A quick-release and detachable vacuum-coated infrared temperature measurement component

Abstract

This utility model discloses a quick-release and detachable infrared temperature measurement component for vacuum coating, relating to the field of high-temperature vacuum coating equipment technology. It includes an infrared glass cover, high-purity quartz glass, an observation window welded component, an infrared observation welding component, an infrared adjustment base, and an infrared mounting plate. The high-purity quartz glass is located between the infrared glass cover and the observation window welded component. One end of the infrared observation welding component is connected to the vacuum coating furnace body, and the other end is connected to the end of the observation window welded component away from the high-purity quartz glass via a vacuum ball valve. An infrared adjustment base is located above the infrared observation welding component, and the infrared adjustment base is connected to the infrared mounting plate, which is located above the infrared glass cover and is used to place and fix the infrared temperature measuring instrument. This utility model enhances the adjustability of the temperature measurement component and solves the technical problem of inaccurate infrared temperature measurement during the operation of vacuum coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature vacuum coating equipment technology, specifically a quick-release and detachable vacuum coating infrared temperature measurement component. Background Technology

[0002] In the field of high-temperature vacuum coating equipment, the furnace design temperature typically needs to reach over 2000 degrees Celsius. Using only thermocouples as temperature measuring devices is prone to inaccuracies. Infrared temperature measuring components are a common choice for technicians.

[0003] Traditional techniques involve creating openings in the furnace body, embedding a high-purity quartz glass plate within it, and then installing an external infrared support. However, contamination of the high-purity quartz glass plate can affect the accuracy of the infrared temperature sensing component. Furthermore, since the high-purity quartz glass plate is mounted on the furnace body, it needs to be disassembled and cleaned after the process is complete, which is extremely inconvenient. In addition, due to installation and manufacturing errors, the infrared temperature sensing component typically requires adjustment and alignment during measurement. Therefore, a detachable and adjustable infrared temperature sensing component needs to be designed. Utility Model Content

[0004] This invention overcomes the shortcomings of existing technologies by proposing a quick-release and detachable infrared temperature measurement component for vacuum coating equipment. It solves the technical problems of difficult adjustment of infrared temperature measurement components in vacuum coating equipment, inaccurate temperature measurement after prolonged use, and inaccurate infrared temperature measurement due to dust accumulation on the quartz glass plate during operation of the vacuum coating equipment.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: A quick-release vacuum-coated infrared temperature measurement component includes an infrared glass cover, high-purity quartz glass, an observation window welded component, an infrared observation welded component, an infrared adjustment base, and an infrared mounting plate. High-purity quartz glass is located between the infrared glass cover and the observation window welded component. The infrared glass cover and the observation window welded component are connected and fix the high-purity quartz glass. One end of the infrared observation welding assembly is connected to the vacuum coating furnace body, and the other end of the infrared observation welding assembly is connected to the end of the observation window welded component away from the high-purity quartz glass by a vacuum ball valve. An infrared adjustment base is set above the infrared observation welding assembly. The infrared adjustment base is connected to the infrared mounting plate by bolts. The infrared mounting plate is located above the infrared glass cover and is used to place and fix the infrared temperature measuring instrument.

[0006] Furthermore, it also includes an infrared connection base plate and a guide shaft support; the infrared connection base plate is connected to the infrared observation welding assembly, the bottom of the guide shaft support is connected to the infrared connection base plate by bolts, and the infrared adjustment base is connected to the top of the guide shaft support by bolts.

[0007] Furthermore, the infrared observation welding assembly includes a circular second flange with circumferentially distributed through holes, which is used to connect to the vacuum coating furnace body; the infrared connection base plate is provided with circular holes, which are connected to the through holes on the second flange by bolts.

[0008] Furthermore, the infrared observation welding assembly also includes a second KF connector, which is welded to a second flange; the observation window welding component includes a first flange and a first KF connector, which are welded to the first KF connector, and a vacuum ball valve is connected between the second KF connector and the first KF connector, and the first KF connector is connected to high-purity quartz glass.

