A vacuum furnace cooling structure

Abstract

This utility model discloses a cooling structure for a vacuum furnace, belonging to the field of vacuum furnace technology. It includes an upper furnace body assembly, a lower furnace body assembly, an upper movable insulation assembly, a lower fixed insulation assembly, and a lower movable insulation assembly. The upper furnace body assembly is connected to the upper movable insulation assembly via a power assembly. When the upper movable insulation assembly separates from the upper insulation assembly, an upper gas flow channel is formed. A lower fixed insulation assembly is provided on the lower furnace body assembly, and the outer side of the lower fixed insulation assembly is sealed to the lower edge of the upper insulation assembly. The lower furnace body assembly is connected to the lower movable insulation assembly via a power assembly. When the lower movable insulation assembly and the lower fixed insulation assembly separate, a lower gas flow channel is formed. This utility model eliminates the need for a heat exchanger for cooling, solving the problem of water vapor entering the heating chamber of the vacuum furnace.

Description

Technical Field

[0001] This utility model relates to the field of vacuum furnace technology, specifically a vacuum furnace cooling structure. Background Technology

[0002] A vacuum purification furnace is a precision device integrating vacuum technology and an intelligent temperature control system. It is primarily used for high-purity material processing, impurity removal, and composition optimization, and is widely applied in semiconductors, new energy, and new materials industries. The vacuum system of a vacuum purification furnace can rapidly evacuate the furnace to a vacuum level of 10. -1 Below Pa, it effectively isolates reactive gases such as oxygen and water vapor, preventing material oxidation or contamination; and achieves the heating and purification of substances in the furnace cavity through the heating and temperature control module.

[0003] Currently used vacuum purification furnaces typically employ natural cooling (furnace-based cooling), which results in long process cycle times and impacts production efficiency. Other methods use a motor + heat exchanger cooling system, but these have the following drawbacks: 1. The heat exchanger is prone to water leakage, which can cause water vapor to enter the heating chamber of the vacuum furnace, damaging the product, heating system, insulation system, etc. 2. For vacuum equipment containing acidic gases (such as purification furnaces, silicon carbide deposition furnaces, etc.), if the heat exchanger leaks water, it will cause strong corrosion to the metal parts. Under high temperature conditions (such as the temperature of a purification furnace at 2400℃), water vapor will instantly vaporize, causing the pressure inside the furnace to increase instantly, which is dangerous. 3. There is a risk that impurities present in the cooling pipes or between the insulation layer and the furnace wall may be reintroduced into the heating zone, affecting the purity or surface quality of the product. Utility Model Content

[0004] This invention overcomes the shortcomings of the prior art by proposing a vacuum furnace cooling structure that does not use a motor and heat exchanger, thus solving the problem caused by water vapor entering the vacuum furnace heating chamber.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: A vacuum furnace cooling structure includes an upper furnace body assembly and a lower furnace body assembly. The upper furnace body assembly is located above the lower furnace body assembly. When the upper and lower furnace body assemblies are engaged, a furnace cavity is formed inside. The upper furnace body assembly has an upper insulation component with openings at the top and bottom, and also includes an upper movable insulation component, a lower fixed insulation component, and a lower movable insulation component. A set of power components is connected to the top of the upper furnace body assembly. The drive end of the power components at the top of the upper furnace body assembly is connected to the upper movable insulation component. The power components at the top of the upper furnace body assembly enable the upper movable insulation component to engage or disengage from the upper insulation component. When the upper movable insulation component disengages from the upper insulation component, an upper gas flow channel is formed. A lower fixed insulation component is provided at the top edge of the lower furnace body assembly, and the outer side of the lower fixed insulation component is sealed to the lower edge of the upper insulation component; another set of power components is connected to the bottom of the lower furnace body assembly; the drive end of the power component at the bottom of the lower furnace body assembly is connected to the lower movable insulation component; the power component at the bottom of the lower furnace body assembly drives the lower movable insulation component to seal and engage or disengage with the lower fixed insulation component; when the lower movable insulation component and the lower fixed insulation component are separated, a gas flow channel is formed below.

