Rotary preparation equipment for preparing perovskite layers by slit coating

Abstract

This application discloses a rotary preparation equipment for preparing perovskite layers by slot coating. It includes a turntable platform, a vision inspection device, a buffer device, and an annealing device, arranged sequentially and connected by a conveyor system. Above the turntable platform, along its circumference, are arranged a vision alignment device, a slot coating machine, and a dryer. Workstations are positioned on the turntable platform, and the platform's rotation drives these workstations from the vision alignment device to the dryer. Conveyor systems before and after the turntable platform connect to the workstations at corresponding points on the vision alignment device and the dryer, respectively. A waste collection device is located next to the vision inspection device, connected to it by a gripping device. This application utilizes a turntable platform for rotary conveying, with loading and unloading connected to upstream and downstream equipment via belt conveyors. Different process steps are executed simultaneously at different positions on the turntable, with processing times matched for each position, significantly improving slot coating capacity and production continuity.

Description

Technical Field

[0001] This application relates to equipment for fabricating perovskite solar cells, and in particular to equipment for automatically and continuously fabricating the perovskite layer of perovskite solar cells using a slot coating method. Background Technology

[0002] Perovskite solar cells are a new type of photovoltaic cell that have been extensively studied since their inception in 2009. Their photoelectric conversion efficiency has increased from 3.8% to 26.5%, thanks to the excellent optical and electrical properties of halide perovskite, the light-absorbing layer material of perovskite solar cells, including a high light absorption coefficient, a long carrier diffusion length, and good tolerance to defects.

[0003] Currently, slot coating is the most important wet process for producing large-area perovskite solar cells. In the process of transitioning from laboratory scale to pilot-scale and GW-level mass production, how to improve coating speed and how to achieve continuous production and match the output time of upstream and downstream processes are key issues in the industrialization process.

[0004] Existing slot coating technology suffers from the following drawbacks: loading and unloading require manual operation, necessitating the use of clamps to lift the substrate, and contact with only the back and sides of the substrate is possible, leading to discontinuous production and difficulties in mass production; the timing of slot coating, flash evaporation, and annealing is inconsistent, with annealing being slower than slot coating and flash evaporation, requiring a long waiting time before coating can continue after each experiment; after flash evaporation, the morphology of each film layer needs to be observed, and substrates meeting the requirements must be manually selected, requiring repeated confirmation and a significant amount of manual work. Therefore, there is still much room for improvement in slot coating technology and preparation equipment. Summary of the Invention

[0005] Purpose of this utility model: The purpose of this application is to provide an automated and continuous equipment for preparing the perovskite layer of perovskite solar cells using the slot coating method, so as to achieve high production efficiency and high yield.

[0006] Technical Solution: A rotary preparation device for preparing perovskite layers by slot coating includes a turntable platform, a vision inspection device, a buffer device, and an annealing device arranged sequentially and connected by a transmission device. Above the turntable platform, along its circumference, a vision alignment device, a slot coating machine, and a dryer are also arranged sequentially. A workstation is set on the turntable platform. The turntable platform rotates, driving the workstation from the vision alignment device as the starting point to the dryer as the ending point. The transmission devices before and after the turntable platform are connected to the workstations at corresponding positions on the vision alignment device and the dryer, respectively. A waste recycling device is also set next to the vision inspection device, and the vision inspection device and the waste recycling device are connected by a gripping device.

[0007] Furthermore, at least one workstation is arranged sequentially along the circumference of the turntable platform. By utilizing the rotation of the turntable, multiple workstations simultaneously complete different process steps at different positions on the turntable.

[0008] Furthermore, the visual inspection device is an AOI visual inspection device.

[0009] Furthermore, the cache device is a flower basket.

[0010] Furthermore, the annealing equipment is a chain annealing furnace or a sintering furnace.

[0011] Furthermore, the transmission device is a belt conveyor.

[0012] Furthermore, the grasping device is a robotic arm.

[0013] Furthermore, the dryer is a vacuum dryer.

[0014] Furthermore, a film loading platform is provided at the workstation, and a suction cup is provided on the surface of the film loading platform. The surface of the suction cup is flush with the surface of the film loading platform. A lifting rod is provided between the bottom surface of the film loading platform and the turntable platform. A rotating shaft is provided between the top end of the lifting rod and the bottom surface of the film loading platform. The lifting rod and the rotating shaft are controlled by motors. The suction cup is connected to a vacuum system, which can control the lifting of the film loading platform to match the operating equipment and the loading and unloading of materials. It can also control the flipping of the film loading platform to match the unloading of materials from the turntable platform.

