Support components and measuring devices

Abstract

This invention provides a support assembly and a measuring device. The support assembly includes: a measuring platform with multiple boundary points, one of which is a reference recess; multiple measuring recesses spaced apart along the distribution direction of the reference recess and the boundary points; each measuring recess is a through hole penetrating the measuring platform; the reference recess and the multiple measuring recesses form an installation space adapted to the workpiece to be measured; a scale portion is also provided on the measuring platform; multiple support members, each detachably mounted on the reference recess and the multiple measuring recesses, each support member being used to support different ends of the workpiece to be measured; at least one support member mounted on a measuring recess is provided with a marking member, which is used to indicate the scale on the scale portion. This invention solves the problem of low measurement efficiency of the workpiece due to the fixed-size measuring platform in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material testing technology, and more specifically, to a support component and a measuring device. Background Technology

[0002] The four-probe method is an important measurement method in the field of semiconductor material property testing, and it is widely used to measure the resistivity and conductivity of semiconductor materials. Traditional four-probe measurement devices are usually equipped with a sample stage of fixed size, and their structural design is mainly for measuring samples of specific sizes.

[0003] However, the fixed-size measurement platform is limited to adapting only to standard-sized semiconductor samples and cannot be compatible with samples of different sizes. This single-size-fits-all sample stage has obvious limitations in practical applications, causing users to frequently change the sample stage or adjust the equipment when measuring samples of different sizes, which greatly reduces measurement efficiency. Utility Model Content

[0004] The main objective of this invention is to provide a support component and a measuring device to solve the problem of low measurement efficiency of the workpiece due to the fixed-size measuring platform in the prior art.

[0005] To achieve the above objectives, according to one aspect of the present invention, a support assembly is provided for supporting a workpiece to be measured. The support assembly includes: a measuring platform having multiple boundary points, one of which is a reference recess; multiple measuring recesses spaced apart along the distribution direction of the reference recess and the boundary points; each measuring recess being a through hole penetrating the measuring platform; the reference recess and the multiple measuring recesses forming an installation space adapted to the workpiece to be measured; a scale portion also provided on the measuring platform; multiple support members, each detachably disposed on the reference recess and the multiple measuring recesses, the multiple support members respectively used to support different ends of the workpiece to be measured; at least one support member disposed on a measuring recess having a marking member for indicating the scale on the scale portion.

[0006] Furthermore, the support includes a support portion having a support surface that contacts the workpiece to be measured, and the support surface and the upper surface of the measuring platform are spaced apart along the height direction of the measuring platform.

[0007] Furthermore, the support also includes a connecting rod that extends along the height direction of the measuring platform and is inserted into the reference recess and the measuring recess to fix the position of the support.

[0008] Furthermore, the support also includes a connecting rod, the outer circumferential wall of which is provided with a groove, and the inner circumferential walls of the reference recess and the measuring recess are provided with protrusions, which are inserted into the groove on the connecting rod.

[0009] Furthermore, the support portion is provided with a relief recess, which is used to form a support surface. The shape of the relief recess is adapted to the end of the part to be measured, and the end of the part to be measured is located in the relief recess.

[0010] Furthermore, along the height direction of the measuring platform, the projection of the recess onto the upper surface of the measuring platform is rectangular.

[0011] Furthermore, the measuring platform has a rectangular structure and four support members. The four support members are respectively set on the reference recess and the other three measuring recesses. The reference recess and the other three measuring recesses are spaced apart along the length direction, the width direction, and the diagonal extension direction of the measuring platform, respectively.

[0012] Furthermore, the support assembly also includes a detection element and a display screen. The detection element is used to detect the real-time movement distance of at least one support element away from the reference recess in the extension direction of the scale portion. The detection element is communicatively connected to the display screen so that the display screen displays the real-time movement distance.

[0013] Furthermore, the support assembly also includes a flexible connecting rod, the two ends of which are connected to the support member and the marking member, respectively.

