A Leak fixture for testing target backplates

Abstract

This invention provides a leak testing fixture for target backplates, comprising an outer frame with a testing platform in the middle. A support platform for supporting the target backplate is rotatably connected to the top surface of the testing platform. A rotation drive device is located on the lower side of the testing platform, and the rotation drive device is driven to connect with the support platform. A flatness detector is mounted on the top of the outer frame. A sealing groove is provided on the top surface of the support platform, extending along its outer edge, and a sealing ring is installed within the groove. An air extraction hole is provided on the top surface of the support platform, and an air outlet is provided on the side wall of the support platform. The air extraction hole and the air outlet communicate with each other, and the air outlet is connected to a vacuum pump via an air pipe. A composite sensor is connected in series between the air outlet and the vacuum pump via an air pipe. This invention can simultaneously complete leak testing and flatness detection, simplifying the testing process, shortening testing time, avoiding the risks of multiple handling operations, quickly identifying micro-cracks, and rapidly determining the vacuum stability of the target backplate, thus improving testing efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a target backplate testing Leak fixture. Background Technology

[0002] In semiconductor sputtering coating processes, the target assembly is a critical consumable, formed by bonding the target and a backplate through processes such as diffusion bonding. The backplate not only supports the target but also, through its intricate internal water channel structure, plays a crucial role in dissipating the significant heat generated during sputtering and ensuring process stability. Therefore, the sealing performance of the backplate and the flatness of the bearing surface bonded to the target are key indicators directly determining the quality, lifespan, and even the overall chip manufacturing yield of the target assembly. Currently, leakage detection and flatness testing of the backplate are typically separate processes. Operators must first move the backplate to a leakage detection station for a vacuum pressure test; then, it is hoisted to a flatness testing platform for flatness measurement. This double clamping and positioning not only consumes considerable time and reduces production efficiency but also introduces risks of impacts, scratches, and even deformation during hoisting and handling.

[0003] Therefore, the above problems urgently need to be solved. Utility Model Content

[0004] Purpose of the utility model: In order to overcome the above shortcomings, this utility model provides a target backplate testing Leak fixture, which can simultaneously complete leakage testing and flatness detection, simplify the testing process, shorten the testing time, avoid the risk of multiple handling, quickly identify micro-cracks, quickly determine the vacuum stability of the target backplate, and improve testing efficiency.

[0005] Technical Solution: To achieve the above objectives, this utility model provides a Leak fixture for testing target backsheets, including an outer frame with a test platform in the middle, forming a test cavity on the upper side of the test platform. A support platform for supporting the target backsheet is rotatably connected to the top surface of the test platform. A rotation drive device is located on the lower side of the test platform, and the rotation drive device is drivenly connected to the support platform. A flatness detector is installed at the top of the outer frame. The flatness detector is located on the upper side of the support platform and is used to detect the flatness of the target backsheet. A sealing groove is provided on the top surface of the support platform, along its outer edge, and a sealing ring is provided inside the groove. An air extraction hole is provided on the top surface of the support platform, and an air outlet is provided on the side wall of the support platform. The air extraction hole and the air outlet communicate with each other, and the air outlet is connected to a vacuum pump via an air pipe. A composite sensor is connected in series between the air outlet and the vacuum pump via an air pipe. The Leak fixture is an airtightness testing fixture.

[0006] The utility model is used for the sealing performance test and flatness test of the target backplane. The test process includes: First, the robotic arm places the target backplane on the bearing platform, ensuring that the sealing ring in the sealing groove fits tightly with the backplane to form a sealed cavity. Second, start the vacuum pump, and perform a vacuum pumping operation on the test cavity through the air outlet and the air extraction hole. At the same time, use a series-connected composite sensor to monitor the vacuum value in real time until it drops to the set value, and then stop the vacuum pumping. Then start the rotation drive device to drive the bearing platform to rotate, so that the target backplane rotates evenly. The flatness detector scans the surface of the backplane in the horizontal direction to measure its flatness data. After maintaining the pressure for a certain period of time, compare the vacuum values before and after pressure maintenance to determine whether there is leakage in the backplane. Start the rotation drive device again, scan the surface of the backplane, and compare the flatness data before and after pressure maintenance. If the change in flatness data ≤ 0.8μm, there are no new microcracks, and the vacuum stability is determined to be qualified. Otherwise, it is unqualified.

