Recovery system

Abstract

The application discloses a recovery system, which belongs to the technical field of residual liquid recovery and is used for recovering alkyl gallium in a to-be-processed device. The to-be-processed device is provided with a first connecting pipe. The recovery system comprises a recovery device and a pipeline assembly. The recovery device comprises a vacuum pump and a cold trap assembly. The pipeline assembly comprises a first pipeline. The first pipeline connects the first connecting pipe and the cold trap assembly, so that the to-be-processed device, the cold trap assembly and the vacuum pump are communicated along a fluid flow direction. The recovery system comprises a collecting device. The to-be-processed device is provided with a second connecting pipe. The pipeline assembly comprises a second pipeline. The second pipeline is connected with the second connecting pipe. The second pipeline is configured to introduce inert gas into the to-be-processed device, so as to transfer the fluid in the to-be-processed device to the collecting device. By introducing the inert gas into the to-be-processed device through the second pipeline, most of the fluid in the to-be-processed device can be transferred to the collecting device, and the recovery efficiency of the recovery system is improved.

Description

Technical Field

[0001] This application belongs to the field of residual liquid recycling technology, specifically relating to a recycling system. Background Technology

[0002] Currently, organometallic compounds (MO sources, such as trimethylgallium) used in the semiconductor industry are typically transported in steel cylinders. After use, a certain amount of liquid alkylgallium remains on the inner wall and bottom of the cylinders. Due to its high reactivity, flammability upon contact with air, explosiveness upon contact with water, and high value, it must be safely and efficiently recycled.

[0003] In related technologies, the device to be treated is heated, and then a vacuum pump is used to create negative pressure to extract the residual liquid, which is then condensed and recovered through a cold trap assembly. However, relying solely on a vacuum pump and a cold trap assembly for recovery results in low recovery efficiency of the recovery system. Utility Model Content

[0004] One of the objectives of this application is to provide a recycling system that improves the recycling efficiency of the recycling system, thereby at least partially solving the above-mentioned technical problems.

[0005] To achieve the above objectives, this application provides a recycling system for recovering alkyl gallium from a processing device. The processing device has a first connecting pipe, and the recycling system includes:

[0006] The recovery device includes a vacuum pump and a cold trap assembly;

[0007] The piping assembly includes a first pipe that connects a first connecting pipe to a cold trap assembly, so that the device to be processed, the cold trap assembly, and the vacuum pump are connected along the fluid flow direction;

[0008] The recycling system includes a collection device, the device to be treated has a second connecting pipe, the piping assembly includes a second pipe, the second pipe is connected to the second connecting pipe, and the second pipe is configured to introduce an inert gas into the device to be treated in order to transfer the fluid in the device to the collection device.

[0009] The recovery system includes an inert gas source, and the piping assembly includes a third pipeline connected to the inert gas source. The recovery system has a first recovery mode in which the third pipeline is connected to a second pipeline to connect the device to be treated to the inert gas source.

[0010] The piping assembly includes a fourth piping, and the recovery system has a second recovery mode. In the second recovery mode, the second piping is disconnected from the third piping, and the fourth piping connects the second piping to the first piping so that the second connecting pipe is connected to the vacuum pump.

[0011] In one or more embodiments of this application, the piping assembly includes a fifth pipe that, in a first recovery mode, connects the first pipe to the collection device so that fluid in the first pipe flows into the collection device, and in a second recovery mode, disconnects the fifth pipe from the collection device.

[0012] In one or more embodiments of this application, the recovery system includes a storage tank, and the piping assembly includes a sixth pipe and a seventh pipe, the sixth pipe connecting the collection device to a third pipe to connect the collection device to an inert gas source, and the seventh pipe connecting the collection device to the collection device to transfer fluid in the collection device to the storage tank.

[0013] In one or more embodiments of this application, the piping assembly includes an eighth piping, and the recovery system has a displacement mode in which the eighth piping connects the third piping to the first piping to connect the first connecting pipe to an inert gas source; and / or, in the displacement mode, the second piping connects to the third piping to connect the second connecting pipe to an inert gas source.