[0014] According to another aspect of the present invention, a measuring device is provided, including the support assembly described above. The measuring device further includes a measuring instrument for measuring the resistivity and conductivity of the part to be measured.

[0015] The technical solution of this utility model includes a support assembly comprising a measuring platform and multiple support members. The measuring platform has a reference recess and multiple spaced measuring recesses, which enclose an installation space adapted to the part to be measured. By manually inserting each support member into the corresponding measuring recess, the size of the installation space can be adjusted, allowing the measuring platform to support parts of different sizes. This enables it to quickly adapt to parts of different sizes without frequent changes to the measuring platform or complex mechanical adjustments, thus solving the problem of low measurement efficiency caused by fixed-size measuring platforms in the prior art. Simultaneously, the measuring platform is also equipped with a scale section, and at least one support member located in a measuring recess is equipped with a marker. The marker indicates the scale on the scale section. When the position of the support member is manually adjusted, the marker moves on the scale section, clearly displaying the current travel range and specific position information of the support member. This allows operators to more accurately position and adjust the part to be measured, improving measurement accuracy. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 A schematic diagram of the structure of the support assembly according to the present invention is shown;

[0018] Figure 2 A structural schematic diagram of the support member of the support assembly according to the present invention is shown;

[0019] Figure 3 A schematic diagram of the structure of the measuring platform of the support assembly according to the present invention is shown;

[0020] Figure 4 A schematic diagram of the structure of the part to be measured assembled with the support assembly of this utility model is shown.

[0021] The above figures include the following reference numerals:

[0022] 1. Measuring platform; 2. Reference recess; 41. Measuring recess; 5. Measured part; 10. Support; 11. Support part; 12. Support surface; 13. Connecting rod; 15. Clearance recess; 6. Scale part; 7. Marking part. Detailed Implementation

[0023] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0024] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0025] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0026] Please refer to Figures 1 to 4 This utility model provides a support assembly for supporting a workpiece 5 to be measured. The support assembly includes: a measuring platform 1 having multiple boundary points, one of which is a reference recess 2; multiple measuring recesses 41 spaced apart along the distribution direction of the reference recess 2 and the boundary points; the measuring recesses 41 being through holes penetrating the measuring platform 1; the reference recess 2 and the multiple measuring recesses 41 forming an installation space adapted to the workpiece 5 to be measured; a scale portion 6 also being provided on the measuring platform 1; multiple support members 10, each of which is detachably mounted on the reference recess 2 and the multiple measuring recesses 41, and the multiple support members 10 being used to support different ends of the workpiece 5 to be measured; and at least one support member 10 mounted on the measuring recess 41 being provided with a marking member 7, which is used to indicate the scale on the scale portion 6.

[0027] The support assembly of this utility model includes a measuring platform 1 and multiple support members 10. The measuring platform 1 has a reference recess 2 and multiple spaced measuring recesses 41. The reference recess 2 and the multiple measuring recesses 41 form an installation space adapted to the part 5 to be measured. By manually inserting each support member 10 into the corresponding measuring recess 41, the size of the installation space can be adjusted, allowing the measuring platform 1 to support parts 5 of different sizes through the support members 10. This enables it to quickly adapt to parts 5 of different sizes without the need for frequent replacement of the measuring platform 1 or complex mechanical adjustments. This solves the problem of low measurement efficiency of the workpiece 5 caused by the fixed-size measurement platform 1 in the prior art; at the same time, the measurement platform is also provided with a scale section 6, and at least one support member 10 provided on the measurement recess 41 is provided with a marker 7. The marker 7 is used to indicate the scale on the scale section 6. When the position of the support member 10 is manually adjusted, the marker 7 moves on the scale section 6, clearly showing the current travel range and specific position information of the support member 10, so that the operator can more accurately position and adjust the workpiece 5 to be measured, and improve the accuracy of the measurement.

