A quick-install photovoltaic vacuum process module integrated cavity

Abstract

This utility model discloses a quick-installation photovoltaic vacuum process module integrated cavity, relating to the field of photovoltaic production technology. It includes a vacuum integrated cavity with a limiting groove at its inner end. A pull-out bracket is installed at the inner end of the limiting groove. A limiting rod hole is opened at the upper end of the pull-out bracket, and a clamping rod is installed at the middle of the limiting rod hole. A pneumatic rod is installed at the upper end of the clamping rod. A sealing ring is installed at the front end of the vacuum integrated cavity. This utility model, through the vacuum integrated cavity, limiting groove, pull-out bracket, limiting rod hole, clamping rod, pneumatic rod, and sealing ring, pushes the pull-out bracket inward within the limiting groove until the sealing ring contacts the front surface of the vacuum integrated cavity. Then, the pneumatic rod drives the clamping rod to vertically insert downward into the limiting rod hole on the vacuum integrated cavity, thereby quickly fixing and sealing the pull-out bracket, improving the speed of device loading.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic production technology, specifically a quick-install photovoltaic vacuum process module integrated cavity. Background Technology

[0002] The photovoltaic vacuum process module integrated cavity is a core piece of equipment used in photovoltaic cell manufacturing to achieve key processes such as thin film deposition and etching in a vacuum environment. Through modular design, it integrates the vacuum cavity, gas distribution, heating and temperature control, and vacuum pumping systems into one unit, providing a precise vacuum environment and process conditions for efficient photovoltaic cell production. It provides a vacuum reaction space, is typically made of aluminum alloy or stainless steel, and incorporates a dry pump and a molecular pump to provide vacuum pumping power. Temperature control is achieved through heating rods or infrared radiation. With the accelerated industrialization of high-efficiency cell technologies such as HJT and perovskite, this cavity will become a core piece of equipment for upgrading photovoltaic manufacturing. However, existing photovoltaic vacuum process module integrated cavities suffer from poor rapid loading performance and unstable loading; therefore, a quick-installation photovoltaic vacuum process module integrated cavity is needed.

[0003] Existing photovoltaic vacuum process module integrated cavities cannot effectively improve the speed and stability of device loading during operation. Therefore, there is an urgent need for a quick-installation photovoltaic vacuum process module integrated cavity. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide a quick-installation photovoltaic vacuum process module integrated cavity to solve the problems that existing photovoltaic vacuum process module integrated cavities cannot effectively improve the speed of device loading and the stability of device loading during use.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a quick-installation photovoltaic vacuum process module integrated cavity, comprising a vacuum integrated cavity, a limiting groove is formed at the inner end of the vacuum integrated cavity, a pull bracket is installed at the inner end of the limiting groove, a limiting rod hole is formed at the upper end of the pull bracket, a clamping rod is installed at the middle end of the limiting rod hole, a pneumatic rod is installed at the upper end of the clamping rod, and a sealing ring is installed at the front end of the vacuum integrated cavity.

[0006] The inner end of the drawer bracket is provided with an inner limiting groove, a magnetic chuck is installed in the middle of the inner limiting groove, a bolt is installed in the middle of the magnetic chuck, and a bearing plate is installed at the outer end of the bolt.

[0007] Preferably, the drawer bracket forms a sliding structure with the vacuum integrated cavity through a limiting groove, and the limiting groove is symmetrically arranged with respect to the central axis of the vacuum integrated cavity.

[0008] Preferably, the card holder rod forms a lifting structure with the vacuum integrated cavity via a pneumatic rod, and the drawer bracket is engaged with the vacuum integrated cavity via the card holder rod.

[0009] Preferably, the outer end surface of the sealing ring is adhered to the inner end surface of the drawer bracket, and the sealing ring is movably connected to the vacuum integrated cavity through the drawer bracket.

[0010] Preferably, the bearing plate forms a sliding structure with the pull-out support frame through an inner limiting groove.

