Radio frequency particle source cooling system

Abstract

This utility model relates to a radio frequency particle source cooling system, including a circulating pump, a first radiator, and a second radiator. The input and output ends of the circulating pump are respectively provided with pipes one and two. The input and output ends of the first radiator are respectively provided with pipes three and four. The input and output ends of the second radiator are respectively provided with pipes five and six. One end of pipe six is ​​connected to pipe seven through a pipe joint. Pipes four and five are connected to pipe eight through a pipe joint. Pipe eight is connected to pipe two through pipe nine. Pipe eight is connected to pipe seven through pipe ten. Valves are provided at the connection points of several pipes. Through the design of the radiators and pipes, the cooling water in the circulation process can be cooled more thoroughly through the two radiators, which is more conducive to cooling the corresponding equipment. Moreover, even if either of the two radiators is damaged, the normal operation of the cooling system can still be guaranteed, without the need to stop the cooling system for maintenance during operation.

Description

Technical Field

[0001] This utility model relates to the field of particle source technology, specifically to a radio frequency particle source cooling system. Background Technology

[0002] A radio frequency particle source is a device that generates and controls a particle beam through a radio frequency electric field. Its core functions include ionizing gas molecules, accelerating ions, and achieving charge neutralization.

[0003] High temperatures can cause changes in plasma impedance, affecting the stable feed of RF power and reducing ionization efficiency. Furthermore, RF discharge generates a large amount of heat, which can damage the vacuum environment and shorten the equipment's lifespan. Existing RF particle sources are generally used in conjunction with circulating cooling systems. However, the cooling effect of existing cooling systems on circulating water is not ideal, resulting in insufficient cooling of the RF particle source. Moreover, when the RF particle source experiences a cold air radiator failure during operation, it cannot continue to operate normally, affecting its use. Therefore, it is necessary to design an RF particle source cooling system to solve the aforementioned problems. Utility Model Content

[0004] Based on the above description, this utility model provides a radio frequency particle source cooling system to solve the problems of unsatisfactory cooling effect of existing cooling systems on circulating cooling water, and the inability to continue to ensure normal use of the particle source when a cold radiator failure occurs during the operation of the radio frequency particle source.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: a radio frequency particle source cooling system, including a circulating pump, a first radiator and a second radiator. The input and output ends of the circulating pump are respectively provided with pipes one and two. The input and output ends of the first radiator are respectively provided with pipes three and four. The input and output ends of the second radiator are respectively provided with pipes five and six. One end of pipe six is ​​connected to pipe seven through a pipe joint. Pipes four and five are connected to pipe eight through a pipe joint. Pipe eight is connected to pipe two through pipe nine. Pipe eight is connected to pipe seven through pipe ten. Valves are provided at the connection points of several pipes to ensure that the circulating liquid is doubly cooled. At the same time, it can also ensure that a radiator can be disassembled and maintained without stopping the system in case of failure.

[0006] Based on the above technical solution, the present invention can be further improved as follows.

[0007] Furthermore, all of the aforementioned pipes are made of seamless steel pipe, ensuring the overall strength of the pipes and improving their service life.

[0008] Furthermore, several of the aforementioned pipe joints are detachable unions, facilitating the assembly and disassembly of multiple pipes.

[0009] Furthermore, each of the pipes has a protruding rod on its surface, and a movable plate is fitted on the outside of the protruding rod. The movable plate has two sets of limiting protrusions integrally formed on its surface. By fitting the movable plate onto the protruding rod and using the limiting protrusions, the position of the valve is restricted, thus preventing the valve from loosening during normal use.

[0010] Furthermore, the protruding rod is rectangular in design to prevent arbitrary rotation during operation of the movable plate, which would affect the corresponding restriction of the valve by the limiting protrusion.

[0011] Furthermore, one end of the protruding rod protrudes above the movable plate, and a threaded hole is provided at the end of the protruding rod. A bolt is provided in the threaded hole to restrict the movable plate and prevent it from separating from the protruding rod and falling off during the adjustment of the movable plate.

[0012] Furthermore, a rubber ring is provided on the inner side of the movable plate, and the inner side of the rubber ring is in close contact with the surface of the protruding rod, making the movable plate sleeved on the outside of the protruding rod more stable and preventing it from shaking and making noise during normal use.

[0013] Furthermore, both the movable plate and the limiting protrusion are made of 304 stainless steel, which makes the movable plate and the limiting protrusion more rigid and prevents them from easily deforming or breaking.

