Plasma power supplies and coating equipment

Abstract

This utility model relates to a plasma power supply and a coating device. The plasma power supply provided by this utility model includes a DC chopper circuit, which comprises a first voltage regulating circuit, a second voltage regulating circuit, and a pulse output switching circuit. The first voltage regulating circuit is used to adjust the DC voltage to obtain a first signal; the second voltage regulating circuit is used to adjust the DC voltage to obtain a second signal, wherein the voltages of the first and second signals have opposite polarities; the pulse output switching circuit is used to receive the first and second signals, and to output the first signal in a first operating mode, and to output an asymmetric bipolar pulse signal based on the first and second signals in a second operating mode. The plasma power supply provided by this utility model can improve the coating quality.

Description

Technical Field

[0001] This utility model relates to the photovoltaic field, and in particular to a plasma power supply and coating equipment. Background Technology

[0002] With economic development, plasma power supplies are widely used in industries such as industrial manufacturing, medical equipment, and environmental protection. Compared with traditional power supplies, plasma power supplies have dynamic load adaptation capabilities for real-time impedance matching and multi-mode control, making them a core energy source for fields such as semiconductor coating and environmental waste treatment.

[0003] However, when using plasma power for coating, there are problems such as target material overheating, metal target oxidation, excessive corrosion of the target material surface, and micro-arcs on the target material surface, which affect the quality and performance of the coating. Utility Model Content

[0004] This invention provides a plasma power supply and coating equipment to improve the problems of overheating and oxidation of the target material during high-energy ion bombardment, and has high stability and arc suppression capability, thereby improving the quality and performance of the coating.

[0005] In a first aspect, this utility model provides a plasma power supply, comprising: a DC chopper circuit, the DC chopper circuit including a first voltage regulating circuit, a second voltage regulating circuit, and a pulse output switching circuit; a first input terminal of the first voltage regulating circuit and a first input terminal of the second voltage regulating circuit are connected to a first polarity of a DC voltage, a second input terminal of the first voltage regulating circuit and a second input terminal of the second voltage regulating circuit are connected to a second polarity of the DC voltage, a first output terminal of the first voltage regulating circuit is connected to a first input terminal of the pulse output switching circuit, a second output terminal of the first voltage regulating circuit is connected to a first output terminal of the pulse output switching circuit and a first terminal of the load of the plasma power supply, and a first output terminal of the second voltage regulating circuit is connected to a pulse output switching circuit. The second input terminal of the output switching circuit is connected, and the second output terminal of the second voltage regulating circuit is connected to the second output terminal of the pulse output switching circuit and the second terminal of the load; the first voltage regulating circuit is used to adjust the DC voltage to obtain a first signal; the second voltage regulating circuit is used to adjust the DC voltage to obtain a second signal, wherein the voltage of the first signal and the voltage of the second signal have opposite polarities; the pulse output switching circuit is used to receive the first signal and the second signal, and to output the first signal in a first operating mode, and to output a bipolar pulse signal based on the first signal and the second signal in a second operating mode, wherein the amplitude of the positive pulse of the bipolar pulse signal is different from the amplitude of the negative pulse.

[0006] In conjunction with the first aspect, in one possible implementation, the first voltage regulating circuit includes a buck circuit; the buck circuit is used to input the DC voltage and output the first signal to the pulse output switching circuit, the voltage of the first signal being less than the DC voltage; wherein the number of the buck circuits is one or more; when the number of the buck circuits is multiple, each of the buck circuits is connected in parallel.

[0007] In conjunction with the first aspect, in one possible implementation, when the number of the step-down circuits is one, the step-down circuit includes a switching transistor Q1, a diode D1, and an inductor L1; the drain of the switching transistor Q1 is connected to the first polarity of the DC voltage, the source of the switching transistor Q1 is connected to the first terminal of the inductor L1 and the negative terminal of the diode D1, the second terminal of the inductor L1 is connected to the first input terminal of the pulse output switching circuit, and the positive terminal of the diode D1 is connected to the second polarity of the DC voltage, the first output terminal of the pulse output switching circuit, and the first terminal of the load.

[0008] In conjunction with the first aspect, in one possible implementation, the second voltage regulating circuit includes a switching transistor Q2, a diode D2, and an inductor L2; the drain of the switching transistor Q2 is connected to the first polarity of the DC voltage, the source of the switching transistor Q2 is connected to the first terminal of the inductor L2 and the negative terminal of the diode D2, the second terminal of the inductor L2 is connected to the second input terminal of the pulse output switching circuit, and the positive terminal of the diode D2 is connected to the second polarity of the DC voltage, the second output terminal of the pulse output switching circuit, and the second terminal of the load.

