A scanning electron microscope sample stage device

Abstract

This utility model discloses a scanning electron microscope (SEM) sample stage device, relating to the field of sample testing technology. It includes a base, a support frame, and U-shaped grippers. Four support frames are fixed to the upper side of the base, and a cylinder is fixed to the center of each support frame. A U-shaped gripper is provided on the outer side of each cylinder, and a fixing rod is welded to the upper side of each U-shaped gripper. Four U-shaped grippers and four fixing rods are provided, each located inside one of the four support frames. A first sample stage, a second sample stage, a third sample stage, and a fourth sample stage are respectively fixed to the top of each of the four fixing rods. The SEM sample stage device has four different sample stages: a circle, a triangle, a heart, and a square, respectively. The stage heights are consistent, but the different shapes facilitate simultaneous testing of different samples, making them easy to distinguish under the SEM and quickly locate the corresponding sample.

Description

Technical Field

[0001] This utility model belongs to the field of sample testing technology, specifically relating to a scanning electron microscope sample stage device. Background Technology

[0002] In mineralogy analysis, scanning electron microscopy (SEM) is frequently used to observe the microscopic morphology, analyze composition, and determine structural characteristics of minerals. The sample stage of an SEM is the core component that supports the sample and enables precise positioning and attitude adjustment. Existing sample stages fall into two categories: one is a loading sample stage used in automated mineral parameter measurement systems to analyze mineral composition, and the other is a load-bearing sample stage used for point, line, and surface analysis of sample composition under an SEM.

[0003] Existing load-bearing sample stages consist of two separate parts: the sample stage and the small column. Furthermore, the small column has a uniform shape, which is not conducive to the simultaneous detection of multiple samples and makes it difficult to distinguish samples under a scanning electron microscope, causing inconvenience and errors in the detection work. Utility Model Content

[0004] The purpose of this invention is to provide a scanning electron microscope sample stage device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A scanning electron microscope sample stage device includes a base, a support frame, and U-shaped grippers. Four support frames are fixed to the upper side of the base, and a cylinder is fixed in the middle of the interior of each support frame. A U-shaped gripper is provided on the outer side of the cylinder, and a fixing rod is welded to the upper side of the U-shaped gripper. There are four U-shaped grippers and four fixing rods. The four fixing rods are located inside the four support frames, and a first sample stage, a second sample stage, a third sample stage, and a fourth sample stage are fixed to the top of the four fixing rods, respectively. The table heights of the first sample stage, the second sample stage, the third sample stage, and the fourth sample stage are the same.

[0006] Furthermore, the base has a cubic structure, and the supporting frame on the upper side of the base consists of four equal hollow small cubes.

[0007] Furthermore, threaded connecting cylinders are fixed to the bottom of both sides of the U-shaped grabber, and locking bolts are provided inside the threaded connecting cylinders.

[0008] Furthermore, a sliding groove is provided on the upper side of the cylinder, and a sliding block is fixed on the inner side of the middle part of the U-shaped grabber.

[0009] Furthermore, the sliding block is located inside the sliding groove, and the sliding block and the sliding groove are slidably connected.

[0010] Furthermore, the first sample stage has a circular shape, while the second sample stage has a triangular shape.

[0011] Furthermore, the third sample stage has a square structure, while the fourth sample stage has a heart-shaped structure.

[0012] The scanning electron microscope sample stage device provided by this utility model has the following beneficial effects: This invention features a U-shaped gripper that is movable, facilitating sample dispersion on conductive adhesive. Since the four support frames have four small platforms, the position of the U-shaped gripper and fixing rods can be moved by the sliding cooperation of the sliding block and sliding groove when testing different samples. This allows for the application of conductive adhesive, and the sample is then dispersed on the conductive adhesive. The four fixing rods and four sample platforms are adjustable, allowing different powder samples to be dispersed on different sample platforms. Furthermore, when a fixed position is required, the locking bolt in the threaded connecting cylinder at the bottom of the U-shaped gripper can be tightened to lock it in place; conversely, loosening the locking bolt allows for easy movement of the U-shaped gripper on the upper side of the cylinder.