[0014] Compared with the prior art, the technical solution of this application has the following beneficial technical effects: By designing two radiators and installing multiple pipes, the cooling water in the circulation process can be cooled more thoroughly through the two radiators, which is more conducive to cooling the corresponding equipment. At the same time, through the structural design of pipes nine and ten, the normal operation of the cooling system can still be guaranteed even if either of the two radiators is damaged, without the need to stop the cooling system for maintenance during operation. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram showing the connection structure between the movable plate and the valve in this utility model; Figure 3 This is a schematic diagram showing the location and structure of the threaded hole in this utility model.

[0016] The attached diagram lists the components represented by each number as follows: 1. Circulating pump; 11. Pipe 1; 12. Pipe 2; 2. Radiator 1; 21. Pipe 3; 22. Pipe 4; 3. Radiator 2; 31. Pipe 5; 32. Pipe 6; 4. Pipe joint; 5. Pipe 7; 6. Pipe 8; 7. Pipe 9; 8. Pipe 10; 9. Valve; 10. Protruding rod; 101. Threaded hole; 20. Movable plate; 201. Limiting protrusion; 30. Bolt; 40. Rubber ring. Detailed Implementation

[0017] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0019] Example Please refer to Figures 1-3 This embodiment provides a radio frequency particle source cooling system, including a circulating pump 1, a first radiator 2, and a second radiator 3. The circulating pump 1 is a TD32-18 / 2 vertical circulating pump. Both the first and second radiators 2 and 3 are water-cooled radiators. The input and output ends of the circulating pump 1 are respectively provided with pipe 11 and pipe 22. Pipe 11 is connected to the radio frequency coil wound around the outside of the discharge cavity. The input and output ends of the first radiator 2 are respectively connected to pipe 31 and pipe 42. Pipe 31 and pipe 22 are connected by pipe joint 4. The input of the second radiator 3... The end and the output end are respectively connected to pipe 5 31 and pipe 6 32. One end of pipe 6 32 is connected to pipe 7 5 through pipe joint 4. Pipe 7 5 is connected to an external radio frequency coil. Pipe 4 22 and pipe 5 31 are connected to pipe 8 6 through pipe joint 4. Pipe 8 6 and pipe 2 12 are connected to pipe 9 7. Pipe 8 6 and pipe 7 5 are connected to pipe 10 8. Pipe 9 7 and pipe 10 8 are arranged in an alternating pattern. Valves 9 are installed at the connection points of multiple pipes. All multiple pipes are seamless steel pipes. All multiple pipe joints 4 are detachable unions.

[0020] In this embodiment, valves 9 installed on pipes 12, 6, and 5 are all in the open state. The radio frequency coil wound around the outside of the discharge cavity that generates heat during operation absorbs heat. The circulation pump 1 is started, and the hot water in the coil enters pipe 11 and the circulation pump 1, and then enters pipe 21 and radiator 2 through pipe 12. The radiator 2 is used to achieve the first cooling treatment of the hot water. After the first cooling treatment, the water enters pipe 6 through pipe 22. The water in pipe 6 enters radiator 3 through pipe 31. The radiator 3 is used to achieve the second cooling of the water. The water after the second cooling enters the external radio frequency coil through pipe 32 and pipe 5, thereby achieving a sufficient cooling effect on the corresponding equipment using the cooling water after the second cooling. If radiator 12 malfunctions during use, the operator can close valves 9 on pipes 212 and 86, and open the two valves 9 on pipe 97. The water in the circulation pump 1 will enter radiator 23 directly through pipe 97, and radiator 23 will be used to cool the water. Then, the water will enter the external radio frequency coil through pipes 632 and 75 to achieve cooling circulation. Finally, the operator can turn the knob on the pipe joint 4 on pipes 321 and 422 and disassemble and repair radiator 12. If the radiator 23 malfunctions during use, the operator can close the valves 9 on pipes 6 and 8, and open the two valves 9 on pipe 10. The water in the circulation pump 1 will enter the radiator 2 directly through pipes 2 and 3 to achieve water cooling, and then enter pipe 7 and RF coil through pipe 10 to achieve cooling circulation. Finally, the operator can turn the knob on the pipe joint 4 on pipes 5 and 6 and disassemble and repair the radiator 23.