[0015] Beneficial effects: This application has the following advantages: 1. The turntable platform forms a rotary conveyor. Loading and unloading are connected to the upstream and downstream process equipment through belt conveyor equipment. Different process steps are executed simultaneously at different positions of the turntable. The processing time of each position is matched. The rotation of the turntable can shorten the waiting time and film making time, greatly optimize the waiting time for loading and unloading of slot coating, and improve the coating preparation speed. By matching the output and rate of each step of slot coating, flash evaporation and annealing, the capacity and production continuity of slot coating can be greatly improved. 2. The visual inspection equipment automatically performs photoelectric detection and automatically sorts the film layers according to their quality, thereby improving the yield rate of the equipment production line; 3. The buffer mechanism is designed to collect a large number of substrates after slot coating and flash evaporation, and simultaneously send them into the annealing equipment, which greatly improves production efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the layout of a rotary preparation equipment; Figure 2 This is a schematic diagram of loading and unloading on a turntable platform. Detailed Implementation

[0017] The present application will be further explained below with reference to the accompanying drawings and specific embodiments.

[0018] A rotary fabrication apparatus for preparing perovskite layers using slit coating method is provided, which prepares the perovskite layer on the substrate using the slit coating method, as shown in the attached figure. Figure 1 As shown, the rotary preparation equipment includes a turntable platform 1, a vision inspection device 2, a buffer device 3, and an annealing device 4 arranged in sequence. The turntable platform 1, the vision inspection device 2, the buffer device 3, and the annealing device 4 are all connected by a transmission device 5. The turntable platform 1 is also connected to the front of the transmission device 5. The transmission device 5 is a belt conveyor. The substrate is placed on the transmission device 5 and is transferred between the turntable platform 1, the vision inspection device 2, the buffer device 3, and the annealing device 4 through the transmission device 5.

[0019] The turntable platform 1 rotates under the drive of a motor. Workstations 14 are arranged on the turntable platform 1, and operating equipment is arranged above it. Specifically, the operating equipment consists of a vision alignment device 11, a slot coater 12, and a dryer 13 arranged sequentially along the circumference of the turntable platform 1. When the turntable platform 1 rotates, it drives workstations 14 to pass sequentially through the vision alignment device 11, slot coater 12, and dryer 13. The transmission devices 5 at the front and rear of the turntable platform 1 connect with workstations 14 at corresponding points on the vision alignment device 11 and the dryer 13, respectively. The vision alignment device 11 is the starting point of the operation on the turntable platform 1, and the dryer 13 is the ending point of the operation. (See attached diagram.) Figure 2 As shown, a film loading stage 141 is provided on station 14. A suction cup 142 is provided on the surface of the film loading stage 141. The surface of the suction cup 142 is flush with the surface of the film loading stage 141. The suction cup 142 is connected to the vacuum system. A lifting rod 143 is provided between the bottom surface of the film loading stage 141 and the turntable platform 1. A rotating shaft 144 is provided between the top of the lifting rod 143 and the bottom surface of the film loading stage 141. The lifting rod 143 and the rotating shaft 144 are controlled by motors, which can control the lifting and tilting of the film loading stage 141.

[0020] Multiple workstations 14 can be arranged sequentially along their circumference on the turntable platform 1. These can be configured according to the number of operating devices, operating rhythm, etc., for example... Figure 1 Four workstations 14 can be set up to meet the matching and coordination of various operation times. The dryer 13 adopts a vacuum dryer.

[0021] The visual inspection device 2 adopts AOI visual inspection equipment. Next to the visual inspection device 2, there is also a waste recycling device 21. A gripping device 6 is set up between the visual inspection device 2 and the waste recycling device 21 for docking. The gripping device 6 can be a robotic arm.

[0022] The buffer device 3 can be a basket annealing unit. The annealing device 4 can be a chain annealing furnace or a sintering furnace.

[0023] The conveyor system in front of the turntable platform supplies substrates. The substrates are placed on the belt surface, and the belt transports the substrates to the turntable platform. The workstation waits at the starting position corresponding to the vision alignment device. The tail end of the belt reversal docks with the front end of the workstation. The structure is designed so that the surface of the placement table is slightly lower than the bottom surface of the substrate on the belt (see attached diagram). Figure 2 As shown in the diagram, the substrate approaches the front end of the unloading table at the end of the belt rotation point. After the substrate reaches the end of the belt rotation point, the front end of the substrate reaches the surface of the unloading table and is pushed forward onto the unloading table as the belt continues to move forward. When the rear end of the substrate disengages from the end of the belt rotation point, the substrate remains on the surface of the unloading table. The vacuum system is activated, and the substrate is fixed by suction cups on the surface of the unloading table. The unloading table is raised according to the settings, allowing the vision alignment equipment to load and align the substrate at the station, calibrating the substrate placement position. After the inspection is completed, the unloading table is lowered according to the settings. Then, the turntable platform rotates, moving the station to the position corresponding to the slot coater, where the slot coater performs slot coating on the substrate surface, preparing perovskite on the substrate. The process involves creating a wet film. During this process, the loading platform can be raised or lowered to coordinate with the slot coater. The height of the loading platform can also be adjusted according to the substrate thickness to maintain a constant distance between the substrate and the slot coater blade, allowing for rapid coating. Then, the turntable platform rotates, moving the station to the position corresponding to the dryer. The dryer performs vacuum flash evaporation on the perovskite wet film on the substrate surface, turning the wet film into a dry film. During this process, the loading platform can also be raised or lowered to coordinate with the dryer. After drying, the station is at its final position, and the substrate is ready to be unloaded onto the conveyor behind the turntable platform. The docking structure between the rear end of the station and the front end of the belt is designed so that the belt surface is slightly lower than the bottom surface of the substrate on the loading platform (see attached diagram). Figure 2 As shown in the diagram, the front end of the conveyor belt rotates close to the rear end of the film loading platform. The film loading platform is controlled to rotate towards the front end of the conveyor belt, releasing the vacuum of the suction cup. The substrate then slides onto the surface of the conveyor belt and eventually stays on the surface. Each station rotates with the turntable platform, and the aforementioned process begins sequentially at the starting position. The transmission equipment behind the turntable platform conveys the substrate to the vision inspection equipment, which inspects the perovskite layer on the surface of the substrate. The AOI vision inspection equipment judges the quality of the perovskite layer after flash evaporation using a high-definition camera and inspection program. If a defective product is detected, the gripping equipment removes the defective product and transfers it to the waste recycling equipment for temporary storage. Qualified products are conveyed to the buffer equipment by the transmission equipment behind the vision inspection equipment. The transmission equipment before and after the vision inspection equipment can be the same, conveyed by the same conveyor belt, which is laid in the conveyor channel inside the vision inspection equipment. The substrate is transferred to a buffer device for storage. During the aforementioned process, qualified products are continuously transferred to the buffer device and placed at intervals in a basket. After the set storage quantity is reached, the substrate is transferred to an annealing device for annealing via a transmission device behind the basket.

