A clean electromagnetic heating furnace for silicon rods

Abstract

This utility model discloses a clean electromagnetic heating furnace for silicon rods, including an electromagnetic heating coil. Two mutually cooperating mounting plates are fixedly installed inside the furnace body. The lower end of the mounting plates is fixedly connected to a partition plate, which is fixedly positioned in the middle of the furnace body. A transport tray is slidably mounted on the partition plate and cooperates with the mounting plates. A support cover is installed inside the furnace body and connected to the upper ends of the two mounting plates. A glass cover is installed inside the support cover and connected to the upper ends of the two mounting plates. An insulation layer is provided on the outer wall of the support cover, and the electromagnetic heating coil is installed on the outer wall of the insulation layer. The silicon rod is heated through the cooperation of the insulation layer and the electromagnetic heating coil. The electromagnetic heating coil heats from the top and sides, causing the entire furnace chamber to be in an eddy current state, thus heating the entire silicon rod. As the temperature rises, the conductivity of the silicon rod increases, and it itself becomes a heating element, effectively eliminating residual stress on the silicon rod.

Description

Technical Field

[0001] This utility model relates to the field of stress relief furnace technology, and in particular to a clean electromagnetic heating furnace for silicon rods. Background Technology

[0002] Residual stress exists in silicon rods during the production process, which needs to be eliminated by heating before processing. Traditional heating involves placing heating tubes above the furnace body and heating the silicon rods downwards through radiation. This heating method results in poor heating of the silicon rods, with a large temperature difference between the top and bottom of the rods, and cannot completely eliminate stress. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a clean electromagnetic heating furnace for silicon rods.

[0004] The objective of this utility model is achieved through the following technical solution:

[0005] A clean electromagnetic heating furnace for silicon rods includes a furnace body, mounting plates, a glass cover, a support cover, an insulation layer, an electromagnetic heating coil, a partition plate, and a transport tray. Two mounting plates are fixedly installed inside the furnace body, with their lower ends fixedly connected to the partition plate. The partition plate is fixedly positioned in the middle of the furnace body. The transport tray is slidably mounted on the partition plate, with its two sides respectively engaging with the two mounting plates. The support cover is located inside the furnace body, with its two sides connected to the upper ends of the two mounting plates. The glass cover is located inside the support cover, with its two sides connected to the upper ends of the two mounting plates. An insulation layer that engages with the support cover is provided on the outer wall of the support cover, and an electromagnetic heating coil is disposed on the outer wall of the insulation layer.

[0006] Furthermore, the partition plate is provided with a conveying guide rail that cooperates with the transport tray, the bottom of the furnace body is provided with a recycling guide rail that cooperates with the transport tray, the bottom of the furnace body is provided with a recycling drive component for driving the transport tray to slide on the recycling guide rail, the input end of the furnace body is provided with a lifting component that cooperates with the conveying guide rail and the recycling guide rail, and the output end of the furnace body is provided with a lowering component that cooperates with the conveying guide rail and the recycling guide rail. Both the lifting component and the lowering component are located inside the furnace body.

[0007] Furthermore, a discharge port is provided on the output end of the furnace body, a discharge protective cover that cooperates with the discharge port is fixedly provided on the furnace body, and a discharge gate assembly that cooperates with the discharge port is provided on the furnace body.

[0008] Furthermore, the discharge gate assembly includes a lifting drive component, a lifting rod, a door panel, and a guide component. The door panel is slidably disposed between the furnace body and the discharge protective cover and cooperates with the discharge port. The upper end of the door panel is fixedly connected to the middle part of the lifting rod. The two ends of the lifting rod are respectively connected to the output parts of the two lifting drive components. The fixed part of the lifting drive component is disposed on the furnace body. The guide component for guiding the door panel is fixedly disposed on the furnace body.

[0009] Furthermore, the guiding component includes a guide seat, a guide rod, guide wheels, and a connecting block. The upper end of the guide rod is fixedly connected to the lifting rod through the connecting block. The guide seat is fixedly mounted on the furnace body. Two guide wheels that cooperate with the guide rod are rotatably mounted on the upper end of the guide seat. Two guide wheels that cooperate with the guide rod are rotatably mounted on the lower end of the guide seat.