[0014] In one or more embodiments of this application, the piping assembly includes a gas distribution platform, and a second, third, and fourth pipeline are all connected to the gas distribution platform, which is provided with a leak detection connector.

[0015] In one or more embodiments of this application, the recovery system includes a heat tracing cable configured to heat alkyl gallium within the device to be processed to a preset temperature, which is between 40°C and 60°C, in a second recovery mode.

[0016] In one or more embodiments of this application, the first connecting pipe is configured as a metal flexible tube, the second connecting pipe is configured as a metal flexible tube, the device to be treated includes a steel cylinder to be treated, and a heat tracing cable is wrapped around the steel cylinder to be treated, the first connecting pipe, and the second connecting pipe.

[0017] In one or more embodiments of this application, the cold trap assembly includes a first recovery cold trap and a second recovery cold trap, which are connected in series between the vacuum pump and the first pipeline. In the second recovery mode, the first recovery cold trap and / or the second recovery cold trap connect the first pipeline to the vacuum pump.

[0018] Compared with the prior art, the recycling system of this application introduces inert gas into the device to be treated through a second pipeline, which can transfer most of the fluid in the device to be treated to a collection device, and then the alkyl gallium in the device to be treated is recovered through the recycling device, thereby improving the recycling efficiency of the recycling system. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of fluid flow in a recovery system according to an embodiment of the present application, wherein the recovery system is in a second recovery mode;

[0021] Figure 2 This is a schematic diagram of fluid flow in a recovery system according to an embodiment of the present application, wherein the recovery system is in a first recovery mode;

[0022] Figure 3 This is a schematic diagram of fluid flow in a recovery system according to an embodiment of this application, wherein the recovery system is in displacement mode.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Device to be processed; 11. First connecting pipe; 12. Second connecting pipe; 13. Gas cylinder to be processed;

[0025] 21. Vacuum pump; 22. Cold trap assembly; 221. First recovery cold trap; 222. Second recovery cold trap;

[0026] 31. First pipeline; 32. Second pipeline; 33. Third pipeline; 34. Fourth pipeline; 35. Fifth pipeline; 36. Sixth pipeline; 37. Seventh pipeline; 38. Eighth pipeline; 39. Gas distribution platform; 391. Leak detection connector;

[0027] 4. Collection device;

[0028] 5. Inert gas source. Detailed Implementation

[0029] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0030] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0031] like Figure 1 As shown, this application provides a recycling system for recycling alkyl gallium in a processing device 1, which has a first connecting pipe 11.

[0032] In this embodiment, alkyl gallium can be trimethylgallium liquid.

[0033] In some embodiments, the recycling system includes a recycling device and a piping assembly.

[0034] In some embodiments, the recovery device includes a vacuum pump 21 and a cold trap assembly 22, and the piping assembly includes a first pipe 31 that connects a first connecting pipe 11 to the cold trap assembly 22 so that the device to be processed 1, the cold trap assembly 22, and the vacuum pump 21 are connected along the fluid flow direction.

[0035] In this embodiment, the recovery system (e.g., in the second recovery mode) uses vacuum pump 21 to provide negative pressure, so that the alkyl gallium in the device to be processed 1 enters the cold trap assembly 22 for gas-liquid separation (i.e. condensation), and the unliquefied gas finally flows downstream through vacuum pump 21.

[0036] In some embodiments, in conjunction with reference Figure 2 As shown, the recycling system includes a collection device 4, the device to be treated 1 has a second connecting pipe 12, and the piping assembly includes a second pipe 32 connected to the second connecting pipe 12. The second pipe 32 is configured to introduce an inert gas into the device to be treated 1 to transfer the fluid in the device to be treated 1 to the collection device 4.

[0037] In this embodiment, an inert gas (such as high-purity nitrogen) is introduced into the device 1 to be treated through a second pipeline 32. The gas pressure is used to pre-transfer most of the free alkyl gallium liquid in the device 1 to the collection device 4 under compressed air. This pre-transfer step can quickly remove most of the residual liquid in the device 1, so that the subsequent vacuum pump 21 and cold trap assembly 22 only need to process the remaining adsorbed state and a small amount of liquid, shortening the vacuum extraction time and improving the recovery efficiency of the recovery system.