[0007] The utility model can simultaneously complete the leakage test and flatness detection, simplify the test process, shorten the detection time, avoid the risk of multiple handling, quickly identify microcracks, quickly judge the vacuum stability of the target backplane, and improve the test efficiency.

[0008] Further, in the above-mentioned target backplane test Leak fixture, a horizontal drive device is connected to the top end of the outer frame. The horizontal drive device is drivingly connected to the flatness detector, and the horizontal drive device drives the flatness detector to move horizontally. Setting the horizontal drive device to drive the flatness detector to move horizontally can enable the flatness detector to completely cover the surface of the target backplane, achieve multi-point scanning, and improve the detection accuracy.

[0009] Further, in the above-mentioned target backplane test Leak fixture, the horizontal drive device includes a cross beam connected to the top end of the outer frame. A slide rail is connected to the bottom surface of the cross beam. A slide table is provided below the cross beam, and the slide table is slidably connected to the slide rail through a slider. A screw rod is provided in a groove provided along the cross beam. The two ends of the screw rod are rotatably connected in baffles provided at both ends of the cross beam. A horizontal drive motor is installed outside the baffle provided at one end of the cross beam, and the horizontal drive motor is drivingly connected to the screw rod. The screw rod is drivingly connected to the slide table through a bushing. The above structure can drive the flatness detector to move precisely horizontally along the cross beam. Combined with the rotatable bearing platform, it ensures that its scanning trajectory covers the entire待测 surface of the target backplane on the bearing platform, eliminates the detection blind area, and obtains comprehensive and continuous surface flatness data.

[0010] Furthermore, in the aforementioned Leak fixture for testing target backplates, the rotary drive device includes a rotary gearbox and a rotary drive motor. The motor shaft of the rotary drive motor is driven to the input shaft of the rotary gearbox, and the output shaft of the rotary gearbox is driven to the support platform. The rotary gearbox employs a reduction gear design to increase output torque and reduce speed, ensuring smooth and controllable rotation of the support platform. The rotary drive motor is selected as a stepper motor or servo motor, and the rotation angle and speed are precisely adjusted through an external control system. Combined with the movement of the horizontal drive device, this enables the flatness tester to perform a full-range scan of the target backplate surface, completely eliminating blind spots and improving the continuity and reliability of data acquisition.

[0011] Furthermore, in the aforementioned Leak fixture for testing the target backplate, the rotary gearbox is a worm gearbox. The worm gearbox has a self-locking characteristic, effectively preventing the support platform from rotating unexpectedly when the motor stops, ensuring safety and stability during the testing process.

[0012] Furthermore, in the aforementioned Leak fixture for testing target backplates, adjustable feet are provided at the four corners of the bottom of the outer frame. Each adjustable foot includes a support plate connected to the bottom of the outer frame. Rollers and adjustable feet are connected to the bottom surface of the support plate. A support plate gearbox and a drive motor are connected to the top surface of the support plate. The adjustable feet include a lifting shaft and a base. The base is connected to the lower end of the lifting shaft. The support plate gearbox contains meshing input and output gears. The lifting shaft passes sequentially through the support plate and the support plate gearbox. The lifting shaft and the output gear in the support plate gearbox are coaxially threaded together. The drive motor is connected to the top surface of the support plate gearbox, and its motor shaft extends into the support plate gearbox. The motor shaft and the input gear in the support plate gearbox are drive-connected. When the Leak fixture needs to be moved, the drive motor starts, rotating the input gear, which in turn drives the output gear. The output gear engages with the threaded connection of the lifting shaft, causing it to rise, thus lifting the base off the ground and allowing it to move via the rollers. When testing is required, the drive motor starts, driving the lifting shaft downwards via the gearbox until the chassis firmly contacts the ground and lifts the entire equipment, causing the rollers to detach from the ground, thus achieving stable support for the equipment. Adjustable support feet work in conjunction with the rollers to enable flexible movement and stable positioning of the Leak fixture, avoiding vibration interference during testing. The drive motors located at the four corners are synchronously controlled by a central controller. The controller sends unified command signals to the four drive motors, ensuring that each motor receives start, stop, and direction commands synchronously, ensuring the chassis smoothly detaches from the ground, effectively preventing equipment swaying, and ensuring that the four corners of the Leak fixture are at the same height during testing, enhancing overall stability.