[0006] Furthermore, the upper and lower edges of the upper insulation component are both stepped structures; the edge of the upper movable insulation component is stepped, which is used to form a stepped seal with the upper edge of the upper insulation component; the outer side of the lower fixed insulation component is stepped, and the stepped structure on the outer side of the lower fixed insulation component forms a stepped seal with the lower edge of the upper insulation component.

[0007] Furthermore, the inner side of the lower fixed insulation component is also a stepped structure, and the edge of the lower movable insulation component is a stepped structure, forming a stepped seal with the stepped structure on the inner side of the lower fixed insulation component.

[0008] Furthermore, an insulation felt fixing component is fixedly connected inside the upper furnace body assembly; the bottom of the insulation felt fixing component is connected to the bottom of the upper furnace body assembly, and the upper insulation component is fixedly connected to the inner wall of the insulation felt fixing component.

[0009] Furthermore, a support platform assembly is provided at the bottom inside the upper insulation component, and the support platform assembly is fixed to the upper furnace body assembly for placing the products to be processed.

[0010] Furthermore, the upper furnace body assembly is connected to a heating system, which passes through the insulation felt fixing assembly and extends into the inside of the upper insulation assembly.

[0011] Furthermore, a guide component is connected to the top of the upper furnace body assembly, and the upper movable insulation component is slidably connected to the guide component at the top of the upper furnace body assembly.

[0012] Furthermore, a guide component is connected to the bottom of the lower furnace body assembly, and the lower movable insulation component is slidably connected to the guide component at the bottom of the lower furnace body assembly.

[0013] Furthermore, the power assembly includes a support rod, a support frame, a welded corrugated pipe, and a power source; one end of the support rod is connected to the upper or lower movable insulation component, and the other end of the support rod is connected to the power source; the support frame and the welded corrugated pipe are connected to the upper or lower furnace body component, and a sealing ring is provided in the middle for sealing; the welded corrugated pipe is connected to the inside of the support frame, and the welded corrugated pipe is slidably connected to the support rod.

[0014] Furthermore, both the upper and lower furnace body components adopt a double-layer water-cooled structure.

[0015] The beneficial effects of this utility model compared to the prior art are as follows: 1. This utility model eliminates the traditional motor + heat exchanger structure, which not only reduces costs but also minimizes the risks associated with heat exchanger leakage. It fundamentally solves the problem of impurities outside the heating zone entering the heating zone due to rapid airflow, without affecting product purity or surface quality.

[0016] 2. This utility model improves the structure of the vacuum furnace body, enabling gas circulation and cooling, thus achieving faster cooling.

[0017] 3. This utility model reduces the corrosion problem caused by the combination of acidic gas and water vapor.

[0018] 4. Both the upper and lower movable insulation components of this utility model open upwards. When closed, they do not require the support of a cylinder, thus avoiding heat leakage caused by the opening of the upper and lower movable insulation components due to damage to the power component. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the vacuum furnace after it is closed according to this utility model; Figure 2 This is a schematic diagram of the cooling process of gas flow after the vacuum furnace of this utility model is turned on; Figure 3 This is a schematic diagram of the power assembly described in this utility model; In the diagram: 1 is the upper furnace body assembly, 2 is the heating system, 3 is the upper insulation assembly, 4 is the support platform assembly, 5 is the insulation felt fixing assembly, 6 is the upper movable insulation assembly, 7 is the lower fixed insulation assembly, 8 is the lower movable insulation assembly, 9 is the guide assembly, 10 is the power assembly, and 11 is the lower furnace body assembly. Detailed Implementation

[0020] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0021] See Figures 1 to 3 This embodiment proposes a vacuum furnace cooling structure, including an upper furnace body assembly 1, a heating system 2, an upper insulation assembly 3, a support platform assembly 4, an insulation felt fixing assembly 5, an upper movable insulation assembly 6, a lower fixed insulation assembly 7, a lower movable insulation assembly 8, a guide assembly 9, a power assembly 10, and a lower furnace body assembly 11.