[0028] In this embodiment, the support member 10 includes a support portion 11, which has a support surface 12 that contacts the part to be measured 5. The support surface 12 and the upper surface of the measuring platform 1 are spaced apart (i.e., non-contact) along the height direction of the measuring platform 1.

[0029] In existing technologies, the design of traditional measurement platform 1 still suffers from the problem of direct contact between the measured component 5 and the measurement platform 1. During the measurement process, the measured component 5 needs to be in close contact with the surface of the measurement platform 1. This contact method not only easily leads to surface contamination of the measured component 5, but may also affect the measurement accuracy due to tiny particles or impurities on the surface of the measurement platform 1. For the testing of some high-precision semiconductor materials, even minor contamination on the surface of the measured component 5 may directly affect the test results of the material's electrical properties, thereby affecting the material's quality assessment and subsequent applications. Furthermore, direct contact between the measured component 5 and the measurement platform 1 may also cause scratches or damage to the surface of the measured component 5, especially when measuring thinner or more brittle semiconductor measured components 5, where this risk is more pronounced.

[0030] Therefore, by setting the support surface 12 and the upper surface of the measuring platform 1 in a non-contact manner along the height direction of the measuring platform 1, a certain height space is left between the support surface 12 and the upper surface of the measuring platform 1, ensuring that the part to be measured 5 will not directly contact the surface of the measuring platform 1. This can effectively prevent the part to be measured 5 from coming into contact with microscopic contaminants (such as dust, grease, etc.) on the surface of the measuring platform 1 during the measurement process, thereby significantly reducing the contamination of the part to be measured 5 and also reducing the risk of damage to the part to be measured 5 during the measurement process.

[0031] In this embodiment, the support member 10 further includes a connecting rod 13, which extends along the height direction of the measuring platform 1. The connecting rod 13 is inserted into the through holes of the reference recess 2 and the measuring recess 41 to fix the position of the support member 10. Specifically, a first connecting annular groove is provided on the circumferential outer wall of the connecting rod 13, and a second connecting hole is provided on the circumferential inner wall of the reference recess 2 and the measuring recess 41. The support assembly also includes a fastener, which passes through the second connecting hole and the first connecting annular groove in sequence. The tip of the fastener abuts against the bottom of the first connecting annular groove to lock and fix the connecting rod 13 inserted into the through holes of the reference recess 2 and the measuring recess 41. This ensures that the connection between the support member 10 and the measuring platform 1 is firm and stable. Even if slight external interference (such as vibration or tilt) is encountered during the measurement process, the stable position of the part to be measured 5 can be maintained, thereby improving the accuracy of the measurement. The axial direction of the second connecting hole is perpendicular to the axial direction of the connecting rod 13, and the fastener is threadedly connected to the second connecting hole.

[0032] In practice, tightening the fastener will firmly fix the support 10 to the current measuring recess 41. Even if the measuring platform 1 is tilted, the support 10 will not fall off, greatly improving stability. After loosening the fastener, the support 10 can be moved to other measuring recesses 41 and tightened again to ensure that the size of the measuring platform 1 is always compatible with the specifications of the part to be measured 5, and the reference recess 2 is always kept at the lower left corner of the measuring platform 1.