[0010] Furthermore, the bottom of the transport pallet is provided with wheels, and both the conveying guide rail and the recycling guide rail cooperate with the wheels. The top of the transport pallet is provided with an anti-contamination block.

[0011] Furthermore, a feeding gate is provided on the input end of the furnace body, and a feeding protective cover that cooperates with the feeding gate is fixedly provided on the furnace body. A pallet drive assembly for pushing the transport pallet to move is provided on the feeding protective cover.

[0012] Furthermore, the pallet drive assembly includes a pallet drive component, a push rod, a connecting plate, and a pallet guide rail. The pallet guide rail and the pallet drive component are both fixedly mounted on the feed protective cover. The connecting plate is slidably mounted on the pallet guide rail and is connected to the output part of the pallet drive component. One end of the push rod is fixedly connected to the connecting plate, and the other end of the connecting plate passes through the furnace body and cooperates with the transport pallet.

[0013] Furthermore, the pallet drive component drives the main sprocket to rotate, the main sprocket drives the secondary sprocket to rotate via a transmission chain, the secondary sprocket drives the transmission screw to rotate, and the transmission screw is threadedly engaged with the connecting disc.

[0014] The beneficial effects of this utility model are:

[0015] 1) In this technology, the silicon rod is heated by the combination of insulation layer and electromagnetic heating coil. The electromagnetic heating coil heats from the top and sides, so that the entire furnace is in an inductive eddy current state, which heats the entire silicon rod. When the temperature rises, the conductivity of the silicon rod increases, and it also becomes a heat source. This can effectively eliminate the residual stress on the silicon rod.

[0016] 2) In this technology, setting anti-contamination blocks on the transport pallet can effectively isolate the silicon rods and prevent them from being contaminated. Attached Figure Description

[0017] Figure 1 This is the three-dimensional connection structure of the electromagnetic heating furnace. Figure 1 ;

[0018] Figure 2 The three-dimensional connection structure of this electromagnetic heating furnace Figure 2 ;

[0019] Figure 3 This is a front sectional view of the electromagnetic heating furnace;

[0020] Figure 4 This is a side sectional view of the electromagnetic heating furnace;

[0021] Figure 5 for Figure 2 Enlarged connection structure diagram at point A;

[0022] Figure 6 This is a three-dimensional diagram of the internal connection structure of this electromagnetic heating furnace;

[0023] Figure 7 This is a structural diagram showing the arrangement of the electromagnetic heating coil on the insulation layer.

[0024] In the diagram, 1-furnace body, 2-mounting plate, 3-glass cover, 4-bearing cover, 5-insulation layer, 6-electromagnetic heating coil, 7-separation shelf, 8-transport pallet, 9-conveying guide rail, 10-recycling guide rail, 11-recycling drive component, 12-lifting component, 13-lowering component, 14-discharge protective cover, 15-lifting drive component, 16-lifting rod, 17-door panel, 18-guide seat, 19-guide rod, 20-guide wheel, 21-connecting block, 22-walking wheel, 23-anti-contamination block, 24-feed protective cover, 25-pallet drive component, 26-push rod, 27-connecting disc, 28-disc guide rail, 29-main sprocket, 30-transmission chain, 31-secondary sprocket, 32-transmission screw. Detailed Implementation

[0025] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0026] See Figures 1-7 This utility model provides a technical solution:

[0027] A clean electromagnetic heating furnace for silicon rods includes a furnace body 1, a mounting plate 2, a glass cover 3, a support cover 4, an insulation layer 5, an electromagnetic heating coil 6, a partition plate 7, and a transport tray 8. Two mutually cooperating mounting plates 2 are fixedly installed inside the furnace body 1. The lower end of the mounting plate 2 is fixedly connected to the partition plate 7, which is fixedly located in the middle of the furnace body 1. The transport tray 8 is slidably mounted on the partition plate 7 and its two sides respectively cooperate with the two mounting plates 2. The support cover 4 is located inside the furnace body 1 and its two sides are respectively connected to the upper ends of the two mounting plates 2. The glass cover 3 is located inside the support cover 4 and its two sides are respectively connected to the upper ends of the two mounting plates 2. An insulation layer 5 that cooperates with the support cover 4 is provided on the outer wall of the support cover 4, and an electromagnetic heating coil 6 is provided on the outer wall of the insulation layer 5. The furnace body 1 is used to reduce heat loss. A partition plate 7 is fixed to the middle of the furnace body 1 to secure the mounting plate 2. The mounting plate 2 is used to install the glass cover 3 and the support cover 4. The support cover 4 is used to install the existing insulation layer 5 and the existing electromagnetic heating coil 6. The electromagnetic heating coil 6 heats the silicon rod. The insulation layer 5 reduces heat loss. The support cover 4 is a stainless steel cover. The support cover 4 serves to install and fix the insulation layer 5 and the electromagnetic heating coil 6. Simultaneously, the support cover 4 also heats up under the inductive effect of the electromagnetic heating coil 6, guiding the initial heating of the silicon rod. The glass cover 3 serves as an insulator to prevent metal contamination of the silicon rod. The transport tray 8 is used to hold the silicon rods that need to be heated.