[0022] The upper furnace body assembly 1 and the lower furnace body assembly 11 constitute the main structure of the vacuum furnace. The upper furnace body assembly 1 is located above the lower furnace body assembly 11. When the upper furnace body assembly 1 and the lower furnace body assembly 11 are fastened together, a furnace cavity is formed inside.

[0023] Both the upper furnace body assembly 1 and the lower furnace body assembly 11 adopt a double-layer water-cooled structure to provide a cooling source for the furnace cavity. The upper furnace body assembly 1 is equipped with an electrode interface, a temperature measurement interface, a side pressure interface, etc., while the lower furnace body assembly 11 is equipped with an air inlet interface, etc. An insulation felt fixing assembly 5 is fixedly connected inside the upper furnace body assembly 1. The insulation felt fixing assembly 5 is made of metal and has a box structure with open top and bottom. The bottom of the insulation felt fixing assembly 5 is connected to the bottom of the upper furnace body assembly 1, and an upper insulation assembly 3 is fixedly connected to the inner wall of the insulation felt fixing assembly 5. The insulation felt fixing assembly 5 can effectively prevent the upper insulation assembly 3 from falling off.

[0024] The upper insulation component 3 provides insulation to prevent excessive heat loss and increased heating power. The upper insulation component 3 can be made of hard felt, soft felt, metal screen, or aluminum silicate insulation material. Both the upper and lower edges of the upper insulation component 3 have stepped structures, which form stepped seals with the upper movable insulation component 6 and the lower fixed insulation component 7, respectively. The heating system 2 provides heat to the product to be processed. The heating system 2 passes through the insulation felt fixing component 5 and extends into the inner side of the upper insulation component 3. The heating system 2 can use graphite as the heating element, or it can use an oxidation-resistant silicon carbide rod, or a metal molybdenum strip (or nickel strip), etc.

[0025] A support platform assembly 4 is provided at the bottom inside the upper insulation component 3. The support platform assembly 4 is fixed to the upper furnace body assembly 1 to place the product to be processed.

[0026] A set of guide components 9 and a set of power components 10 are connected to the top of the upper furnace body assembly 1. The drive end of the power component 10 at the top of the upper furnace body assembly 1 is connected to the upper movable insulation component 6. The upper movable insulation component 6 is slidably connected to the guide components 9 at the top of the upper furnace body assembly 1. The power component 10 at the top of the upper furnace body assembly 1 can drive the upper movable insulation component 6 to move up and down. The edge of the upper movable insulation component 6 is stepped, which is used to form a stepped seal with the upper edge of the upper insulation component 3. The power component 10 at the top of the upper furnace body assembly 1 can make the upper movable insulation component 6 engage with the upper insulation component 3 or open the upper movable insulation component 6. When the upper movable insulation component 6 is opened from the upper insulation component 3, an upper gas flow channel can be formed. The guide components 9 at the top of the upper furnace body assembly 1 provide a guiding function to prevent the upper movable insulation component 6 from tilting during the up and down movement, which would cause the cylinder to leak or fail to close when closed, thereby enhancing the repeatability and positioning accuracy.

