A substrate adsorption device for a sapphire substrate lithography machine

Abstract

This utility model relates to the field of lithography machine technology and discloses a substrate adsorption device for a sapphire substrate lithography machine. It includes a base, a moving mechanism on the base, a disassembly / assembly mechanism on the moving mechanism, and a vacuum chuck on the disassembly / assembly mechanism. The disassembly / assembly mechanism includes a fixed plate and a fixed frame. The fixed frame is fixedly mounted on the fixed plate, and a pull rod is provided on the fixed frame. An insert plate is fixedly mounted on the pull rod. When the vacuum chuck needs to be disassembled for maintenance, the user can pull the pull rod with the pull rod, causing the insert plate to be pulled out from the positioning plate at the bottom of the vacuum chuck. At this time, the positioning plate loses the positioning of the insert plate, and the vacuum chuck can be directly removed from the fixed plate, facilitating quick disassembly of the vacuum chuck and improving the maintenance efficiency of the vacuum chuck.

Description

Technical Field

[0001] This utility model relates to the field of lithography technology, specifically to a substrate adsorption device for a sapphire substrate lithography machine. Background Technology

[0002] With the rapid development of the semiconductor and LED industries, the types of wafers are increasing, and the requirements for testing and wafer positioning accuracy are also becoming more stringent. Among these requirements, photolithography machines are essential in the chip manufacturing process. Photolithography machines are key equipment in the semiconductor device manufacturing process, used to create various patterns on semiconductor devices. Sapphire substrates are materials primarily composed of aluminum oxide single crystals, and due to their excellent physicochemical properties, they are widely used in the semiconductor, optoelectronics, and high-end manufacturing fields.

[0003] Currently, most existing lithography machines use vacuum adsorption devices to position the substrate. However, the existing vacuum chucks are fixed on the processing stage of the lithography machine, making it inconvenient to remove them for maintenance and cleaning. Therefore, a substrate adsorption device for sapphire substrate lithography machines is proposed to solve the above-mentioned problems. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a substrate adsorption device for a sapphire substrate lithography machine, which addresses the shortcomings of the prior art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a substrate adsorption device for a sapphire substrate lithography machine, including a base, a moving mechanism on the base, a disassembly and assembly mechanism on the moving mechanism, and a vacuum suction cup on the disassembly and assembly mechanism; The disassembly and assembly mechanism includes a fixed plate and a fixed frame. The fixed frame is fixedly installed on the fixed plate. A pull rod is provided on the fixed frame. An insert plate is fixedly installed on the pull rod. A spring is sleeved on the pull rod. A positioning plate is fixedly installed at the bottom of the vacuum suction cup. An insertion hole is opened on the positioning plate. The insert plate is inserted into the insertion hole. The moving mechanism includes a motor and a lead screw. The lead screw is fixedly installed on the output end of the motor, and a moving seat is threaded onto the lead screw.

[0006] Preferably, the fixing plate is fixedly installed on the movable base, and the fixing plate has a positioning hole. A positioning post is inserted into the positioning hole. The positioning hole and the positioning post can be used to position the vacuum suction cup.

[0007] Preferably, the positioning post is fixedly installed at the bottom of the vacuum suction cup, a handle is fixedly installed on the pull rod, and an air extraction pipe is provided at the bottom of the vacuum suction cup. The pull handle allows the pull rod to be pulled easily.

[0008] Preferably, one end of the spring abuts against the insert plate, and the other end of the spring abuts against the fixing frame. The fixing frame has a through hole, and the pull rod passes through the inside of the through hole. The spring allows the insert plate to be easily inserted into the positioning plate under its force.

[0009] Preferably, the motor is fixedly mounted on the base, and the lead screw is rotatably connected inside the base via a bearing. Starting the motor can drive the lead screw to rotate.

[0010] Preferably, a guide rod is fixedly installed inside the base, and the movable seat is slidably connected to the guide rod. The guide rod can limit and guide the movable seat.

