A sensor adjustment structure and sensor assembly

Abstract

This utility model discloses a sensor adjustment structure and sensor assembly. The adjustment structure is used to mount a sensor on a cavity. The adjustment structure includes a fixing base, a base plate, a first fixing screw, and a set screw. The base plate has at least two first screw holes. The fixing base includes a connecting plate and a mounting plate. The connecting plate has multiple set screw holes and second screw holes corresponding to the first screw holes. The base plate is located on one side of the connecting plate, and one end of the first fixing screw can pass through the second screw hole and the first screw hole to connect with the cavity. The set screw is located in the set screw hole, and its bottom can abut against the base plate. The mounting plate is vertically connected to the lower end of the other side of the connecting plate. The mounting plate is used to mount the sensor. Through holes are also provided on the connecting plate and the base plate at the positions corresponding to the sensor. The structure provided by this utility model can be adapted to the installation of sensors in large-sized cavities, and the accuracy of sensor detection is increased by realizing angle adjustment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing accessories technology, and more specifically, to a sensor adjustment structure and a sensor assembly. Background Technology

[0002] In semiconductor manufacturing, precise wafer transfer is a crucial step in ensuring the quality of subsequent processes. The wafer transfer cavity, as the core structure for wafer transfer, requires specialized sensors to achieve real-time detection of the wafer's position. Currently, these sensors are typically used in conjunction with reflectors. The sensor emits a light signal to the reflector, which reflects the light signal back to the sensor's receiver. By analyzing the intensity and characteristics of the received light signal, the sensor determines the wafer's current position and transmits this position information to a robotic arm. The robotic arm then adaptively adjusts the wafer's position based on this information, ensuring the wafer accurately proceeds to the next process step.

[0003] However, as the semiconductor industry's demand for larger wafer sizes continues to increase, the size of wafer transfer cavities is also expanding. During the assembly of large-size wafer transfer cavities, the installation difficulty of the sensor and reflector increases, making it difficult to guarantee absolute coaxiality between them and easily leading to angular deviations. In scenarios where the distance between the sensor and reflector is small, this angular deviation has a relatively small impact on the light intensity at the sensor's receiving end, and the sensor can still stably acquire effective light signals, ensuring the accuracy of position detection. However, in large-size cavity scenarios, the distance between the sensor and reflector increases significantly. At this point, the impact of angular deviation on light signal transmission is drastically amplified, causing a significant attenuation of the light intensity acquired by the sensor's receiving end, and weakening its anti-interference capability, thus affecting the sensor's sensitivity in wafer position detection.

[0004] Therefore, it is necessary to provide a sensor adjustment structure that can solve the above problems. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a sensor adjustment structure to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A sensor adjustment structure is provided for mounting a sensor on a cavity. The adjustment structure includes a fixing base, a base plate, a first fixing screw, and a set screw. The base plate has at least two first screw holes. The fixing base includes: A connecting plate is provided with multiple set screw holes and a second screw hole corresponding to the first screw hole. A base plate is provided on one side of the connecting plate, and one end of the first fixing screw can pass through the second screw hole and the first screw hole and connect to the cavity. The set screw is provided in the set screw hole, and its bottom can abut against the base plate. The mounting plate is vertically connected to the lower end of the other side of the connecting plate. The mounting plate is used to mount and place the sensor. The connecting plate and the base plate are also provided with through holes at the positions corresponding to the sensor.

[0007] Furthermore, a baffle is formed at the upper end of the mounting plate, and the baffle is perpendicularly connected to the mounting plate and the connecting plate respectively.

[0008] Furthermore, an amplifier connector is also provided at the bottom of the mounting plate.

[0009] Furthermore, the adjustment structure also includes a second fixing screw, through which the amplifier connector is detachably connected to the bottom of the mounting plate.

[0010] Furthermore, the amplifier connector has a locking portion and a connection hole.

[0011] Furthermore, four set screws are provided, located at the four corners of the connecting plate.

[0012] This utility model also provides a sensor assembly, including a sensor, a reflector assembly, and any of the sensor adjustment structures described above. The reflector assembly includes a reflector mounting base and a reflector. The sensor is disposed on the mounting plate. The adjustment structure is detachably connected to one end of the cavity. The reflector is connected to the other end of the cavity through the reflector mounting base.

[0013] The beneficial effects of this utility model are as follows: The sensor adjustment structure provided by this utility model allows for sensor adjustment by mounting the sensor on a mounting plate, loosening the first fixing screw, and adjusting the set screw on the connecting plate to adjust the angle of the fixing base relative to the base plate, thereby adjusting the angle of the sensor. After adjusting to a suitable angle, the first fixing screw is tightened. This allows the light emitted from the sensor's emitting end to pass through the cavity and reach the reflector plate, where the reflector plate can reflect most of the light to the sensor's receiving end, improving the light intensity at the sensor's receiving end and increasing the accuracy of sensor detection. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0015] Figure 1 This is a schematic diagram of the sensor adjustment structure in this utility model.

