Hydrofluoric acid filtering device and solar cell production equipment

Abstract

This utility model relates to a hydrofluoric acid filtration device and solar cell production equipment. The hydrofluoric acid filtration device includes a filtration pipe, a filter element, a circulation pipe, and a cleaning pipe. The filtration pipe includes an inlet and an outlet spaced apart, and a receiving portion communicating with the inlet and outlet. The filter element is housed in the receiving portion, with at least a portion of the filter element located between the inlet and outlet. The circulation pipe includes an acid inlet pipe and an acid outlet pipe communicating with the inlet and outlet, respectively. The cleaning pipe includes a water inlet pipe and a water outlet pipe communicating with the receiving portion. By providing a cleaning pipe, pure water can be introduced to rinse the filter element, achieving automatic rinsing of the filter element without disassembly, thus improving the service life of the hydrofluoric acid filtration device and the production efficiency and quality of solar cells. Furthermore, before disassembling, replacing, or repairing the hydrofluoric acid filtration device, pure water can be introduced to drain the hydrofluoric acid, avoiding its impact on operators and the environment.

Description

Technical Field

[0001] This utility model relates to the field of solar cell production technology, and in particular to a hydrofluoric acid filtration device and solar cell production equipment. Background Technology

[0002] In the production of solar cells, hydrofluoric acid is used to clean the solar cells or to etch away the glass layer formed after texturing and diffusion. To ensure the purity of the hydrofluoric acid and prevent impurities from contaminating the solar cells, a hydrofluoric acid filtration device is required. However, existing hydrofluoric acid filtration devices suffer from short filter lifespans, reducing the production efficiency and quality of solar cells. Utility Model Content

[0003] Therefore, it is necessary to provide a hydrofluoric acid filtration device and solar cell production equipment that improve upon the aforementioned defects, addressing the problem of short service life of existing hydrofluoric acid filtration devices.

[0004] This application provides a hydrofluoric acid filtration device, the hydrofluoric acid filtration device comprising:

[0005] A filter pipe includes an inlet and an outlet spaced apart, the filter pipe is hollow to form a receiving part, and the inlet and outlet are connected to the receiving part;

[0006] A filter element is housed in the receiving portion, and the filter element is at least partially located between the liquid inlet and the liquid outlet;

[0007] The circulation pipeline includes an acid inlet pipeline and an acid outlet pipeline respectively connected to the liquid inlet and the liquid outlet.

[0008] The cleaning pipe includes an inlet pipe and an outlet pipe that are connected to the receiving part.

[0009] By setting up inlet and outlet water pipes connected to the containment section, on the one hand, pure water can be introduced through the inlet water pipe to rinse the filter element, achieving automatic rinsing of the filter element without disassembly, thus ensuring the filtration effect of the filter element on hydrofluoric acid, thereby improving the service life of the hydrofluoric acid filtration device and the production efficiency and quality of solar cells; on the other hand, before disassembling, replacing or repairing the hydrofluoric acid filtration device, the hydrofluoric acid in the hydrofluoric acid filtration device can be discharged through the inlet water pipe, avoiding the impact of hydrofluoric acid on operators and the environment.

[0010] In some embodiments, the hydrofluoric acid filtration device further includes an end cap, which is removably disposed at one end of the filtration pipe.

[0011] In some embodiments, the liquid outlet is located at the other end of the filter pipe, and the liquid inlet is located on the pipe wall of the filter pipe near the end cap.

[0012] In some embodiments, the hydrofluoric acid filtration device further includes valves, the valves including a first valve, a second valve, a third valve and a fourth valve respectively disposed on the acid inlet pipe, the acid outlet pipe, the water inlet pipe and the water outlet pipe.

[0013] In some embodiments, the water inlet pipe and the water outlet pipe are respectively connected to the liquid inlet and the liquid outlet.

[0014] In some embodiments, the hydrofluoric acid filtration device further includes connecting pipes, the connecting pipes including a first connecting pipe and a second connecting pipe respectively connected to the liquid inlet and the liquid outlet, the acid inlet pipe and the water inlet pipe being connected to the first connecting pipe, and the acid outlet pipe and the water outlet pipe being connected to the second connecting pipe.

[0015] In some embodiments, the hydrofluoric acid filtration device further includes a circulation pump disposed in the acid inlet pipe.