[0013] This invention features four sample stages of different shapes (the first, second, third, and fourth sample stages are circular, triangular, heart-shaped, and square, respectively), with the same stage height and different shapes. This facilitates the simultaneous testing of different samples, making them easy to distinguish under a scanning electron microscope. This allows for quick and easy identification of the corresponding sample, improving work efficiency and mechanical energy utilization. The four sample stages can simultaneously test four samples, placing them into the testing chamber at once, avoiding repeated venting and improving vacuum efficiency. Attached Figure Description

[0014] Figure 1 This is a front view schematic diagram of the scanning electron microscope sample stage device of this utility model; Figure 2 This is a schematic diagram of the U-shaped gripper structure of the scanning electron microscope sample stage device of this utility model; Figure 3 This is a side view of the scanning electron microscope sample stage device of this utility model.

[0015] In the diagram: 1. Base; 2. Bearing frame; 3. Cylinder; 4. U-shaped grab; 5. Threaded connecting cylinder; 6. Locking bolt; 7. Fixing rod; 8. Sliding groove; 9. Sliding block; 10. First sample stage; 11. Second sample stage; 12. Third sample stage; 13. Fourth sample stage. Detailed Implementation

[0016] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0017] like Figures 1-2 As shown, the scanning electron microscope sample stage device of this utility model includes a base 1, a support frame 2, and a U-shaped gripper 4. Four support frames 2 are fixed on the upper side of the base 1, and a cylinder 3 is fixed in the middle of the interior of each support frame 2. The base 1 has a cubic structure, and the support frames 2 on the upper side of the base 1 are four equal hollow small cubes. A U-shaped gripper 4 is provided on the outer side of the cylinder 3, and a fixing rod 7 is welded to the upper side of the U-shaped gripper 4. Threaded connecting cylinders 5 are fixed on the bottom of both sides of the U-shaped gripper 4, and locking bolts 6 are provided inside the threaded connecting cylinders 5. A sliding groove 8 is opened on the upper side of the cylinder 3.

[0018] A sliding block 9 is fixed to the inner side of the middle of the U-shaped grab 4. The sliding block 9 is located inside the sliding groove 8, and the sliding block 9 and the sliding groove 8 are slidably connected.

[0019] It should be noted that the U-shaped gripper 4 is movable, which helps the sample to be dispersed on the conductive adhesive.

[0020] Since the four support frames 2 have four small platforms, when testing different samples, the position of the U-shaped gripper 4 and the fixing rod 7 can be moved by the sliding cooperation of the sliding block 9 and the sliding groove 8, so that the conductive adhesive can be pasted and the sample can be dispersed on the conductive adhesive. The four fixing rods 7 and the four sample platforms are adjustable, which makes it convenient for different powder samples to be dispersed on different sample platforms. When it is necessary to fix the position, the locking bolt 6 in the threaded connecting cylinder 5 at the bottom of the U-shaped gripper 4 can be tightened to lock and fix it. Conversely, the U-shaped gripper 4 on the upper side of the cylinder 3 can be easily moved by loosening the locking bolt 6.

[0021] In some specific embodiments, such as Figure 1 and Figure 3 As shown, there are four U-shaped grabs 4 and four fixing rods 7. The four fixing rods 7 are located inside the four bearing frames 2 respectively. The top of the four fixing rods 7 are respectively fixed with the first sample stage 10, the second sample stage 11, the third sample stage 12, and the fourth sample stage 13. The table heights of the first sample stage 10, the second sample stage 11, the third sample stage 12, and the fourth sample stage 13 are the same. The first sample stage 10 has a circular structure, the second sample stage 11 has a triangular structure, the third sample stage 12 has a square structure, and the fourth sample stage 13 has a heart-shaped structure.