[0009] In conjunction with the first aspect, in one possible implementation, the pulse output switching circuit includes a first output circuit and a second output circuit; a first terminal of the first output circuit is connected to a first output terminal of the first voltage regulating circuit, a second terminal of the first output circuit is connected to a second output terminal of the second voltage regulating circuit and a second terminal of the load, a first terminal of the second output circuit is connected to a first output terminal of the second voltage regulating circuit, and a second terminal of the second output circuit is connected to a second output terminal of the first voltage regulating circuit and a first terminal of the load; the first output circuit is used to receive the first signal; the second output circuit is used to receive the second signal; wherein, in the first operating mode, the first output circuit is turned on and the second output circuit is turned off, so that the pulse output switching circuit outputs the first signal; in one operating cycle of the second operating mode, the first output circuit is turned on and off based on a preset frequency, and the second output circuit is turned on for at least a portion of the time during the off time of the first output circuit, so that the pulse output switching circuit outputs the bipolar pulse signal.

[0010] In conjunction with the first aspect, in one possible implementation, the first output circuit includes a switching transistor Q3, and the second output circuit includes a switching transistor Q4; the drain of the switching transistor Q3 is connected to the first output terminal of the first voltage regulating circuit, and the source of the switching transistor Q3 is connected to the second output terminal of the second voltage regulating circuit and the second terminal of the load; the drain of the switching transistor Q4 is connected to the first output terminal of the second voltage regulating circuit, and the source of the switching transistor Q4 is connected to the second output terminal of the first voltage regulating circuit and the first terminal of the load; wherein, in the first operating mode, the switching transistor Q3 is turned on, and the switching transistor Q4 is turned off, so that the pulse output switching circuit outputs the first signal; in one operating cycle of the second operating mode, the switching transistor Q3 is turned on and off based on the preset frequency, and the switching transistor Q4 is turned on for at least a portion of the time during the off time of the switching transistor Q3, so that the pulse output switching circuit outputs the bipolar pulse signal.

[0011] In conjunction with the first aspect, in one possible implementation, the first output circuit further includes a first absorption circuit, and the second output circuit further includes a second absorption circuit, a resistor R1, and a diode D3; the first absorption circuit is connected in parallel with the switch Q3, the second absorption circuit is connected in parallel with the switch Q4, the first end of the resistor R1 is connected to the first output terminal of the second voltage regulating circuit, the second end of the resistor R1 is connected to the drain of the switch Q4, the anode of the diode D3 is connected to the source of the switch Q4, and the cathode of the diode D3 is connected to the second output terminal of the first voltage regulating circuit and the first terminal of the load; the first absorption circuit is used to absorb voltage spikes on both sides of the switch Q3; the second absorption circuit is used to absorb voltage spikes on both sides of the switch Q4; the resistor R1 is used to reduce the current flowing into the switch Q4; and the diode D3 is used to limit the direction of the current flowing into the switch Q4.

[0012] In conjunction with the first aspect, in one possible implementation, the DC chopper circuit further includes a magnetically controlled bias switching circuit; a first terminal of the magnetically controlled bias switching circuit is connected to a first output terminal of the first voltage regulating circuit and a first input terminal of the pulse output switching circuit, and a second terminal of the magnetically controlled bias switching circuit is connected to a second output terminal of the first voltage regulating circuit, a first output terminal of the pulse output switching circuit, and a first terminal of the load; the magnetically controlled bias switching circuit includes a magnetically controlled operating mode and a biased operating mode, wherein the magnetically controlled bias switching circuit is in a cutoff state in the magnetically controlled operating mode and in a conducting state in the biased operating mode; the magnetically controlled bias switching circuit is used to receive the first signal in the biased operating mode and to reduce the voltage ripple of the first signal.

[0013] In conjunction with the first aspect, in one possible implementation, the magnetically controlled bias switching circuit includes a switch Q6, a capacitor C6, a diode D6, and an inductor L3; the source of the switch Q6 is connected to the first output terminal of the first voltage regulation circuit and the first input terminal of the pulse output switching circuit; the drain of the switch Q6 is connected to the first terminal of the capacitor C6; the second terminal of the capacitor C6 is connected to the anode of the diode D6; the cathode of the diode D6 is connected to the second output terminal of the first voltage regulation circuit, the first output terminal of the pulse output switching circuit, and the first terminal of the load; and the inductor L3 is connected in parallel with the diode D6; in the magnetically controlled operating mode, the switch Q6 is turned off, and in the biased operating mode, the switch Q6 is turned on.

[0014] In conjunction with the first aspect, in one possible implementation, the plasma power supply further includes a first rectifier circuit, a power factor correction circuit, a high-frequency inverter circuit, an isolation transformer, and a second rectifier circuit connected in sequence; the second rectifier circuit is used to output the DC voltage to the DC chopper circuit.

[0015] Secondly, this utility model provides a coating device, which includes a plasma power source as described in the first aspect or any implementation thereof.