[0016] Figure 2 This is a schematic diagram of the sensor adjustment structure from another perspective in this utility model.

[0017] Figure 3 This is a structural schematic diagram of the fixed base in this utility model.

[0018] Figure 4 This is a schematic diagram of the fixed base from another perspective in this utility model.

[0019] Figure 5 This is a schematic diagram of the sensor assembly in use in this utility model.

[0020] Figure 6 This is a schematic diagram of the reflector assembly in this utility model.

[0021] Explanation of reference numerals in the attached figures: 100. Adjustment structure; 1. Fixing base; 11. Connecting plate; 111. Set screw hole; 112. Second screw hole; 113. Through hole; 12. Mounting plate; 13. Baffle; 14. Amplifier connector; 141. Locking part; 142. Connecting hole; 2. Base plate; 21. First screw hole; 3. First fixing screw; 4. Set screw; 5. Second fixing screw; 200. Cavity; 300. Reflector assembly; 310. Reflector mounting base; 320. Reflector; 400, sensor; 500, amplifier. Detailed Implementation

[0022] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0023] Example 1 refer to Figures 1 to 6As shown, this embodiment specifically discloses a sensor adjustment structure for mounting a sensor 400 on a cavity 200 (such as the cavity of a transmission cavity). The sensor 400 can be of various types, such as a reflective sensor, a through-beam sensor, and other types of sensors. The adjustment structure 100 includes a fixing base 1, a base plate 2, a first fixing screw 3, and a set screw 4. The base plate 2 has at least two first screw holes 21. In the illustrated embodiment, there are two first screw holes 21, located on the left and right sides of the base plate 2, respectively. In this embodiment, the fixing base 1 includes: The connecting plate 11 has multiple set screw holes 111 and second screw holes 112 corresponding to the first screw holes 21. The base plate 2 is disposed on one side of the connecting plate 11, and one end of the first fixing screw 3 can pass through the second screw hole 112 and the first screw hole 21 and then connect to the cavity 200. The set screw 4 is disposed in the set screw hole 111, and its bottom can abut against the base plate 2. Mounting plate 12 is vertically connected to the lower end of the other side of connecting plate 11. Mounting plate 12 is used to mount sensor 400. Through holes 113 are also provided on connecting plate 11 and base plate 2 at positions corresponding to sensor 400.

[0024] Specifically, the base plate 2 is initially connected to the cavity 200 by a first fixing screw 3 passing through its own first screw hole 21 and the second screw hole 112 of the connecting plate 11 (the first fixing screw 3 is not tightened). At this time, there is room for fine adjustment in the relative position of the fixing seat 1 and the base plate 2; the mounting plate 12 of the fixing seat 1 is vertically connected to the lower end of the other side of the connecting plate 11 for mounting the sensor 400; the through holes 113 on the connecting plate 11 and the base plate 2 provide a channel for the optical signal transmission of the sensor.

[0025] Multiple set screws 4 are screwed into the set screw holes 111 of the connecting plate 11, with their bottoms abutting against the base plate 2. When the set screws 4 are rotated, they move axially, pushing or pulling the connecting plate 11 to deflect slightly relative to the base plate 2. Since the mounting plate 12 is perpendicularly connected to the connecting plate 11, the angular deflection of the connecting plate will cause the mounting plate 12 and the sensor 400 above it to deflect synchronously, ultimately achieving precise adjustment of the light angle at the sensor's emitting end, aligning it with the optical axis of the reflector.

[0026] In this embodiment, by precisely fine-tuning multiple set screws, the light emitted from the sensor's transmitting end can be strictly aligned with the reflector. Even in large-sized cavity scenarios where the distance between the sensor and the reflector is large, sufficient light intensity at the sensor's receiving end can be guaranteed, thus improving detection accuracy.

[0027] In the illustrated embodiment, four set screws 4 are provided, located at the four corners of the connecting plate 11, facilitating fine-tuning at multiple angles. In some other embodiments, the set screws can have different numbers and arrangements to accommodate different directional angle adjustment needs.

[0028] Continue to refer to Figure 3 and Figure 4 As shown, a baffle 13 is also formed on the upper end of the mounting plate 12. The baffle 13 is perpendicularly connected to the mounting plate 12 and the connecting plate 11 respectively. Specifically, the baffle 13, the mounting plate 12 and the connecting plate 11 are integrally formed structures, which can ensure the overall structural strength. By setting the baffle 13, the sensor 400 can be protected to a certain extent.

[0029] In some embodiments, an amplifier connector 14 is also provided at the bottom of the mounting plate 12; in order to improve the signal strength of the sensor, the sensor assembly is generally provided with an amplifier connected to the sensor, which is used to amplify and process the signal received by the sensor so that it can be read by subsequent devices; therefore, an amplifier connector 14 for connecting the amplifier is provided on the mounting plate 12.

[0030] In some preferred embodiments, the amplifier connector 14 is detachably connected to the bottom of the mounting plate 12 by a second fixing screw 5, which facilitates disassembly or replacement in situations where it is not needed.

