A sampling device for electronic-grade drummed chemicals

Abstract

This utility model relates to a sampling device for electronic-grade barrelled chemicals, including a placement cavity for holding a storage barrel. A sampling port is provided at the top of the storage barrel for a sampling tube to extend into. The other end of the sampling tube passes through the placement cavity and enters the sampling cavity. The sampling cavity is divided into upper and lower sections by a partition. The sampling tube passes through the partition from top to bottom to extend into the sampling bottle. The sampling cavity below the partition is sealed and connected to a gas supply pipe and a gas extraction pipe. The sampling tube in the sampling cavity above the partition is connected to a negative pressure pipe. The negative pressure pipe is equipped with a negative pressure valve and a negative pressure suction device. This sampling device for electronic-grade barrelled chemicals has a simple structure, is convenient for sampling, and ensures that the sampling operator is in a safe environment without material contact.

Description

Technical Field

[0001] This utility model relates to a sampling device for electronic-grade barrelled chemicals. Background Technology

[0002] High-purity chemical solvents are widely used in modern industrial production, especially in precision manufacturing industries such as semiconductors and panels, where extremely high purity is required. When transporting and storing solvents in large quantities, large storage tanks with a small-diameter opening at the top are typically used. To ensure that the solvents do not deteriorate or become contaminated before and after transportation, storage, and use, their concentration and chemical properties must be tested. The common practice in factories is to open the small-diameter opening at the top of the storage tank, insert a tubing connected to a pump, and extract the solvent from the tank for sampling or dispensing into smaller containers. However, this method has significant drawbacks: repeated opening and closing of the tank during sampling or dispensing increases the risk of environmental contaminants (such as dust and moisture) entering the tank or the solvent to be dispensed; the process exposes the user to the external environment, making it difficult to guarantee solvent purity; and the required equipment components (pumps, tubing, adapter interfaces, etc.) are numerous and relatively complex, resulting in high purchase and maintenance costs for the overall sampling / dispensing system. In summary, the current sampling and dispensing method based on tubing and pump extraction has significant shortcomings in preventing contamination and controlling costs. Utility Model Content

[0003] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a sampling device for electronic-grade barrelled chemicals, which is not only reasonably structured, but also safe and convenient.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a sampling device for electronic-grade barrelled chemicals, including a placement cavity for placing a storage barrel, a sampling port on the top of the storage barrel for a sampling tube to extend into, the other end of the sampling tube passing through the placement cavity and entering the sampling cavity, the sampling cavity being divided into upper and lower sections by a partition, the sampling tube passing through the partition from top to bottom to extend into the sampling bottle, the sampling cavity below the partition being sealed and connected to a gas supply pipe and a gas extraction pipe, the sampling tube in the sampling cavity located above the partition being connected to a negative pressure pipe, the negative pressure pipe being equipped with a negative pressure valve and a negative pressure suction device.

[0005] Furthermore, the sampling chamber is divided into an upper chamber and a lower chamber by a partition. The upper chamber has an opening on its side and an upper chamber door is hinged at the opening. A sampling valve is installed on the sampling tube located in the upper chamber near the partition.

[0006] Furthermore, the sampling bottle is placed in the lower compartment, the side of the lower compartment has a glove window and a glove is installed thereon, and the side of the lower compartment has an opening and a hinged airtight door.

[0007] Furthermore, a waste liquid pipe is connected to the bottom of the lower compartment, and valves are installed on the waste liquid pipe, the gas supply pipe, and the gas extraction pipe.

[0008] Furthermore, a soaking solution storage bottle is provided inside the placement cavity.

[0009] Furthermore, an exhaust fan is installed at the top of the placement cavity, and a filter is installed at the output end of the exhaust fan.

[0010] Furthermore, the negative pressure suction device uses a medical needle.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] (1) Sampling is simple and can be used for various materials in drums;

[0013] (2) During the sampling process, the sampling environment maintains a high level of cleanliness;

[0014] (3) The overall sampling process ensures that the sampling personnel are in a safe environment without material contact.

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model.

[0017] In the diagram: 1-Storage tank, 2-Placement chamber, 3-Sampling port, 4-Sampling tube, 5-Sampling chamber, 6-Partition, 7-Sampling bottle, 8-Gas supply tube, 9-Suction tube, 10-Negative pressure tube, 11-Negative pressure valve, 12-Negative pressure suction device, 13-Upper compartment, 14-Lower compartment, 15-Upper chamber door, 16-Sampling valve, 17-Glove window, 18-Sealed chamber door, 19-Waste liquid tube, 20-Valve, 21-Soaking solution storage bottle, 22-Exhaust fan, 23-Filter, 24-Medical needle. Detailed Implementation

[0018] To make the above-mentioned features and advantages of this utility model more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings for detailed explanation.

[0019] like Figure 1As shown, a sampling device for electronic-grade drummed chemicals includes a placement cavity 2 for placing a storage drum 1. A sampling port 3 is provided at the top of the storage drum for a sampling tube 4 to extend into. The other end of the sampling tube passes through the placement cavity and enters the sampling cavity 5. The sampling cavity is divided into upper and lower sections by a partition 6. The sampling tube passes through the partition from top to bottom to extend into the sampling bottle 7. The sampling cavity below the partition is sealed and connected to a gas supply pipe 8 and a gas extraction pipe 9. A nitrogen supply device is connected to the gas supply pipe to blow nitrogen into the gas supply pipe. A gas extraction device is connected to the gas extraction pipe to vent impurities from the lower cavity. The gas supply device and the gas extraction device are existing equipment and will not be described in detail here. A negative pressure pipe 10 is connected to the sampling tube in the sampling cavity located above the partition. A negative pressure valve 11 and a negative pressure suction device 12 are provided on the negative pressure pipe.