[0016] This invention provides a plasma power supply and a coating device. The plasma power supply provides improved sputtering rate and coating uniformity by outputting an asymmetric bipolar pulse signal, thereby enhancing coating quality. The asymmetric bipolar pulse signal includes both positive and negative voltages; the negative voltage helps remove contaminants from the target surface, thus extending target life, reducing production costs, and increasing economic benefits. Furthermore, the plasma power supply provides multiple operating modes to adapt to the complexity and diversity of plasma power supply applications. This means that different operating modes can be selected for different applications, helping to mitigate problems such as overheating and oxidation of the target material during high-energy ion bombardment. Attached Figure Description

[0017] Figure 1 A schematic diagram of the topology of a plasma power source provided by this utility model;

[0018] Figure 2a A schematic diagram of the topology of another plasma power source provided by this utility model;

[0019] Figure 2b A schematic diagram illustrating a pulse output switching circuit in the second operating mode provided by this utility model;

[0020] Figure 2A schematic diagram of another plasma power source topology provided by this utility model;

[0021] Figure 3 A waveform diagram of an asymmetric bipolar pulse signal provided by this utility model;

[0022] Figure 4 A schematic diagram of the topology of another plasma power source provided by this utility model;

[0023] Figure 5 A schematic diagram of the topology of another plasma power source provided by this utility model. Detailed Implementation

[0024] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0025] With economic development, plasma power supplies have been widely used in industries such as industrial manufacturing, medical equipment, and environmental protection technologies. The demand and shipments of new energy battery plates have been steadily increasing, and the demand for plasma power supply equipment, as a core component of the photovoltaic industry chain, is also growing simultaneously. Plasma power supplies differ from traditional power supplies in that they feature dynamic load adaptation for real-time impedance matching and multi-mode control, making them suitable for various applications such as waste gas treatment and material surface modification. As a core energy device in fields such as semiconductor coating and environmental waste gas treatment, its precision and reliability directly determine the quality boundary of plasma processes.

[0026] When plasma power supplies are applied in the coating field, the sputtering rate, as a key indicator in the coating field, is directly affected by the plasma power supply. For example, the plasma density, ion energy and distribution state can be controlled by parameters such as the frequency, power density and pulse modulation of the plasma power supply, thereby affecting the sputtering rate and film uniformity.

[0027] However, current plasma power source deposition methods suffer from problems such as target material overheating, metal target oxidation, excessive corrosion of the target surface, and micro-arc generation on the target surface, all of which affect the quality and performance of the thin film. Therefore, improving the target sputtering rate and thus the quality of the thin film is crucial for the further development of plasma power source applications in the deposition field.

[0028] In view of this, the present invention provides a plasma power supply and a coating device. The plasma power supply provided by the present invention improves the sputtering rate and coating uniformity by outputting an asymmetric bipolar pulse signal, thereby improving the coating quality. Furthermore, the plasma power supply provided by the present invention has multiple operating modes to adapt to the complexity and diversity of plasma power supply applications. That is, different operating modes can be selected for different applications, which helps to improve problems such as overheating and oxidation of the target material during high-energy ion bombardment. Considering that different operating modes can output different signals, the operating mode can also be called the output mode, and this application does not limit this terminology.

[0029] The following is combined with Figures 1 to 5 The technical solution provided by this utility model will be described in detail below.

[0030] Figure 1 A schematic diagram of the topology of a plasma power source provided by this utility model. Figure 1 The plasma power supply 100 shown includes a DC chopper circuit 110, which includes a voltage regulation circuit (such as...). Figure 1 The circuit includes a first voltage regulating circuit 111a, a second voltage regulating circuit 111b, and a pulse output switching circuit 112.

[0031] like Figure 1 As shown, the first input terminal of the first voltage regulating circuit 111a and the first input terminal of the second voltage regulating circuit 111b are connected to the first polarity of the DC voltage. The second input terminal of the first voltage regulating circuit 111a and the second input terminal of the second voltage regulating circuit 111b are connected to the second polarity of the DC voltage. The first output terminal of the first voltage regulating circuit 111a is connected to the first input terminal of the pulse output switching circuit 112. The second output terminal of the first voltage regulating circuit 111a is connected to the first output terminal of the pulse output switching circuit 112 and the first terminal of the load of the plasma power supply. The first output terminal of the second voltage regulating circuit 111b is connected to the second input terminal of the pulse output switching circuit 112. The second output terminal of the second voltage regulating circuit 111b is connected to the second output terminal of the pulse output switching circuit 112 and the second terminal of the load.

[0032] It should be noted that the first and second polarities of the DC voltage can be set according to actual needs, and this invention does not impose any restrictions on this. It should be understood that the first polarity is one of the positive and negative terminals, and the second polarity is the other of the negative and positive terminals.

[0033] The first voltage regulating circuit 111a is used to receive DC voltage and adjust the received DC voltage to obtain a first signal. The first signal can be understood as a voltage signal.

[0034] The second voltage regulating circuit 111b is used to receive DC voltage and adjust the received DC voltage to obtain a second signal. The second signal can be understood as a voltage signal. The voltage of the first signal and the voltage of the second signal have opposite polarities. The voltage amplitudes of the first signal and the second signal can be different.

[0035] The pulse output switching circuit 112 is used to receive a first signal from the first voltage regulating circuit 111a and a second signal from the second voltage regulating circuit 111b, and to output the first signal to the load in the first operating mode, and to output an asymmetric bipolar pulse signal to the load based on the first signal and the second signal in the second operating mode.

[0036] In this invention, an asymmetric bipolar pulse signal can be understood as a bipolar pulse signal in which the amplitude of the positive pulse is different from the amplitude of the negative pulse.