[0016] In another aspect, this application provides a solar cell manufacturing apparatus, the solar cell manufacturing apparatus comprising:

[0017] The above-mentioned hydrofluoric acid filtration device; and

[0018] A hydrofluoric acid container tank, wherein the acid inlet pipe and the acid outlet pipe are respectively connected to the hydrofluoric acid container tank.

[0019] In some embodiments, the hydrofluoric acid container includes a main tank and a secondary tank. The side wall of the main tank is provided with an overflow hole, which connects the main tank and the secondary tank. The acid inlet pipe and the acid outlet pipe are respectively connected to the secondary tank and the main tank.

[0020] In some embodiments, the acid outlet pipe includes multiple branch pipes, which are connected to the bottom wall of the main tank.

[0021] In some embodiments, the hydrofluoric acid containment tank is an etching tank, and the solar cell manufacturing equipment further includes a conveyor disposed in the etching tank.

[0022] In some embodiments, the solar cell manufacturing equipment includes two hydrofluoric acid containment tanks, which are respectively the etching tank and the cleaning tank, and the cleaning tank is located upstream of the etching tank. Attached Figure Description

[0023] Figure 1This is a schematic diagram of the hydrofluoric acid filtration device in an embodiment of the present invention;

[0024] Figure 2 for Figure 1 The main view;

[0025] Figure 3 for Figure 1 The right view;

[0026] Figure 4 for Figure 3 Sectional view along AA;

[0027] Figure 5 This is a schematic diagram of the structure of the solar cell production equipment in this embodiment of the present invention;

[0028] Figure 6 for Figure 5 The main view;

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. Hydrofluoric acid filtration device; 11. Filter pipe, 111 inlet, 112 outlet, 113 receiving part; 12. Filter element; 13. Circulation pipe, 131 acid inlet pipe, 132 acid outlet pipe; 14. Cleaning pipe, 141 water inlet pipe, 142 water outlet pipe; 15. End cap; 16. Valves, 161 first valve, 162 second valve, 163 third valve, 164 fourth valve; 17. Connecting pipe, 171 first connecting pipe, 172 second connecting pipe; 18. Circulation pump;

[0031] 2 Hydrofluoric acid containment tank, 21 Main tank, 211 Overflow hole, 22 Auxiliary tank;

[0032] 3. Conveying components;

[0033] 4 solar cells;

[0034] 5 etching grooves;

[0035] 6. Cleaning tank. Detailed Implementation

[0036] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0042] To better understand the embodiments of this application, the following is combined with... Figures 1 to 6 The embodiments of this application will be described in detail.

[0043] like Figures 1 to 4 As shown, this application provides a hydrofluoric acid filtration device 1, including a filtration pipe 11, a filter element 12, a circulation pipe 13, and a cleaning pipe 14. The filtration pipe 11 includes an inlet 111 and an outlet 112 spaced apart, and is hollow to form a receiving portion 113. The inlet 111 and outlet 112 are connected to the receiving portion 113. The filter element 12 is housed in the receiving portion 113, and at least partially located between the inlet 111 and outlet 112. The circulation pipe 13 includes an acid inlet pipe 131 and an acid outlet pipe 132 respectively connected to the inlet 111 and outlet 112. The cleaning pipe 14 includes a water inlet pipe 141 and a water outlet pipe 142 connected to the receiving portion 113.

[0044] The filter pipe 11 includes an inlet 111, an outlet 112, and a receiving portion 113. The inlet 111 and outlet 112 are through holes in the filter pipe 11, allowing communication between the hollow receiving portion 113 and the outside environment. The inlet 111 and outlet 112 can be regular shapes such as circles or squares, or irregular shapes composed of straight lines and / or curves; this embodiment does not impose such limitations. The hollow receiving portion 113 of the filter pipe 11 allows the filter element 12 to pass through, thus achieving the filtration function of hydrofluoric acid. Furthermore, the inlet 111 and outlet 112 are spaced apart, ensuring that the hydrofluoric acid has a certain flow distance within the filter pipe 11, thereby ensuring that the hydrofluoric acid can pass evenly through the filter element 12 and achieving the filtration function of hydrofluoric acid.

[0045] The filter element 12 is housed in the receiving section 113 and can intercept impurities in the hydrofluoric acid flowing through the receiving section 113, thereby achieving the filtration function of hydrofluoric acid. The filter element 12 is at least partially located between the inlet 111 and the outlet 112, so that the hydrofluoric acid flowing from the inlet 111 to the outlet 112 can be filtered by the filter element 12. Specifically, during the filtration process, hydrofluoric acid flows into the receiving section 113 from the inlet 111, is filtered by the filter element 12 in the receiving section 113, and is discharged from the filter pipe 11 from the outlet 112.

