A laser fast and precise pointing device

Abstract

A laser fast and precise pointing device includes a device body, an X-axis driving device, a Y-axis driving device, and a laser. The X-axis driving device is installed on one side of the device body, the Y-axis driving device is installed on one side of the X-axis driving device, and the laser is installed on one side of the Y-axis driving device. A main control module is installed inside the device body, and a protective cover is installed outside the device body, with the X-axis driving device, Y-axis driving device, and laser covered inside the protective cover.

Description

Technical Field

[0001] This utility model relates to a pointing device, specifically a laser fast and accurate pointing device, which is widely used in the detection of array products to quickly locate target units and in scenarios where the laser needs to be pointed at specific features on a plane, such as in the field of automation for semiconductor wafer inspection and high-precision industrial calibration. Background Technology

[0002] Existing laser positioning and pointing devices rely on purely mechanical structures for positioning and pointing. While they can be manually operated within a certain space, they cannot calculate angle parameters using predetermined parameters and then execute these parameters through intelligent control to point the device at the target location. Existing laser positioning and pointing devices have the following drawbacks:

[0003] 1. Laser movement relies on a mechanical guide rail structure, resulting in slow response speed and mechanical wear errors;

[0004] 2. Rotary laser heads based on fixed angular velocities exhibit nonlinear positioning deviations when the distance changes;

[0005] 3. Lack of adaptive compensation mechanism; changing the working plane requires re-tuning the entire system. Summary of the Invention

[0006] This invention utilizes calibrated parameters and a nonlinear compensation mechanism to calculate the angle compensation values ​​of the X-axis motor 22 and the Y-axis motor 32 using predetermined known values ​​through the main control module. This drives the X-axis motor 22 and the Y-axis motor 32 to rotate at that angle, thereby causing the laser 4 to point towards the target position.

[0007] A laser fast and precise pointing device includes a device body 1, an X-axis driving device 2, a Y-axis driving device 3, and a laser. The X-axis driving device is installed on one side of the device body, the Y-axis driving device is installed on one side of the X-axis driving device, and the laser is installed on one side of the Y-axis driving device. A main control module is installed inside the device body, and a protective cover is installed outside the device body, with the X-axis driving device, the Y-axis driving device, and the laser housed within the protective cover.

[0008] The X-axis drive device and the Y-axis drive device move in directions perpendicular to each other.

[0009] The X-axis drive device and the Y-axis drive device use predetermined known values ​​to drive the X-axis motor and the Y-axis motor through the main control module 11 to perform rotation at the target angle, thereby driving the laser to point to the target position.

[0010] The X-axis drive device includes an X-axis base and an X-axis motor. The X-axis base is fixed to one side of the device body, and the X-axis motor is mounted on the X-axis base.

[0011] The Y-axis drive device includes a Y-axis base, a Y-axis motor, and a connector. The connector is a right-angled connector, with one right-angled side fixed to the Y-axis base and the other right-angled side used to fix the Y-axis motor. The Y-axis base is fixed on the rotating shaft of the X-axis motor and rotates as the rotating shaft of the X-axis motor rotates. The connector is fixed on the Y-axis base.

[0012] The laser is fixed on the shaft of the Y-axis motor.

[0013] Both the X-axis motor and the Y-axis motor are servo motors.

[0014] When the X-axis motor rotates, the laser moves laterally in a certain plane. When the Y-axis motor rotates, the laser moves longitudinally in the same plane. Using the lateral movement line of the laser driven by the X-axis motor as the X-axis of a Cartesian coordinate system and the longitudinal movement line of the laser driven by the Y-axis motor as the Y-axis of the Cartesian coordinate system, coordinate modeling is performed.

[0015] Define the vertical distance H from the laser rotation center O to the baseline AB. Set point A as the origin of the coordinate system. Let the distance S1 from the target point P to point A be the distance between the laser beam and the baseline AB. The displacement distance S1 of the laser beam on the AB line and the rotation angle θ of the X-axis servo motor satisfy the angle displacement conversion formula: S1 = H * tanθ1. Using this formula, the distance S2 from the target point P to point A can be calculated. Define the vertical distance H from the laser rotation center O to the baseline AB. Set point A as the origin of the coordinate system. Let the distance S2 from the target point P to point A be the distance between the laser beam and the baseline AB. The displacement distance S2 of the laser beam on the AB line and the rotation angle θ of the Y-axis motor satisfy the formula: S2 = H * tanθ2. Using this formula, the distance S2 from the target point P to point A can be calculated. In the same plane, the intersection of the line containing the horizontal coordinate S1 and the line containing the vertical coordinate S2 is the target point P.