[0033] Specifically, the connecting rod 13 is a cylindrical rod; the second connecting hole is a radially threaded through hole (M3 or M4); the first connecting annular groove is a 0.5mm deep V-shaped annular groove or a flat cut, wherein the V-shaped annular groove has a first groove wall and a second groove wall arranged opposite to each other along the axial direction of the connecting rod 13, both the first groove wall and the second groove wall are connected to the bottom of the V-shaped annular groove, the second groove wall is set closer to the bottom surface of the measuring platform 1 relative to the first groove wall, and the distance between the first groove wall and the axis of the connecting rod 13 in the radial direction of the connecting rod 13 gradually increases from the bottom surface to the top surface of the measuring platform 1. The second groove wall extends in the radial direction of the connecting rod 13, tightly... The fastener is sequentially inserted through the second connecting hole and the V-shaped annular groove, and abuts against the bottom of the V-shaped annular groove, as well as against the first and second groove walls of the V-shaped annular groove, to limit the movement of the connecting rod 13; or, the planar cut has a first groove wall and a second groove wall arranged opposite to each other along the axial direction of the connecting rod 13, both of which are connected to the bottom of the planar cut, and both of which extend radially along the connecting rod 13. The fastener is sequentially inserted through the second connecting hole and the planar cut, and abuts against the bottom of the planar cut, as well as against the first and second groove walls of the planar cut, to limit the movement of the connecting rod 13.

[0034] In other embodiments, the support member 10 further includes a connecting rod 13, the outer circumferential wall of which is provided with a groove, and the inner circumferential walls of the reference recess 2 and the measuring recess 41 are provided with protrusions, which are inserted into the groove on the connecting rod 13.

[0035] Specifically, the groove on the connecting rod 13 is inserted into the protrusion on the circumferential inner wall of the reference recess 2 and the measuring recess 41, that is, the protrusion is inserted into the groove on the connecting rod 13 that is adapted to it, which ensures that the connection between the support member 10 and the measuring platform 1 is firm and stable, and also maintains the stable position of the part to be measured 5, thereby improving the accuracy of the measurement. At the same time, the support member 10 can be quickly installed and removed, and the operator can quickly adjust the position of the support member 10 according to the part to be measured 5 of different sizes, which greatly improves the efficiency when changing the part to be measured 5; wherein, the protrusion protrudes along the radial direction of the connecting rod 13.

[0036] Optionally, such as Figure 2As shown, the support member 10 includes two connecting rods 13, which are spaced apart along the diagonal of the support member 10. At this time, the reference recess 2 includes two reference holes, and the measuring recess 41 includes two measuring holes. The two connecting rods 13 of the support member 10 are respectively inserted into the two reference holes of the reference recess 2 or the two measuring holes of the measuring recess 41.

[0037] In this embodiment, as Figure 2 As shown, the support part 11 is a square platform, and the clearance recess 15 is used to form the support surface 12. The shape of the clearance recess 15 is adapted to the end of the part to be measured 5, and the end of the part to be measured 5 can be placed on the clearance recess 15.

[0038] Specifically, the end of the measuring piece 5 is located within the relief recess 15, so that the measuring piece 5 can be stably supported by the support part 11 when placed, while reducing the contact area between the support part 11 and the measuring piece 5, thus reducing contamination and damage to the measuring piece 5.

[0039] In this embodiment, as Figure 2 As shown, along the height direction of the measuring platform 1, the projection of the recess 15 on the upper surface of the measuring platform 1 is rectangular.

[0040] Specifically, the part to be measured 5 has a rectangular structure, and the four corners of the part to be measured 5 are located in the four clearance recesses 15, which effectively avoids the end of the part to be measured 5 from directly contacting the measuring platform 1, and can reduce the damage and contamination of the edge of the part to be measured 5 during handling and measurement.

[0041] In this embodiment, the measuring platform 1 has a rectangular structure, and there are four support members 10. The four support members 10 are respectively disposed on the reference recess 2 and the other three measuring recesses 41. The reference recess 2 and the three measuring recesses 41 are respectively spaced along the length direction, the width direction and the diagonal extension direction of the measuring platform 1.

[0042] In this embodiment, the support assembly further includes a detection element and a display screen. The detection element is used to detect the real-time movement distance of at least one support element 10 away from the reference recess 2 in the extension direction of the scale portion 6. The detection element is communicatively connected to the display screen so that the display screen displays the real-time movement distance.

[0043] In this embodiment, the support assembly further includes an elastic connecting rod, the two ends of which are connected to the support member 10 and the marking member 7, respectively.