[0009] Furthermore, the infrared glass cover is annular, and a first rectangular groove is formed on the bottom surface of the infrared glass cover; a second rectangular groove is formed on the top surface of the observation window welded component; when the infrared glass cover is fastened to the observation window welded component, the space formed in the first rectangular groove and the second rectangular groove matches the high-purity quartz glass and is used to place the high-purity quartz glass.

[0010] Furthermore, O-rings are provided in both the first and second rectangular grooves.

[0011] Furthermore, the infrared adjustment base has protrusions on both sides, each protrusion having two threaded holes, and the tightening bolts lock the infrared mounting plate through the threaded holes on both sides.

[0012] Furthermore, the infrared adjustment base is provided with an elongated hole in the x-axis direction, and the infrared mounting plate is provided with an elongated hole in the y-axis direction. A fixing bolt is connected inside the elongated hole in the y-axis direction on the infrared mounting plate.

[0013] Furthermore, the infrared mounting plate has four threaded holes, and adjusting bolts are connected to these four threaded holes. The infrared mounting plate is pressed against the infrared adjustment base in an inclined state by adjusting bolts of different lengths.

[0014] Furthermore, a circular perforated bracket is provided on one side of the infrared mounting plate, which is used to place and fix the infrared temperature measuring instrument.

[0015] The beneficial effects of this utility model compared to the prior art are as follows: 1. The infrared mounting plate on the detachable infrared temperature measuring component of this utility model is connected to the infrared adjustment base by bolts. There are four screws on the upper surface of the infrared mounting plate. The tilt and height of the infrared can be adjusted by rotating the screws. There are two screws on each side of the infrared adjustment base. The infrared can be moved left, right and up and down by rotating the screws. It has a high degree of freedom and a wide adjustment range.

[0016] 2. A vacuum ball valve is installed between the quartz glass eyepiece of the detachable infrared temperature measurement component and the infrared observation welding component in this utility model. During the process, if impurities such as graphite dust contaminate the quartz eyepiece, the quartz glass can be cleaned by closing the ball valve. This avoids interrupting the process and reduces losses.

[0017] In summary, this invention can enhance the adjustability of the infrared temperature measurement component of vacuum coating equipment and solve the technical problem of inaccurate infrared temperature measurement caused by floating dust on the quartz glass plate during the operation of vacuum coating equipment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the infrared temperature measurement component. Figure 2 Schematic diagram for debugging infrared temperature measurement component; In the diagram, 1 is the infrared glass cover, 2 is the high-purity quartz glass, 3 is the observation window welded component, 4 is the infrared observation welded assembly, 5 is the infrared connection base plate, 6 is the guide shaft support, 7 is the infrared adjustment base, 8 is the infrared mounting plate, 9 is the vacuum ball valve, 10 is the tightening bolt, 11 is the fixing bolt, 12 is the adjusting bolt, 13 is the hollow card holder, 31 is the first flange, 32 is the first KF connector, 41 is the second flange, and 42 is the second KF connector. Detailed Implementation

[0019] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0020] See Figure 1 and Figure 2 This embodiment proposes a quick and detachable vacuum coating infrared temperature measurement component, including an infrared glass cover plate 1, a high-purity quartz glass 2, an observation window welded component 3, an infrared observation welded component 4, an infrared connecting base plate 5, a guide shaft support 6, an infrared adjustment base 7, and an infrared mounting plate 8.

[0021] The infrared glass cover 1 is a circular machined part with a ring-shaped appearance. The glass cover 1 has two end faces. One end face has a first countersunk hole, and the other end face has a first rectangular groove. The first rectangular groove is used to place high-purity quartz glass 2. An O-ring is also placed in the first rectangular groove to ensure the sealing of the infrared temperature measuring component. The observation window welded component 3 includes a first flange 31 and a first KF connector 32. The first flange 31 has a second countersunk hole, and the bottom surface of the second countersunk hole has a second rectangular groove. An O-ring is also installed in the second rectangular groove to ensure the airtightness of the infrared support assembly. When the infrared glass cover 1 is fastened to the first flange 31, the space formed by the first and second rectangular grooves matches the high-purity quartz glass 2, allowing it to be placed. The diameter of the central hole in the infrared glass cover 1 is smaller than the outer diameter of the high-purity quartz glass 2, allowing infrared rays to pass through.