[0016] Using the above S1 = H * tanθ1 and S2 = H * tanθ2, perform the parameter calibration as follows:

[0017] Step 1: Select four segments AB, AC, AD and AF with known distances on line AB.

[0018] Step 2: Control the laser to point to points D, C, F, and B in sequence, and record the corresponding rotation angles θD, θC, θF, and θB.

[0019] Step 3: Solve the system of equations to find the perpendicular distance H:

[0020] AC = H*(tanθA - tanθC)

[0021] CB = H*(tanθC - tanθB)

[0022] Step 4: Calculate the piecewise compensation coefficient K = ΔS / Δθ, and establish an angle-displacement comparison table:

[0023] Using the piecewise compensation coefficient K=ΔS / Δθ, the maximum value of K can be calculated as 2+0.44, and the minimum value of K is 2-0.08; according to the piecewise compensation coefficient K=ΔS / Δθ, the maximum value of K can be calculated as 2+0.49, and the minimum value of K is 2-0.11.

[0024] Assuming A is the starting point, when the X-axis motor rotates, the beam emitted by laser 4 can move along line AB. By inputting different parameters S1 to the X-axis motor and different parameters S2 to the Y-axis motor, the beam emitted by laser 4 can move to any specified position on line AB.

[0025] Take three points F, C, and D on line AB, input the measured distances of AB, AC, AF, and AD and the actual rotation angle of the X-axis motor, and calculate the vertical distance H1 from the rotation center to the straight line AB using the distances of line segments AB, AC, AF, and AD and the corresponding angles. Then, calculate the compensation parameters for the rotation angle and movement distance of the X-axis motor based on the vertical distance.

[0026] The same method is used to calculate the compensation parameters for the rotation angle and movement distance of the Y-axis motor. Once the compensation parameters are set, the beam can move to the designated position according to the distance input by the user.

[0027] The beneficial effects of this utility model are: 1. Improved positioning speed, with response time reduced to less than 300ms compared to traditional mechanical movement methods; 2. Precision control, achieving a positioning accuracy of ±0.1mm through dynamic compensation, suitable for precision fields such as microelectronics; 3. Adaptability, automatically adapting when changing to different sized worktables, only requiring re-performing three-point calibration. Attached Figure Description

[0028] Figure 1 This is the assembly structure diagram of this utility model;

[0029] Figure 2 This is an exploded view of the structure of this utility model;

[0030] Figure 3 This is a schematic diagram of the X-axis working principle of this utility model;

[0031] Figure 4 This is a schematic diagram of the working principle of the Y-axis of this utility model;

[0032] Figure 5 This is a schematic diagram of the rectangular plane coordinate system of this utility model;

[0033] Figure 6 This is a schematic diagram of the actual measurement of this utility model;

[0034] Figure 7 This is a schematic diagram of the working principle of this utility model;

[0035] In the diagram: 1. Device body; 11. Main control module; 12. Protective cover; 2. X-axis drive device; 21. X-axis base; 22. X-axis motor; 3. Y-axis drive device; 31. Y-axis base; 32. Y-axis motor; 33. Connector; 4. Laser. Detailed Implementation

[0036] The technical solution of this utility model will be further clearly and completely described below with reference to the accompanying drawings and through embodiments. The described embodiments are only some embodiments of this utility model. Other embodiments obtained by those skilled in the art without creative effort are all within the protection scope of this utility model.

[0037] like Figure 1 and 2 As shown, a laser fast and precise pointing device includes a device body 1, an X-axis driving device 2, a Y-axis driving device 3, and a laser 4. The X-axis driving device 2 is installed on one side of the device body 1, and the Y-axis driving device 3 is installed on one side of the X-axis driving device 2. The Y-axis driving device 3 can move back and forth longitudinally under the drive of the X-axis driving device 2. The laser 4 is installed on one side of the Y-axis driving device 3, and the laser 4 can move back and forth laterally under the drive of the Y-axis driving device 3. A motherboard 11 is installed inside the device body 1, and a protective cover 12 is installed outside the device body 1, covering the X-axis driving device 2, the Y-axis driving device 3, and the laser 4 inside the protective cover 12.

