Elastic positioning mechanism for chip testing

Abstract

This utility model relates to the field of semiconductor chip manufacturing equipment and discloses an elastic positioning mechanism for chip testing. It includes a test base with chip placement slots on its upper surface for accommodating and positioning chips. A chip testing positioning mechanism is positioned slightly above and to the side of the chip placement slots. The chip testing positioning mechanism includes an elastic pressing part that, under normal conditions, elastically presses against the upper surface of the chip within the chip placement slot in a vertical direction; a transmission mechanism linked to the elastic pressing part; and a positioning drive mechanism that drives the transmission mechanism linearly. During the upward movement of the positioning drive mechanism, the elastic pressing part first moves vertically upward and then moves slightly upward and to the side, moving away from above the chip placement slots. This provides more stable positioning and limiting; a compact and simple structure; minimal impact on chip loading and unloading; and better testing stability.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip manufacturing equipment, and in particular to an elastic positioning mechanism for chip testing. Background Technology

[0002] In chip manufacturing, chip testing is a crucial process for improving chip yield and quality stability. During chip testing, the chip under test (DUT) needs to be stably positioned and connected to the test circuit board for connection testing. Existing testing equipment typically includes a test socket mounted on the upper side of the test circuit board for chip positioning and a chip positioning mechanism for chip positioning. Existing chip positioning mechanisms, designed to avoid impacting chip loading and unloading, generally fall into two categories. The first involves a spring-loaded rotating pressure block that is removed during chip loading and unloading, then elastically presses the chip into the test socket. Because the spring is not adjustable, the pressure varies depending on the thickness of the chip and the angle of rotation. For thinner chips, insufficient spring pressure can lead to unstable connection between the chip and the test circuit board, while for thicker chips, excessive spring pressure can damage the connection structure. Furthermore, it exerts forces on the chip beyond the vertical direction, resulting in poor practicality. The second type involves a multi-directional drive mechanism working in conjunction with the pressure block. The pressure block is removed during chip loading and unloading, and then moved above the chip for testing before being pressed down for positioning. This multi-directional drive mechanism consists of a horizontal and a vertical power drive mechanism, resulting in a larger and more complex structure with room for improvement in stability. Utility Model Content

[0003] This utility model provides an elastic positioning mechanism for chip testing, which solves the technical problem that chip positioning mechanisms generate forces other than those in the vertical direction for chips of different thicknesses during the testing process, or have large and complex structures, and whose stability needs to be improved.

[0004] The technical solution adopted by this utility model to solve its technical problem is: an elastic positioning mechanism for chip testing, including a test base. The upper surface of the test base is provided with a chip placement cavity for accommodating and limiting the chip. A chip testing positioning mechanism is arranged above and to the side of the chip placement cavity. The chip testing positioning mechanism includes an elastic pressing part that, under normal conditions, elastically presses against the upper surface of the chip within the chip placement cavity in a vertical direction; a transmission mechanism linked to the elastic pressing part; and a positioning drive mechanism that drives the transmission mechanism linearly. During the upward movement of the positioning drive mechanism, the elastic pressing part first moves vertically upward and then moves laterally and upward away from above the chip placement cavity. This provides more stable positioning and limiting; a compact and simple structure; less impact on chip loading and unloading; and better testing stability.

[0005] Furthermore, the chip testing and positioning mechanism also includes a limiting outer plate frame, a vertical sliding part, a horizontal sliding part, and a horizontal driving part. The vertical sliding part is disposed inside the limiting outer plate frame and its vertical movement is limited by the limiting outer plate frame. The vertical sliding part is provided with a horizontal through-hole limiting cavity that limits the horizontal movement of the horizontal sliding part. The limiting outer plate frame is provided with a window for the horizontal sliding part to move. A vertical through-hole clearance cavity is provided on the vertical sliding part at a position corresponding to the horizontal through-hole limiting cavity. The upper end of the horizontal driving part is fixedly disposed inside the upper side of the limiting outer plate frame, and the lower end extends vertically into the vertical through-hole clearance cavity. The sliding part has a vertically penetrating drive cavity that allows the horizontal drive part to pass vertically through. The upper part of the elastic pressing part is fixed to the horizontal sliding part and protrudes from one end of the horizontally penetrating limiting cavity. A first elastic element is provided between the upper part of the elastic pressing part and the corresponding side of the horizontal sliding part. A first driving slope is provided on the upper end of the vertically penetrating drive cavity away from the elastic pressing part. A second driving slope parallel to the first driving slope is provided at the lower end of the horizontal drive part. The lower end of the transmission mechanism is fixedly connected to the vertical sliding part. A vertically penetrating clearance hole is provided at the upper end of the limiting outer plate frame for the transmission mechanism to pass through. Unidirectional drive can realize the on-demand movement of the elastic pressing part in both vertical and horizontal directions, resulting in a simple structure.