[0022] The infrared glass cover plate 1 is provided with four first countersunk holes, which are evenly distributed along the center; correspondingly, the first flange 31 is also provided with four second countersunk holes. The first countersunk holes and the second countersunk holes are connected by bolts, and a pre-tightening force is provided to press the O-ring seal. The first flange 31 is welded to the first KF joint 32. A boss is provided at the weld joint between the first flange 31 and the first KF joint 32 to improve the strength of the structure. The first KF joint 32 is connected to the high-purity quartz glass 2.

[0023] The infrared observation welding assembly 4 includes a circular second flange 41 and a second KF connector 42. The second flange 41 has circular through holes evenly distributed around its circumference and is used to connect to the vacuum coating furnace body. The second KF connector 42 is welded to the second flange 41. A vacuum ball valve 9 connects the second KF connector 42 and the first KF connector 32. The connection between the vacuum ball valve 9 and the second KF connector 42 and the first KF connector 32 is fixed by clamps, and a bracket sealing ring is provided at the connection to ensure the airtightness and vacuum degree of the structure. During the process, graphite powder and other dust will be generated. Closing the vacuum ball valve 9 allows for the replacement and cleaning of the high-purity quartz glass 2.

[0024] It should be noted that the KF connector (K-Ferritsch connector) is a high-vacuum sealing connector, mainly used for gas transmission and connection in vacuum systems. It features high sealing performance, low leakage rate and corrosion resistance, and is the existing structure.

[0025] The infrared connection base plate 5 is provided with a round hole, which is connected to the round through hole on the second flange 41 by bolts; the bottom of the guide shaft support 6 is connected to the infrared connection base plate 5 by bolts. This design can save materials and reduce manufacturing costs.

[0026] The infrared adjustment base 7 is connected to the top of the guide shaft support 6 by bolts; the infrared mounting plate 8 is connected to the infrared adjustment base 7 by bolts. The infrared adjustment base 7 has bosses on both sides, each boss having two threaded holes. Tightening bolts 10 are tightened through these threaded holes, and the bolts tighten the infrared mounting plate 8 for positioning. The infrared mounting plate 8 is located above the infrared glass cover 1. A circular, hollowed-out bracket 13 is provided on one side of the infrared mounting plate 8 for placing and fixing the infrared temperature measuring instrument.

[0027] See Figure 2 The infrared adjustment base 7 has an elongated hole in the x-axis direction, and the infrared mounting plate 8 has an elongated hole in the y-axis direction. The position of the infrared mounting plate 8 can be adjusted by adjusting the four tightening bolts 10, allowing the infrared mounting plate 8 to move along the y-axis, move along the x-axis, and rotate along the z-axis. When it is moved to the appropriate position, the infrared adjustment base 7 and the infrared mounting plate 8 are fixed in place by using the fixing bolts 11 through the elongated holes in the y-axis direction on the infrared mounting plate 8.

[0028] As a preferred embodiment, the infrared mounting plate 8 has four threaded holes, and adjusting bolts 12 are connected to these four threaded holes. When the infrared light needs to pass obliquely through the high-purity quartz glass 2, the infrared mounting plate 8 can be set to an inclined state, either left or right or front and back. Then, the infrared mounting plate 8 is pressed against the infrared adjustment base 7 in an inclined state by adjusting bolts 12 of different lengths. Adjusting the four adjusting bolts 12 can make the infrared mounting plate 8 rotate along the y-axis and along the x-axis.

[0029] The infrared connection base plate 5 has a round hole, which allows the position of the infrared mounting plate 8 relative to the infrared observation welding component 4 to be adjusted, so that the infrared temperature measuring component can rotate along the vacuum ball valve 9. This connection method can meet the infrared installation requirements of different models, specifications and different scenarios.