[0028] In some embodiments, the partition plate 7 is provided with a conveying guide rail 9 that cooperates with the transport tray 8, the bottom of the furnace body 1 is provided with a recycling guide rail 10 that cooperates with the transport tray 8, and the bottom of the furnace body 1 is provided with a recycling drive component 11 for driving the transport tray 8 to slide on the recycling guide rail 10. The input end of the furnace body 1 is provided with a lifting component 12 that cooperates with the conveying guide rail 9 and the recycling guide rail 10, and the output end of the furnace body 1 is provided with a lowering component 13 that cooperates with the conveying guide rail 9 and the recycling guide rail 10. Both the lifting component 12 and the lowering component 13 are located inside the furnace body 1. To improve processing efficiency, the furnace body 1 is a rectangular box, and the transport tray 8 moves from one end of the furnace body 1 to the other, thus achieving stress relief during silicon rod heating. The function of the conveying guide rail 9 is to guide the movement of the transport tray 8. At the output end of furnace body 1, the silicon rods on transport tray 8 are removed through the discharge port. Transport tray 8 moves downward via descending component 13, and then, under the action of recycling drive component 11, transport tray 8 enters recycling guide rail 10 from descending component 13, and then enters lifting component 12. It rises to the mating point of conveying guide rail 9 via lifting component 12 and engages with the feed gate, thus realizing the recycling of transport tray 8. Recycling drive component 11, lifting component 12, and descending component 13 are all existing technology equipment.

[0029] In some embodiments, a discharge port is provided at the output end of the furnace body 1, and a discharge protective cover 14 that cooperates with the discharge port is fixedly provided on the furnace body 1. A discharge gate assembly that cooperates with the discharge port is provided on the furnace body 1. The discharge gate assembly includes a lifting drive component 15, a lifting rod 16, a door plate 17, and a guide component. The door plate 17 is slidably disposed between the furnace body 1 and the discharge protective cover 14 and cooperates with the discharge port. The upper end of the door plate 17 is fixedly connected to the middle part of the lifting rod 16. The two ends of the lifting rod 16 are respectively connected to the output parts of the two lifting drive components 15. The fixed part of the lifting drive component 15 is provided on the furnace body 1, and a guide component that guides the door plate 17 is fixedly provided on the furnace body 1. In this embodiment, the temperature during the stress relief process of the silicon rod is controlled at around 400°C. If the silicon rod has a large area of ​​contact with air, it is easy for impurities in the air to contaminate the silicon rod. Therefore, the discharge protective cover 14 is provided to reduce the large area of ​​contact between the silicon rod and the air. To reduce heat loss, a door panel 17 is installed at the discharge port. The door panel 17 is fixed to the lifting rod 16. The two ends of the lifting rod 16 are driven up and down by different lifting drive components 15. The lifting drive component 15 is a pneumatic cylinder or hydraulic cylinder in the prior art. The guide component guides the movement of the door panel 17.

[0030] In some embodiments, the guiding component includes a guide seat 18, a guide rod 19, guide wheels 20, and a connecting block 21. The upper end of the guide rod 19 is fixedly connected to the lifting rod 16 via the connecting block 21. The guide seat 18 is fixedly mounted on the furnace body 1. Two guide wheels 20 that cooperate with the guide rod 19 are rotatably mounted on the upper end of the guide seat 18, and two guide wheels 20 that cooperate with the guide rod 19 are rotatably mounted on the lower end of the guide seat 18. The guide seat 18 is used to mount the guide wheels 20. There are four guide wheels 20, arranged in two groups, upper and lower, sandwiched between two cooperating guide wheels 20. A groove cooperating with the guide rod 19 is provided in the middle of each guide wheel 20. The connecting block 21 is used to connect the guide rod 19 and the lifting rod 16.