[0006] Furthermore, the limiting outer plate frame includes an upper fixing plate, a lower fixing plate, a front fixing plate, and a rear fixing plate. The upper and lower fixing plates are correspondingly arranged vertically. The upper and lower ends of the front and rear fixing plates are correspondingly fixed to the front and rear sides of the lower surface of the upper fixing plate and the upper surface of the lower fixing plate, respectively. Each side of the front and rear fixing plates is provided with at least two vertically arranged vertical limiting protrusions. The vertical sliding part is arranged between the upper and lower fixing plates, and vertical limiting grooves matching the vertical limiting protrusions are provided on both its front and rear sides. An elastically compressed spring is provided between the upper fixing plate and the vertical sliding part. This simple structure achieves elastic contact limiting and clearance for chip placement and removal on the upper surface of the chip.

[0007] Furthermore, the upper end of the vertical sliding part has an annular spring limiting groove vertically penetrating the outer side of the clearance cavity. The lower end of the spring is located within the spring limiting groove. A vertically penetrating drive limiting hole is provided on the upper fixed plate at a position corresponding to the inner side of the upper spring limiting groove of the vertical sliding part. The lower end of the transmission mechanism vertically passes through the drive limiting hole and is fixed to the inner side of the upper spring limiting groove of the vertical sliding part. The portion of the transmission mechanism between the lower side of the upper fixed plate and the upper end of the vertical sliding part is a smooth rod. The spring is sleeved around the smooth rod of the portion of the transmission mechanism between the lower side of the upper fixed plate and the upper end of the vertical sliding part. This ensures that the spring will not shift during long-term operation, improving operational stability.

[0008] Furthermore, the horizontally penetrating limiting cavity includes a first horizontal limiting cavity on the side away from the elastic pressing part and a second horizontal limiting cavity on the side closer to the elastic pressing part. The height of the first horizontal limiting cavity is greater than the height of the second horizontal limiting cavity. The horizontal sliding part includes a first horizontal sliding part and a second horizontal sliding part, which are respectively limited in their horizontal sliding by the first horizontal limiting cavity and the second horizontal limiting cavity. The second horizontal limiting cavity can limit the distance in which the first horizontal sliding part slides horizontally toward the elastic pressing part, resulting in a simple and effective structure.

[0009] Furthermore, the vertical sliding part has first elastic element limiting cavities corresponding to the upper and lower sides of the horizontally penetrating limiting cavity near the transmission rod. A second elastic element limiting cavity is provided on the transmission rod at a position corresponding to the first elastic element limiting cavity. The first elastic element includes two springs, with both ends of the springs elastically abutting against the bottom of the corresponding first and second elastic element limiting cavities. This provides limiting protection for the first elastic element, effectively improving the stability and service life of the device.

[0010] Furthermore, the elastic pressing part includes a transmission rod and a replaceable elastic pressure head fixed to the lower end of the transmission rod. The appropriate elastic pressure head can be replaced according to the size and specifications of the chip, effectively improving the overall applicability of the equipment.

[0011] Furthermore, a horizontally protruding rectangular boss is provided at a horizontally corresponding position on the side of the transmission rod corresponding to the horizontal sliding part. A rectangular recess matching the rectangular boss is provided at the end of the horizontal sliding part corresponding to the transmission rod and at a position corresponding to the rectangular boss. A horizontally penetrating first threaded hole is provided at the position corresponding to the rectangular boss on the transmission rod. A second threaded hole matching the first threaded hole is provided at the bottom of the rectangular recess. A first bolt is provided in the first threaded hole, which, through the first and second threaded holes, secures the transmission rod and the horizontal sliding part together. The structure is compact and the fixation is stable.