[0024] The rotary preparation equipment for preparing perovskite layers by slit coating in this application has the following advantages: 1. The turntable platform forms a rotary conveyor. Loading and unloading are connected to the upstream and downstream process equipment through belt conveyor equipment. Different process steps are executed simultaneously at different positions of the turntable. The processing time of each position is matched. The rotation of the turntable can shorten the waiting time and film making time, greatly optimize the waiting time for loading and unloading of slot coating, and improve the coating preparation speed. By matching the output and rate of each step of slot coating, flash evaporation and annealing, the capacity and production continuity of slot coating can be greatly improved. 2. The visual inspection equipment automatically performs photoelectric detection and automatically sorts the film layers according to their quality, thereby improving the yield rate of the equipment production line; 3. The buffer mechanism is designed to collect a large number of substrates after slot coating and flash evaporation, and simultaneously send them into the annealing equipment, which greatly improves production efficiency.

Claims

1. A rotary preparation apparatus for preparing perovskite layers by slit coating, characterized in that: The system includes a turntable platform (1), a vision inspection device (2), a buffer device (3), and an annealing device (4) arranged in sequence and connected to a transmission device (5). Above the turntable platform (1), a vision alignment device (11), a slot coater (12), and a dryer (13) are also arranged in sequence along its circumference. A workstation (14) is arranged on the turntable platform (1). The turntable platform (1) rotates and drives the workstation (14) from the vision alignment device (11) to the dryer (13). The transmission devices (5) in front of and behind the turntable platform (1) are connected to the workstation (14) at the corresponding positions of the vision alignment device (11) and the dryer (13), respectively. A waste recycling device (21) is also set up next to the vision inspection device (2). The vision inspection device (2) and the waste recycling device (21) are connected by a gripping device (6).

2. The slot-die preparation apparatus for preparing a perovskite layer according to claim 1, characterized in that: At least one of the workstations (14) is arranged sequentially along its circumference on the turntable platform (1).

3. The slot-die preparation apparatus for preparing a perovskite layer according to claim 1, characterized in that: The visual inspection device (2) is an AOI visual inspection device.

4. The slot-die preparation apparatus for preparing a perovskite layer according to claim 1, characterized in that: The cache device (3) is a flower basket.

5. The slot-die preparation apparatus for preparing a perovskite layer according to claim 1, characterized in that: The annealing equipment (4) is a chain annealing furnace or a sintering furnace.

6. The rotary manufacturing apparatus for manufacturing a perovskite layer by slit coating according to claim 1, characterized by: The transmission device (5) is a belt conveyor.

7. The slot-die preparation apparatus for preparing a perovskite layer according to claim 1, characterized in that: The gripping device (6) is a robotic arm.

8. The rotary preparation equipment for preparing perovskite layers by slit coating according to claim 1, characterized in that: The dryer (13) is a vacuum dryer. 9.The rotary apparatus for manufacturing a perovskite layer by a slot-die coating according to claim 1, wherein: A film loading platform (141) is provided on the workstation (14). A suction cup (142) is provided on the surface of the film loading platform (141). The surface of the suction cup (142) is flush with the surface of the film loading platform (141). A lifting rod (143) is provided between the bottom surface of the film loading platform (141) and the turntable platform (1). A rotating shaft (144) is provided between the top of the lifting rod (143) and the bottom surface of the film loading platform (141). The lifting rod (143) and the rotating shaft (144) are controlled by motors respectively. The suction cup (142) is connected to a vacuum system.

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