[0011] Preferably, the magnetic chuck is threadedly connected to the support plate by bolts, and the support plate is movably connected to the drawer bracket by the magnetic chuck.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This utility model uses a vacuum integrated cavity, a limiting groove, a drawer bracket, a limiting rod hole, a clamp rod, a pneumatic rod, and a sealing ring to push the drawer bracket inward in the limiting groove until the sealing ring contacts the front surface of the vacuum integrated cavity. Then, the pneumatic rod drives the clamp rod to be inserted vertically downward into the limiting rod hole on the vacuum integrated cavity, thereby quickly fixing and sealing the contact of the drawer bracket, improving the speed of device loading.

[0014] This invention utilizes a vacuum integrated cavity, a tray, an inner limiting groove, a magnetic chuck, and a carrier plate. Silicon wafers are systematically stacked on the carrier plate, and then the carrier plate is placed into the inner limiting groove on the tray using the magnetic chuck. The tray is then pushed forward so that the magnetic chucks on both sides are positioned at the two ends of the inner limiting groove. The magnetic attraction effect of the magnetic chucks temporarily stabilizes the position of the carrier plate, thereby improving the stability of the device during loading. Attached Figure Description

[0015] Figure 1 This is a frontal three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a side view of the structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the disassembled structure of this utility model;

[0018] Figure 4 This utility model Figure 3 Enlarged structural diagram at point A in the middle.

[0019] In the diagram: 1. Vacuum integrated cavity; 2. Limiting groove; 3. Pull-out bracket; 4. Limiting rod hole; 5. Card holder rod; 6. Pneumatic rod; 7. Sealing ring; 8. Inner limiting groove; 9. Magnetic chuck; 10. Bolt; 11. Bearing plate. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0021] The embodiments of this utility model will be described below based on its overall structure.

[0022] Please see Figures 1-4 A quick-installation photovoltaic vacuum process module integrated cavity includes a vacuum integrated cavity 1. A limiting groove 2 is formed at the inner end of the vacuum integrated cavity 1. A pull-out bracket 3 is installed at the inner end of the limiting groove 2. A limiting rod hole 4 is formed at the upper end of the pull-out bracket 3. A clamping rod 5 is installed at the middle of the limiting rod hole 4. A pneumatic rod 6 is installed at the upper end of the clamping rod 5. A sealing ring 7 is installed at the front end of the vacuum integrated cavity 1. The pull-out bracket 3 and the vacuum integrated cavity 1 form a sliding structure through the limiting groove 2, and the limiting groove 2 is symmetrically arranged about the central axis of the vacuum integrated cavity 1. The clamping rod 5 is connected to the pneumatic rod... 6 forms a lifting structure with the vacuum integrated cavity 1, and the drawer bracket 3 is engaged with the vacuum integrated cavity 1 through the clamp rod 5. The outer end surface of the sealing ring 7 is adhered to the inner end surface of the drawer bracket 3, and the sealing ring 7 is movably connected to the vacuum integrated cavity 1 through the drawer bracket 3. The drawer bracket 3 is pushed inward in the limiting groove 2 until the sealing ring 7 contacts the front end surface of the vacuum integrated cavity 1. Then, the pneumatic rod 6 drives the clamp rod 5 to be inserted vertically downward into the limiting rod hole 4 on the vacuum integrated cavity 1, thereby quickly fixing and sealing the contact of the drawer bracket 3, improving the speed of device loading.