[0031] In some embodiments, the transport pallet 8 is provided with wheels 22 on its bottom, and the conveying rail 9 and the recycling rail 10 both cooperate with the wheels 22. An anti-contamination block 23 is provided on the top of the transport pallet 8. The wheels 22 facilitate the movement of the transport pallet 8, reduce friction between the conveying rail 9 and the recycling rail 10 and the transport pallet 8, and prevent damage to these components. The anti-contamination block 23 is placed on the transport pallet 8 to prevent direct contact between the silicon rod and the transport pallet 8, thus preventing contamination of the silicon rod. The anti-contamination block 23 is also made of silicon material.

[0032] In some embodiments, a feeding gate is provided at the input end of the furnace body 1, and a feeding protective cover 24 cooperating with the feeding gate is fixedly provided on the furnace body 1. A pallet drive assembly for pushing the transport pallet 8 to move is provided on the feeding protective cover 24. The pallet drive assembly includes a pallet drive component 25, a push rod 26, a connecting plate 27, and a pallet guide rail 28. The pallet guide rail 28 and the pallet drive component 25 are both fixedly provided on the feeding protective cover 24. The connecting plate 27 is slidably provided on the pallet guide rail 28 and is drivenly connected to the output part of the pallet drive component 25. One end of the push rod 26 is fixedly connected to the connecting plate 27, and the other end of the connecting plate 27 passes through the furnace body 1 and cooperates with the transport pallet 8. The pallet drive component 25 drives the main sprocket 29 to rotate, the main sprocket 29 drives the secondary sprocket 31 to rotate through the transmission chain 30, and the secondary sprocket 31 drives the transmission screw 32 to rotate. The transmission screw 32 is threadedly engaged with the connecting plate 27. Silicon rods are placed onto transport pallets 8 through the feeding gate. The feeding protective cover 24 reduces the entry of cold air into the furnace body 1. The pallet drive assembly pushes the transport pallets 8 to move on the conveyor rails 9. On the conveyor rails 9, each subsequent transport pallet 8 directly pushes all the transport pallets 8 to move on the conveyor rails 9. The pallet drive component 25 is a motor as in the prior art. The pallet drive component 25 drives the main sprocket 29 to rotate. The main sprocket 29 drives the secondary sprocket 31 to rotate through the transmission chain 30. The secondary sprocket 31 drives the transmission screw 32 to rotate. The transmission screw 32 is threadedly engaged with the connecting plate 27, thereby driving the connecting plate 27 to move on the plate guide rail 28. The connecting plate 27 drives the transport pallets 8 to move through the push rod 26. The side wall of the furnace body 1 is provided with guide holes that cooperate with the push rod 26.

[0033] In the description of this utility model, it should be understood that the terms "upper", "lower", "bottom", "one end", "top", "middle", "other end", "coaxial", "one side", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] In this utility model, unless otherwise explicitly specified and limited, the terms "setting", "installation", "connection", "fixing", "hinged" and other such terms should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0035] The above description is merely a preferred embodiment of this utility model. It should be understood that this utility model is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the concept described herein through the above teachings or related technologies or knowledge. Modifications and variations made by those skilled in the art that do not depart from the spirit and scope of this utility model should be protected within the scope of the appended claims.

Claims

1. A clean electromagnetic heating furnace for silicon rods, characterized in that: The furnace includes a furnace body (1), mounting plates (2), a glass cover (3), a support cover (4), an insulation layer (5), an electromagnetic heating coil (6), a partition plate (7), and a transport tray (8). Two mounting plates (2) are fixedly installed inside the furnace body (1). The lower end of the mounting plate (2) is fixedly connected to the partition plate (7). The partition plate (7) is fixedly installed on the middle part of the furnace body (1). The transport tray (8) is slidably installed on the partition plate (7) and its two sides are respectively connected to the two mounting plates (2). The support cover (4) is installed inside the furnace body (1) and its two sides are respectively connected to the upper ends of the two mounting plates (2). The glass cover (3) is installed inside the support cover (4) and its two sides are respectively connected to the upper ends of the two mounting plates (2). An insulation layer (5) is provided on the outer wall of the support cover (4) to cooperate with the support cover (4). An electromagnetic heating coil (6) is provided on the outer wall of the insulation layer (5).