[0044] Specifically, the movement distance of the support 10 in the extension direction of the scale section 6 is monitored in real time by the detection component, and the data is transmitted to the display screen. The operator can view and adjust the position of the part to be measured 5 in an instant, thereby greatly improving the accuracy of the measurement.

[0045] Optionally, the detection element is a displacement sensor.

[0046] Specifically, the presence of the elastic connecting rod can automatically compensate for slight displacements caused by external factors (such as equipment vibration, changes in ambient temperature, etc.), ensuring that the support member 10 and the indicator member 7 always maintain the most suitable fixed state, thereby improving the stability of the positioning of the measured member 5, and further ensuring that the stroke range and specific position information of the support member 10 can be accurately obtained based on the movement distance of the indicator member 7 in the extension direction of the scale portion 6.

[0047] Specifically, the scale section 6 is a travel scale, and the indicator 7 is a movable pointer. The travel scale is fixed to the side of the measuring platform 1, and the pointer is connected to the support member 10, moving with the support member 10. When the operator manually adjusts the position of the support member 10, the pointer moves on the travel scale, clearly displaying the current travel range and specific position information of the support member 10. This allows the operator to more accurately adjust the positioning of the part 5 to be measured, improving the accuracy of the measurement.

[0048] This utility model also provides a measuring device, including the above-mentioned support assembly. The measuring device also includes a measuring instrument for measuring the resistivity and conductivity of the part to be measured 5.

[0049] The measuring device of this utility model includes the aforementioned support assembly and a measuring instrument for measuring the resistivity and conductivity of the workpiece 5 to be measured. The support assembly includes: a measuring platform 1 with multiple boundary points, one of which is a reference recess 2; multiple measuring recesses 41 spaced apart along the distribution direction of the reference recess 2 and the boundary points; each measuring recess 41 being a through hole penetrating the measuring platform 1; the reference recess 2 and the multiple measuring recesses 41 forming an installation space adapted to the workpiece 5 to be measured; a scale portion 6 is also provided on the measuring platform; multiple support members 10, each detachably mounted on the reference recess 2 and the multiple measuring recesses 41, each support member 10 being used to support different ends of the workpiece 5 to be measured; at least one support member 10 mounted on the measuring recess 41 is provided with a marking member 7, which indicates the scale on the scale portion 6.

[0050] In specific implementation, the measurement process of the measuring device of this utility model is as follows: According to the size of the part to be measured, each support 10 is manually inserted into the selected measuring recess 41. When placing the part to be measured 5, ensure that the key measuring points of the part to be measured 5 are within the indication range of the scale part 6; use a measuring instrument to perform four-probe measurement on the part to be measured 5 to obtain electrical parameter data. Clean and check the probes of the measuring instrument before and after measurement to ensure good contact and improve measurement accuracy; combine the size and position information of the part to be measured, calibrate and analyze the data, and eliminate errors caused by size differences.

[0051] In specific implementation, 1.1. Based on the size and shape of the measuring platform 1, plan the distribution of the measuring recesses 41. The measuring recesses 41 need to be evenly distributed on the surface of the measuring platform 1, and ensure sufficient space to place measuring parts 5 of different sizes. Since the measuring platform 1 is rectangular, design measuring recesses 41 near the four corners and the center of the measuring platform 1 to flexibly place measuring parts 5 of different sizes. 1.2. The size of the measuring recesses 41 should be determined according to the installation requirements of the support member 10. Generally, the diameter of the measuring recesses 41 should be slightly larger than the diameter of the connecting rod 13 so that the support member 10 can be smoothly installed on the measuring recesses 41. For example, if the diameter of the connecting rod 13 is 5mm, the diameter of the measuring recesses 41 can be designed to be about 6mm. 1.3 A radial threaded through hole (M3 or M4), i.e. a second connecting hole, is machined on the circumferential sidewall of each measuring recess 41, and fitted with an internal hexagonal flat-end set screw, i.e. a fastener. The screw axis is perpendicular to the axis of the measuring recess 41 and is used to tighten the cylindrical surface of the support 10 to achieve quick locking and anti-loosening.