[0038] Furthermore, by pre-introducing inert gas to achieve alkyl gallium transfer, the amount of fluid subsequently entering the cold trap assembly 22 is reduced, preventing premature blockage or failure of the cold trap due to liquid accumulation. This also reduces the operational burden on the vacuum pump 21 and extends the equipment's lifespan. Because inert gas compressed air transfer is used, the entire process is carried out in a closed pipeline, preventing alkyl gallium from being exposed to air.

[0039] In some embodiments, continue to refer to Figure 2As shown, the recovery system includes an inert gas source 5, and the pipeline assembly includes a third pipeline 33, which is connected to the inert gas source 5. The recovery system has a first recovery mode. In the first recovery mode, the third pipeline 33 is connected to the second pipeline 32 to connect the device to be processed 1 to the inert gas source 5.

[0040] In this embodiment, in the first recovery mode, the third pipeline 33 is connected to the second pipeline 32, and the inert gas in the inert gas source 5 flows controllably into the device to be treated 1 along the third pipeline 33 and the second pipeline 32, realizing directional and quantitative compressed air pre-transfer. The first recovery mode can be enabled and disabled by switching pipelines (e.g., through an automatic valve), providing a clear logical branch for fully automatic program control.

[0041] In some embodiments, continue to refer to Figure 1 As shown, the piping assembly includes a fourth pipe 34. The recovery system has a second recovery mode. In the second recovery mode, the second pipe 32 is disconnected from the third pipe 33, and the fourth pipe 34 connects the second pipe 32 to the first pipe 31 so that the second connecting pipe 12 is connected to the vacuum pump 21.

[0042] In this embodiment, in the second recovery mode, the vacuum pump 21 is not only connected to the first connecting pipe 11 of the device to be treated 1 through the first pipe 31, but also connected to the second connecting pipe 12 through the first pipe 31, the fourth pipe 34, and the second pipe 32. This enables simultaneous vacuuming of both ends of the device to be treated 1, improving the extraction speed of residual gas and vapor. Especially for residual liquid adhering to the bottom and inner wall, dual-channel extraction can form a more uniform negative pressure field, accelerating liquid vaporization and vapor discharge.

[0043] In this embodiment, the second connecting pipe 12 is used for air intake during pre-transfer and for air extraction during vacuum extraction, realizing the reuse of the same connecting pipe. There is no need to open an additional interface on the device to be processed 1, which reduces the cost of gas cylinder modification and also reduces the number of leakage points.

[0044] In this embodiment, by using dual-channel vacuuming, the residual alkyl gallium in the first connecting pipe 11, the second connecting pipe 12, and the pipeline assembly can be completely removed at the end of the second recycling mode. As a result, when the device to be processed 1 is disassembled, there is no liquid residue at the first connecting pipe 11 and the second connecting pipe 12, thus avoiding the risk of combustion and explosion caused by the residue coming into contact with air.

[0045] In some embodiments, the piping assembly includes a fifth conduit 35.

[0046] In some embodiments, continue to refer to Figure 2As shown, in the first recovery mode, the fifth pipe 35 connects the first pipe 31 to the collection device 4 so that the fluid in the first pipe 31 flows into the collection device 4.

[0047] In this embodiment, under the first recovery mode, the fifth pipeline 35 connects the first pipeline 31 to the collection device 4. The alkyl gallium liquid that is forced out by the inert gas in the device to be processed 1 flows smoothly into the collection device 4 through the first pipeline 31 and the fifth pipeline 35, forming a complete liquid transfer channel and preventing the liquid from accumulating in the pipeline.

[0048] In some embodiments, continue to refer to Figure 1 As shown, in the second recycling mode, the fifth pipeline 35 is disconnected from the collection device 4.