[0038] The X-axis driving device 2 and the Y-axis driving device 3 move in directions perpendicular to each other, and are located in the same Cartesian coordinate system as the laser 4.

[0039] like Figure 2 and 7 As shown, the laser rapid and precise pointing device includes a control component, which includes:

[0040] The laser module is used to emit laser light, pointing it to a location specified by the system.

[0041] The laser rotation module executes the instructions from the main control module to drive the laser to rotate by a certain angle, so that the laser emitted by the laser is directed to a specified position;

[0042] The main control module is a high-performance 32-bit floating-point microcontroller (MCU) containing two TMS320C28x DSP cores with a main frequency of up to 200MHz. It supports parallel processing of complex algorithms and single-precision floating-point arithmetic (FPU), making it suitable for high-precision mathematical calculations. It is equipped with a trigonometric function accelerator (TMU) and a complex mathematics accelerator (VCU) to optimize algorithm execution efficiency. It receives data detected by the X-axis motor ranging module and the Y-axis motor ranging module, calculates the angle that the laser should compensate for, and instructs the laser rotation module to drive the laser to rotate.

[0043] The X-axis motor drive module drives the X-axis drive device to move linearly along the X-axis of the Cartesian coordinate system.

[0044] The X-axis motor ranging module is used to measure the distance the X-axis drive device moves along the X-axis.

[0045] The Y-axis motor drive module drives the Y-axis drive device to move linearly along the Y-axis of the Cartesian coordinate system.

[0046] The Y-axis motor ranging module is used to measure the distance the Y-axis drive device moves along the Y-axis.

[0047] like Figure 2 As shown, the X-axis drive device 2 includes an X-axis base 21 and an X-axis motor 22. The X-axis base 21 is fixed to one side of the device body 1, and the X-axis motor 22 is mounted on the X-axis base 21. The Y-axis drive device 3 includes a Y-axis base 31, a Y-axis motor 32, and a connector 33. The connector 33 is a right-angled connector, with one right-angled side fixed to the Y-axis base 31 and the other right-angled side used to fix the Y-axis motor 32. The Y-axis base 31 is fixed on the rotating shaft of the X-axis motor 22 and rotates with the rotating shaft of the X-axis motor 22. The connector 33 is fixed on the Y-axis base 31. The laser 4 is fixed on the rotating shaft of the Y-axis motor 32.

[0048] Both the X-axis motor 22 and the Y-axis motor 32 are servo motors.

[0049] like Figure 3 and 4 As shown, when the X-axis motor 22 rotates, the laser 4 moves laterally on a certain plane; when the Y-axis motor 32 rotates, the laser 4 moves longitudinally on the same plane. Using the lateral movement line of the laser 4 driven by the X-axis motor 22 as the X-axis of a Cartesian coordinate system, and the longitudinal movement line of the laser 4 driven by the Y-axis motor 32 as the Y-axis of the Cartesian coordinate system, coordinate modeling is performed:

[0050] like Figure 3As shown, the vertical distance H from the laser rotation center O to the baseline AB is defined. Point A is set as the origin of the coordinate system, and the distance S1 from the target point P to point A is set as S1. Using the angle displacement conversion formula, the displacement distance S1 of the laser beam on the AB line and the rotation angle θ of the X-direction servo motor satisfy: S1 = H * tanθ1. The distance S2 from the target point P to point A can be calculated using this formula.

[0051] like Figure 4 As shown, define the vertical distance H from the laser rotation center O to the baseline AB, set point A as the origin, and the distance S2 from the target point P to point A. Using the angular displacement conversion formula, the displacement distance S2 of the laser beam along line AB satisfies the following relationship with the Y-axis motor rotation angle θ:

[0052] S2 = H * tanθ2, the distance S2 from point P to point A can be calculated using this formula.

[0053] like Figure 3 and 4 As shown, the intersection of the line containing the horizontal coordinate S1 and the line containing the vertical coordinate S2 in the same plane is the target point P.

[0054] Based on the above S1 = H * tanθ1 and S2 = H * tanθ2, perform the parameter calibration as follows:

[0055] Step 1: Select four segments AB, AC, AD and AF with known distances on line AB.

[0056] Step 2: Control the laser to point to points D, C, F, and B in sequence, and record the corresponding rotation angles θD, θC, θF, and θB.