[0037] The plasma power supply provided by this invention includes two operating modes, allowing technicians to select the appropriate mode for different applications, thus improving coating quality. Furthermore, the plasma power supply can output an asymmetric bipolar pulse signal, further enhancing coating quality. The asymmetric bipolar pulse signal includes both positive and negative voltages; the negative voltage helps remove contaminants from the target surface, thereby extending target life, reducing production costs, and increasing economic benefits.

[0038] Figure 2a A schematic diagram of the topology of another plasma power source provided by this utility model. Figure 2a The plasma power supply pair shown Figure 1 A detailed description of the voltage regulation circuit and pulse output switching circuit is provided. It should be understood that... Figure 2a The voltage regulation circuit and pulse output switching circuit shown are merely examples and are not intended to limit the technical solution of this application.

[0039] As an example, Figure 2a The DC power supply outputs DC voltage to the DC chopper circuit.

[0040] like Figure 2a As shown, the first voltage regulating circuit 111a includes a buck circuit. The buck circuit is used to input a DC voltage and output a first signal to the pulse output switching circuit 112. The voltage of the first signal is less than the DC voltage. In other words, the buck circuit is used to reduce the input DC voltage before outputting it.

[0041] Optionally, the first voltage regulating circuit 111a can have one or more buck circuits. When there are multiple buck circuits, each buck circuit can be connected in parallel to increase the output power.

[0042] like Figure 2a As shown, when the number of buck circuits is one, the buck circuit may include a switching transistor Q1, a diode D1, and an inductor L1. The drain of the switching transistor Q1 can be connected to the first output terminal of the DC power supply. The source of the switching transistor Q1 is connected to the first terminal of the inductor L1 and the cathode of the diode D1. The second terminal of the inductor L1 is connected to the first input terminal of the pulse output switching circuit 112. The anode of the diode D1 is connected to the second output terminal of the DC power supply, the first output terminal of the pulse output switching circuit 112, and the first terminal of the load. It should be noted that the first output terminal of the DC power supply is used to output a DC voltage of the first polarity, and the second output terminal of the DC power supply is used to output a DC voltage of the second polarity.

[0043] It can be seen that the first input terminal of the first voltage regulating circuit 111a is as follows: Figure 2a The drain of the switching transistor Q1 is connected to the second input terminal of the first voltage regulating circuit 111a, which is connected to the positive terminal of the diode D1. The first output terminal of the first voltage regulating circuit 111a is as follows: Figure 2a The second terminal of the inductor L1 and the second output terminal of the first voltage regulating circuit 111a are connected to the positive terminal of the diode D1.

[0044] The second voltage regulating circuit 111b includes a switching transistor Q2, a diode D2, and an inductor L2. The drain of the switching transistor Q2 is connected to the first output terminal of the DC power supply, the source of the switching transistor Q2 is connected to the first terminal of the inductor L2 and the cathode of the diode D2, the second terminal of the inductor L2 is connected to the second input terminal of the pulse output switching circuit 112, and the anode of the diode D2 is connected to the second output terminal of the DC power supply, the second output terminal of the pulse output switching circuit 112, and the second terminal of the load.

[0045] It can be seen that the first input terminal of the second voltage regulating circuit 111b is as follows: Figure 2a The drain of the switching transistor Q2 is connected to the positive terminal of the second input terminal of the second voltage regulating circuit 111b, and the first output terminal of the second voltage regulating circuit 111b is as follows: Figure 2a The second terminal of the inductor L2 and the second output terminal of the second voltage regulating circuit 111b are connected to the positive terminal of the diode D2.

[0046] The pulse output switching circuit 112 may include a first output circuit and a second output circuit. The first terminal of the first output circuit is connected to the first output terminal of the first voltage regulating circuit 111a, and the second terminal of the first output circuit is connected to the second output terminal of the second voltage regulating circuit 111b and the second terminal of the load. The first terminal of the second output circuit is connected to the first output terminal of the second voltage regulating circuit 111b, and the second terminal of the second output circuit is connected to the second output terminal of the first voltage regulating circuit 111a and the first terminal of the load.

[0047] The first output circuit is used to receive the first signal from the first voltage regulating circuit 111a.

[0048] The second output circuit is used to receive the second signal from the second voltage regulating circuit 111b.

[0049] The pulse output switching circuit 112 includes a first operating mode and a second operating mode. In the first operating mode, the first output circuit is turned on and the second output circuit is turned off, so that the pulse output switching circuit 112 outputs a first signal to the load. In the second operating mode, the first output circuit and the second output circuit will not be in the on state simultaneously within one operating cycle. For example, within one operating cycle, the first output circuit can be turned on and off according to a preset frequency, and the second output circuit can be turned on for at least a portion of the off time of the first output circuit, so as to realize the output of an asymmetric bipolar pulse signal within that cycle. The preset frequency and the on-time of the second output circuit can be set according to actual needs, and this utility model does not limit them. The on-time can include the on-time and the on-duration. For one operating cycle, the on-time of the second output circuit and the off-time of the first output circuit can be the same or different. The on-duration of the second output circuit and the off-duration of the first output circuit can be the same or different. The time when the first output circuit and the second output circuit are simultaneously in the off state can be called the dead time of that operating cycle. Off-duration can also be called shutdown, and this utility model does not limit it.

