A microwave switch and a microwave remote plasma source

Abstract

This invention discloses a microwave switch and a remote microwave plasma source. The microwave switch includes: a main microwave waveguide, a first microwave waveguide, a second microwave waveguide, a microwave baffle, and a driving mechanism; the first output terminal of the main microwave waveguide is connected to the input terminal of the first microwave waveguide, and the second output terminal of the main microwave waveguide is connected to the input terminal of the second microwave waveguide; the microwave baffle is disposed at the connection between the first and second microwave waveguides, and includes a main baffle and a fire-resistant film layer covering the outer surface of the main baffle; the driving mechanism is connected to the microwave baffle, and the driving mechanism is used to drive the microwave baffle to move to the first output terminal to block microwave output from the first output terminal, or to drive the microwave baffle to move to the second output terminal to block microwave output from the second output terminal. This invention can reduce the manufacturing cost of the microwave switch and also improve the power capacity, reliability, and service life of the microwave switch.

Description

Technical Field

[0001] This utility model relates to the field of microwave technology, and in particular to a microwave switch and a microwave remote plasma source. Background Technology

[0002] Microwave switches play a crucial role in microwave transmission systems, controlling the transmission path of microwave energy. In industrial applications such as semiconductor processing and materials handling, it is often necessary to alternately or selectively direct microwave energy to different loads, such as multiple plasma generators.

[0003] Traditional microwave switches typically employ mechanical or solid-state structures. While mechanical switches offer low insertion loss, they suffer from slow response times, mechanical wear, and limited lifespan. Solid-state switches, on the other hand, offer fast switching speeds but are expensive and consume significant power. Furthermore, under the influence of high-power microwaves, gas ionization (arson) can easily occur inside the switch, particularly in moving parts or areas of concentrated field strength. This can lead to microwave energy reflection, unstable transmission, and even permanent damage to the equipment, severely impacting the reliability and safety of the system. Utility Model Content

[0004] This invention provides a microwave switch and a microwave remote plasma source, which can reduce the manufacturing cost of microwave switches and improve the power capacity, reliability and service life of microwave switches.

[0005] According to one aspect of the present invention, a microwave switch is provided, the microwave switch comprising: a main microwave waveguide, a first microwave waveguide, a second microwave waveguide, a microwave baffle, and a driving mechanism;

[0006] The microwave input terminal of the main microwave waveguide is used to receive microwave signals. The first output terminal of the main microwave waveguide is connected to the input terminal of the first branch microwave waveguide. The second output terminal of the main microwave waveguide is connected to the input terminal of the second branch microwave waveguide, and the first output terminal and the second output terminal are interconnected.

[0007] The microwave baffle is disposed at the connection between the first microwave waveguide and the second microwave waveguide. The microwave baffle includes a main baffle and a fireproof film layer covering the outer surface of the main baffle.

[0008] The driving mechanism is connected to the microwave baffle. The driving mechanism is used to drive the microwave baffle to move to the first output end to block microwaves from being output from the first output end, or to drive the microwave baffle to move to the second output end to block microwaves from being output from the second output end.

[0009] Optionally, the main microwave waveguide, the first microwave waveguide, and the second microwave waveguide are integrally formed to form a three-way waveguide structure, and the horizontal projection shape of the three-way waveguide structure is "T", "Y" or arrow-shaped.

[0010] Optionally, the cross-sectional shape of the microwave baffle is adapted to the cross-sectional shape of the first microwave waveguide and the cross-sectional shape of the second microwave waveguide.

[0011] Optionally, the material of the fire-resistant membrane layer includes polytetrafluoroethylene or ceramic.

[0012] According to another aspect of the present invention, a microwave remote plasma source is provided, the microwave remote plasma source including a microwave source, a microwave switch provided in any embodiment of the present invention, a first impedance matching device, a second impedance matching device, a first plasma generator and a second plasma generator;

[0013] The output terminal of the microwave source is connected to the microwave input terminal of the main microwave waveguide in the microwave switch; the input terminal of the first impedance matching device is connected to the output terminal of the first branch microwave waveguide, and the output terminal of the first impedance matching device is connected to the first plasma generator; the input terminal of the second impedance matching device is connected to the output terminal of the second branch microwave waveguide, and the output terminal of the second impedance matching device is connected to the second plasma generator.

[0014] Optionally, the microwave source is a solid-state microwave source or a magnetron.

[0015] This invention provides a microwave switch that, through a driving mechanism, moves a microwave baffle to selectively direct microwave energy to either a first or second microwave waveguide. The switch features a simple structure and low manufacturing cost, and enables switching control of two loads from a single microwave source, improving system flexibility and equipment utilization. By covering the main baffle with a spark-resistant film layer, direct contact between the main baffle and the microwave waveguide is avoided, significantly increasing the microwave breakdown threshold, eliminating the risk of sparking at high power, and improving the reliability and lifespan of the microwave switch. In summary, the microwave switch provided by this invention reduces manufacturing costs and improves power capacity, reliability, and lifespan.