[0013] Furthermore, in the aforementioned Leak fixture for testing target backplates, a flexible pad is connected to the bottom surface of the chassis. This flexible pad is made of elastic rubber material, which can absorb impact force during testing, reduce vibration transmission, and ensure uniform contact between the chassis and the ground, thereby improving overall stability and testing accuracy.

[0014] Furthermore, in the aforementioned Leak fixture for testing the target backplate, the flatness tester is set as a laser planar interferometer.

[0015] As can be seen from the above technical solution, this utility model has the following beneficial effects: The target backplate testing Leak fixture of this utility model can drive the flatness detector horizontally via a horizontal drive device, and combined with a rotary drive device to rotate the support platform, achieves full coverage measurement of the target backplate surface without blind spots, ensuring the comprehensiveness and continuity of flatness data. Adjustable feet control the lifting and lowering of the chassis via a drive motor, enabling rapid and smooth switching between the moving and testing states. This utility model integrates vacuum leak testing and flatness detection functions into one unit, completing the testing of two key indicators with a single clamping, avoiding the damage risks caused by multiple handling and positioning in traditional step-by-step testing, shortening the testing cycle, and improving testing efficiency and product yield control. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the Leak fixture for testing the target backplate of this utility model; Figure 2 This is a schematic diagram of the structure of the support platform; Figure 3 This is a schematic diagram of the structure of the horizontal drive device; Figure 4 This is a schematic diagram of the structure of the rotary drive device; Figure 5 for Figure 4 A magnified view of a portion of the image.

[0017] In the diagram: 1. Test bench, 2. Support platform, 21. Sealing groove, 22. Air extraction hole, 23. Air outlet, 3. Rotary drive device, 31. Rotary gearbox, 32. Rotary drive motor, 4. Flatness tester, 5. Horizontal drive device, 51. Crossbeam, 52. Slide rail, 53. Slide table, 54. Lead screw, 55. Baffle, 56. Horizontal drive motor, 6. Adjustable feet, 61. Support plate, 62. Roller, 63. Adjustable support feet, 631. Lifting shaft, 632. Chassis, 64. Support foot gearbox, 65. Drive motor, 100. Outer frame. Detailed Implementation

[0018] Example 1 like Figure 1-2The target backplate testing Leak fixture shown includes an outer frame 100, with a test platform 1 in the middle of the outer frame 100, forming a test cavity on the upper side of the test platform 1. A support platform 2 for supporting the target backplate is rotatably connected to the top surface of the test platform 1. A rotation drive device 3 is located on the lower side of the test platform 1, and the rotation drive device 3 is drivenly connected to the support platform 2. A flatness detector 4 is mounted on the top of the outer frame 100. The flatness detector 4 is located on the upper side of the support platform 2 and is used to detect the flatness of the target backplate. A sealing groove 21 is provided on the top surface of the support platform 2, and the sealing groove 21 is set along the outer edge of the support platform 2. A sealing ring is provided inside the sealing groove 21. An air extraction hole 22 is provided on the top surface of the support platform 2, and an air outlet 23 is provided on the side wall of the support platform 2. The air extraction hole 22 and the air outlet 23 communicate with each other. The air outlet 23 is connected to a vacuum pump through an air pipe, and a composite sensor is connected in series between the air outlet 23 and the vacuum pump through an air pipe. Leak fixtures are for airtightness testing. The composite sensor includes two types of vacuum gauges: a capacitance film gauge and a cold cathode ionization gauge.

[0019] In this embodiment, a horizontal drive device 5 is connected to the top of the outer frame 100. The horizontal drive device 5 is connected to the flatness detector 4 and drives the flatness detector 4 to move horizontally.

[0020] like Figure 3 The target backplate testing Leak fixture shown includes a horizontal drive device 5 comprising a crossbeam 51 connected to the top of the outer frame 100. A slide rail 52 is connected to the bottom surface of the crossbeam 51. A slide table 53 is provided on the lower side of the crossbeam 51, and the slide table 53 is slidably connected to the slide rail 52 via a slider. A lead screw 54 is provided within a groove along the crossbeam 51. Both ends of the lead screw 54 are rotatably connected to baffles 55 provided at both ends of the crossbeam 51. A horizontal drive motor 56 is mounted on the outside of the baffle 55 at one end of the crossbeam 51, and the horizontal drive motor 56 is drivenly connected to the lead screw 54. The lead screw 54 is drivenly connected to the slide table 53 via a bushing.