[0012] Furthermore, a concealed clearance hole for mounting the first bolt nut is provided on the side of the first threaded hole away from the second threaded hole. This avoids obstructing the structure's operation or causing other adverse effects during chip placement and removal. Attached Figure Description

[0013] Figure 1 A front view schematic diagram of the elastic pressing part, the transmission mechanism, the limiting outer plate frame, the vertical sliding part, the horizontal sliding part, and the first elastic element;

[0014] Figure 2 This is a front view schematic diagram of the internal structure of the limiting outer panel frame;

[0015] Figure 3 This is a partial structural diagram of the elastic pressing part, the horizontal sliding part, and the horizontal driving part;

[0016] Figure 4 This is a cross-sectional schematic diagram showing the elastic pressing part in the case of elastically pressing the chip;

[0017] Figure 5 This is a cross-sectional view of the elastic pressing part when it is removed from above the chip;

[0018] Figure 6 A cross-sectional schematic diagram of the elastic pressing part, the limiting outer plate frame, the vertical sliding part, the horizontal sliding part, and the first elastic element;

[0019] Figure 7 This is a cross-sectional schematic diagram of the horizontal sliding part and the first elastic element.

[0020] The components are labeled as follows: elastic pressing part 110, transmission rod 111, elastic pressure head 112, second elastic element limiting cavity 113, rectangular boss 114, first threaded hole 115, first bolt 116, horizontal protrusion 117, transmission mechanism 120, spring 124, upper fixing plate 131, lower fixing plate 132, front fixing plate 133, rear fixing plate 134, vertical limiting protrusion 135, vertical sliding part 140, horizontal through limiting cavity 141, vertical through clearance cavity 142, vertical limiting groove 143, first elastic element limiting cavity 144, spring limiting groove 145, horizontal sliding part 150, vertical through driving cavity 151, first driving inclined surface 152, rectangular concave platform 153, second threaded hole 154, horizontal driving part 160, first elastic element 170, and chip 200. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] like Figure 1 The elastic positioning mechanism for chip testing shown includes a test base. The upper surface of the test base is provided with a chip placement acupoint for accommodating and limiting the chip 200. A chip testing positioning mechanism is provided on the side above the chip placement acupoint. The chip testing positioning mechanism includes an elastic pressing part 110 that elastically presses against the upper surface of the chip 200 in the chip placement acupoint in the vertical direction under normal conditions, a transmission mechanism 120 that is linked to the elastic pressing part 110, and a positioning drive mechanism that drives the linear drive mechanism 120. During the upward movement of the positioning drive mechanism driving the transmission mechanism 120, the elastic pressing part 110 first moves vertically upward and then moves to the side and upward away from the top of the chip placement acupoint.

[0023] In this specific embodiment, the positioning drive mechanism is a cylinder assembly. In practice, the positioning drive mechanism can also be a linear motor assembly or other mechanism or assembly with linear drive function. A chip testing positioning mechanism is provided on both sides of each chip placement cavity, located above the chip placement cavity on both sides. The lower ends of the two elastic pressing parts 110 are respectively used to elastically and vertically press against the corresponding sides of the upper surface of the chip within the chip placement cavity. In the specific implementation, initially, the chip placement cavity on the test holder is unloaded, and the lower ends of the elastic pressing parts 110 are located within the chip placement cavity. The positioning drive mechanism drives the transmission mechanism 120 to move upwards, and the elastic pressing parts 110 first move upwards and then move laterally upwards away from above the chip placement cavity to a preset position. After the test chip 200 is transferred to the chip placement cavity on the test holder, the positioning drive mechanism moves downwards to reset, and the elastic pressing parts 110 reset accordingly, first moving laterally downwards. Then move vertically downwards until the lower end of the elastic pressing part 110 vertically and elastically abuts against the upper surface of the chip 200 in the chip placement cavity, limiting and pressing the chip 200 to make the chip 200 conductive with the test circuit board. After the positioning is stable, the chip 200 is tested. After the chip 200 is tested, the positioning drive mechanism drives the transmission mechanism 120 to move upwards. The elastic pressing part 110 first moves upwards and then moves to the side and upwards, leaving the top of the chip placement cavity to the preset position. The tested chip 200 in the chip placement cavity on the test seat is transferred away, and the chip 200 to be tested is transferred to the chip placement cavity, and the test can be performed as above. The elastic pressing part 110 vertically and elastically abuts and presses against the chip 200 to position the chip 200. Only the vertical force is applied, and the positioning and limiting are more stable. The structure is compact and simple, with little impact on the loading and unloading of the chip 200, and the test stability is also better.

