A particulate matter detection device and a defoaming system for use in a defoaming system

Abstract

This utility model discloses a particulate matter detection device and a defoaming system for a defoaming system. The particulate matter detection device includes a control component and a particle detection component. The particle detection component has a sampling port, which is connected to the cavity of the defoaming system through the control component. The input end of the control component is connected to the cavity of the defoaming system, and the output end is connected to the sampling port of the particle detection component. The control component is used to control preset parameters of the gas input to the sampling port. The particulate matter detection device and defoaming system provided in this application realize particulate matter detection of the gas in the cavity of the defoaming system by controlling preset parameters of the gas through the control component and then detecting them through the particle detection component. By precisely controlling these parameters, the accuracy and stability of particulate matter detection can be improved.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to a particulate matter detection device and a defoaming system for a defoaming system. Background Technology

[0002] With the continuous development of semiconductor manufacturing processes, the cleanliness requirements for the production environment are becoming increasingly stringent. In the semiconductor wafer manufacturing process, the defoaming system, as a critical piece of equipment, directly impacts product yield and quality through the control of internal particulate contamination. Currently, vacuum defoaming systems in the semiconductor wafer defoaming field need to meet CLASS100 cleanliness requirements, meaning that the number of suspended particles with a diameter ≥0.5 micrometers per cubic foot of air within the chamber must not exceed 100. However, existing defoaming systems typically lack the capability to detect suspended particles. Utility Model Content

[0003] The technical problem to be solved by this utility model embodiment is to provide a particulate matter detection device and a defoaming system for a defoaming system, which can regulate the gas in the cavity of the defoaming system and perform particulate matter detection.

[0004] To address the aforementioned technical problems, this utility model provides a particulate matter detection device for a defoaming system, comprising a control component and a particle detection component. The particle detection component is provided with a sampling port, which is connected to the cavity of the defoaming system via the control component. The input end of the control component is connected to the cavity of the defoaming system, and the output end is connected to the sampling port of the particle detection component. The control component is used to control preset parameters of the gas input to the sampling port.

[0005] In one feasible implementation, the preset parameters include pressure and temperature, and the control components include a temperature control element and a pressure control element.

[0006] In one feasible implementation, the temperature control element includes a heat exchanger.

[0007] In one feasible implementation, the pressure control component includes a pressure regulating valve disposed at the output end of the control component.

[0008] In one feasible implementation, a gas storage component is also included, which has an air inlet and an air outlet. The air inlet is connected to the cavity of the defoaming system, and the air outlet is connected to the sampling port. The gas storage component is used to provide a detection space independent of the cavity of the defoaming system.

[0009] In one feasible implementation, the control component is disposed between the gas storage component and the particle detection component.

[0010] In one feasible implementation, the control component is disposed between the cavity of the defoaming system and the gas storage component.

[0011] In one feasible implementation, the control component includes a pressure regulating valve and a heat exchanger, with the inlet of the gas storage component connected to the pressure regulating valve and the outlet of the gas storage component connected to the heat exchanger.

[0012] In one feasible implementation, a user terminal is also included, which is electrically connected to the particle detection component and is used to receive dust particle information obtained by the particle detection component.

[0013] In one feasible implementation, an alarm device is also included, which is electrically connected to the user terminal; when the user terminal determines that the dust particle information is abnormal, the user terminal controls the alarm device to be activated.

[0014] Accordingly, this application also provides a defoaming system, including the particulate matter detection device for the defoaming system described above, and a cavity, wherein the cavity is hollow and has a side valve, and the particulate matter detection device for the defoaming system is connected to the interior of the cavity through the side valve.

[0015] Implementing this utility model has the following beneficial effects: The particulate matter detection device and defoaming system provided in this application embodiment regulate preset parameters of the gas through a regulating component, and then detect particulate matter in the gas within the chamber of the defoaming system through a particle detection component. Precise control of these parameters can improve the accuracy and stability of particulate matter detection.

[0016] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0017] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application, and do not constitute an undue limitation of this application.