[0046] The acid inlet pipe 131 is connected to the liquid inlet 111, which allows hydrofluoric acid to be passed into the filter pipe 11 for filtration. The acid outlet pipe 132 is connected to the liquid outlet 112, which allows the filtered hydrofluoric acid to be passed into cleaning parts, etching parts and other working machines.

[0047] The cleaning pipe 14 includes an inlet pipe 141 and an outlet pipe 142. Since the inlet pipe 141 and outlet pipe 142 are respectively connected to the receiving section 113, pure water can be introduced into the receiving section 113 through the inlet pipe 141 to flush the filter element 12 inside the receiving section 113, ensuring the filtration capacity of the filter element 12. The outlet pipe 142 can collect and treat the used pure water, preventing environmental pollution caused by hydrofluoric acid and impurities mixed in the pure water. In addition, by setting up the inlet pipe 141 and outlet pipe 142 connected to the receiving section 113, the hydrofluoric acid solution in the filter pipe 11 can also be drained, ensuring an acid-free state during disassembly, replacement, or maintenance of the filter pipe 11, preventing hydrofluoric acid from affecting personnel health and the environment.

[0048] By providing an inlet pipe 141 and an outlet pipe 142 connected to the receiving part 113, on the one hand, pure water can be introduced to rinse the filter element 12, achieving automatic rinsing of the filter element 12 without disassembly, thus ensuring the filtration effect of the filter element 12 on hydrofluoric acid, thereby improving the service life of the hydrofluoric acid filtration device 1 and the production efficiency and quality of solar cells; on the other hand, before disassembling, replacing or repairing the hydrofluoric acid filtration device 1, the hydrofluoric acid in the hydrofluoric acid filtration device 1 can be discharged through the pure water introduced through the inlet pipe 141, avoiding the impact of hydrofluoric acid on operators and the environment.

[0049] like Figures 1 to 4 As shown, in some embodiments, the hydrofluoric acid filtration device 1 further includes an end cap 15, which is removably disposed at one end of the filtration pipe 11.

[0050] The end cap 15 is detachably covered at one end of the filter pipe 11. Specifically, the end cap 15 can be detachably covered at the end of the filter pipe 11 by means of threads, or it can be detachably covered at the end of the filter pipe 11 by means of bolts or buckles. This application embodiment does not limit this.

[0051] By providing a detachable end cap 15, the filter element 12 inside the filter pipe 11 can be quickly replaced. Specifically, when the filter element 12 reaches the end of its service life or needs to be replaced with a filter element of a different material or pore size, the hydrofluoric acid in the filter pipe 11 can be replaced with pure water through the cleaning pipe 14. Then, the end cap 15 can be removed to replace the filter element 14. This avoids the impact of hydrofluoric acid on operators and the environment, and also enables quick replacement of the filter element. In addition, by detachably covering one end of the filter pipe 11 with the end cap 15, the filter element 12 inside the filter pipe 11 can be periodically removed for cleaning, thereby improving the cleaning effect of the filter element 12 and the production quality of the solar cell 4.

[0052] like Figure 1 , 2 As shown in Figure 4, in some embodiments, the outlet 112 is located at the other end of the filter pipe 11, and the inlet 111 is located on the pipe wall of the filter pipe 11 near the end cap 15.

[0053] The inlet 111 is located on the pipe wall of the filter pipe 11 near the end cap 15, while the outlet 112 is located at the other end of the filter pipe 11 away from the end cap 15. This maximizes the distance between the inlet 111 and the outlet 112, so that the filter element 12 is completely between the inlet 111 and the outlet 112, thereby improving the filtration effect of hydrofluoric acid.

[0054] like Figure 1 , 2 As shown in Figure 4, in some embodiments, the hydrofluoric acid filtration device 1 further includes valves 16, which include a first valve 161, a second valve 162, a third valve 163, and a fourth valve 164 respectively disposed on the acid inlet pipe 131, the acid outlet pipe 132, the water inlet pipe 141, and the water outlet pipe 142.

[0055] Valve 16 refers to a component used to control the opening and closing of the pipeline. Specifically, valve 16 can be a solenoid valve, hydraulic valve, pneumatic valve, etc., and this application embodiment does not limit this. A first valve 161, a second valve 162, a third valve 163, and a fourth valve 164 are respectively installed in the acid inlet pipeline 131, acid outlet pipeline 132, water inlet pipeline 141, and water outlet pipeline 142. These valves can be used to control the flow rate of hydrofluoric acid in the circulation pipeline 13 and the flow rate of pure water in the cleaning pipeline 14, respectively, to meet different usage requirements. In addition, the valve 16 can also switch the hydrofluoric acid filtration device 1 between two working states: filtration and filter element 12 cleaning.