[0024] Based on the above, such as Figures 1 to 7As shown, the chip testing and positioning mechanism further includes a limiting outer plate frame, a vertical sliding part 140, a horizontal sliding part 150, and a horizontal driving part 160. The vertical sliding part 140 is disposed inside the limiting outer plate frame and its vertical movement is limited by the limiting outer plate frame. The vertical sliding part 140 is provided with a horizontal through-hole limiting cavity 141 that limits the horizontal movement of the horizontal sliding part 150. The limiting outer plate frame is provided with a window for the horizontal sliding part 150 to move. A vertical through-hole clearance cavity 142 is provided on the vertical sliding part 140 at a position corresponding to the horizontal through-hole limiting cavity 141. The upper end of the horizontal driving part 160 is fixedly disposed inside the upper side of the limiting outer plate frame, and its lower end extends vertically into the vertical through-hole clearance cavity 142. The horizontal sliding part 150... The upper part is provided with a vertically penetrating drive cavity 151 through which the horizontal drive part 160 passes vertically. The upper part of the elastic pressing part 110 is fixed to the horizontal sliding part 150 and protrudes from one end of the horizontally penetrating limiting cavity 141. A first elastic element 170 is provided between the upper part of the elastic pressing part 110 and the corresponding side of the horizontal sliding part 150. A first driving inclined surface 152 is provided on the upper end of the vertically penetrating drive cavity 151 away from the elastic pressing part 110. A second driving inclined surface parallel to the first driving inclined surface 152 is provided at the lower end of the horizontal drive part 160. The lower end of the transmission mechanism 120 is fixedly connected to the vertical sliding part 140. A vertically penetrating clearance hole for the transmission mechanism 120 to pass through is provided at the upper end of the limiting outer plate frame.

[0025] In specific implementation, when the vertical sliding part 140 moves vertically within the limiting outer plate frame, it can drive the horizontal sliding part 150 to move vertically, and the horizontal sliding part 150 drives the elastic pressing part 110 fixed thereto to move vertically.

[0026] Under normal conditions, the second driving ramp is located above the first driving ramp 152. The horizontal driving part 160 does not apply force to the horizontal sliding part 150. The first elastic member 170 applies force to make the elastic pressing part 110 move away from the vertical sliding part 140. The lower end of the elastic pressing part 110 is located in the corresponding chip placement acupoint.

[0027] When the transmission mechanism 120 drives the vertical sliding part 140 to move upward, during this process, the vertical sliding part 140 drives the horizontal sliding part 150 and the elastic pressing part 110 to move upward. When the second driving slope at the lower end of the horizontal driving part 160 abuts against the first driving slope 152 of the horizontal sliding part 150 and applies force, the horizontal driving part 160 drives the horizontal sliding part 150 to move horizontally away from the corresponding chip placement hole. That is, during the process of the limiting outer board frame driving the transmission mechanism 120 to move upward, the elastic pressing part 110 first moves vertically upward and then moves to the side and upward away from the top of the chip placement hole.

[0028] The elastic pressing part 110 can be moved as needed in the vertical and horizontal directions with unidirectional drive, and the structure is simple.

[0029] Based on the above, such as Figures 1 to 6 As shown, the limiting outer plate frame includes an upper fixing plate 131, a lower fixing plate 132, a front fixing plate 133, and a rear fixing plate 134. The upper fixing plate 131 and the lower fixing plate 132 are arranged vertically and vertically respectively. The upper and lower ends of the front fixing plate 133 and the rear fixing plate 134 are fixed to the front and rear sides of the lower surface of the upper fixing plate 131 and the upper surface of the lower fixing plate 132 respectively. At least two vertically arranged vertical limiting protrusions 135 are provided on one side of the front fixing plate 133 and the rear fixing plate 134. The vertical sliding part 140 is arranged between the upper fixing plate 131 and the lower fixing plate 132 and has vertical limiting grooves 143 matching the vertical limiting protrusions 135 on both the front and rear sides. An elastically compressed spring member 124 is provided between the upper fixing plate 131 and the vertical sliding part 140.