[0031] Continue to combine Figure 4 As shown, the amplifier connector 14 also has a locking part 141 and a connecting hole 142. The locking part 141 is formed at both ends of the amplifier connector 14 on the side away from the base plate 2, and is used to initially lock it into the amplifier during amplifier installation, and then achieve detachable connection and fixation of the amplifier by passing screws through the connecting hole 142.

[0032] Example 2 Continue to refer to Figures 1 to 6 As shown, this embodiment provides a sensor assembly, including a sensor 400, a reflector assembly 300, an amplifier 500, and a sensor adjustment structure 100 of any one of the embodiments in 1. The reflector assembly 300 includes a reflector fixing seat 310 and a reflector 320. The adjustment structure 100 is detachably connected to one end of the cavity 200, and the reflector 320 is connected to the other end of the cavity 200 through the reflector fixing seat 310.

[0033] Specifically, the sensor adjustment structure 100 is detachably connected to one end of the cavity 200 via the base plate 2 and the first fixing screw 3. The sensor 400 is fixed on the mounting plate 12 of the adjustment structure 100, with its optical signal transmitting end and receiving end facing the inside of the cavity 200. The reflector assembly 300 is correspondingly connected to the other end of the cavity 200 via the reflector fixing seat 310. The reflective surface of the reflector 320 is directly opposite to the optical axis of the sensor 400, forming an optical signal transmission path of "sensor → cavity space → reflector". If there is an angular deviation between the sensor 400 and the reflector 320 (such as due to installation error or cavity vibration), the four corner screws 4 of the structure 100 can be adjusted for fine-tuning: rotating the screws pushes the connecting plate 11 to deflect, which drives the mounting plate 12 and the sensor 400 to adjust their angles synchronously until the light signal emitted by the sensor can be accurately projected onto the effective reflection area of ​​the reflector 320; the reflector fixing seat 310 provides rigid support for the reflector 320 to prevent the reflector from shifting itself, and works with the sensor to ensure long-term alignment of the optical axis.

[0034] In large cavities, the large distance between the sensor and the reflector means that even a small angular deviation can cause light signal offset. However, in this embodiment, by adjusting the structural design, the angle of the sensor after installation can be adjusted. This allows the reflector to reflect most of the light emitted from the sensor's transmitter to the sensor receiver, increasing the light intensity at the receiver and improving detection accuracy. This solves the problem in large cavities where, after sensor installation, the angular deviation becomes increasingly significant as the distance between the sensor and the reflector increases, leading to insufficient light intensity at the receiver and susceptibility to interference, resulting in inaccurate detection.

[0035] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0036] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0037] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A sensor adjustment structure for mounting a sensor (400) on a cavity (200), characterized by, The adjusting structure (100) comprises a fixing base (1), a bottom plate (2), a first fixing screw (3) and a jackscrew (4), at least two first screw holes (21) are formed in the bottom plate (2); The fixing base (1) comprises: A connecting plate (11), a plurality of jackscrew holes (111) and second screw holes (112) corresponding to the first screw holes (21) are formed in the connecting plate (11), the bottom plate (2) is arranged on one side of the connecting plate (11), and one end of the first fixing screw (3) can be connected with the cavity (200) after penetrating through the second screw hole (112) and the first screw hole (21); the jackscrew (4) is arranged in the jackscrew hole (111), and the bottom can abut against the bottom plate (2); An installation plate (12) is vertically connected to the lower end of the other side of the connecting plate (11), the installation plate (12) is used for mounting a sensor (400), and a through hole (113) is further formed in the connecting plate (11) and the bottom plate (2) at a position corresponding to the sensor (400).

2. The sensor adjustment structure according to claim 1, characterized by, The upper end of the installation plate (12) is further formed with a baffle (13), and the baffle (13) is vertically connected with the installation plate (12) and the connecting plate (11) respectively.

3. The sensor adjustment structure according to claim 1, characterized by, The bottom of the installation plate (12) is further provided with an amplifier connecting piece (14).

4. The sensor adjustment structure according to claim 3, characterized by The adjusting structure (100) further comprises a second fixing screw (5), and the amplifier connecting piece (14) is detachably connected to the bottom of the installation plate (12) through the second fixing screw (5).

5. The sensor adjustment structure according to claim 3, characterized by The amplifier connecting piece (14) is formed with a clamping portion (141) and a connecting hole (142).

6. The sensor adjustment structure according to claim 1, characterized by The jackscrew (4) is provided with four jackscrews, which are respectively located at four corners of the connecting plate (11).

7. A sensor assembly characterized by, The sensor (400), the reflector plate assembly (300), the amplifier (500) and the sensor adjusting structure (100) of any one of claims 1-6 are provided, the reflector plate assembly (300) comprises a reflector plate fixing base (310) and a reflector plate (320), the adjusting structure (100) is detachably connected to one end of the cavity (200), and the reflector plate (320) is connected to the other end of the cavity (200) through the reflector plate fixing base (310).

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