A combined coil type high-efficiency plasma torch

Abstract

This invention discloses a combined coil type high-efficiency plasma torch, relating to the field of radio frequency plasma technology. It includes a torch body and at least one radio frequency induction coil group. The radio frequency induction coil group is horseshoe-shaped and surrounds the outside of the torch body. Inside the torch body, corresponding to the position of the radio frequency induction coil group, plasma excitation gas moves linearly towards the nozzle of the torch body. The horseshoe-shaped design of the radio frequency induction coil group in this invention ensures that the resulting magnetic induction lines are not parallel to the torch axis. Therefore, the linear movement of the plasma excitation gas towards the nozzle of the torch body can also cut the magnetic lines of force to generate an induced electromotive force, causing the gas to ionize and form high-temperature plasma. This makes the overall gas flow output from the torch body closer to a laminar flow state, thereby improving deposition efficiency.

Description

Technical Field

[0001] This invention relates to the field of radio frequency plasma technology, and in particular to a combined coil type high-efficiency plasma torch. Background Technology

[0002] Radio frequency (RF) plasma is a technology that uses a high-frequency alternating electromagnetic field to ionize gas and form stable plasma. Compared with traditional DC arc plasma, RF plasma has the following significant advantages: it adopts an electrodeless discharge mode, avoiding direct contact between electrodes and plasma; it has higher system stability; and it can operate under lower gas pressure conditions. These characteristics make it more widely applicable in fields such as semiconductor manufacturing and thin film deposition.

[0003] The basic structure of commonly used radio frequency plasma torches includes: a torch body and an induction coil. The induction coil is wrapped around the outside of the torch body and has a cylindrical structure. The magnetic induction lines generated by the induction coil are parallel to the torch axis. According to the principle of plasma excitation, the working gas needs to cut the magnetic lines of force to effectively excite the plasma. Therefore, the gas usually needs to enter the torch at a specific angle (generally along the tangent of the outer circle of the torch) and form a spiral airflow to fully contact the magnetic lines of force. However, in deposition applications, this spiral airflow pattern contradicts the ideal laminar flow output state, resulting in low material deposition efficiency and limiting its large-scale industrial application.

[0004] Therefore, there is an urgent need for a combined coil type high-efficiency plasma torch with high deposition efficiency. Summary of the Invention

[0005] The purpose of this invention is to provide a combined coil type high-efficiency plasma torch to solve the problems existing in the prior art. By designing the radio frequency induction coil group, the plasma excitation gas can move in a straight line toward the nozzle of the torch body to cut the magnetic lines of force, making the airflow output by the torch closer to the laminar flow state, thereby improving the deposition efficiency.

[0006] To achieve the above objectives, the present invention provides the following solution: The present invention provides a combined coil type high-efficiency plasma torch, including a torch body and at least one radio frequency induction coil group. The radio frequency induction coil group is in the shape of a horseshoe coil and surrounds the outside of the torch body. The position of the radio frequency induction coil group inside the torch body corresponds to the position of the radio frequency induction coil group, and the plasma excitation gas moves in a straight line toward the nozzle of the torch body.

[0007] Preferably, the torch body includes a plasma excitation gas channel, a process gas channel, and a raw material gas channel. The process gas channel and the raw material gas channel are connected to the plasma excitation gas channel. The radio frequency induction coil group surrounds the outside of the plasma excitation gas channel, and the outlet of the plasma excitation gas channel is the torch nozzle.

[0008] Preferably, the raw material gas channel, the process gas channel, and the plasma excitation gas channel are sequentially nested from the inside to the outside, and the outlets of the raw material gas channel and the process gas channel are spaced apart from the outlet of the plasma excitation gas channel to form a flow space, and the radio frequency induction coil group is arranged corresponding to the flow space.

[0009] Preferably, the shells of the raw material gas channel, the process gas channel, and the plasma excitation gas channel are all cylindrical structures.

[0010] Preferably, the inlet end of the process gas channel extends into the plasma excitation gas channel, and the raw material gas channel extends into the process gas channel.

[0011] Preferably, the outlet of the process gas channel is provided with an acceleration section for increasing the flow rate.

[0012] Preferably, the outlet end of the raw material gas channel is narrowed.

[0013] Preferably, the first air inlet of the plasma excitation gas channel, the second air inlet of the process gas channel, and the third air inlet of the raw material gas channel are all located at the end of the channel away from the torch nozzle.

[0014] Preferably, the radio frequency induction coil group is hollow to form a passage for the flow of cooling water.

[0015] Preferably, the body of the blowtorch is made of quartz.