[0030] In this specific embodiment, the upper end of the horizontal drive unit 160 is fixed to the lower surface of the upper fixing plate 131 by bolts; the upper and lower ends of the front fixing plate 133 and the rear fixing plate 134 are provided with two first fixing plate threaded holes, and the upper fixing plate 131 and the lower fixing plate 132 are provided with through second fixing plate threaded holes at positions corresponding to the first fixing plate threaded holes. The upper fixing plate 131 and the lower fixing plate 132 are fixed together by bolts through the first fixing plate threaded holes and the second fixing plate threaded holes; the front fixing plate 133 and the rear fixing plate 134 are provided with two vertically positioned vertical limiting protrusions 135 on corresponding sides, and the first fixing plate threaded holes are located at positions corresponding to the vertical limiting protrusions 135. While ensuring structural robustness, the structure is more compact and reasonable, saving space.

[0031] In practical implementation, after installation, the vertical sliding part 140 is limited to moving only vertically between the upper fixed plate 131 and the lower fixed plate 132. The spring member 124 is configured so that when the transmission mechanism 120 does not apply force to the vertical sliding part 140, the spring member 124 applies downward elastic pressure to the vertical sliding part 140. The vertical sliding part 140 drives the elastic pressing part 110 to press down elastically and apply pressure to the upper surface of the chip 200. When the transmission mechanism 120 drives the vertical sliding part 140 to move upward and the elastic pressing part 110 to give way, the spring member 124 is further compressed. After the chip transfer mechanism picks up and places the chip 200, the force applied to the transmission mechanism 120 is removed, and the spring member 124 applies a force to reset the vertical sliding part 140. The simple structure realizes the elastic contact limitation and pick-up / placement of the upper surface of the chip 200.

[0032] Based on the above, such as Figure 2 , Figure 4 , Figure 5 and Figure 6 As shown, the upper end of the vertical sliding part 140 vertically penetrates the outer side of the clearance cavity 142 and is provided with an annular spring limiting groove 145. The lower end of the spring member 124 is located inside the spring limiting groove 145. The upper fixing plate 131 is provided with a vertically penetrating drive limiting hole corresponding to the inner side of the upper end spring limiting groove 145 of the vertical sliding part 140. The lower end of the transmission mechanism 120 vertically passes through the drive limiting hole and is fixed inside the upper end spring limiting groove 145 of the vertical sliding part 140. The portion of the transmission mechanism 120 between the lower side of the upper fixing plate 131 and the upper end of the vertical sliding part 140 is a smooth rod. The spring member 124 is sleeved around the smooth rod of the transmission mechanism 120 between the lower side of the upper fixing plate 131 and the upper end of the vertical sliding part 140. The spring limiting groove 145 and the smooth rod cooperate to limit the spring member 124, ensuring that the spring member 124 will not shift during long-term operation and improving operational stability.

[0033] Based on the above, such as Figure 1 , Figure 2 , Figures 4 to 6 As shown, the horizontal through-hole limiting cavity 141 includes a first horizontal limiting cavity on the side away from the elastic pressing part 110 and a second horizontal limiting cavity on the side closer to the elastic pressing part 110. The height of the first horizontal limiting cavity is greater than the height of the second horizontal limiting cavity. The horizontal sliding part 150 includes a first horizontal sliding part and a second horizontal sliding part, which are respectively limited by the first horizontal limiting cavity and the second horizontal limiting cavity to slide horizontally. In specific implementation, the distance that the first horizontal sliding part slides horizontally toward the elastic pressing part 110 can be limited by the second horizontal limiting cavity, which is simple and effective.

[0034] Based on the above, such as Figure 6 As shown, the vertical sliding part 140, near the transmission rod 111, has first elastic element limiting cavities 144 corresponding to the upper and lower sides of the limiting cavity 141. A second elastic element limiting cavity 113 is provided on the transmission rod 111 at a position corresponding to the first elastic element limiting cavity 144. The first elastic element 170 includes two springs, with both ends of the springs elastically abutting the bottom of the corresponding first elastic element limiting cavity 144 and second elastic element limiting cavity 113. In specific implementation, limiting protection is provided for the first elastic element 170, effectively improving the stability and service life of use.

[0035] Based on the above, such as Figure 4 Zhihe Figure 7As shown, the elastic pressing part 110 includes a transmission rod 111 and an elastic pressure head 112 that can be replaced and fixed to the lower end of the transmission rod 111. In this specific embodiment, the main body of the elastic pressure head 112 is made of plastic material and the contact end is covered with an elastic rubber layer. The main body of the elastic pressure head 112 is fixed to the lower end of the transmission rod 111 by bolts. In specific implementations, the elastic pressure head 112 can also be glued to the lower end of the transmission rod 111. The appropriate elastic pressure head 112 can be replaced according to the size and specifications of the chip, effectively improving the overall applicability of the equipment.