[0052] 2.1 The shape and dimensions of the connecting rod 13 should match the measuring recess 41. It should be cylindrical, and a 0.5mm deep V-shaped groove or flat cut (i.e., the first connecting annular groove) should be machined on the corresponding height of the circumferential sidewall for the tip of the set screw (i.e., the fastener) to tighten, forming a reliable lock. 2.2 The shape and dimensions of the support part 11 should be designed according to the shape and dimensions of the part to be measured 5. For a rectangular part to be measured 5, the support part 11 can be designed as cylindrical or rectangular to reduce the contact area. 2.3 The support surface 12 should be designed as a smooth surface to reduce friction and contamination. 2.4 The height of the connecting rod 13 should be designed according to the thickness of the part to be measured 5 and the measurement requirements. Generally, the height should be sufficient to maintain a certain distance between the bottom of the part to be measured 5 and the measuring platform 1, avoiding direct contact between the part to be measured 5 and the measuring platform 1. 2.5 The diameter or width of the support part 11 should be as small as possible to reduce the contact area with the part to be measured 5. For example, for a rectangular part 5 to be measured, the support part 11 can be designed as a cylinder with a diameter of 2-3 mm.

[0053] 3.1 During installation, first insert the connecting rod 13 of the support member 10 into the measuring recess 41. After confirming the depth is in place, tighten the side wall set screws (fasteners) with an Allen wrench. After installation, gently shake the support member 10 to check its stability. If the support member 10 still wobbles, tighten the screws (fasteners) again or check if the V-groove / cutout is aligned. Then, select a suitable measuring recess 41 to install the support member 10 according to the size and shape of the part to be measured 5. For rectangular parts to be measured 5, the support member 10 usually needs to be installed in the measuring recesses 41 near the four corners of the measuring platform 1 so that the four corners of the part to be measured 5 can be set precisely on the support member 10.

[0054] 4.1. Based on the size and shape of the part to be measured 5, place the part to be measured 5 on the installed support 10. For rectangular parts to be measured 5, carefully observe the four corners of the part to be measured 5 and the position of the support 10 to ensure that the support 10 is accurately positioned according to the size of the part to be measured 5 and that its position corresponds one-to-one with the four corners of the part to be measured 5. Then, steadily pick up the rectangular part to be measured 5 with both hands and slowly bring one corner of the part to be measured 5 close to the support 10. Align one corner first. When this corner contacts the support 10 and can be just placed inside, align the other three corners in turn, so that the four corners of the part to be measured 5 are just set on the support 10. At this time, the four corners of the part to be measured 5 are in contact with the support 10, the contact area is small, and the part to be measured 5 does not directly contact the measuring platform 1, thereby reducing contamination between the part to be measured 5 and the measuring platform 1.

[0055] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:

[0056] The support assembly of this utility model can quickly adapt to different sizes of the measuring parts 5 by manually adjusting the support 10, without the need for frequent changes of the measuring platform 1 or complex mechanical adjustments; it reduces the preparation time caused by changes in the size of the measuring parts 5 and improves the detection efficiency; it can be compatible with measuring parts 5 from small to large sizes, and has wide applicability; at the same time, the manual adjustment method is simple and intuitive, reducing the difficulty of operation and the probability of error.