[0027] A lower fixed insulation component 7 is provided at the top edge of the lower furnace body assembly 11. Both the inner and outer sides of the lower fixed insulation component 7 have stepped structures. The stepped structure on the outer side of the lower fixed insulation component 7 forms a stepped seal with the lower edge of the upper insulation component 3. A set of guide components 9 and a set of power components 10 are also connected to the bottom of the lower furnace body assembly 11. The drive end of the power component 10 at the bottom of the lower furnace body assembly 11 faces upwards and is connected to a lower movable insulation component 8. The edge of the lower movable insulation component 8 has a stepped structure, which forms a stepped seal with the stepped structure on the inner side of the lower fixed insulation component 7. When the drive end of the power component 10 at the bottom of the lower furnace body assembly 11 moves the lower movable insulation component 8 to its lowest position, the lower movable insulation component 8 and the lower fixed insulation component 7 are sealed and engaged. When the power component 10 at the bottom of the lower furnace body assembly 11 moves the lower movable insulation component 8 upwards, a lower gas flow channel is formed between the lower movable insulation component 8 and the lower fixed insulation component 7. The guide component 9 at the bottom of the lower furnace body assembly 11 also provides a guiding function to prevent the lower movable heat preservation assembly 8 from tilting during the up and down movement, which could cause the cylinder to leak air or fail to close when closed, thus enhancing the repeatability and positioning accuracy.

[0028] The upper movable insulation component 6, the lower fixed insulation component 7, and the lower movable insulation component 8 are all made of the same material as the upper insulation component 3. When the upper movable insulation component 6 and the lower movable insulation component 8 are all fastened together, a sealed insulation layer is formed by the upper movable insulation component 6, the lower fixed insulation component 7, the lower movable insulation component 8, and the upper insulation component 3.

[0029] In this embodiment, the power assembly 10 includes a support rod 101, a support frame 102, a welded corrugated pipe 103, and a power source 104. One end of the support rod 101 is connected to the upper movable insulation component 6 or the lower movable insulation component 8, and the other end of the support rod 101 is connected to the power source 104. The support frame 102 and the welded corrugated pipe 103 are connected to the upper furnace body component 1 or the lower furnace body component 11, and a sealing ring is provided in the middle for sealing. The welded corrugated pipe 103 is connected to the inner side of the support frame 102, and the welded corrugated pipe 103 is slidably connected to the support rod 101. The welded corrugated pipe 103 ensures that the support rod 101 can both extend and retract and be in a sealed state with the upper and lower furnace body components. The power source 104 provides power to the upper movable insulation component 6 and the lower movable insulation component 8. The power source can be a cylinder, an electric cylinder, or a hydraulic cylinder, etc.

[0030] The working principle of the vacuum furnace cooling structure proposed in this embodiment is as follows: After the vacuum furnace completes the steps of vacuuming, heating, and slow cooling under power, when the furnace temperature reaches 1500℃ (or the temperature of a lower vacuum furnace drops to 800℃), N2 or argon gas is introduced through the gas inlet on the lower furnace body assembly 11 until the furnace pressure reaches approximately 90000Pa. Then, the lower movable insulation assembly 8 and the upper movable insulation assembly 6 are opened. The gas introduced into the furnace will flow in a direction where hot gas rises and cold gas falls due to the alternation of hot and cold gases. The hot gas enters between the insulation assembly and the inner surface of the furnace through the channel opened by the upper movable insulation assembly 6, and then cools down by contacting the furnace wall of the upper furnace body assembly 1. The gradually cooling gas then enters the heating area through the channel opened by the lower movable insulation assembly 8, thus forming an internal circulation. During the cooling process, as the furnace temperature gradually decreases, the gas pressure gradually decreases. Gas is continuously introduced into the furnace during the process to maintain the furnace pressure at approximately 90000Pa.