[0018] Figure 1 This is a schematic diagram of the gas path of a particulate matter detection device for a defoaming system shown in some embodiments of this application; Figure 2 This is a schematic diagram of the gas path of a particulate matter detection device for a defoaming system shown in some other embodiments of this application; Figure 3 This is a schematic diagram of the gas path of a particulate matter detection device for a defoaming system shown in some embodiments of this application; The reference numerals in the figure are: 10-control component, 11-temperature control component, 12-pressure control component, 20-particle detection component, 30-cavity, 31-side valve, 40-gas storage component. Detailed Implementation

[0019] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0020] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0022] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0023] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0024] Please refer to Figures 1 to 3This application provides a particulate matter detection device for a defoaming system, used to detect the particulate matter content in the cavity 30 of the defoaming system to ensure the normal operation of the defoaming system. The particulate matter detection device for the defoaming system includes a control component 10 and a particle detection component 20. The particle detection component 20 has a sampling port, which is connected to the cavity 30 of the defoaming system via the control component 10. The input end of the control component 10 is connected to the cavity 30 of the defoaming system, and the output end is connected to the sampling port of the particle detection component 20. The control component 10 is used to control preset parameters of the gas input to the sampling port. As an intermediate link connecting the cavity 30 of the defoaming system and the particle detection component 20, the control component 10 can preprocess the gas sample collected from the cavity 30 to meet the detection requirements of the particle detection component 20. The input end of the control component 10 is connected to the cavity 30 of the defoaming system via a pipe, allowing gas samples to be extracted from the cavity 30. The output of the control component 10 is connected to the sampling port of the particle detection component 20 via another pipe, delivering the controlled gas sample to the particle detection component 20 for detection. The control component 10 has an internal control mechanism that can adjust the preset parameters of the gas sample according to the operating requirements of the particle detection component 20.

[0025] The particulate matter detection device and defoaming system provided in this application embodiment regulate the preset parameters of the gas through the regulating component 10, and then detect the particulate matter in the gas in the cavity 30 of the defoaming system through the particle detection component 20.

[0026] The particle detection component 20 can detect particulate matter using the principle of light scattering. It contains a light source, a photodetector, and a signal processing circuit. When a gas sample passes through the detection area, the particulate matter in the gas scatters the light emitted by the light source. The photodetector receives the scattered light and converts it into an electrical signal. The signal processing circuit processes the electrical signal to obtain information such as the concentration and particle size distribution of the particulate matter.

[0027] In one feasible implementation, the particle detection component 20 can be a CLJ-R series online laser dust particle counter. One or more monitoring points can be installed according to the actual site conditions. The counter simultaneously monitors particles ranging from 0.3 μm to 10.0 μm, and the data is directly displayed on the LCD screen at each monitoring point. Data can also be read via RS485 communication. This counter uses a semiconductor laser light source, has a long service life, and provides more accurate counting. The operating temperature range is 0-50℃, and the vacuum range is -70 kPa to 90 kPa.

[0028] In one feasible implementation, the preset parameters include pressure and temperature, and the control component 10 includes a temperature control element 11 and a pressure control element 12. The gas within the cavity 30 of the defoaming system is typically at high temperature and high pressure, an environment often unfavorable to the particle detection component 20. By setting the temperature control element 11 to regulate the temperature of the gas sample, ensuring it remains within the suitable operating temperature range of the particle detection component 20; and the pressure control element 12 to regulate the pressure of the gas sample, ensuring it remains within the suitable operating pressure range of the particle detection component 20, precise control of these parameters can improve the accuracy and stability of particulate matter detection.

[0029] In one feasible implementation, the temperature control element 11 includes a heat exchanger. Further, the heat exchanger adopts a plate structure with multiple internal heat exchange channels, enabling efficient temperature regulation of the gas sample. A temperature control system is connected to one side of the heat exchanger, allowing for heating or cooling of the gas sample as needed. The temperature control system includes a temperature sensor, a controller, and an actuator. The temperature sensor monitors the gas sample temperature in real time, and the controller controls the operating state of the actuator based on temperature feedback information, thereby achieving precise temperature control of the gas sample.

[0030] In one feasible implementation, the temperature control element 11 can also be a cooling pipeline, which is connected to the cavity 30 through a cooling pipeline, and the gas to be detected is cooled naturally or by a heat exchanger in the cooling pipeline.

[0031] In one feasible implementation, the pressure control component 12 includes a pressure regulating valve located at the output end of the control assembly 10. Furthermore, the pressure regulating valve employs an electrically controlled structure, enabling precise adjustment of the gas sample pressure according to the operational requirements of the particle detection assembly 20. The opening degree of the pressure regulating valve can be adjusted by the control system, thereby changing the gas flow cross-sectional area to achieve pressure regulation. The pressure regulating valve is also equipped with a pressure sensor, which can monitor the gas sample pressure in real time and feed the pressure information back to the control system, forming a closed-loop control to ensure the pressure remains stable at the set value.