[0020] In this embodiment of the utility model, the sampling chamber is divided into an upper chamber 13 and a lower chamber 14 by a partition. The upper chamber has an opening on its side and an upper chamber door 15 is hinged at the opening. A sampling valve 16 is provided on the sampling tube located near the partition in the upper chamber.

[0021] In this embodiment of the utility model, the sampling bottle is placed in the lower compartment, a glove window 17 is provided on the side of the lower compartment and a glove is installed thereon, and a sealed door 18 is hinged to the side of the lower compartment.

[0022] In this embodiment of the utility model, the bottom of the lower compartment is connected to a waste liquid pipe 19, and valves 20 are provided on the waste liquid pipe, the gas supply pipe and the gas extraction pipe.

[0023] In this embodiment of the invention, a soaking solution storage bottle 21 is provided inside the placement cavity, and UPW soaking solution is provided inside the soaking solution storage bottle.

[0024] In this embodiment of the utility model, a blower 22 is provided at the top of the placement cavity, and a filter 23 is provided at the output end of the blower.

[0025] In this embodiment of the invention, the negative pressure suction device is a medical needle tube 24.

[0026] Working principle of this utility model embodiment:

[0027] First, a purge-displacement procedure must be performed before sampling:

[0028] In an environment that meets the required cleanliness standards, production involves the filling of storage tanks with the assistance of bottling equipment.

[0029] After the storage tank is filled, open the valves of the nitrogen supply pipe and the extraction pipe in the placement chamber to purge and replace the nitrogen.

[0030] Next, the pre-sampling cleaning procedure:

[0031] Place one end of the sampling tube in the soaking solution bottle and suspend the other end in the lower chamber. Open the negative pressure valve and the sampling valve, and use a medical syringe to perform negative pressure aspiration and UPW rinsing. The rinsing time is >5 minutes. After rinsing, close the negative pressure valve and the sampling valve, and discharge the cleaning solution through the waste liquid tube.

[0032] Pre-sampling rinsing procedure:

[0033] Place one end of the sampling tube in the storage tank and suspend the other end in the lower chamber. Repeat the above cleaning operation and rinse the sampling tube with the sampling solution for more than 5 minutes. After rinsing, close the negative pressure valve and the sampling valve.

[0034] Sampling operation:

[0035] After rinsing, the sampling bottle is placed directly below the sampling tube using sampling gloves, with the end of the sampling tube inside the sampling bottle. Negative pressure is applied through a medical syringe, and the siphon principle is used to confirm that there is liquid in the syringe. Then, the sampling valve is opened and the negative pressure valve is closed to perform non-contact, high-cleanliness sampling.

[0036] This invention is not limited to the preferred embodiment described above. Anyone can derive other various forms of sampling devices for electronically packaged, drummed chemicals based on the inspiration of this invention. All equivalent variations and modifications made within the scope of the claims of this invention should be considered within the scope of this invention.

Claims

1. An electronic grade bulk chemical sampling device, comprising: The device includes a placement cavity for holding a storage tank. The top of the storage tank has a sampling port for a sampling tube to be inserted. The other end of the sampling tube passes through the placement cavity and enters the sampling cavity. The sampling cavity is divided into upper and lower sections by a partition. The sampling tube passes through the partition from top to bottom to extend into the sampling bottle. The sampling cavity below the partition is sealed and connected to a gas supply pipe and a gas extraction pipe. The sampling tube in the sampling cavity above the partition is connected to a negative pressure pipe. The negative pressure pipe is equipped with a negative pressure valve and a negative pressure suction device.

2. A device for sampling electronic grade bulk chemicals according to claim 1, characterized in that: The sampling chamber is divided into an upper chamber and a lower chamber by a partition. The upper chamber has an opening on its side and an upper chamber door is hinged at the opening. A sampling valve is installed on the sampling tube located in the upper chamber near the partition.

3. A device for sampling electronic grade bulk chemicals according to claim 2, characterized in that: The sampling bottle is placed in the lower compartment, and a glove window is provided on the side of the lower compartment for installing gloves. The side of the lower compartment is open and hinged with a sealed door.

4. A device for sampling electronic grade bulk chemicals according to claim 2, characterized in that: The bottom of the lower compartment is connected to a waste liquid pipe, and valves are installed on the waste liquid pipe, the gas supply pipe, and the gas extraction pipe.

5. A device for sampling electronic grade bulk chemicals according to claim 1, characterized in that: The placement cavity is equipped with a soaking solution storage bottle.

6. A device for sampling electronic grade bulk chemicals according to claim 1, characterized in that: An exhaust fan is installed at the top of the placement chamber, and a filter is installed at the output end of the exhaust fan.

7. A device for sampling electronic grade bulk chemicals according to claim 1, characterized in that: The negative pressure suction device uses a medical needle.

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