[0031] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A vacuum furnace cooling structure, comprising an upper furnace body assembly (1) and a lower furnace body assembly (11), wherein the upper furnace body assembly (1) is located above the lower furnace body assembly (11), and a furnace cavity is formed inside when the upper furnace body assembly (1) and the lower furnace body assembly (11) are fitted together; the upper furnace body assembly (1) is provided with an upper heat insulation assembly (3) with openings at the top and bottom, characterized in that, It also includes an upper movable insulation component (6), a lower fixed insulation component (7) and a lower movable insulation component (8); a set of power components (10) is connected to the top of the upper furnace body component (1), and the drive end of the power component (10) at the top of the upper furnace body component (1) is connected to the upper movable insulation component (6). The upper movable insulation component (6) is engaged or disengaged from the upper insulation component (3) through the power component (10) at the top of the upper furnace body component (1). When the upper movable insulation component (6) is disengaged from the upper insulation component (3), an upper gas flow channel is formed. A lower fixed insulation component (7) is provided at the top edge of the lower furnace body assembly (11), and the outer side of the lower fixed insulation component (7) is sealed to the lower edge of the upper insulation component (3); another set of power components (10) is connected to the bottom of the lower furnace body assembly (11); the drive end of the power component (10) at the bottom of the lower furnace body assembly (11) is connected to the lower movable insulation component (8); the power component (10) at the bottom of the lower furnace body assembly (11) drives the lower movable insulation component (8) to seal and lock or separate from the lower fixed insulation component (7); after the lower movable insulation component (8) and the lower fixed insulation component (7) separate, a gas flow channel is formed below.

2. The vacuum furnace cooling structure according to claim 1, wherein The upper and lower edges of the upper insulation component (3) are both stepped structures; the edge of the upper movable insulation component (6) is stepped, which is used to form a stepped seal with the upper edge of the upper insulation component (3); the outer side of the lower fixed insulation component (7) is stepped, and the stepped structure on the outer side of the lower fixed insulation component (7) forms a stepped seal with the lower edge of the upper insulation component (3).

3. The vacuum furnace cooling structure according to claim 2, wherein The inner side of the lower fixed insulation component (7) is also a stepped structure, and the edge of the lower movable insulation component (8) is a stepped structure, forming a stepped seal with the stepped structure on the inner side of the lower fixed insulation component (7).

4. The vacuum furnace cooling structure of claim 1, wherein, The upper furnace body assembly (1) is internally fixedly connected to a heat insulation felt fixing assembly (5); the bottom of the heat insulation felt fixing assembly (5) is connected to the bottom of the upper furnace body assembly (1), and the upper heat insulation assembly (3) is fixedly connected to the inner wall of the heat insulation felt fixing assembly (5).

5. The vacuum furnace cooling structure according to claim 1, wherein A support platform assembly (4) is provided at the bottom inside the upper insulation component (3). The support platform assembly (4) is fixed to the upper furnace body assembly (1) for placing the products to be processed.

6. The vacuum furnace cooling structure according to claim 4, wherein The upper furnace body assembly (1) is connected to a heating system (2), which passes through the insulation felt fixing assembly (5) and extends into the inner side of the upper insulation assembly (3).

7. The vacuum furnace cooling structure of claim 1, wherein, A guide assembly (9) is connected to the top of the upper furnace body assembly (1), and the upper movable heat insulation assembly (6) is slidably connected to the guide assembly (9) at the top of the upper furnace body assembly (1).

8. The vacuum furnace cooling structure of claim 1, wherein, The bottom of the lower furnace body assembly (11) is connected to a guide assembly (9), and the lower movable heat insulation assembly (8) is slidably connected to the guide assembly (9) at the bottom of the lower furnace body assembly (11).

9. The vacuum furnace cooling structure of claim 1, wherein, The power assembly (10) includes a support rod (101), a support frame (102), a welded corrugated pipe (103), and a power source (104). One end of the support rod (101) is connected to the upper movable insulation component (6) or the lower movable insulation component (8), and the other end of the support rod (101) is connected to the power source (104). The support frame (102) and the welded corrugated pipe (103) are connected to the upper furnace body component (1) or the lower furnace body component (11), and a sealing ring is provided in the middle for sealing. The welded corrugated pipe (103) is connected to the inside of the support frame (102), and the welded corrugated pipe (103) is slidably connected to the support rod (101).

10. The vacuum furnace cooling structure of claim 1, wherein, Both the upper furnace body assembly (1) and the lower furnace body assembly (11) adopt a double-layer water-cooled structure.

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