[0049] In this embodiment, in the second recovery mode, the fifth pipeline 35 is disconnected from the collection device 4, which effectively prevents the vacuum pump 21 from causing negative pressure suction on the collection device 4 when it pumps air, avoids the liquid in the collection device 4 from being sucked back into the first pipeline 31 or the cold trap assembly 22, and also ensures the stability of the negative pressure of the system during vacuum extraction, thereby improving the extraction effect.

[0050] In this embodiment, the path separation or merging of the pre-transfer liquid and the vacuum extraction condensate liquid is realized by controlling the on / off state of the fifth pipeline 35. This can be flexibly configured as needed to avoid the recovered liquid being contaminated again.

[0051] In some embodiments, the recycling system includes a storage tank (not shown in the figure).

[0052] In some embodiments, continue to refer to Figure 1 and Figure 2 As shown, the piping assembly includes a sixth pipe 36 and a seventh pipe 37.

[0053] In some embodiments, the sixth conduit 36 ​​connects the collection device 4 to the third conduit 33 to connect the collection device 4 to the inert gas source 5.

[0054] In some embodiments, the seventh conduit 37 is connected to the collection device 4 to transfer fluid within the collection device 4 to a storage tank.

[0055] In this embodiment, when the alkyl gallium liquid in the collecting device 4 reaches a certain amount, inert gas is introduced through the sixth pipeline 36 (sharing the third pipeline 33 and the inert gas source 5) to pressurize the inside of the collecting device 4, causing the liquid to be forced out from the bottom through the seventh pipeline 37 to the storage tank. This process does not require disassembling the collecting device 4 or additional pumping equipment, and automatic emptying can be achieved using the existing inert gas source 5, improving continuous operation capability.

[0056] For example, when the alkyl gallium liquid is discharged from the treatment device 1 and the collection device 4, a bottom insertion method can be used (e.g., the pipe extends into the bottom of the device). Inert gas enters from the top and the liquid is discharged from the bottom. The discharge is thorough and leaves no residue. The discharge process is also closed and safe.

[0057] For example, the evacuation operation can be completed automatically by switching valves, reducing the chance of operators coming into contact with alkyl gallium and improving safety.

[0058] In some embodiments, in conjunction with reference Figure 3 As shown, the piping assembly includes an eighth piping 38, and the recycling system has a replacement mode.

[0059] In some embodiments, during the displacement mode, the eighth conduit 38 connects the third conduit 33 to the first conduit 31 so that the first connecting pipe 11 is connected to the inert gas source 5.

[0060] In some embodiments, during the displacement mode, the second conduit 32 is connected to the third conduit 33 so that the second connecting pipe 12 is connected to the inert gas source 5.

[0061] In this embodiment, after the second recovery mode (i.e., vacuum extraction) is completed, trace amounts of alkyl gallium vapor may still remain in the device to be treated 1 and the piping assembly. Through the replacement mode, inert gas can be introduced into the device to be treated 1 from the first connecting pipe 11 and / or the second connecting pipe 12 to replace and discharge the residual vapor. Combined with vacuuming again, it can be ensured that the alkyl gallium content in the device to be treated 1 and the piping assembly is reduced to below the safe threshold.

[0062] In this embodiment, the device to be processed 1 (e.g., the gas cylinder to be processed) and the first connecting pipe 11 and the second connecting pipe 12 after being processed by the replacement mode have no flammable or explosive gas residue inside, and will not spontaneously combust or explode during disassembly, thus ensuring the safety of operators.

[0063] For example, inflation can be selected through the first connecting tube 11 only, the second connecting tube 12 only, or both the first and second connecting tubes 11 and 12 simultaneously, to adapt to different replacement needs. For instance, simultaneous inflation of both tubes is more efficient when rapid replacement is required; single-tube inflation can be selected when protecting a particular connecting tube.

[0064] In some embodiments, continue to refer to Figure 1 , Figure 2 and Figure 3 As shown, the piping assembly includes a gas distribution platform 39, and the second pipeline 32, the third pipeline 33 and the fourth pipeline 34 are all connected to the gas distribution platform 39. The gas distribution platform 39 is equipped with a leak detection connector 391.

