the collimating lens is located within the field stop.

10. The monochromatic light source apparatus according to any one of claims 1 to 6, wherein The light-emitting component also includes a dust cover that can be detachably fixed to the mounting housing, and the dust cover is disposed at the light path of the light emitted by the corresponding self-imaging lens on the mounting housing.

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