[0011] The present invention adopts the above technical solution, which can bring the following beneficial effects: 1. When the sapphire substrate lithography machine substrate adsorption device needs to disassemble and maintain the vacuum chuck, the user can pull the lever to pull the insert plate out of the positioning plate at the bottom of the vacuum chuck. At this time, the positioning plate loses the positioning of the insert plate, and the vacuum chuck can be directly removed from the fixing plate, which facilitates quick disassembly of the vacuum chuck and improves the maintenance efficiency of the vacuum chuck.

[0012] 2. The sapphire substrate lithography machine substrate adsorption device uses a motor to drive the lead screw to rotate, allowing the moving seat to move along the guide rod. This facilitates the removal of the vacuum chuck from the lithography machine's worktable, making it easier for staff to place the sapphire substrate and further improving the practicality of the adsorption device. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the base structure of this utility model; Figure 3 This is a schematic diagram of the movable base structure of this utility model; Figure 4 This is a schematic diagram of the fixing frame structure of this utility model; Figure 5 This is a schematic diagram of the bottom structure of the vacuum suction cup of this utility model.

[0014] In the diagram: 1. Base; 2. Assembly / disassembly mechanism; 201. Fixing plate; 202. Fixing bracket; 203. Positioning hole; 204. Pull rod; 205. Insert plate; 206. Spring; 207. Pull handle; 208. Positioning plate; 209. Insertion hole; 210. Positioning post; 3. Moving mechanism; 301. Motor; 302. Lead screw; 303. Moving seat; 304. Guide rod; 4. Vacuum suction cup; 5. Evacuation pipe. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0017] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integral connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" means two or more, unless otherwise explicitly specified.

[0019] Please see Figure 1-5 The technical solution of this utility model is: a substrate adsorption device for a sapphire substrate lithography machine, including a base 1, a moving mechanism 3 on the base 1, a disassembly and assembly mechanism 2 on the moving mechanism 3, and a vacuum chuck 4 on the disassembly and assembly mechanism 2. The disassembly and assembly mechanism 2 includes a fixed plate 201 and a fixed frame 202. The fixed frame 202 is fixedly installed on the fixed plate 201. A pull rod 204 is provided on the fixed frame 202. An insert plate 205 is fixedly installed on the pull rod 204. A spring 206 is sleeved on the pull rod 204. A positioning plate 208 is fixedly installed at the bottom of the vacuum suction cup 4. An insertion hole 209 is opened on the positioning plate 208. The insert plate 205 is inserted into the insertion hole 209. When it is necessary to disassemble and maintain the vacuum suction cup 4, the user can pull the pull rod 204 through the pull handle 207 to pull the insert plate 205 out of the positioning plate 208 at the bottom of the vacuum suction cup 4. At this time, the positioning plate 208 loses the positioning of the insert plate 205, and the vacuum suction cup 4 can be directly removed from the fixed plate 201, which facilitates the quick disassembly of the vacuum suction cup 4 and improves the maintenance efficiency of the vacuum suction cup 4. The moving mechanism 3 includes a motor 301 and a lead screw 302. The lead screw 302 is fixedly installed on the output end of the motor 301. A moving seat 303 is threaded onto the lead screw 302. By starting the motor 301, the lead screw 302 is driven to rotate, so that the moving seat 303 can move along the guide rod 304, which facilitates the removal of the vacuum chuck 4 from the worktable of the lithography machine, making it easier for the staff to place the sapphire substrate, and further improving the practicality of the adsorption device.

[0020] The fixing plate 201 is fixedly installed on the movable base 303. The fixing plate 201 has a positioning hole 203. A positioning post 210 is inserted into the positioning hole 203. The positioning hole 203 and the positioning post 210 can be used to position the vacuum suction cup 4.

[0021] The positioning post 210 is fixedly installed at the bottom of the vacuum suction cup 4, and the handle 207 is fixedly installed on the pull rod 204. The bottom of the vacuum suction cup 4 is provided with an air extraction pipe 5. The handle 207 allows the pull rod 204 to be pulled easily.