[0016] The present invention achieves the following main technical effects compared to the prior art: The horseshoe-shaped design of the radio frequency induction coil group means that the magnetic induction lines formed are not parallel to the torch axis. Therefore, the plasma excitation gas can also cut the magnetic lines of force to generate an induced electromotive force when it moves in a straight line toward the torch nozzle of the torch body. This causes the gas to ionize and form high-temperature plasma. In this way, the airflow output by the entire torch body is closer to the laminar flow state, thereby improving the deposition efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the combined coil type high-efficiency plasma torch in an embodiment of the present invention; Figure 2 This is a front view of a combined coil-type high-efficiency plasma torch in an embodiment of the present invention; Figure 3 This is a top view of the combined coil type high-efficiency plasma torch in an embodiment of the present invention; Figure 4 for Figure 3 Sectional view at point AA; The components include: 1. the torch body; 2. the radio frequency induction coil group; 3. the first air inlet; 4. the third air inlet; 5. the second air inlet; 6. the plasma excitation gas channel; 7. the raw material gas channel; and 8. the process gas channel. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] The purpose of this invention is to provide a combined coil type high-efficiency plasma torch to solve the problems existing in the prior art. By designing the radio frequency induction coil group, the plasma excitation gas can move in a straight line toward the nozzle of the torch body to cut the magnetic lines of force, making the airflow output by the torch closer to the laminar flow state, thereby improving the deposition efficiency.

[0021] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] Please refer to the following: Figures 1-4As shown, a combined coil type high-efficiency plasma torch is provided, including a torch body 1 and at least one radio frequency induction coil group 2. When multiple radio frequency induction coil groups 2 are provided, the multiple radio frequency induction coil groups 2 are arranged sequentially along the output direction of the torch body 1. The radio frequency induction coil group 2 is in the shape of a horseshoe coil and surrounds the outside of the torch body 1. The position of the radio frequency induction coil group 2 is inside the torch body 1. The plasma excitation gas moves in a straight line toward the nozzle of the torch body 1.

[0023] The working principle of this device is as follows: the radio frequency induction coil group 2 is connected to the high-performance radio frequency induction power supply through a high-frequency cable. When the radio frequency power supply is turned on, a strong high-frequency current surges rapidly in the radio frequency induction coil group 2, generating a strong induced magnetic field. Due to the special shape of the coil, the magnetic induction lines formed are not parallel to the axis of the blowtorch body 1 (i.e., the gas flow direction), but are nearly perpendicular to the airflow direction inside the blowtorch body 1. When the plasma excitation gas flows out from the inside of the blowtorch body 1 to the blowtorch nozzle in a straight flow, it will interact with these magnetic induction lines, cut the magnetic lines of force to generate an induced electromotive force, and then cause the plasma excitation gas to ionize and form high-temperature plasma. The airflow output by the entire blowtorch body 1 is closer to the laminar flow state, thereby improving the deposition efficiency.

[0024] In this embodiment, a single radio frequency induction coil group 2 includes two horseshoe-shaped coils, which are wrapped around the outer periphery of the torch body 1.

[0025] The torch body 1 includes a plasma excitation gas channel 6, a process gas channel 8, and a raw material gas channel 7. The process gas channel 8 and the raw material gas channel 7 are connected to the plasma excitation gas channel 6. The radio frequency induction coil group 2 is surrounded around the outside of the plasma excitation gas channel 6. The outlet of the plasma excitation gas channel 6 is the torch nozzle. The plasma excitation gas, process gas, and raw material gas can be selected as needed. The plasma excitation gas can be an inert gas such as argon, nitrogen, or helium.

[0026] In this embodiment, the raw material gas channel 7, the process gas channel 8, and the plasma excitation gas channel 6 are arranged sequentially from the inside to the outside. The outlets of the raw material gas channel 7 and the process gas channel 8 are spaced apart from the outlet of the plasma excitation gas channel 6 to form a flow space. The radio frequency induction coil group 2 is arranged corresponding to the flow space. The plasma gas cuts the magnetic lines of force and ionizes to form high-temperature plasma in the flow space.

[0027] Multiple process gas channels 8 can be set up, and multiple process gas channels 8 can be nested in sequence.

[0028] In this embodiment, the shells of the raw material gas channel 7, the process gas channel 8, and the plasma excitation gas channel 6 are all cylindrical structures. In other embodiments, the three can also be designed as cylindrical structures with other cross-sectional shapes.

[0029] Due to the existence of the flow space, the inlet end of the process gas channel 8 is extended into the plasma excitation gas channel 6, and the raw material gas channel 7 is extended into the process gas channel 8. The extension method can prolong the length of the channel to ensure the stability of gas flow, thereby improving the final deposition efficiency.