[0057] Step 3: Solve the system of equations to find the perpendicular distance H:

[0058] AC = H*(tanθA - tanθC)

[0059] CB = H*(tanθC - tanθB)

[0060] Step 4: Calculate the piecewise compensation coefficient K = ΔS / Δθ, and establish an angle-displacement comparison table:

[0061] Table 1

[0062] Based on the piecewise compensation coefficient K = ΔS / Δθ, the maximum value of K can be calculated to be 2 + 0.44, and the minimum value of K is 2 - 0.08.

[0063] Table 2

[0064] Based on the piecewise compensation coefficient K=ΔS / Δθ, the maximum value of K can be calculated as 2+0.49, and the minimum value of K is 2-0.11.

[0065] like Figure 3 and 4 As shown, assuming A is the starting point, when the X-axis motor 22 rotates, the beam emitted by the laser 4 can move along the AB line. By inputting specified parameters into the X-axis motor 22, the beam can move to any specified position on the AB line.

[0066] As the rotation angle of the X-axis motor 22 increases, the distance the beam travels on line AB increases by a corresponding amount for each degree increase in angle. At the same time, the distance from line AB to the rotation center of the X-axis motor 22 varies, and the distance the beam travels on line AB also varies. Therefore, the rotation parameters of the motor can be adjusted according to the vertical distance from the rotation center of the X-axis servo motor 22 to line AB and the distance from the specified point to point A.

[0067] like Figure 6 As shown, take three points F, C, and D on line AB, input the measured distances of AB, AC, AF, and AD and the actual rotation angle of X-axis motor 22, and calculate the vertical distance H1 from the rotation center to line AB using the distances of line segments AB, AC, AF, and AD and the corresponding angles. Then, calculate the compensation parameters for the rotation angle and movement distance of X-axis motor 22 based on the vertical distance. Calculate the compensation parameters for the rotation angle and movement distance of Y-axis motor 32 using the same method.

[0068] Once the compensation parameters are set, the beam can move to the designated position according to the distance input by the user.

[0069] The duty cycle of the pulse width modulation (PWM) signal is dynamically adjusted to correct the motor stepping error.

[0070] This invention utilizes calibrated parameters and a nonlinear compensation mechanism to calculate the angle compensation values ​​of the X-axis motor 22 and the Y-axis motor 32 using predetermined known values. The X-axis motor 22 and the Y-axis motor 32 then perform the angle compensation, causing the laser 4 to point towards the target position. Example

[0071] like Figure 5As shown, on a batch quality inspection platform for industrial products, with a corner of the inspection platform as the coordinate point, the vertical axis as the Y-axis and the horizontal axis as the X-axis, N newly manufactured industrial products to be inspected are arranged in a matrix on this inspection platform. The coordinate point of each product is recorded in the inspection equipment. The inspection equipment detects that one product is defective. The distance from this defective product to the X-axis is S1 = 750mm, and the distance to the Y-axis is S2 = 300mm. The vertical distance from the pointing device to the platform is H = 500mm. The laser rotation center point O of the pointing device is adjusted to be on the same straight line as the coordinate point. After the main control module obtains the parameters S1, S2, and H, it calculates the angle using the formula S1 = H * tanθ of the X-axis motor 22 and the formula S2 = H * tanθ of the Y-axis motor 32. Calculate the compensation angles of X-axis motor 22: tanθ1 = 750 / 500, θ1 = 56.31 degrees; and Y-axis motor 32: tanθ2 = 300 / 500, θ2 = 30.96 degrees. Under the drive of the main control module, when the rotation angle of X-axis motor 22 is 56.31 degrees and the rotation angle of Y-axis motor 32 is 30.96 degrees, the target position indicated by the laser of laser 4 is the location of the defective product.

[0072] When the industrial products being inspected are located within the first coordinate region of the Cartesian coordinate system, the compensated rotation angle values ​​of the X-axis motor 22 and the Y-axis motor 32 remain unchanged, and the installation height H of the pointing device remains unchanged. The X-axis motor 22 rotates forward 56.31 degrees, and the Y-axis motor 32 rotates forward 30.96 degrees. When the industrial products being inspected are located within the second coordinate region of the Cartesian coordinate system, the compensated rotation angle values ​​of the X-axis motor 22 and the Y-axis motor 32 remain unchanged. The X-axis motor 22 rotates backward 56.31 degrees, and the Y-axis motor 32 rotates forward... When the industrial products being tested are located in the third coordinate region of the Cartesian coordinate system, the compensation rotation angle values ​​of the X-axis motor 22 and the Y-axis motor 32 remain unchanged. The X-axis motor 22 rotates 56.31 degrees in the reverse direction, and the Y-axis motor 32 rotates 30.96 degrees in the reverse direction. When the industrial products being tested are located in the fourth coordinate region of the Cartesian coordinate system, the compensation rotation angle values ​​of the X-axis motor 22 and the Y-axis motor 32 remain unchanged. The X-axis motor 22 rotates 56.31 degrees in the forward direction, and the Y-axis motor 32 rotates 30.96 degrees in the reverse direction.