[0021] like Figure 4 The target backplate testing Leak fixture shown includes a rotary drive unit 3 comprising a rotary gearbox 31 and a rotary drive motor 32. The motor shaft of the rotary drive motor 32 is driven to the input shaft of the rotary gearbox 31, and the output shaft of the rotary gearbox 31 is driven to the support platform 2. The rotary gearbox 31 employs a reduction gear design to increase output torque and reduce speed, ensuring smooth and controllable rotation of the support platform 2. The rotary drive motor 32 can be a stepper motor or a servo motor.

[0022] In this embodiment, the rotary gearbox 31 is configured as a worm gearbox.

[0023] like Figure 5The target backplate testing Leak fixture shown has adjustable feet 6 at the four corners of the bottom of the outer frame 100. Each adjustable foot 6 includes a support plate 61 connected to the bottom of the outer frame 100. Rollers 62 and adjustable support feet 63 are connected to the bottom surface of the support plate 61. A support foot gearbox 64 and a drive motor 65 are connected to the top surface of the support plate 61. The adjustable support foot 63 includes a lifting shaft 631 and a base 632. The base 632 is connected to the lower end of the lifting shaft 631. The support foot gearbox 64 contains meshing input and output gears. The lifting shaft 631 passes through the support plate 61 and the support foot gearbox 64 in sequence. The lifting shaft 631 and the output gear in the support foot gearbox 64 are coaxially threaded together. The drive motor 65 is connected to the top surface of the support foot gearbox 64, and the motor shaft of the drive motor 65 extends into the support foot gearbox 64. The motor shaft of the drive motor 65 is driven by the input gear in the support foot gearbox 64. When the Leak fixture needs to be moved, the drive motor 65 starts, driving the input gear to rotate, which in turn drives the output gear to rotate. The output gear engages with the threaded connection of the lifting shaft 631, causing the lifting shaft 631 to rise, thus lifting the chassis 632 off the ground and allowing it to move via the rollers 62. When testing is required, the drive motor 65 starts, driving the lifting shaft 631 downwards via the gearbox 64 until the chassis 632 firmly contacts the ground and lifts the entire equipment, causing the rollers 62 to leave the ground, thus achieving stable support for the equipment. The adjustable support feet 63 work in conjunction with the rollers 62 to achieve flexible movement and stable positioning of the Leak fixture, avoiding vibration interference during testing. The drive motors 65 located at the four corners are synchronously controlled by the central controller. The controller sends unified command signals to the four drive motors 65 to ensure that each motor receives start, stop, and direction commands synchronously, ensuring that the chassis 632 smoothly leaves the ground, effectively preventing equipment shaking, ensuring that the four corners of the Leak fixture are at the same height during testing, and enhancing overall stability.

[0024] In this embodiment, a flexible pad is connected to the bottom surface of the chassis 632. The flexible pad is made of elastic rubber material.

[0025] In this embodiment, the flatness detector 4 is set as a laser plane interferometer.

[0026] This invention is used for sealing and flatness testing of target backplates. The testing process includes: placing the target backplate onto the support platform 2 using a robotic arm, aligning the target backplate and the support platform 2 to ensure effective sealing of the sealing ring. A vacuum pump is started, and a vacuum is created in the sealed cavity formed between the backplate and the support platform 2 through the evacuation port 22 and the outlet port 23. Once the vacuum level reaches a set threshold (e.g., 0.1 Pa), the vacuum pump valve is closed, and pressure is maintained. Simultaneously, a rotary drive device 3 is started, driving the support platform 2 to rotate at a constant speed. A horizontal drive device 5 is also started synchronously, with a horizontal drive motor 56 driving a lead screw 54 to rotate, causing the slide table 53 and the flatness testing instrument 4 mounted on it to move horizontally along the crossbeam 51. Under the combined motion of horizontal movement and the rotation of the support platform 2, the flatness testing instrument 4 performs a spiral trajectory scan on the surface of the target backplate, collecting surface morphology data.

[0027] The pressure holding period is preset (e.g., 12 hours), during which the vacuum level is continuously monitored and recorded by a composite sensor. After the pressure holding period ends, the change in vacuum level before and after the pressure holding period is compared. If the change exceeds the allowable range (e.g., ≤5%), it is determined that there is a leak in the back panel.