[0023] Please see Figures 1-4 A quick-installation photovoltaic vacuum process module integrated cavity is disclosed. An inner limiting groove 8 is formed at the inner end of a drawer bracket 3. A magnetic chuck 9 is installed in the middle of the inner limiting groove 8, and a bolt 10 is installed in the middle of the magnetic chuck 9. A support plate 11 is installed at the outer end of the bolt 10. The support plate 11 and the drawer bracket 3 form a sliding structure through the inner limiting groove 8. The magnetic chuck 9 is threadedly connected to the support plate 11 through the bolt 10, and the support plate 11 is movably connected to the drawer bracket 3 through the magnetic chuck 9. Silicon wafers are regularly stacked on the support plate 11. Then, the support plate 11 is placed into the inner limiting groove 8 on the drawer bracket 3 through the magnetic chuck 9, and pushed forward so that the magnetic chucks 9 on both sides are respectively placed at both ends of the inner limiting groove 8. The magnetic attraction effect of the magnetic chucks temporarily stabilizes the position of the support plate 11, improving the stability of the device loading.

[0024] Working principle: In use, silicon wafers are first arranged regularly on the carrier plate 11. Then, the carrier plate 11 is placed into the inner limiting groove 8 on the drawer 3 through the magnetic chuck 9, and pushed so that the magnetic chucks 9 on both sides are placed at both ends of the inner limiting groove 8. The magnetic attraction effect of the magnetic chucks 9 temporarily stabilizes the position of the carrier plate 11, improving the stability of the device loading. Then, the drawer 3 is pushed inward in the limiting groove 2 until the sealing ring 7 contacts the front surface of the vacuum integrated cavity 1. Then, the pneumatic rod 6 drives the clamp rod 5 to be inserted vertically downward into the limiting rod hole 4 on the vacuum integrated cavity 1, so as to quickly fix and seal the contact of the drawer 3, improving the speed of device loading. Then, the evacuation work can be carried out by the built-in dry pump and molecular pump. At the same time, the cavity temperature can be controlled by the built-in heating rod or infrared radiation. This completes the use of the device. The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0025] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A fast-mounting photovoltaic vacuum process module integrated cavity, comprising a vacuum integrated cavity (1), characterized in that: The vacuum integrated cavity (1) has a limiting groove (2) at its inner end, a drawer bracket (3) is installed at the inner end of the limiting groove (2), a limiting rod hole (4) is opened at the upper end of the drawer bracket (3), a clamping rod (5) is installed at the middle end of the limiting rod hole (4), a pneumatic rod (6) is installed at the upper end of the clamping rod (5), and a sealing ring (7) is installed at the front end of the vacuum integrated cavity (1). The inner end of the drawer (3) is provided with an inner limiting groove (8), a magnetic chuck (9) is installed in the middle of the inner limiting groove (8), a bolt (10) is installed in the middle of the magnetic chuck (9), and a bearing plate (11) is installed on the outer end of the bolt (10).

2. The fast-mounting photovoltaic vacuum process module integrated cavity according to claim 1, characterized in that: The drawer bracket (3) forms a sliding structure with the vacuum integrated cavity (1) through the limiting groove (2), and the limiting groove (2) is symmetrically arranged with respect to the central axis of the vacuum integrated cavity (1).

3. The fast-mounting photovoltaic vacuum process module integrated cavity according to claim 1, characterized in that: The card holder rod (5) forms a lifting structure with the vacuum integrated cavity (1) through the pneumatic rod (6), and the drawer bracket (3) is engaged with the vacuum integrated cavity (1) through the card holder rod (5).

4. The quick-mount photovoltaic vacuum process module integrated cavity according to claim 1, characterized in that: The outer end surface of the sealing ring (7) is bonded to the inner end surface of the drawer bracket (3), and the sealing ring (7) is movably connected to the vacuum integrated cavity (1) through the drawer bracket (3).

5. The quick-mount photovoltaic vacuum process module integrated cavity according to claim 1, characterized in that: The bearing plate (11) forms a sliding structure with the drawer bracket (3) through the inner limiting groove (8).

6. The quick-fit photovoltaic vacuum process module integrated cavity according to claim 1, characterized in that: The magnetic chuck (9) is threadedly connected to the bearing plate (11) by bolts (10), and the bearing plate (11) is movably connected to the drawer bracket (3) by the magnetic chuck (9).

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