[0065] In this embodiment, multiple pipelines (such as the second pipeline 32, the third pipeline 33 and the fourth pipeline 34) are centrally connected through the gas distribution platform 39. An internal switching valve is provided, which can quickly switch between the first recovery mode, the second recovery mode and the replacement mode, avoiding pipeline clutter and manual disassembly.

[0066] In this embodiment, the gas distribution platform 39 is equipped with a leak detection connector 391, which can be used to install a helium mass spectrometer leak detector. After system pretreatment and each connection of the device to be treated 1, the entire pipeline assembly can be checked for leaks using helium mass spectrometry through the leak detection connector 391 to ensure that the system is leak-free.

[0067] In this embodiment, the gas distribution platform 39 is an independent module, which facilitates manufacturing, testing and maintenance, and also facilitates docking with external equipment (such as helium mass spectrometer leak detectors and control systems).

[0068] In some embodiments, the recycling system includes a heat tracing cable (not shown) configured to heat the alkyl gallium in the device to be treated to a preset temperature between 40°C and 60°C during a second recycling mode.

[0069] In this embodiment, alkyl gallium (e.g., trimethylgallium) has high viscosity and poor flowability at room temperature. After being heated to 40-60°C, its viscosity decreases significantly, making it easier for the liquid to detach from the inner wall and bottom of the device to be treated (e.g., the steel cylinder to be treated) and flow under negative pressure.

[0070] In this embodiment, within the temperature range of 40-60°C, the vapor pressure of alkyl gallium (e.g., trimethylgallium) is significantly increased, making it easier for liquid molecules to vaporize into vapor, which can then be efficiently extracted by the vacuum pump 21. This avoids the problem of excessively long extraction time or incomplete extraction due to excessively low vapor pressure.

[0071] For example, in the second recovery mode, the combined effect of heating and vacuum negative pressure allows even residual liquid adsorbed on the inner wall of the device to be treated to be vaporized and extracted, significantly improving the recovery rate.

[0072] In some embodiments, continue to refer to Figure 1 As shown, the first connecting pipe 11 is configured as a metal flexible tube, the second connecting pipe 12 is configured as a metal flexible tube, the device to be treated 1 includes a steel cylinder to be treated 13, and the heat tracing cable is wrapped around the steel cylinder to be treated 13, the first connecting pipe 11 and the second connecting pipe 12.

[0073] In this embodiment, both the first connecting pipe 11 and the second connecting pipe 12 are flexible metal hoses, which can be conveniently connected to the gas cylinder 13 to be treated and the first pipe 31 and the second pipe 32 in confined spaces such as glove boxes or gas cylinder cabinets. At the same time, the metal hoses are pressure-resistant and corrosion-resistant, making them suitable for the active environment of alkyl gallium.

[0074] In this embodiment, the heat tracing cable is simultaneously wrapped around the gas cylinder 13 to be treated and the two metal hoses (i.e., the first connecting pipe 11 and the second connecting pipe 12), so that the entire fluid path from the inside of the gas cylinder 13 to the two connecting pipes (i.e., the first connecting pipe 11 and the second connecting pipe 12) is heated. This not only promotes the vaporization of the residual liquid in the gas cylinder 13, but also ensures that no liquid alkyl gallium remains in the first connecting pipe 11 and the second connecting pipe 12 due to condensation.

[0075] In this embodiment, after heating, the residual alkyl gallium in the first connecting pipe 11 and the second connecting pipe 12 is completely vaporized and removed by the vacuum pump. During disassembly, the inside of the first connecting pipe 11 and the second connecting pipe 12 is dry and without residue, thus avoiding the possibility of combustion and explosion caused by the residue coming into contact with air at the moment of disassembly.

[0076] For example, the gas cylinder 13 to be treated, the first connecting pipe 11, and the second connecting pipe 12 can be installed and disassembled as a whole, and the heat tracing cable can be removed or rewound together, making the operation convenient.