[0021] Please see Figure 2 As an optional implementation, the surfaces of multiple pipes are provided with protruding rods 10, and movable plates 20 are sleeved on the outer side of the protruding rods 10. The surfaces of the movable plates 20 are integrally formed with two sets of limiting protrusions 201.

[0022] In this embodiment, the movable plate 20 is sleeved on the outside of the protruding rod 10, and the limiting protrusion 201 is used to restrict the various position states of the valve 9, which can ensure the stability of the valve 9 when it is open or closed, and avoid the phenomenon of unstable state of the valve 9.

[0023] Please see Figure 2 As an optional implementation, the protrusion 10 is rectangular in design.

[0024] In this embodiment, the operator moves the movable plate 20 along the protruding rod 10 and then adjusts the state of the valve 9. The position of the movable plate 20, which is sleeved on the protruding rod 10, is more stable, ensuring the positional relationship between the limiting protrusion 201 and the valve 9 after the state adjustment, so that it can restrict the valve 9 again.

[0025] Please see Figures 2-3 As an optional implementation, one end of the protruding rod 10 protrudes above the movable plate 20, and the end of the protruding rod 10 is provided with a threaded hole 101, and a bolt 30 is provided in the threaded hole 101.

[0026] In this embodiment, during the process of applying pressure to move the movable plate 20, the bolt 30 located at the end of the protruding rod 10 achieves the restriction effect of the movable plate 20, preventing accidental disengagement from the protruding rod 10 during the adjustment of the movable plate 20.

[0027] Please see Figure 2 As an optional implementation, the inner side of the movable plate 20 is provided with a rubber ring 40, and the inner side of the rubber ring 40 is in close contact with the surface of the protruding rod 10.

[0028] In this embodiment, the rubber ring 40 ensures the stability of the movable plate 20 sleeved on the outside of the protruding rod 10, and avoids the vibration of the circulating pump 1 or the radiator during operation, which would cause the movable plate 20 to shake and generate noise, affecting the surrounding environment.

[0029] Please see Figures 1-2 As an optional implementation, both the movable plate 20 and the limiting protrusion 201 are made of 304 stainless steel.

[0030] In this embodiment, if the valve 9 is accidentally pressurized and adjusted without adjusting the movable plate 20, it can be ensured that the limit protrusion 201 will not break or deform under strong pressure, thereby improving the overall quality and ensuring service life.

[0031] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A radio frequency particle source cooling system, comprising a circulating pump (1), a first radiator (2), and a second radiator (3), characterized in that: The input and output ends of the circulating pump (1) are respectively provided with pipe one (11) and pipe two (12), the input and output ends of the radiator one (2) are respectively provided with pipe three (21) and pipe four (22), the input and output ends of the radiator two (3) are respectively provided with pipe five (31) and pipe six (32), one end of pipe six (32) is connected to pipe seven (5) through pipe joint (4), pipe four (22) and pipe five (31) are connected to pipe eight (6) through pipe joint (4), pipe eight (6) is provided between pipe eight (6) and pipe two (12), pipe ten (8) is provided between pipe eight (6) and pipe seven (5), and valves (9) are provided at the connection points of several pipes.

2. The radio frequency particle source cooling system according to claim 1, characterized in that: Several of the aforementioned pipes are seamless steel pipes.

3. The radio frequency particle source cooling system according to claim 1, characterized in that: Several of the pipe joints (4) are detachable live joints.

4. The radio frequency particle source cooling system according to claim 1, characterized in that: Each of the pipes has a protruding rod (10) on its surface. A movable plate (20) is fitted on the outside of the protruding rod (10). Two sets of limiting protrusions (201) are integrally formed on the surface of the movable plate (20).

5. The radio frequency particle source cooling system according to claim 4, characterized in that: The protruding rod (10) has a rectangular design.

6. The radio frequency particle source cooling system according to claim 4, characterized in that: One end of the protruding rod (10) protrudes above the movable plate (20), and a threaded hole (101) is provided at the end of the protruding rod (10), and a bolt (30) is provided in the threaded hole (101).

7. The radio frequency particle source cooling system according to claim 4, characterized in that: The inner side of the movable plate (20) is provided with a rubber ring (40), and the inner side of the rubber ring (40) is in close contact with the surface of the protruding rod (10).

8. The radio frequency particle source cooling system according to claim 4, characterized in that: Both the movable plate (20) and the limiting protrusion (201) are made of 304 stainless steel.

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