[0016] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a microwave switch according to an embodiment of the present utility model;

[0019] Figure 2 This is a schematic diagram of the structure of another microwave switch according to an embodiment of the present utility model;

[0020] Figure 3 This is a schematic diagram of the structure of another microwave switch according to an embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram of the structure of a microwave baffle according to an embodiment of the present utility model;

[0022] Figure 5 This is a schematic diagram of the structure of a microwave remote plasma source according to an embodiment of the present invention. Detailed Implementation

[0023] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0024] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0025] Figure 1This is a schematic diagram of the structure of a microwave switch according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the structure of another microwave switch according to an embodiment of the present invention. Figure 3 This is a schematic diagram of the structure of another microwave switch according to an embodiment of the present invention. Figure 4 This is a schematic diagram of a microwave baffle according to an embodiment of the present invention, with reference to... Figures 1-4 The microwave switch provided in this embodiment includes: a main microwave waveguide 111, a first microwave waveguide 112, a second microwave waveguide 113, a microwave baffle 120, and a driving mechanism (not shown in the figure); the microwave input terminal of the main microwave waveguide 111 is used to receive microwave signals, the first output terminal of the main microwave waveguide 111 is connected to the input terminal of the first microwave waveguide 112, the second output terminal of the main microwave waveguide 111 is connected to the input terminal of the second microwave waveguide 113, and the first output terminal and the second output terminal are interconnected; the microwave baffle 120 is disposed at the connection between the first microwave waveguide 112 and the second microwave waveguide 113; the microwave baffle 120 includes a main baffle 121 and a fireproof film layer 122 covering the outer surface of the main baffle 121 (see reference). Figure 4 The driving mechanism is connected to the microwave baffle 120. The driving mechanism is used to drive the microwave baffle 120 to move to the first output end to block the microwave from being output from the first output end, or to drive the microwave baffle 120 to move to the second output end to block the microwave from being output from the second output end.

[0026] Specifically, the microwave input terminal of the main microwave waveguide 111 is used to connect to a microwave source. The first output terminal of the main microwave waveguide 111 is connected to the input terminal of the first branch microwave waveguide 112, and the second output terminal of the main microwave waveguide 111 is connected to the input terminal of the second branch microwave waveguide 113, and the first output terminal and the second output terminal are connected.

[0027] The first side of the microwave baffle 120 is fixedly connected to the driving mechanism. The driving mechanism can move the microwave baffle 120 from the first output end of the main microwave waveguide 111 to the second output end, or from the second output end to the first output end. In this embodiment, the driving mechanism is connected to the microwave baffle 120 to drive the microwave baffle 120 to move, so that it can move and position precisely to the position of the first output end or the second output end of the main microwave waveguide 111, thereby guiding microwave energy to another branch that is not blocked. During operation, microwave energy is input from the input end of the main microwave waveguide 111. When the driving mechanism moves the microwave baffle 120 to the position of the first output end, the microwave energy cannot enter the first microwave waveguide 112, but is reflected and output entirely from the second output end, entering the second microwave waveguide 113. Conversely, when the driving mechanism moves the microwave baffle 120 to the position of the second output end (… Figure 1When the microwave baffle 120 is in its position, microwave energy cannot enter the second microwave waveguide 113, but is reflected and output entirely from the first output end, entering the first microwave waveguide 112.

[0028] The main baffle 121 can be made of metal, such as aluminum, copper, or stainless steel. The main baffle 121 provides effective reflection and shielding of microwaves, ensuring the path is reliably cut off. Its shape is machined to a rectangle that matches the waveguide cross-section. A fire-resistant film layer 122 is formed on all outer surfaces of the main baffle 121 by spraying, sintering, or bonding.

[0029] The anti-sparking membrane layer 122 covers the outer surface of the main baffle 121, significantly improving the breakdown field strength and effectively isolating the main baffle 121 from direct contact with the waveguide wall, thereby fundamentally preventing the occurrence of microwave arcing.

[0030] This embodiment provides a microwave switch that, by moving a microwave baffle through a drive mechanism, can selectively direct microwave energy to a first or second microwave waveguide. It features a simple structure and low manufacturing cost, and also enables switching control of two loads from a single microwave source, improving system flexibility and equipment utilization. By covering the main baffle with an anti-sparking film layer, direct contact between the main baffle and the microwave waveguide is avoided, significantly increasing the microwave breakdown threshold, eliminating the risk of arcing under high power, and improving the reliability and lifespan of the microwave switch. In summary, the microwave switch provided in this embodiment can reduce the manufacturing cost of microwave switches and improve their power capacity, reliability, and lifespan.