[0036] Based on the above, such as Figure 7 As shown, a horizontally protruding rectangular boss 114 is provided at a horizontally corresponding position on the side of the transmission rod 111 corresponding to the horizontal sliding part 150. A rectangular recess 153 matching the rectangular boss 114 is provided at the end of the horizontal sliding part 150 corresponding to the transmission rod 111 and at a position corresponding to the rectangular boss 114. A horizontally penetrating first threaded hole 115 is provided at the position corresponding to the rectangular boss 114 on the transmission rod 111. A second threaded hole 154 matching the first threaded hole 115 is provided at the bottom of the rectangular recess 153. A first bolt 116 is provided in the first threaded hole 115 to fix the transmission rod 111 and the horizontal sliding part 150 together through the first threaded hole 115 and the second threaded hole 154. In practical implementation, after the rectangular boss 114 and the rectangular recess 153 are connected, the rectangular structure avoids relative rotation and vertical movement of the rectangular boss 114 and the rectangular recess 153. The first bolt 116 fixes the transmission rod 111 and the horizontal sliding part 150 together through the first threaded hole 115 and the second threaded hole 154, and limits the horizontal movement. The transmission rod 111 and the horizontal sliding part 150 can be stably fixed together with one bolt. The structure is compact and the fixation is stable.

[0037] Based on the above, such as Figure 7 As shown, a concealed clearance hole for accommodating the nut of the first bolt 116 is provided on the side of the first threaded hole 115 away from the second threaded hole 154. In this specific embodiment, after installation, the nut of the first bolt 116 is located in the concealed clearance hole, avoiding any obstruction or other adverse effects on the operation of the structure during the chip 200 placement and removal process.

[0038] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An elastic positioning mechanism for chip testing, comprising a testing seat, an upper surface of the testing seat being provided with a chip placement hole for accommodating a limiting chip (200), characterized in that: A chip testing and positioning mechanism is provided on the upper side of the chip placement acupoint. The chip testing and positioning mechanism includes an elastic pressing part (110) that is vertically and elastically pressed on the upper surface of the chip (200) in the chip placement acupoint under normal conditions, a transmission mechanism (120) that is linked with the elastic pressing part (110), and a positioning drive mechanism that is a linear drive transmission mechanism (120). During the process of the positioning drive mechanism driving the transmission mechanism (120) to move upward, the elastic pressing part (110) first moves vertically upward and then moves to the upper side to leave the upper side of the chip placement acupoint.

2. The elastic positioning mechanism for chip testing according to claim 1, characterized in that: The chip testing and positioning mechanism further includes a limiting outer plate frame, a vertical sliding part (140), a horizontal sliding part (150), and a horizontal driving part (160). The vertical sliding part (140) is disposed inside the limiting outer plate frame and is limited to move vertically by the limiting outer plate frame. The vertical sliding part (140) is provided with a horizontal through-hole limiting cavity (141) that limits the horizontal movement of the horizontal sliding part (150). The limiting outer plate frame is provided with a window for the horizontal sliding part (150) to move. A vertical through-hole clearance cavity (142) is provided on the vertical sliding part (140) at a position corresponding to the horizontal through-hole limiting cavity (141). The upper end of the horizontal driving part (160) is fixedly disposed on the upper side inside the limiting outer plate frame, and the lower end extends vertically into the vertical through-hole clearance cavity (142). The horizontal sliding part (150) is provided with... A vertically penetrating drive cavity (151) through which the horizontal drive part (160) passes vertically is provided. The upper part of the elastic pressing part (110) is fixed on the horizontal sliding part (150) and protrudes from one end of the horizontal penetrating limiting cavity (141). A first elastic element (170) is provided between the upper part of the elastic pressing part (110) and the corresponding side of the horizontal sliding part (150). A first driving slope (152) is provided on the side of the upper end of the vertically penetrating drive cavity (151) away from the elastic pressing part (110). A second driving slope parallel to the first driving slope (152) is provided at the lower end of the horizontal drive part (160). The lower end of the transmission mechanism (120) is fixedly connected to the vertical sliding part (140). A vertically penetrating clearance hole through which the transmission mechanism (120) passes is provided at the upper end of the limiting outer plate frame.