[0022] One end of the spring 206 abuts against the insert plate 205, and the other end of the spring 206 abuts against the fixing bracket 202. The fixing bracket 202 has a through hole, and the pull rod 204 passes through the inside of the through hole. The spring 206 allows the insert plate 205 to be easily inserted into the positioning plate 208 under its force.

[0023] The motor 301 is fixedly mounted on the base 1, and the lead screw 302 is rotatably connected inside the base 1 through a bearing. By starting the motor 301, the lead screw 302 can be driven to rotate.

[0024] A guide rod 304 is fixedly installed inside the base 1, and the movable seat 303 is slidably connected to the guide rod 304. The guide rod 304 can limit and guide the movable seat 303.

[0025] Working principle: When the vacuum chuck 4 needs to be disassembled and maintained, the user can pull the lever 204 through the handle 207, so that the insertion plate 205 is pulled out from the positioning plate 208 at the bottom of the vacuum chuck 4. At this time, the positioning plate 208 loses the positioning of the insertion plate 205, and the vacuum chuck 4 can be directly removed from the fixing plate 201, which facilitates the quick disassembly of the vacuum chuck 4 and improves the maintenance efficiency of the vacuum chuck 4. By starting the motor 301, the lead screw 302 is driven to rotate, so that the moving seat 303 can move along the guide rod 304, which makes it easy to remove the vacuum chuck 4 from the worktable of the lithography machine, making it easier for the staff to place the sapphire substrate, and further improving the practicality of the adsorption device.

[0026] This invention provides a substrate adsorption device for a sapphire substrate lithography machine. Many methods and approaches exist for implementing this technical solution; the above description is merely a preferred embodiment. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this invention, and these improvements and modifications should also be considered within the scope of protection of this invention. All components not explicitly stated in this embodiment can be implemented using existing technology.

Claims

1. A substrate adsorption device for a sapphire substrate lithography machine, comprising a base (1), characterized in that: The base (1) is provided with a moving mechanism (3), the moving mechanism (3) is provided with a disassembly and assembly mechanism (2), and the disassembly and assembly mechanism (2) is provided with a vacuum suction cup (4). The disassembly and assembly mechanism (2) includes a fixing plate (201) and a fixing frame (202). The fixing frame (202) is fixedly installed on the fixing plate (201). A pull rod (204) is provided on the fixing frame (202). An insert plate (205) is fixedly installed on the pull rod (204). A spring (206) is sleeved on the pull rod (204). A positioning plate (208) is fixedly installed at the bottom of the vacuum suction cup (4). An insertion hole (209) is opened on the positioning plate (208). The insert plate (205) is inserted into the insertion hole (209). The moving mechanism (3) includes a motor (301) and a lead screw (302). The lead screw (302) is fixedly installed on the output end of the motor (301), and a moving seat (303) is threaded onto the lead screw (302).

2. The sapphire substrate lithography machine substrate adsorption device according to claim 1, characterized in that: The fixing plate (201) is fixedly installed on the movable base (303). The fixing plate (201) has a positioning hole (203) and a positioning post (210) is inserted into the positioning hole (203).

3. The sapphire substrate lithography machine substrate adsorption device according to claim 2, characterized in that: The positioning post (210) is fixedly installed at the bottom of the vacuum suction cup (4), and a handle (207) is fixedly installed on the pull rod (204). An air extraction pipe (5) is provided at the bottom of the vacuum suction cup (4).

4. The sapphire substrate lithography machine substrate adsorption device according to claim 1, characterized in that: One end of the spring (206) abuts against the insert plate (205), and the other end of the spring (206) abuts against the fixing frame (202). The fixing frame (202) has a through hole, and the pull rod (204) passes through the interior of the through hole.

5. The sapphire substrate lithography machine substrate adsorption device according to claim 1, characterized in that: The motor (301) is fixedly mounted on the base (1), and the lead screw (302) is rotatably connected inside the base (1) through a bearing.

6. The sapphire substrate lithography machine substrate adsorption device according to claim 1, characterized in that: A guide rod (304) is fixedly installed inside the base (1), and the movable seat (303) is slidably connected to the guide rod (304).

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