[0028] After confirming that the vacuum stability is qualified, the rotary drive device 3 and the horizontal drive device 5 are restarted to perform a spiral trajectory scan on the target back plate surface and collect the surface morphology data. The flatness data obtained before and after pressure holding are compared. If the maximum change is ≤0.8μm, it is determined that there are no new microcracks and the flatness stability is qualified. If any test item fails, the entire test is deemed unqualified. All test items can be completed without moving the workpiece.

[0029] The above embodiments are exemplary and are intended to illustrate the technical concept and features of this utility model, so that those skilled in the art can understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the scope of protection of this utility model.

Claims

1. A target backing plate test Leak fixture, characterized by: The test includes an outer frame (100), a test platform (1) in the middle of the outer frame (100), and the outer frame (100) encloses the upper side of the test platform (1) to form a test cavity; the top surface of the test platform (1) is rotatably connected to a support platform (2) for supporting the target back plate; a rotation drive device (3) is provided on the lower side of the test platform (1), and the rotation drive device (3) and the support platform (2) are drivenly connected; a flatness detector (4) is installed at the top of the outer frame (100); the flatness detector (4) is located on the support platform (2). The upper side is used to detect the flatness of the target back plate; the top surface of the support platform (2) is provided with a sealing groove (21), the sealing groove (21) is set along the outer edge of the support platform (2), and a sealing ring is provided in the sealing groove (21); the top surface of the support platform (2) is provided with an air extraction hole (22), the side wall of the support platform (2) is provided with an air outlet (23), the air extraction hole (22) and the air outlet (23) are connected, the air outlet (23) and the vacuum pump are connected through an air pipe, and a composite sensor is connected in series between the air outlet (23) and the vacuum pump through an air pipe.

2. The target backing plate test Leak fixture of claim 1, wherein: The top of the outer frame (100) is connected to a horizontal drive device (5), which is connected to the flatness detector (4) and drives the flatness detector (4) to move horizontally.

3. The target backing plate test Leak fixture of claim 2, wherein: The horizontal drive device (5) includes a crossbeam (51) connected to the top of the outer frame (100); a slide rail (52) is connected to the bottom surface of the crossbeam (51); a slide table (53) is provided on the lower side of the crossbeam (51), and the slide table (53) is slidably connected to the slide rail (52) by a slider; a lead screw (54) is provided in a groove along the crossbeam (51); the two ends of the lead screw (54) are rotatably connected to the baffles (55) provided at both ends of the crossbeam (51); a horizontal drive motor (56) is installed on the outside of the baffle (55) provided at one end of the crossbeam (51), and the horizontal drive motor (56) and the lead screw (54) are drivenly connected; the lead screw (54) is drivenly connected to the slide table (53) through a bushing.

4. The target backing plate test Leak fixture of claim 1, wherein: The rotary drive device (3) includes a rotary gearbox (31) and a rotary drive motor (32); the motor shaft of the rotary drive motor (32) is driven to the input shaft of the rotary gearbox (31), and the output shaft of the rotary gearbox (31) is driven to the support platform (2).

5. The target backing plate test Leak fixture of claim 4, wherein: The rotary gearbox (31) is configured as a worm gearbox.

6. The target backing plate test Leak fixture of claim 1, wherein: The outer frame (100) has adjustable feet (6) at its four bottom corners. Each adjustable foot (6) includes a support plate (61) connected to the bottom of the outer frame (100). The bottom surface of the support plate (61) is connected to a roller (62) and an adjustable support foot (63). The top surface of the support plate (61) is connected to a support foot gearbox (64) and a drive motor (65). The adjustable support foot (63) includes a lifting shaft (631) and a base (632). The base (632) is connected to the lower end of the lifting shaft (631). The gearbox (64) is equipped with an input gear and an output gear that mesh with each other; the lifting shaft (631) passes through the support plate (61) and the support gearbox (64) in sequence, and the lifting shaft (631) and the output gear of the support gearbox (64) are coaxially threaded together; the drive motor (65) is connected to the top surface of the support gearbox (64), and the motor shaft of the drive motor (65) extends into the support gearbox (64); the motor shaft of the drive motor (65) and the input gear of the support gearbox (64) are driven together.

7. The target backing plate test Leak fixture of claim 6, wherein: The bottom surface of the chassis (632) is connected to a flexible pad.

8. The target backing plate test Leak fixture of claim 1, wherein: The flatness tester (4) is set as a laser plane interferometer.

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