[0050] Figure 2b This is a schematic diagram illustrating a pulse output switching circuit provided by the present invention in the second operating mode. Figure 2b The operating cycle of the second operating mode shown is T, where T = T1 + T2. Taking one operating cycle as an example, it can be seen that the first output circuit is turned on during T1 and turned off during T2. The second output circuit is turned on during T3, which is included in T2.

[0051] like Figure 2a As shown, the first output circuit may include a switching transistor Q3, and the second output circuit may include a switching transistor Q4. The drain of switching transistor Q3 is connected to the first output terminal of the first voltage regulating circuit 111a, and the source of switching transistor Q3 is connected to the second output terminal of the second voltage regulating circuit 111b and the second terminal of the load. The drain of switching transistor Q4 is connected to the first output terminal of the second voltage regulating circuit 111b, and the source of switching transistor Q4 is connected to the second output terminal of the first voltage regulating circuit 111a and the first terminal of the load.

[0052] It should be understood that in the first operating mode, switch Q3 is turned on and switch Q4 is turned off, and the pulse output switching circuit 112 outputs a first signal to the load; in the second operating mode, switch Q3 is turned on based on a preset frequency, and switch Q4 is turned on for at least a portion of the time during the off time of switch Q3, so that the pulse output switching circuit 112 outputs an asymmetric bipolar pulse signal to the load.

[0053] Considering that the back electromotive force generated by the parasitic inductance when the switching transistor is turned off will form a high-voltage spike, a snubber circuit can be added to absorb the voltage spike and oscillation caused by the parasitic inductance when the switching transistor is turned off, thereby reducing the risk of overvoltage on the switching transistor. For example... Figure 2a As shown, the first output circuit may include a first absorption circuit to absorb voltage spikes across switch Q3, thereby reducing the risk of overvoltage breakdown of switch Q3. The second output circuit may include a second absorption circuit to absorb voltage spikes across switch Q4, thereby reducing the risk of overvoltage breakdown of switch Q4. This invention does not limit the specific implementation of the first and second absorption circuits. As an example, the first absorption circuit is as follows: Figure 2a The circuit consists of resistor R5 and capacitor C5. The second absorption circuit is as follows: Figure 2a The circuit consists of resistor R2 and capacitor C1. It can be seen that the first absorption circuit is connected in parallel with the switch Q3, and the second absorption circuit is connected in parallel with the switch Q4.

[0054] Optionally, the second output circuit may also include a resistor R1 and a diode D3 to further protect the switching transistor Q4. For example... Figure 2a As shown, the first terminal of resistor R1 is connected to the first output terminal of the second voltage regulating circuit 111b, the second terminal of resistor R1 is connected to the drain of the switching transistor Q4, the anode of diode D3 is connected to the source of the switching transistor Q4, and the cathode of diode D3 is connected to the second output terminal of the first voltage regulating circuit 111a and the first terminal of the load. Resistor R1 reduces the current flowing into the switching transistor Q4, thereby reducing the risk of overcurrent breakdown. Diode D3, through its unidirectional conductivity, limits the direction of current flowing into the switching transistor Q4, preventing reverse current.

[0055] In one possible implementation, the output voltage level can be increased by connecting switches in series and parallel. For example, at least one switch can be added to the first output circuit, and each added switch can be connected in parallel with switch Q3. Correspondingly, the number of snubber circuits in the first output circuit can be increased to protect the added switches. Similarly, at least one switch can be added to the second output circuit, and the added switch can be connected in series with switch Q4. Correspondingly, the number of snubber circuits in the second output circuit can be increased to protect the added switches.

[0056] Figure 2A schematic diagram of another plasma power source topology provided by this utility model. Figure 2 The second output circuit shown also includes a switching transistor Q5 and a snubber circuit to protect the switching transistor Q5. For example... Figure 2 As shown, switching transistor Q5 is connected in series with switching transistor Q4. The snubber circuit corresponding to switching transistor Q5 is as follows. Figure 2 The circuit consists of resistor R3 and capacitor C2, and the circuit consists of diode D5 and capacitor C4. Additionally, resistor R4 can be added to further protect switching transistors Q4 and Q5. Figure 2 The absorption circuit of the switching transistor Q4 also includes a loop consisting of capacitor C3 and diode D4.

[0057] It can be seen that the second voltage regulating circuit 111b can also be understood as a step-down circuit. Compared with the step-down circuit in the first voltage regulating circuit 111a, the polarity of the output signal of the second voltage regulating circuit 111b is opposite to the polarity of the output signal of the step-down circuit in the first voltage regulating circuit 111a. In some embodiments, the second voltage regulating circuit 111b can also be called a reverse voltage circuit.

[0058] The following is about Figure 2a and Figure 2 The working principle of the plasma power supply shown will be explained.