[0077] In some embodiments, continue to refer to Figure 1 As shown, the cold trap assembly 22 includes a first recovery cold trap 221 and a second recovery cold trap 222, which are connected in series between the vacuum pump 21 and the first pipeline 31.

[0078] In this embodiment, both the first recovery cold trap 221 and the second recovery cold trap 222 are filled with liquid nitrogen and maintained at a temperature of -196°C. Alkyl gallium vapor passes sequentially through the first recovery cold trap 221 and the second recovery cold trap 222, rapidly condensing into liquid at the lower temperature. The two-stage series design ensures that even if a small amount of vapor escapes from the first recovery cold trap 221, the second recovery cold trap 222 can capture it, thereby achieving an extremely high recovery rate.

[0079] In some embodiments, in the second recovery mode, the first recovery cold trap 221 and / or the second recovery cold trap 222 connect the first pipeline 31 to the vacuum pump 21.

[0080] In this embodiment, depending on actual needs, one recycling cold trap can be used (e.g., when the processing volume is small) or two recycling cold traps can be used in series (when the processing volume is large or an ultra-high recovery rate is required). When one recycling cold trap needs defrosting or maintenance, the other recycling cold trap can continue to work independently without affecting the operation of the recycling system.

[0081] In this embodiment, the cold trap assembly 22 is located upstream of the vacuum pump 21, which effectively prevents alkyl gallium vapor from entering the vacuum pump 21, avoids contamination of the vacuum pump oil or corrosion of the pump body, and extends the service life of the vacuum pump.

[0082] In this embodiment, non-condensable inert gases (such as nitrogen) are not condensed in the recovery cold trap and are discharged by a vacuum pump, while alkyl gallium liquid is collected and flows into the collection device 4, thus achieving efficient gas-liquid separation.

[0083] For example, the operation of a recycling system includes at least the following steps:

[0084] Step S1: System Preparation. Connect the first connecting pipe 11 of the gas cylinder 13 to be treated to the cold trap assembly 22 and the vacuum pump 21 via the first pipe 31. Connect the second connecting pipe 12 to the inert gas source 5 via the second pipe 32. Wrap a heat tracing cable around the gas cylinder 13 to be treated, the first connecting pipe 11, and the second connecting pipe 12. The recovery system passes the helium mass spectrometry leak test.

[0085] Step S2, First Recovery Mode (i.e., Nitrogen Compressed Air Pre-transfer). For example... Figure 2 As shown, the third pipe 33 is connected to the second pipe 32. Inert gas (i.e., nitrogen) enters the top of the steel cylinder 13 to be treated through the third pipe 33 and the second pipe 32, forcing most of the liquid alkyl gallium in the steel cylinder 13 into the collecting device 4 through the first pipe 31 and the fifth pipe 35. At this time, the fifth pipe 35 is connected to the collecting device 4, the second pipe 32 is disconnected from the fourth pipe 34, and the second pipe 32 is not connected to the vacuum pump 21.

[0086] Step S3, the second recovery mode (i.e., heating, vacuum extraction, and condensation). For example... Figure 1 As shown, the system switches to the second recovery mode: the second pipeline 32 is disconnected from the third pipeline 33, and the fourth pipeline 34 connects the second pipeline 32 to the first pipeline 31, so that the second connecting pipe 12 is also connected to the vacuum pump 21; the fifth pipeline 35 is disconnected from the collection device 4. The heating cable heats the gas cylinder 13 to be treated, the first connecting pipe 11, and the second connecting pipe 12 to 40-60°C. The vacuum pump 21 simultaneously draws a vacuum through the first pipeline 31 (connected to the first connecting pipe 11) and the first pipeline 31, the fourth pipeline 34, and the second pipeline 32 (connected to the second connecting pipe 12), extracting the residual alkyl gallium vapor. The vapor is condensed into liquid in the first recovery cold trap 221 and the second recovery cold trap 222 (containing liquid nitrogen at -196°C) and flows into the collection device 4.