[0032] In one feasible implementation, the particulate matter detection device for the defoaming system further includes a gas storage component 40. The gas storage component 40 has an inlet and an outlet; the inlet communicates with the cavity 30 of the defoaming system, and the outlet communicates with the sampling port. The gas storage component 40 provides a detection space independent of the cavity 30 of the defoaming system. Thus, by providing the gas storage component 40, gas can be isolated from the cavity 30 of the defoaming system, facilitating detection. Furthermore, the gas storage component 40 is made of stainless steel, possessing good airtightness and corrosion resistance. In one feasible embodiment, the volume of the gas storage component 40 is 0.5 liters to 5 liters, sufficient to store enough gas samples for multiple tests. In another feasible embodiment, the gas storage component 40 has internal partitions dividing the gas storage space into multiple areas, allowing simultaneous storage of gas samples collected at different time points for comparative analysis.

[0033] In a feasible implementation, such as Figure 2 As shown, the control component 10 is disposed between the gas storage component 40 and the particle detection component 20. When the control component 10 is disposed between the gas storage component 40 and the particle detection component 20, the gas sample in the gas storage component 40 can be controlled and then delivered to the particle detection component 20.

[0034] In a feasible implementation, such as Figure 3 As shown, the control component 10 is disposed between the cavity 30 of the defoaming system and the gas storage component 40. When the control component 10 is disposed between the cavity 30 of the defoaming system and the gas storage component 40, the gas sample collected from the cavity 30 can be controlled first, and then stored in the gas storage component 40, and then transported to the particle detection component 20 when needed.

[0035] In a feasible implementation, such as Figure 3 As shown, the pressure control component 12 in the control assembly 10 can be directly connected to the cavity 30, meaning that the pressure control component 12 is a side valve. In this way, the pressure control component directly controls the pressure and flow rate of the gas output from the cavity 30, simplifying the structure.

[0036] In one feasible implementation, the control component 10 includes a pressure regulating valve and a heat exchanger. The inlet of the gas storage component 40 is connected to the pressure regulating valve, and the outlet of the gas storage component 40 is connected to the heat exchanger. This connection method allows the pressure of the gas sample to be regulated first, then stored in the gas storage component 40, and finally delivered to the particle detection component 20 after temperature regulation via the heat exchanger. The operating pressure range of the pressure regulating valve can be adjusted to a suitable range to regulate the pressure of the gas sample as needed. The operating temperature range of the heat exchanger can be adjusted to a suitable range to regulate the temperature of the gas sample as needed.

[0037] In one feasible implementation, the particulate matter detection device for the defoaming system further includes a user terminal, which is electrically connected to the particle detection component 20 and used to receive dust particle information analyzed by the particle detection component 20. The user terminal can be a computer, tablet, or smartphone, connected to the particle detection component 20 via wired or wireless means. The user terminal is equipped with dedicated data processing software that can process, analyze, and display the data transmitted by the particle detection component 20. Users can view real-time information such as particulate matter concentration and particle size distribution through the user terminal, as well as historical data and trend charts.

[0038] In one feasible implementation, an alarm device is also included, electrically connected to the user terminal. When the user terminal determines that the dust particle information is abnormal, it controls the alarm device to activate. The alarm device includes an audible and visual alarm and a remote notification system. The audible and visual alarm is installed near the defoaming system and can emit sound and flashing signals to alert on-site personnel. The remote notification system can notify relevant personnel of abnormal situations via SMS, email, or APP push notifications. The user terminal can determine whether the dust particle information is abnormal based on a preset threshold; for example, when the particulate matter concentration exceeds a preset threshold, it is determined to be an abnormal situation, triggering an alarm.

[0039] The beneficial effects of this application are that, by setting up the control component 10 and the particle detection component 20, the high-temperature and high-pressure (negative pressure) gas in the defoaming system cavity 30 can be quantitatively circulated out and subjected to particulate matter detection, realizing real-time monitoring of the particulate matter status within the semiconductor vacuum defoaming system cavity 30. By adjusting the gas pressure and temperature through the control component 10 to suit the working conditions of the particle detection component 20, the technical challenge of particulate matter monitoring under high-temperature and high-pressure (negative pressure) environments is solved. Furthermore, the gas storage component 40 provides a detection space independent of the defoaming system cavity 30, further improving the accuracy and stability of the detection. Combined with the user terminal and alarm device, abnormal situations can be detected and alarmed in a timely manner, effectively meeting the cleanliness requirements of CLASS100, improving the quality control capability in the semiconductor wafer production process, and reducing product defects caused by particulate matter contamination.