[0059] In the first operating mode, switch Q3 in the pulse output switching circuit remains normally on, while switches Q4 and Q5 remain off. This allows the output of the first voltage regulator circuit to directly act on the load, and the pulse output switching circuit outputs a first signal to the load. In the second operating mode, switch Q3 in the pulse output switching circuit performs high-frequency switching according to a preset frequency, causing the output of the first voltage regulator circuit to turn on or off following the preset frequency. The second voltage regulator circuit, controlled by the pulse output switching circuit, is switched on and off in conjunction with the first signal output by the first voltage regulator circuit, thus enabling the pulse output switching circuit to output an asymmetric bipolar pulse signal. For example, in the second operating mode, switches Q4 and Q5 can be turned on for at least a portion of the off time of switch Q3.

[0060] Optionally, the first operating mode can be called DC mode, and the second operating mode can be called pulse mode.

[0061] Figure 3 A waveform diagram of an asymmetric bipolar pulse signal provided by this utility model.

[0062] In one possible implementation, to achieve wide-frequency pulse output, the modulation mode of the first voltage regulating circuit is related to the frequency of the output signal. For example, when the frequency of the output signal is less than or equal to a first threshold, the modulation mode of the first voltage regulating circuit can adopt a fixed-frequency (e.g., 50 Hz) interleaved modulation mode; when the frequency of the output signal is greater than the first threshold, the modulation mode of the first voltage regulating circuit can adopt an interleaved modulation mode following the output pulse frequency. The first threshold can be set according to actual needs, and this invention does not limit it. For example, the first threshold can be 60 Hz.

[0063] In one possible implementation, the DC chopper circuit 110 may further include a magnetically controlled bias switching circuit 113, such as... Figure 4 As shown.

[0064] The first terminal of the magnetically controlled bias switching circuit 113 is connected to the first output terminal of the first voltage regulating circuit 111a and the first input terminal of the pulse output switching circuit 112. The second terminal of the magnetically controlled bias switching circuit 113 is connected to the second output terminal of the first voltage regulating circuit 111a, the first output terminal of the pulse output switching circuit 112, and the first terminal of the load.

[0065] The magnetic control bias switching circuit 113 includes a magnetic control working mode and a bias working mode. The magnetic control bias switching circuit 113 is in the off state in the magnetic control working mode and in the on state in the bias working mode.

[0066] The magnetically controlled bias switching circuit 113 is used to receive a first signal from the first voltage regulating circuit 111a in the bias working mode, and to reduce the voltage ripple of the first signal, thereby reducing the voltage fluctuation amplitude of the first signal and increasing the stability of the electrical signal.

[0067] In one possible implementation, the magnetically controlled bias switching circuit 113 may include a switching transistor Q6, a capacitor C6, a diode D6, and an inductor L3.

[0068] like Figure 4 As shown, the source of the switching transistor Q6 is connected to the first output terminal of the first voltage regulating circuit 111a and the first input terminal of the pulse output switching circuit 112. The drain of the switching transistor Q6 is connected to the first terminal of the capacitor C6. The second terminal of the capacitor C6 is connected to the positive terminal of the diode D6. The negative terminal of the diode D6 is connected to the second output terminal of the first voltage regulating circuit 111a, the first output terminal of the pulse output switching circuit 112, and the first terminal of the load. The inductor L3 is connected in parallel with the diode D6.

[0069] Among them, capacitor C6 can release energy during the switching transient of switch Q6 to buffer voltage changes and reduce the impact on switch Q6; capacitor C6 can absorb the voltage spikes generated by the parasitic inductance of switch Q6 to reduce the risk of overvoltage breakdown of switch Q6.

[0070] Diode D6 can limit the direction of current flowing into switch Q6 through its unidirectional conductivity to prevent reverse current. Inductor L3 can release energy when switch Q6 is turned off, maintaining current continuity, reducing voltage spikes, and maintaining circuit stability.

[0071] The following is about Figure 4 The working principle of the plasma power supply shown will be explained.

[0072] When the magnetically controlled bias switching circuit is in magnetically controlled operating mode, switch Q6 is cut off, or in other words, switch Q6 is turned off. At this time, the magnetically controlled bias switching circuit is disconnected from the circuit and has no effect on other circuits. When the magnetically controlled bias switching circuit is in bias operating mode, switch Q6 follows switch Q3 in turning on and off, or in other words, the on / off state of switch Q6 is consistent with the on / off state of switch Q3. This biases the first signal before outputting it to the pulse output switching circuit to reduce the voltage ripple of the first signal.

[0073] In this invention, by adding a magnetic control bias switching circuit and a pulse output switching circuit, the plasma power supply has four working modes, such as DC magnetic control mode, DC bias mode, pulse magnetic control mode and pulse bias mode, to adapt to the complexity and diversity of plasma power supply applications, and to help improve problems such as overheating and oxidation of the target material during high-energy ion bombardment.

[0074] In one possible implementation, the plasma power supply 100 may further include a first rectifier circuit 120, a power factor correction (PFC) circuit 130, a high-frequency inverter circuit 140, an isolation transformer 150, and a second rectifier circuit 160 connected in sequence, such as... Figure 5 As shown.