[0087] Step S4, Displacement Mode. After vacuum extraction is complete, disconnect the first pipeline 31 from the vacuum pump 21. (Example:) Figure 3 As shown, switch to replacement mode: the eighth pipe 38 connects the third pipe 33 to the first pipe 31, so that the first connecting pipe 11 is connected to the inert gas source 5; at the same time, the second pipe 32 connects to the third pipe 33, so that the second connecting pipe 12 is also connected to the inert gas source 5. Nitrogen gas is filled into the cylinder, and then a vacuum is drawn. This process is repeated several times to complete the inert gas replacement.

[0088] Step S5: Emptying the collection device 4. When the liquid in the collection device 4 reaches a certain amount, nitrogen gas is introduced through the sixth pipeline 36 (via the third pipeline 33) to pressurize the collection device 4, so that the liquid is pressed into the storage tank through the seventh pipeline 37.

[0089] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0090] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0091] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0092] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A recycling system, characterized in that, The recovery system is used to recover alkyl gallium from the device to be processed, the device to be processed having a first connecting pipe, and the recovery system includes: The recovery device includes a vacuum pump and a cold trap assembly; A piping assembly includes a first piping that connects the first connecting pipe to the cold trap assembly, so that the device to be processed, the cold trap assembly, and the vacuum pump are connected along the fluid flow direction. The recycling system includes a collection device, the device to be treated has a second connecting pipe, the piping assembly includes a second pipe, the second pipe is connected to the second connecting pipe, and the second pipe is configured to introduce an inert gas into the device to be treated in order to transfer the fluid in the device to the collection device. The recovery system includes an inert gas source, the pipeline assembly includes a third pipeline connected to the inert gas source, and the recovery system has a first recovery mode in which the third pipeline is connected to a second pipeline to connect the device to be processed to the inert gas source. The piping assembly includes a fourth piping, and the recycling system has a second recycling mode. In the second recycling mode, the second piping is disconnected from the third piping, and the fourth piping connects the second piping to the first piping so that the second connecting pipe is connected to the vacuum pump.

2. The recycling system as described in claim 1, characterized in that, The piping assembly includes a fifth pipe that connects the first pipe to the collection device in the first recovery mode, so that fluid in the first pipe flows into the collection device. In the second recovery mode, the fifth pipe is disconnected from the collection device.

3. The recycling system as described in claim 1, characterized in that, The recovery system includes a storage tank, and the piping assembly includes a sixth pipe and a seventh pipe. The sixth pipe connects the collection device to the third pipe to connect the collection device to the inert gas source, and the seventh pipe connects to the collection device to transfer the fluid in the collection device to the storage tank.

4. The recycling system as described in claim 1, characterized in that, The piping assembly includes an eighth piping line, and the recovery system has a displacement mode in which the eighth piping line connects the third piping line to the first piping line, thereby connecting the first connecting pipe to the inert gas source; and / or, In the displacement mode, the second pipeline is connected to the third pipeline so that the second connecting pipe is connected to the inert gas source.

5. The recycling system as described in claim 1, characterized in that, The piping assembly includes a gas distribution platform, and the second, third, and fourth pipelines are all connected to the gas distribution platform. The gas distribution platform is equipped with a leak detection connector.

6. The recycling system as described in claim 1, characterized in that, The recycling system includes a heat tracing cable, which is configured to heat the alkyl gallium inside the device to be processed to a preset temperature between 40°C and 60°C during the second recycling mode.

7. The recycling system as described in claim 6, characterized in that, The first connecting pipe is configured as a metal flexible tube, the second connecting pipe is configured as a metal flexible tube, the device to be treated includes a steel cylinder to be treated, and the heat tracing cable is wrapped around the steel cylinder to be treated, the first connecting pipe and the second connecting pipe.

8. The recycling system as described in claim 1, characterized in that, The cold trap assembly includes a first recovery cold trap and a second recovery cold trap, which are connected in series between the vacuum pump and the first pipeline. In the second recovery mode, the first recovery cold trap and / or the second recovery cold trap connect the first pipeline to the vacuum pump.

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