[0022] It is understandable that by setting the shapes of the first sample stage 10, the second sample stage 11, the third sample stage 12, and the fourth sample stage 13 to different shapes, such as circles, triangles, hearts, and squares respectively, and with the same stage height and different stage shapes, it is beneficial to distinguish between different samples under a scanning electron microscope when testing them simultaneously. This facilitates the quick identification of the corresponding sample, improves work efficiency, and increases the utilization rate of mechanical energy. The four sample stages can test four samples simultaneously, and the samples can be placed into the testing chamber for testing at once.

[0023] In summary, using this scanning electron microscope sample stage device, firstly, conductive adhesive is applied to the surfaces of the first sample stage 10, the second sample stage 11, the third sample stage 12, and the fourth sample stage 13. Then, the powder sample is mixed thoroughly, and the sample stage surface with the conductive adhesive is pressed onto the powder sample. Suspended samples are then removed using an air gun. The U-shaped gripper 4 is then aligned, and other samples are dispersed on the other three sample stages, facilitating simultaneous detection of multiple samples. The first sample stage 10, the second sample stage 11, the third sample stage 12, and the fourth sample stage 13 have different shapes: circular, triangular, heart-shaped, and square, respectively, with the same stage height and different shapes. The four sample stages can simultaneously detect four samples, allowing samples to be placed into the detection chamber at once, saving time. The U-shaped gripper 4 is movable, which facilitates the dispersion of samples on the conductive adhesive. Since the four support frames 2 have four small platforms, the positions of the U-shaped gripper 4 and the fixing rod 7 can be moved by the sliding cooperation of the sliding block 9 and the sliding groove 8 when testing different samples. The four fixing rods 7 and the four sample stages are adjustable, which makes it convenient for different powder samples to be dispersed on different sample stages. When it is necessary to fix the position, the locking bolt 6 in the threaded connecting cylinder 5 at the bottom of the U-shaped gripper 4 can be tightened to lock and fix it. Finally, the sample stage is placed in the scanning electron microscope cavity for detection, vacuum is drawn, the filament is turned on, and under the scanning electron microscope, different test samples can be quickly found according to the shape of the sample stage, which facilitates subsequent detection work. This completes the use process of the scanning electron microscope sample stage device.

[0024] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A scanning electron microscope sample stage device comprising a base (1), a carrier frame (2) and a U-shaped catch (4), characterized in that Four support frames (2) are fixed on the upper side of the base (1), and a cylinder (3) is fixed in the middle of the inner side of each support frame (2). A U-shaped grab (4) is provided on the outer side of the cylinder (3), and a fixing rod (7) is welded on the upper side of the U-shaped grab (4). There are four U-shaped grabs (4) and four fixing rods (7). The four fixing rods (7) are located inside the four support frames (2). The top of the four fixing rods (7) are respectively fixed with a first sample stage (10), a second sample stage (11), a third sample stage (12), and a fourth sample stage (13). The table heights of the first sample stage (10), the second sample stage (11), the third sample stage (12), and the fourth sample stage (13) are the same.

2. The scanning electron microscope sample stage apparatus of claim 1, wherein, The base (1) is a cube structure, and the support frame (2) on the upper side of the base (1) is four equal hollow small cubes.

3. The scanning electron microscope sample stage apparatus of claim 1, wherein, Both sides of the bottom of the U-shaped grab (4) are fixed with threaded connecting cylinders (5), and the threaded connecting cylinders (5) are provided with locking bolts (6).

4. The scanning electron microscope sample stage apparatus of claim 1, wherein, The cylinder (3) has a sliding groove (8) on its upper side, and a sliding block (9) is fixed on the inner side of the middle part of the U-shaped grab (4).

5. A scanning electron microscope sample stage apparatus as claimed in claim 4, wherein, The sliding block (9) is located inside the sliding groove (8), and the sliding block (9) and the sliding groove (8) are slidably connected.

6. The scanning electron microscope sample stage apparatus according to claim 1, characterized in that, The first sample stage (10) has a circular shape, while the second sample stage (11) has a triangular shape.

7. The scanning electron microscope sample stage apparatus of claim 1, wherein, The third sample stage (12) has a square structure, while the fourth sample stage (13) has a heart-shaped structure.

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