3. The elastic positioning mechanism for chip testing according to claim 2, characterized in that: The limiting outer plate frame includes an upper fixing plate (131), a lower fixing plate (132), a front fixing plate (133), and a rear fixing plate (134). The upper fixing plate (131) and the lower fixing plate (132) are arranged vertically and vertically respectively. The upper and lower ends of the front fixing plate (133) and the rear fixing plate (134) are fixed to the front and rear sides of the lower surface of the upper fixing plate (131) and the upper surface of the lower fixing plate (132) respectively. At least two vertically arranged vertical limiting protrusions (135) are provided on one side of the front fixing plate (133) and the rear fixing plate (134). The vertical sliding part (140) is arranged between the upper fixing plate (131) and the lower fixing plate (132) and has vertical limiting grooves (143) matching the vertical limiting protrusions (135) on both the front and rear sides. An elastically compressed spring (124) is provided between the upper fixing plate (131) and the vertical sliding part (140).

4. The elastic positioning mechanism for chip testing according to claim 3, characterized in that: The upper end of the vertical sliding part (140) is vertically penetrating the outer side of the clearance cavity (142) and is provided with an annular spring limiting groove (145). The lower end of the spring member (124) is located in the spring limiting groove (145). The upper fixing plate (131) is provided with a vertically penetrating drive limiting hole at the corresponding position to the inner side of the upper end spring limiting groove (145) of the vertical sliding part (140). The lower end of the transmission mechanism (120) is vertically penetrating through the drive limiting hole and fixed to the inner side of the upper end spring limiting groove (145) of the vertical sliding part (140). The part of the transmission mechanism (120) between the lower side of the upper fixing plate (131) and the upper end of the vertical sliding part (140) is a smooth rod. The spring member (124) is sleeved on the outer periphery of the smooth rod of the part of the transmission mechanism (120) between the lower side of the upper fixing plate (131) and the upper end of the vertical sliding part (140).

5. The elastic positioning mechanism for chip testing according to claim 2, characterized in that: The horizontal through-limiting cavity (141) includes a first horizontal limiting cavity on the side away from the elastic pressing part (110) and a second horizontal limiting cavity on the side close to the elastic pressing part (110). The height of the first horizontal limiting cavity is greater than the height of the second horizontal limiting cavity. The horizontal sliding part (150) includes a first horizontal sliding part and a second horizontal sliding part that are respectively limited by the first horizontal limiting cavity and the second horizontal limiting cavity for horizontal sliding.

6. The elastic positioning mechanism for chip testing according to claim 2, characterized in that: The vertical sliding part (140) is horizontally connected to the upper and lower sides of the limiting cavity (141) near the transmission rod (111) and is provided with a first elastic element limiting cavity (144). The transmission rod (111) is provided with a second elastic element limiting cavity (113) at the position corresponding to the first elastic element limiting cavity (144). The first elastic element (170) includes two springs and the two ends of the springs elastically abut against the bottom of the corresponding first elastic element limiting cavity (144) and second elastic element limiting cavity (113).

7. The elastic positioning mechanism for chip testing according to claim 2, characterized in that: The elastic pressing part (110) includes a transmission rod (111) and an elastic pressure head (112) that can be replaced and fixed to the lower end of the transmission rod (111).

8. The elastic positioning mechanism for chip testing according to claim 7, characterized in that: A horizontally protruding rectangular boss (114) is provided at a horizontally corresponding position on the side of the transmission rod (111) and the horizontal sliding part (150). A rectangular recess (153) matching the rectangular boss (114) is provided at the end of the horizontal sliding part (150) corresponding to the transmission rod (111) and at a position corresponding to the rectangular boss (114). A horizontally penetrating first threaded hole (115) is provided at the position corresponding to the rectangular boss (114) on the transmission rod (111). A second threaded hole (154) matching the first threaded hole (115) is provided at the bottom of the rectangular recess (153). A first bolt (116) is provided in the first threaded hole (115) to fix the transmission rod (111) and the horizontal sliding part (150) together through the first threaded hole (115) and the second threaded hole (154).

9. The elastic positioning mechanism for chip testing according to claim 8, characterized in that: The first threaded hole (115) is provided with a hidden clearance hole for accommodating the nut of the first bolt (116) on the side away from the second threaded hole (154).

Images