[0075] The second rectifier circuit 160 is used to output DC voltage to the DC chopper circuit 110.

[0076] The PFC 130 may include one or more PFC modules. When there are multiple PFC modules, each PFC module is connected in parallel, or in other words, multiple PFC modules form an interleaved boost topology to improve output power, thereby solving the problem of wide voltage input in industrial applications and achieving the purpose of boosting to a stable voltage and low harmonic output.

[0077] like Figure 5As shown, the grid voltage (the three-phase voltages U, V, and W in the figure) is uncontrolled rectified by the first rectifier circuit 120 to achieve the switching from alternating current (AC) to direct current (DC), thereby providing DC voltage for the subsequent PFC 130.

[0078] The output voltage of PFC 130 is converted from DC to AC via high-frequency inverter circuit 140 to reduce the size of isolation transformer 150 and improve topology efficiency. High-frequency inverter circuit 140, as shown... Figure 5 The two-level H-bridge circuit in the example.

[0079] The output voltage of the isolation transformer 150 is converted from AC to DC through the second rectifier circuit 160, thereby outputting DC voltage to the DC chopper circuit 110.

[0080] Optionally, the first rectifier circuit 120 and the second rectifier circuit 160 can be full-bridge rectifier circuits.

[0081] The input voltage and output power of the plasma power supply provided by this invention are not limited to the power grid and current power designs.

[0082] In one possible implementation, the high-frequency inverter circuit 140 can use a multi-level H-bridge topology instead of a two-level H-bridge to increase the input voltage. Alternatively, the multi-level H-bridge topology can be modularly designed using parallel combinations of silicon carbide (SiC) metal oxide semiconductor field-effect transistors (MOSFETs) and insulated-gate bipolar transistors (IGBTs) to achieve compatibility with both high-frequency and high-voltage outputs.

[0083] In one possible implementation, the plasma power supply can be modularly designed to generate plasma power supply modules. By connecting these modules in series and parallel, the output voltage and current can be expanded, thereby increasing the output power. For example, when there are multiple plasma power supply modules, they can be connected in parallel for parallel output, or they can be connected in series for parallel output; this application does not impose any restrictions on this.

[0084] This invention also provides a coating device, including the plasma power supply described in the foregoing embodiments.

[0085] In the description of this utility model, it should be noted that the terms "first", "second" and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0086] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described above can be combined with each other as long as they do not conflict with each other.

[0087] It should be emphasized that the above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A plasma power supply, characterized by, include: A DC chopper circuit, comprising a first voltage regulating circuit, a second voltage regulating circuit, and a pulse output switching circuit; The first input terminal of the first voltage regulating circuit and the first input terminal of the second voltage regulating circuit are connected to the first polarity of the DC voltage. The second input terminal of the first voltage regulating circuit and the second input terminal of the second voltage regulating circuit are connected to the second polarity of the DC voltage. The first output terminal of the first voltage regulating circuit is connected to the first input terminal of the pulse output switching circuit. The second output terminal of the first voltage regulating circuit is connected to the first output terminal of the pulse output switching circuit and the first terminal of the load of the plasma power supply. The first output terminal of the second voltage regulating circuit is connected to the second input terminal of the pulse output switching circuit. The second output terminal of the second voltage regulating circuit is connected to the second output terminal of the pulse output switching circuit and the second terminal of the load. The first voltage regulating circuit is used to adjust the DC voltage to obtain a first signal; The second voltage regulating circuit is used to adjust the DC voltage to obtain a second signal, wherein the voltage of the first signal and the voltage of the second signal have opposite polarities. The pulse output switching circuit is used to receive the first signal and the second signal, and to output the first signal in a first working mode, and to output a bipolar pulse signal based on the first signal and the second signal in a second working mode, wherein the amplitude of the positive pulse of the bipolar pulse signal is different from the amplitude of the negative pulse.

2. The power supply of claim 1, wherein, The DC chopper circuit also includes a magnetically controlled bias switching circuit; The first terminal of the magnetically controlled bias switching circuit is connected to the first output terminal of the first voltage regulating circuit and the first input terminal of the pulse output switching circuit, and the second terminal of the magnetically controlled bias switching circuit is connected to the second output terminal of the first voltage regulating circuit, the first output terminal of the pulse output switching circuit, and the first terminal of the load. The magnetically controlled bias switching circuit includes a magnetically controlled working mode and a bias working mode. The magnetically controlled bias switching circuit is in the off state in the magnetically controlled working mode and in the on state in the bias working mode. The magnetically controlled bias switching circuit is used to receive the first signal in the bias operating mode and to reduce the voltage ripple of the first signal.

3. The power supply of claim 2, wherein, The magnetically controlled bias switching circuit includes a switching transistor Q6, a capacitor C6, a diode D6, and an inductor L3. The source of the switching transistor Q6 is connected to the first output terminal of the first voltage regulating circuit and the first input terminal of the pulse output switching circuit. The drain of the switching transistor Q6 is connected to the first terminal of the capacitor C6. The second terminal of the capacitor C6 is connected to the anode of the diode D6. The cathode of the diode D6 is connected to the second output terminal of the first voltage regulating circuit, the first output terminal of the pulse output switching circuit, and the first terminal of the load. The inductor L3 is connected in parallel with the diode D6. In the magnetic control operating mode, the switch Q6 is turned off, and in the bias operating mode, the switch Q6 is turned on.