[0056] Specifically, when cleaning or replacing filter element 12 is required, close the first valve 161 and the second valve 162, and open the third valve 163 and the fourth valve 164. This blocks the flow of hydrofluoric acid into the filter pipe 11 while simultaneously introducing pure water into the filter pipe 11. The pure water is used to drain the hydrofluoric acid from the filter pipe 11, and the water pressure is used to flush the filter element 12, removing impurities and improving its filtration efficiency. Alternatively, if filter element replacement is required, pure water is used to drain the hydrofluoric acid from the filter pipe 11, creating an acid-free environment during replacement and ensuring operator safety. After cleaning or replacing filter element 12, close the third valve 163 and the fourth valve 164, and open the first valve 161 and the second valve 162. This cuts off the pure water supply while introducing hydrofluoric acid into the filter pipe 11, allowing the hydrofluoric acid to be filtered by the filter element 12 and returned to the machine through the acid outlet channel 132.

[0057] In some embodiments, the hydrofluoric acid filtration device 1 further includes a control element for controlling the opening and closing time and opening degree of the first valve 161, the second valve 162, the third valve 163 and the fourth valve 164.

[0058] Specifically, when the filter element 12 needs cleaning or replacement, the control unit closes the first valve 161 and opens the third valve 163, allowing pure water to flow into the filter pipe 11 to discharge residual hydrofluoric acid into the acid outlet pipe 132. Then, the control unit closes the second valve 162 and opens the fourth valve 164, allowing pure water to drain from the water outlet pipe 142 while simultaneously flushing the filter element 12 using the water pressure. After cleaning, the third valve 163 is closed and the first valve 161 is opened, allowing hydrofluoric acid from the acid inlet pipe 131 to flow into the filter pipe 11, and the pure water in the filter pipe 11 to drain from the water outlet pipe. Then, the fourth valve 164 is closed and the second valve 162 is opened, allowing hydrofluoric acid to be introduced into the working machine through the acid outlet pipe 132. In this way, during the replacement or cleaning of the filter element 12, residual hydrofluoric acid in the filter pipe 11 can be discharged into the acid outlet pipe 132 for recycling, reducing hydrofluoric acid consumption and lowering production costs.

[0059] like Figure 1 , 2 As shown in Figure 4, in some embodiments, the water inlet pipe 141 and the water outlet pipe 142 are respectively connected to the liquid inlet 111 and the liquid outlet 112.

[0060] The inlet pipe 141 and the outlet pipe 142 are respectively connected to the liquid inlet 111 and the liquid outlet 112. That is, the acid inlet pipe 131 and the water inlet pipe 141 are both connected to the container 113 through the liquid inlet 111, while the acid outlet pipe 132 and the water outlet pipe 142 are both connected to the container 113 through the liquid outlet 112. In this way, the structure of the filter pipe 11 can be simplified, and the strength of the filter pipe 11 can be avoided by having too many openings on the filter pipe 11.

[0061] like Figures 1 to 4 As shown, in some embodiments, the hydrofluoric acid filtration device 1 further includes a connecting pipe 17, which includes a first connecting pipe 171 and a second connecting pipe 172 respectively connected to the inlet 111 and the outlet 112. The acid inlet pipe 131 and the water inlet pipe 141 are connected to the first connecting pipe 171, and the acid outlet pipe 132 and the water outlet pipe 142 are connected to the second connecting pipe 172.

[0062] The first connecting pipe 171 and the second connecting pipe 172 are tee pipes. The three ports of the first connecting pipe 171 are respectively connected to the acid inlet pipe 131, the water inlet pipe 141 and the liquid inlet 111, so that hydrofluoric acid and pure water can flow into the receiving part 113 through the first connecting pipe 171. Similarly, the three ports of the second connecting pipe 172 are respectively connected to the acid outlet pipe 132, the water outlet pipe 142 and the liquid outlet 112, so that the filtered hydrofluoric acid and the used pure water can be discharged from the filter pipe 11 through the second connecting pipe 172.