[0030] An acceleration section is provided at the outlet of the process gas channel 8 to increase the flow rate. The acceleration section can be a narrowed structure or the overall cross-sectional area of ​​the process gas channel 8 can be reduced so that the entire process gas channel 8 exists as an acceleration section. The high-speed flow of process gas at the outlet of the process gas channel 8 can not only efficiently carry the generated plasma out of the torch body 1 to form a stable and powerful plasma torch, but also effectively reduce the accumulation of reactants at the outlet of the raw material gas channel 7 by utilizing the scouring effect generated by the gas flow, avoid blockage, and ensure the continuous and stable operation of the equipment.

[0031] In this embodiment, the outlet end of the raw material gas channel 7 is narrowed to increase the flow rate of the raw material gas, shorten the reaction time of the raw material gas at the outlet of the raw material gas channel 7, and further reduce the accumulation of reactants at the outlet of the raw material gas channel 7.

[0032] The first inlet 3 of the plasma excitation gas channel 6, the second inlet 5 of the process gas channel 8, and the third inlet 4 of the raw material gas channel 7 are all located at the end of the channel away from the torch nozzle, so as to extend the gas flow path and ensure that the gas has a stable flow state when it enters the flow space, thereby improving the deposition effect.

[0033] The radio frequency induction coil group 2 is hollow to form a passage for cooling water to flow through. By introducing cooling water into this passage, the temperature of the radio frequency induction coil group 2 can be reduced, ensuring that the equipment operates in a safe, stable and efficient state.

[0034] In this embodiment, all components of the torch body 1 are made of quartz. If the budget allows, high-purity quartz can be selected.

[0035] A cylindrical cooling layer and other gas layers may also be provided within the plasma excitation gas channel 6 as needed.

[0036] In practical use, the plasma excitation gas enters the plasma excitation gas channel 6, cuts the magnetic lines of force to generate high-temperature plasma, and creates a high-temperature environment; the process gas can carry the generated plasma out of the torch to form a stable and powerful plasma torch; the raw material gas enters the high-temperature environment and undergoes a violent thermochemical reaction. Under the dual action of high temperature and plasma, the raw material molecules rapidly decompose and recombine, eventually generating the target reactants, which are uniformly deposited on the target surface under the impetus of the gas flow field, completing the key process of material surface treatment or precision machining.

[0037] Any adaptive changes made according to actual needs are within the scope of protection of this invention.

[0038] It should be noted that, for those skilled in the art, it is obvious that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0039] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A combined coil type high efficiency plasma torch, characterized in that, The device includes a blowtorch body and at least one radio frequency induction coil group. The radio frequency induction coil group is in the shape of a horseshoe coil and surrounds the outside of the blowtorch body. Inside the blowtorch body, corresponding to the position of the radio frequency induction coil group, plasma excitation gas moves in a straight line toward the blowtorch nozzle of the blowtorch body.

2. The combination coil high efficiency plasma torch of claim 1 wherein, The blowtorch body includes a plasma excitation gas channel, a process gas channel, and a raw material gas channel. The process gas channel and the raw material gas channel are connected to the plasma excitation gas channel. The radio frequency induction coil group surrounds the outside of the plasma excitation gas channel, and the outlet of the plasma excitation gas channel is the blowtorch nozzle.

3. The combined coil high efficiency plasma torch of claim 2, wherein, The raw material gas channel, the process gas channel, and the plasma excitation gas channel are sequentially nested from the inside out. The outlets of the raw material gas channel and the process gas channel are spaced apart from the outlet of the plasma excitation gas channel to form a flow space. The radio frequency induction coil group is arranged corresponding to the flow space.

4. The combination coil high efficiency plasma torch of claim 3 wherein, The shells of the raw material gas channel, the process gas channel, and the plasma excitation gas channel are all cylindrical structures.

5. The combination coil high efficiency plasma torch of claim 3 wherein, The plasma excitation gas channel extends from the inlet end of the process gas channel, and the raw material gas channel extends from the process gas channel.

6. The combination coil high efficiency plasma torch of claim 3 wherein, An acceleration section is provided at the outlet of the process gas channel to increase the flow rate.

7. The combination coil high efficiency plasma torch of claim 2 wherein, The outlet end of the raw material gas channel is narrowed.

8. The combination coil high efficiency plasma torch of claim 2, wherein, The first air inlet of the plasma excitation gas channel, the second air inlet of the process gas channel, and the third air inlet of the raw material gas channel are all located at the end of the channel away from the torch nozzle.

9. The combination coil high efficiency plasma torch of claim 1 wherein, The radio frequency induction coil group is hollowed out to form a passage for the flow of cooling water.

10. The combination coil high efficiency plasma torch of claim 1 wherein, The body of the blowtorch is made of quartz.

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