4. The power supply of claim 1, wherein, The first voltage regulating circuit includes a step-down circuit; The step-down circuit is used to input the DC voltage and output the first signal to the pulse output switching circuit, wherein the voltage of the first signal is less than the DC voltage; The number of the step-down circuits is one or more; When there are multiple buck circuits, each buck circuit is connected in parallel.

5. The power supply of claim 4, wherein, When the number of buck circuits is one, the buck circuit includes a switching transistor Q1, a diode D1, and an inductor L1; The drain of the switching transistor Q1 is connected to the first polarity of the DC voltage, the source of the switching transistor Q1 is connected to the first terminal of the inductor L1 and the negative terminal of the diode D1, the second terminal of the inductor L1 is connected to the first input terminal of the pulse output switching circuit, and the positive terminal of the diode D1 is connected to the second polarity of the DC voltage, the first output terminal of the pulse output switching circuit, and the first terminal of the load.

6. The plasma power supply according to any one of claims 1, 4, or 5, characterized in that, The second voltage regulation circuit includes a switching transistor Q2, a diode D2, and an inductor L2; The drain of the switching transistor Q2 is connected to the first polarity of the DC voltage, the source of the switching transistor Q2 is connected to the first terminal of the inductor L2 and the negative terminal of the diode D2, the second terminal of the inductor L2 is connected to the second input terminal of the pulse output switching circuit, and the positive terminal of the diode D2 is connected to the second polarity of the DC voltage, the second output terminal of the pulse output switching circuit, and the second terminal of the load.

7. The power supply of claim 1, wherein, The pulse output switching circuit includes a first output circuit and a second output circuit; The first terminal of the first output circuit is connected to the first output terminal of the first voltage regulating circuit, the second terminal of the first output circuit is connected to the second output terminal of the second voltage regulating circuit and the second terminal of the load, the first terminal of the second output circuit is connected to the first output terminal of the second voltage regulating circuit, and the second terminal of the second output circuit is connected to the second output terminal of the first voltage regulating circuit and the first terminal of the load. The first output circuit is used to receive the first signal; The second output circuit is used to receive the second signal; In the first operating mode, the first output circuit is turned on and the second output circuit is turned off, so that the pulse output switching circuit outputs the first signal. During one working cycle in the second working mode, the first output circuit is turned on and off based on a preset frequency, and the second output circuit is turned on for at least a portion of the time during the off time of the first output circuit, so that the pulse output switching circuit outputs the bipolar pulse signal.

8. The power supply of claim 7, wherein, The first output circuit includes a switching transistor Q3, and the second output circuit includes a switching transistor Q4; The drain of the switching transistor Q3 is connected to the first output terminal of the first voltage regulating circuit, and the source of the switching transistor Q3 is connected to the second output terminal of the second voltage regulating circuit and the second terminal of the load. The drain of the switching transistor Q4 is connected to the first output terminal of the second voltage regulating circuit, and the source of the switching transistor Q4 is connected to the second output terminal of the first voltage regulating circuit and the first terminal of the load. In the first operating mode, the switching transistor Q3 is turned on and the switching transistor Q4 is turned off, so that the pulse output switching circuit outputs the first signal; During one working cycle in the second working mode, the switch Q3 is turned on and off based on the preset frequency, and the switch Q4 is turned on for at least a portion of the off time of the switch Q3, so that the pulse output switching circuit outputs the bipolar pulse signal.

9. The power supply of claim 8, wherein, The first output circuit further includes a first absorption circuit, and the second output circuit further includes a second absorption circuit, a resistor R1, and a diode D3; The first absorption circuit is connected in parallel with the switch Q3, the second absorption circuit is connected in parallel with the switch Q4, the first end of the resistor R1 is connected to the first output terminal of the second voltage regulating circuit, the second end of the resistor R1 is connected to the drain of the switch Q4, the anode of the diode D3 is connected to the source of the switch Q4, and the cathode of the diode D3 is connected to the second output terminal of the first voltage regulating circuit and the first end of the load. The first absorption circuit is used to absorb voltage spikes on both sides of the switching transistor Q3; The second absorption circuit is used to absorb voltage spikes on both sides of the switching transistor Q4; The resistor R1 is used to reduce the current flowing into the switch Q4; The diode D3 is used to limit the direction of the current flowing into the switching transistor Q4.

10. The plasma power supply of claim 1 or 2, wherein, It also includes a first rectifier circuit, a power factor correction circuit, a high-frequency inverter circuit, an isolation transformer, and a second rectifier circuit connected in sequence; The second rectifier circuit is used to output the DC voltage to the DC chopper circuit.

11. A coating apparatus, characterized by, Including the plasma power source as described in any one of claims 1 to 10.

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