[0073] This invention utilizes a main controller to quickly convert linear coordinate parameters into coordinate angle parameters and drive a servo motor to execute the angle, thereby achieving the purpose of accurately and quickly specifying the target point.

[0074] The above are all preferred embodiments of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent changes made to the structure, shape and principle of this utility model should be covered within the scope of protection of this utility model.

Claims

1. A laser pointing device for rapid and precise pointing, characterized in that, The device includes a main body (1), an X-axis drive device (2), a Y-axis drive device (3), and a laser (4). The X-axis drive device (2) is installed on one side of the main body (1), and the Y-axis drive device (3) is installed on one side of the X-axis drive device (2). The Y-axis drive device (3) can move back and forth longitudinally under the drive of the X-axis drive device (2). The laser (4) is installed on one side of the Y-axis drive device (3). The laser (4) can move back and forth laterally under the drive of the Y-axis drive device (3). A motherboard (11) is installed inside the main body (1), and a protective cover (12) is installed outside the main body (1). The X-axis drive device (2), the Y-axis drive device (3), and the laser (4) are covered inside the protective cover (12).

2. The laser rapid and precise pointing device according to claim 1, characterized in that, The X-axis drive device (2) and the Y-axis drive device (3) move in directions perpendicular to each other and are located in the same plane rectangular coordinate system as the laser (4).

3. The laser rapid and precise pointing device according to claim 2, characterized in that, The laser rapid and precise pointing device includes a control component, which includes: The laser module is used to emit laser light, pointing it to a location specified by the system. The laser rotation module executes the instructions from the main control module to drive the laser to rotate by a certain angle, so that the laser emitted by the laser is directed to a specified position; The main control module is a high-performance 32-bit floating-point microcontroller (MCU) containing two TMS320C28x DSP cores with a main frequency of up to 200MHz. It supports parallel processing of complex algorithms and single-precision floating-point arithmetic (FPU), making it suitable for high-precision mathematical calculations. It is equipped with a trigonometric function accelerator (TMU) and a complex mathematics accelerator (VCU) to optimize algorithm execution efficiency. It receives data detected by the X-axis motor ranging module and the Y-axis motor ranging module, calculates the angle that the laser should compensate for, and instructs the laser rotation module to drive the laser to rotate. The X-axis motor drive module drives the X-axis drive device to move linearly along the X-axis of the Cartesian coordinate system. The X-axis motor ranging module is used to measure the distance the X-axis drive device moves along the X-axis. The Y-axis motor drive module drives the Y-axis drive device to move linearly along the Y-axis of the Cartesian coordinate system. The Y-axis motor distance measuring module is used to measure the distance the Y-axis drive device moves along the Y-axis.

4. A laser rapid and precise pointing device according to claim 2, characterized in that, The X-axis drive device (2) includes an X-axis base (21) and an X-axis motor (22). The X-axis base (21) is fixed to one side of the device body (1), and the X-axis motor (22) is mounted on the X-axis base (21).

5. A laser rapid and precise pointing device according to claim 2, characterized in that, The Y-axis drive device (3) includes a Y-axis base (31), a Y-axis motor (32), and a connector (33). The connector (33) is a right-angled connector, with one right-angled side fixed to the Y-axis base (31) and the other right-angled side used to fix the Y-axis motor (32). The Y-axis base (31) is fixed on the shaft of the X-axis motor (22) and rotates as the shaft of the X-axis motor (22) rotates. The connector (33) is fixed on the Y-axis base (31).

6. A laser rapid and precise pointing device according to claim 2, characterized in that, The laser (4) is fixed on the shaft of the Y-axis motor (32).

7. A laser rapid and precise pointing device according to claim 4, characterized in that, Both the X-axis motor (22) and the Y-axis motor (32) are servo motors.

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