[0057] The support assembly of this utility model includes a measuring platform 1 and multiple support members 10. The measuring platform 1 has a reference recess 2 and multiple spaced measuring recesses 41. The reference recess 2 and the multiple measuring recesses 41 form an installation space adapted to the part 5 to be measured. By manually inserting each support member 10 into the corresponding measuring recess 41, the size of the installation space can be adjusted, allowing the measuring platform 1 to support parts 5 of different sizes through the support members 10. This enables it to quickly adapt to parts 5 of different sizes without the need for frequent replacement of the measuring platform 1 or complex mechanical adjustments. This solves the problem of low measurement efficiency of the workpiece 5 caused by the fixed-size measurement platform 1 in the prior art; at the same time, the measurement platform is also provided with a scale section 6, and at least one support member 10 provided on the measurement recess 41 is provided with a marker 7. The marker 7 is used to indicate the scale on the scale section 6. When the position of the support member 10 is manually adjusted, the marker 7 moves on the scale section 6, clearly showing the current travel range and specific position information of the support member 10, so that the operator can more accurately position and adjust the workpiece 5 to be measured, and improve the accuracy of the measurement.

[0058] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0059] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this application.

[0060] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A support assembly for supporting the part to be measured (5), characterized in that, The support components include: The measuring platform (1) has multiple boundary points, one of which is a reference recess (2). Along the distribution direction of the reference recess (2) and each of the boundary points, there are multiple measuring recesses (41) spaced apart. The measuring recesses (41) are through holes penetrating the measuring platform (1). The reference recess (2) and the multiple measuring recesses (41) form an installation space adapted to the workpiece (5) to be measured. The measuring platform is also provided with a scale section (6). Multiple support members (10) are provided, each of which is detachably disposed on the reference recess (2) and the multiple measuring recesses (41). The multiple support members (10) are respectively used to support different ends of the object to be measured (5). At least one support member (10) disposed on the measuring recess (41) is provided with a marking member (7), which is used to indicate the scale on the scale portion (6).

2. The support component according to claim 1, characterized in that, The support member (10) includes a support portion (11), which has a support surface (12) that contacts the object to be measured (5). The support surface (12) and the upper surface of the measuring platform (1) are spaced apart along the height direction of the measuring platform (1).

3. The support component according to claim 1, characterized in that, The support member (10) also includes a connecting rod (13) which extends along the height direction of the measuring platform (1) and is inserted into the reference recess (2) and the measuring recess (41) to fix the position of the support member (10).

4. The support component according to claim 1, characterized in that, The support member (10) also includes a connecting rod (13), the outer circumferential wall of the connecting rod (13) is provided with a groove, the inner circumferential wall of the reference recess (2) and the measuring recess (41) is provided with a protrusion, and is inserted into the groove on the connecting rod (13).

5. The support component according to claim 2, characterized in that, The support portion (11) is provided with a relief recess (15), which is used to form the support surface (12). The shape of the relief recess (15) is adapted to the end of the part to be measured (5), and the end of the part to be measured (5) is located in the relief recess (15).

6. The support component according to claim 5, characterized in that, Along the height direction of the measuring platform (1), the projection of the avoidance recess (15) on the upper surface of the measuring platform (1) is rectangular.

7. The support component according to claim 1, characterized in that, The measuring platform (1) has a rectangular structure, and there are four support members (10). The four support members (10) are respectively disposed on the reference recess (2) and the other three measuring recesses (41). The reference recess (2) and the other three measuring recesses (41) are respectively spaced along the length direction of the measuring platform (1), the width direction of the measuring platform (1), and the diagonal extension direction of the measuring platform (1).

8. The support component according to claim 1, characterized in that, The support assembly further includes a detection element and a display screen. The detection element is used to detect the real-time movement distance of the at least one support element (10) away from the reference recess (2) in the extension direction of the scale portion (6). The detection element is communicatively connected to the display screen so that the display screen displays the real-time movement distance.

9. The support component according to claim 1, characterized in that, The support assembly also includes an elastic connecting rod, the two ends of which are connected to the support member (10) and the marking member (7), respectively.

10. A measuring device, characterized in that, The measuring device includes the support component according to any one of claims 1 to 9, and further includes a measuring instrument for measuring the resistivity and conductivity of the part to be measured (5).

Images