[0040] Accordingly, this application also provides a defoaming system, including a particulate matter detection device for a defoaming system as described above, and a cavity 30. The cavity 30 is hollow and has a side valve 31. The particulate matter detection device for the defoaming system is connected to the interior of the cavity 30 through the side valve. The defoaming system in this embodiment is mainly used to remove particulate matter from gas, improving the purity and stability of the gas. The cavity 30 is the main component of the defoaming system, used to contain the gas requiring defoaming. The cavity 30 is made of stainless steel, which has good corrosion resistance and airtightness. The volume of the cavity 30 is 100 liters, which can meet the defoaming needs of large quantities of gas.

[0041] The cavity 30 is hollow, providing sufficient space for gas degassing. Multiple baffles divide the cavity 30 into several zones, through which the gas flows sequentially, gradually removing bubbles during the flow. Micropores on the baffles accelerate bubble separation and breakup. A stirring device is also installed inside the cavity 30 to further accelerate gas flow and bubble separation.

[0042] A side valve 31 is provided on the side of the cavity 30. The side valve 31 adopts an electrically controlled ball valve structure, which can be opened or closed as needed. The diameter of the side valve 31 can be 10 mm-100 mm to meet the needs of gas sample collection. A filter screen is provided on the inside of the side valve 31 to prevent particulate matter from entering the sampling pipeline. The particulate matter detection device of the defoaming system is connected to the interior of the cavity 30 through the side valve 31. The side valve 31 is a valve specifically used to connect the particulate matter detection device, and adopts a quick-connect structure for easy installation and disassembly. Furthermore, the side valve 31 can control the gas sample collection rate. The side valve 31 is equipped with a sealing ring to ensure that there is no leakage at the connection.

[0043] The working process of the defoaming system is as follows: First, the gas that needs to be defoamed is injected into the cavity 30; then, during the defoaming process, the particulate matter detection device will periodically collect gas samples in the cavity 30 to detect the particulate matter content in the gas in order to monitor the working status of the defoaming system.

[0044] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A particulate matter detection device for a defoaming system, characterized in that, Includes control components and particle detection components, among which, The particle detection component is provided with a sampling port, and the sampling port is connected to the cavity of the defoaming system through the control component; The input end of the control component is connected to the cavity of the defoaming system, and the output end is connected to the sampling port of the particle detection component. The control component is used to control the preset parameters of the gas input to the sampling port.

2. The particulate matter detection device for a defoaming system according to claim 1, characterized in that, The preset parameters include pressure and temperature, and the control components include temperature control components and pressure control components.

3. The particulate matter detection device for a defoaming system according to claim 2, characterized in that, The temperature control component includes a heat exchanger.

4. The particulate matter detection device for a defoaming system according to claim 2, characterized in that, The pressure control component includes a pressure regulating valve, which is located at the output end of the control component.

5. The particulate matter detection device for a defoaming system according to claim 1, characterized in that, It also includes a gas storage component, which has an air inlet and an air outlet. The air inlet is connected to the cavity of the defoaming system, and the air outlet is connected to the sampling port. The gas storage component is used to provide a detection space independent of the cavity of the defoaming system.

6. The particulate matter detection device for a defoaming system according to claim 5, characterized in that, The control component is disposed between the gas storage component and the particle detection component, or The control component is located between the cavity of the defoaming system and the gas storage component.

7. The particulate matter detection device for a defoaming system according to claim 5, characterized in that, The control component includes a pressure regulating valve and a heat exchanger. The inlet of the gas storage component is connected to the pressure regulating valve, and the outlet of the gas storage component is connected to the heat exchanger.

8. The particulate matter detection device for a defoaming system according to claim 1, characterized in that, It also includes a user terminal, which is electrically connected to the particle detection component and is used to receive dust particle information obtained by the particle detection component.

9. The particulate matter detection device for a defoaming system according to claim 8, characterized in that, It also includes an alarm device, which is electrically connected to the user terminal; When the user terminal determines that the dust particle information is abnormal, the user terminal controls the alarm device to be activated.

10. A defoaming system, characterized in that, The device includes a particulate matter detection device for a defoaming system as described in any one of claims 1 to 9, and a cavity, the cavity being hollow and having a side valve, the particulate matter detection device for the defoaming system being connected to the interior of the cavity through the side valve.

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