[0031] Optional, continue to refer to Figures 1-3 The main microwave waveguide 111, the first microwave waveguide 112, and the second microwave waveguide 113 are integrally formed to constitute a three-way waveguide structure. The cross-sectional shape of the three-way waveguide structure is "T"-shaped (see reference). Figure 1 ), "Y" shape (for reference) Figure 2 ) or arrow type (see reference) Figure 3 ).

[0032] Specifically, the "T", "Y" and arrow-shaped three-way waveguide structures are simple in structure and easy to manufacture. They can also facilitate the arrangement and optimization of the microwave baffle's movement trajectory. Furthermore, they can ensure that when the microwave baffle 120 moves to the first output end or the second output end, it can fit well with the waveguide wall, effectively isolating the microwave path and blocking microwave leakage.

[0033] Optionally, the cross-sectional shape of the microwave baffle is adapted to the cross-sectional shape of the first output end and the cross-sectional shape of the second output end.

[0034] Specifically, the shape-fitting microwave baffle can fit tightly with the first and second output terminals, minimizing the possibility of microwave leakage from the gaps and providing extremely high shutdown isolation.

[0035] Optional materials for the fire-resistant membrane include polytetrafluoroethylene or ceramic.

[0036] Specifically, the type of ceramic can be alumina ceramic. Ceramics are particularly characterized by high thermal stability, chemical inertness, high hardness, and wear resistance, resulting in a long service life. Polytetrafluoroethylene (PTFE) may facilitate the smooth movement of the microwave baffle.

[0037] Both polytetrafluoroethylene (PTFE) and ceramics are excellent high-frequency dielectric materials, possessing high dielectric strength and low dielectric loss. They can effectively withstand high voltage without breakdown and have minimal absorption of microwave energy, ensuring the reliability and durability of the anti-sparking effect. Furthermore, both materials exhibit good high-temperature resistance, capable of withstanding the heat that may be generated during microwave system operation.

[0038] Figure 5 This is a schematic diagram of a microwave remote plasma source according to an embodiment of the present invention, with reference to... Figure 5 The microwave remote plasma source provided in this embodiment includes a microwave source 210, a microwave switch provided in any embodiment of this utility model, a first impedance matching device 221, a second impedance matching device 222, a first plasma generator 231, and a second plasma generator 232; the output terminal of the microwave source 210 is connected to the microwave input terminal of the main microwave waveguide 111 in the microwave switch; the input terminal of the first impedance matching device 221 is connected to the output terminal of the first branch microwave waveguide 112, and the output terminal of the first impedance matching device 221 is connected to the first plasma generator 231; the input terminal of the second impedance matching device 222 is connected to the output terminal of the second branch microwave waveguide 113, and the output terminal of the second impedance matching device 222 is connected to the second plasma generator 232.

[0039] Specifically, a microwave switch is used to allow a single microwave source to flexibly power two plasma generators (reaction chambers). This enables one plasma generator to produce plasma while the microwave source is turned off, while the other plasma generator can be maintained simultaneously, greatly improving equipment utilization and production efficiency, and allowing for alternating or selective operation of the two reaction chambers.

[0040] The microwave remote plasma source provided in this embodiment has all the advantages of microwave switches, especially the high isolation that prevents microwave leakage into the unused chamber (protecting operators and equipment), and the strong anti-sparking capability that ensures the entire plasma source system can operate stably at high power for a long time, reducing downtime and maintenance caused by sparking.

[0041] The first impedance matching device 221 and the second impedance matching device 222 are both three-pin microwave impedance matching devices. The three-pin microwave impedance matching device ensures that microwave energy can be effectively coupled from the waveguide to each plasma cavity and achieve good impedance matching, so as to excite stable and uniform plasma under different cavities or different process conditions, and ensure the repeatability and consistency of process results.

[0042] This embodiment provides a microwave remote plasma source. By controlling the position of the microwave baffle through a drive mechanism, microwave energy can be directed to one plasma generator while the other is turned off, thereby realizing the function of alternating operation or standby switching of the two chambers.

[0043] Optionally, the microwave source can be a solid-state microwave source or a magnetron.

[0044] Specifically, solid-state microwave sources offer advantages such as precise and rapid power adjustment, stable frequency, long lifespan, and instant start / stop capability. They are suitable for advanced applications requiring precise control processes.

[0045] Magnetrons have the advantages of mature technology, low cost, and high power output, making them suitable for cost-sensitive or traditional applications that require extremely high power.

[0046] It should be understood that the various forms of the process shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this utility model can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this utility model can be achieved, and this is not limited herein.

[0047] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

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