2. The clean electromagnetic heating furnace for silicon rods according to claim 1, characterized in that: The partition plate (7) is provided with a conveying guide rail (9) that cooperates with the transport tray (8). The bottom of the furnace body (1) is provided with a recycling guide rail (10) that cooperates with the transport tray (8). The bottom of the furnace body (1) is provided with a recycling drive component (11) for driving the transport tray (8) to slide on the recycling guide rail (10). The input end of the furnace body (1) is provided with a lifting component (12) that cooperates with the conveying guide rail (9) and the recycling guide rail (10). The output end of the furnace body (1) is provided with a lowering component (13) that cooperates with the conveying guide rail (9) and the recycling guide rail (10). The lifting component (12) and the lowering component (13) are both located inside the furnace body (1).

3. A clean electromagnetic heating furnace for silicon rods according to claim 1 or 2, characterized in that: The furnace body (1) is provided with a discharge port at the output end, and a discharge protective cover (14) that cooperates with the discharge port is fixedly provided on the furnace body (1). A discharge gate assembly that cooperates with the discharge port is provided on the furnace body (1).

4. A clean electromagnetic heating furnace for silicon rods according to claim 3, characterized in that: The discharge gate assembly includes a lifting drive (15), a lifting rod (16), a door panel (17), and a guide component. The door panel (17) is slidably disposed between the furnace body (1) and the discharge protective cover (14) and cooperates with the discharge port. The upper end of the door panel (17) is fixedly connected to the middle part of the lifting rod (16). The two ends of the lifting rod (16) are respectively connected to the output parts of the two lifting drive components (15). The fixed part of the lifting drive component (15) is disposed on the furnace body (1). The guide component for guiding the door panel (17) is fixedly disposed on the furnace body (1).

5. A clean electromagnetic heating furnace for silicon rods according to claim 4, characterized in that: The guiding component includes a guide seat (18), a guide rod (19), guide wheels (20), and a connecting block (21). The upper end of the guide rod (19) is fixedly connected to the lifting rod (16) through the connecting block (21). The guide seat (18) is fixedly mounted on the furnace body (1). Two guide wheels (20) that cooperate with the guide rod (19) are rotatably mounted on the upper end of the guide seat (18). Two guide wheels (20) that cooperate with the guide rod (19) are rotatably mounted on the lower end of the guide seat (18).

6. A clean electromagnetic heating furnace for silicon rods according to claim 2, characterized in that: The bottom of the transport pallet (8) is provided with a walking wheel (22), the conveying guide rail (9) and the recycling guide rail (10) are both in cooperation with the walking wheel (22), and the top of the transport pallet (8) is provided with an anti-pollution block (23).

7. A clean electromagnetic heating furnace for silicon rods according to claim 1 or 2, characterized in that: The furnace body (1) is provided with a feeding door at the input end. A feeding protective cover (24) that cooperates with the feeding door is fixedly provided on the furnace body (1). A pallet drive assembly for pushing the transport pallet (8) to move is provided on the feeding protective cover (24).

8. A clean electromagnetic heating furnace for silicon rods according to claim 7, characterized in that: The pallet drive assembly includes a pallet drive component (25), a push rod (26), a connecting plate (27), and a pallet guide rail (28). The pallet guide rail (28) and the pallet drive component (25) are both fixedly mounted on the feed protective cover (24). The connecting plate (27) is slidably mounted on the pallet guide rail (28) and is connected to the output part of the pallet drive component (25). One end of the push rod (26) is fixedly connected to the connecting plate (27), and the other end of the connecting plate (27) passes through the furnace body (1) and cooperates with the transport pallet (8).

9. A clean electromagnetic heating furnace for silicon rods according to claim 8, characterized in that: The pallet drive (25) drives the main sprocket (29) to rotate. The main sprocket (29) drives the secondary sprocket (31) to rotate through the transmission chain (30). The secondary sprocket (31) drives the transmission screw (32) to rotate. The transmission screw (32) is threadedly engaged with the connecting disc (27).

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