[0030] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A quick detachable vacuum coated infrared temperature measurement assembly, comprising: Includes infrared glass cover (1), high-purity quartz glass (2), observation window welding component (3), infrared observation welding assembly (4), infrared adjustment base (7), and infrared mounting plate (8); The high-purity quartz glass (2) is located between the infrared glass cover plate (1) and the observation window welded part (3). The infrared glass cover plate (1) and the observation window welded part (3) are connected and fix the high-purity quartz glass (2). One end of the infrared observation welding assembly (4) is connected to the vacuum coating furnace body, and the other end of the infrared observation welding assembly (4) is connected to the end of the observation window welding part (3) away from the high-purity quartz glass (2) by a vacuum ball valve (9); an infrared adjustment base (7) is set on the top of the infrared observation welding assembly (4), and the infrared adjustment base (7) is connected to the infrared mounting plate (8) by bolts. The infrared mounting plate (8) is located above the infrared glass cover plate (1), and the infrared mounting plate (8) is used to place and fix the infrared temperature measuring instrument.

2. The quick detachable vacuum coated infrared temperature measurement assembly of claim 1, wherein, It also includes an infrared connection base plate (5) and a guide shaft support (6); the infrared connection base plate (5) is connected to the infrared observation welding assembly (4), the bottom of the guide shaft support (6) is connected to the infrared connection base plate (5) by bolts, and the infrared adjustment base (7) is connected to the top of the guide shaft support (6) by bolts.

3. The quick detachable vacuum coated infrared temperature measurement assembly of claim 2, wherein, The infrared observation welding assembly (4) includes a circular second flange (41), on which circular through holes are evenly distributed around the circumference. The second flange (41) is used to connect with the vacuum coating furnace body. A circular hole is provided on the infrared connection base plate (5), and the circular hole on the infrared connection base plate (5) is connected to the circular through hole on the second flange (41) by bolts.

4. The quick detachable vacuum coated infrared temperature measurement assembly of claim 3, wherein, The infrared observation welding assembly (4) also includes a second KF connector (42), which is welded to the second flange (41); the observation window welding component (3) includes a first flange (31) and a first KF connector (32), which is welded to the first KF connector (32), and a vacuum ball valve (9) is connected between the second KF connector (42) and the first KF connector (32), and the first KF connector (32) is connected to the high-purity quartz glass (2).

5. The quick detachable vacuum coated infrared temperature measurement assembly of claim 1 or 4, wherein, The infrared glass cover (1) is circular, and a first rectangular groove is provided on the bottom surface of the infrared glass cover (1); a second rectangular groove is provided on the top surface of the observation window welding part (3); when the infrared glass cover (1) is fastened to the observation window welding part (3), the space formed in the first rectangular groove and the second rectangular groove matches the high-purity quartz glass (2) and is used to place the high-purity quartz glass (2).

6. The quick detachable vacuum coated infrared temperature measurement assembly of claim 5, wherein, Both the first and second rectangular grooves are equipped with O-ring seals.

7. The quick detachable vacuum coated infrared temperature measurement assembly of claim 1, wherein, The infrared adjustment base (7) has protrusions on both sides, and each protrusion has two threaded holes. The top bolt (10) locks the infrared mounting plate (8) through the threaded holes on both sides.

8. The quick detachable vacuum coated infrared temperature measurement assembly of claim 7, wherein, The infrared adjustment base (7) is provided with an elongated hole in the x-axis direction, and the infrared mounting plate (8) is provided with an elongated hole in the y-axis direction. A fixing bolt (11) is connected in the elongated hole in the y-axis direction on the infrared mounting plate (8).

9. The quick detachable vacuum coated infrared temperature measurement assembly of claim 8, wherein, The infrared mounting plate (8) has four threaded holes, and adjusting bolts (12) are connected in these four threaded holes. The infrared mounting plate (8) is pressed against the infrared adjustment base (7) in an inclined state by adjusting bolts (12) of different lengths.

10. The quick detachable vacuum coated infrared temperature measurement assembly of claim 1, wherein, A circular hollow card holder (13) is provided on one side of the infrared mounting plate (8). The hollow card holder (13) is used to place and fix the infrared temperature measuring instrument.

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