[0063] By setting up the first connecting pipe 171 and the second connecting pipe 172, the pipeline structure and pipe connection position of the hydrofluoric acid filter device 1 can be simplified, thereby reducing the risk of pipeline leakage and reducing the installation and maintenance costs of the pipeline.

[0064] like Figure 1 , 2 As shown in Figures 4 and 5, in some embodiments, the hydrofluoric acid filtration device 1 further includes a circulation pump 18 disposed in the acid inlet pipe 131.

[0065] The circulation pump 18 has the function of regulating the flow rate of hydrofluoric acid. By setting the circulation pump 18 in the acid inlet pipe 131, hydrofluoric acid can be pumped into the filter pipe 11 with power, so as to realize the automatic filtration of hydrofluoric acid.

[0066] like Figure 5 and Figure 6 In another aspect, this application provides a solar cell manufacturing apparatus, which includes a hydrofluoric acid filtration device 1 and a hydrofluoric acid storage tank 2. An acid inlet pipe 131 and an acid outlet pipe 132 are respectively connected to the hydrofluoric acid storage tank 2.

[0067] The hydrofluoric acid container 2, which is a tank for storing hydrofluoric acid, can be used to clean or etch the solar cells 4.

[0068] The acid inlet pipe 13 is connected to the hydrofluoric acid container tank 2, which can introduce the hydrofluoric acid in the hydrofluoric acid container tank 2 into the hydrofluoric acid filter device 1, thereby achieving the filtration of hydrofluoric acid; at the same time, the acid outlet pipe 132 is connected to the hydrofluoric acid container tank 2, which can lead the filtered hydrofluoric acid back into the hydrofluoric acid container tank 2, ensuring the purity of the hydrofluoric acid stored in the hydrofluoric acid container tank 2, thereby ensuring the production quality of the solar cell 4.

[0069] By setting up a hydrofluoric acid filtration device 1, the hydrofluoric acid in the hydrofluoric acid storage tank 2 can be filtered to ensure the purity of the hydrofluoric acid stored in the hydrofluoric acid storage tank 2, thereby ensuring the production quality of the solar cell 4.

[0070] like Figure 5 As shown, in some embodiments, the hydrofluoric acid containing tank 2 includes a main tank 21 and a secondary tank 22. The side wall of the main tank 21 is provided with an overflow hole 211, which connects the main tank 21 and the secondary tank 22. The acid inlet pipe 131 and the acid outlet pipe 132 are respectively connected to the secondary tank 22 and the main tank 21.

[0071] The hydrofluoric acid container 2 includes a main tank 21 and a secondary tank 22. The main tank 21 is used for cleaning, etching, and other processes of the solar cells 4, while the secondary tank 22 is used to buffer the hydrofluoric acid. The main tank 21 and the secondary tank 22 are connected by an overflow hole 211. The secondary tank 22 is connected to the filter pipe 11 by an acid inlet pipe 131, and the filter pipe 11 is connected to the main tank by an acid outlet pipe 132. Specifically, the hydrofluoric acid and impurities in the main tank 21 overflow from the overflow hole 211 into the secondary tank 22. Subsequently, the hydrofluoric acid and impurities in the secondary tank 22 flow into the container 113 through the acid inlet pipe 131, where the impurities in the hydrofluoric acid are filtered out by the filter element 12. The filtered hydrofluoric acid then flows back into the main tank 21 through the acid outlet pipe 132, realizing automatic circulation filtration of the hydrofluoric acid in the main tank 21 and improving the production quality of the solar cells 4.

[0072] like Figure 6 As shown, in some embodiments, the acid outlet pipe 132 includes multiple branch pipes, which are connected to the bottom wall of the main tank 21.

[0073] The acid outlet pipe 132 includes multiple branch pipes, through which the filtered hydrofluoric acid can flow back to the main tank 21 through multiple locations on the bottom wall. On the one hand, this ensures that the filtered hydrofluoric acid is evenly distributed in the main tank 21, ensuring the uniformity of the production of solar cells 4; on the other hand, the multiple branch pipes connected to the main tank 21 can ensure that the hydrofluoric acid at multiple locations in the main tank 21 is circulated, ensuring the uniformity of hydrofluoric acid circulation and the thoroughness of filtration.

[0074] Multiple branch pipes are connected to the bottom wall of the main tank 21, meaning that the filtered hydrofluoric acid is introduced to the bottom of the main tank 21 through multiple branch pipes. A flow path for hydrofluoric acid can be formed between the branch pipe outlet and the overflow hole 211, that is, hydrofluoric acid flows from bottom to top towards the overflow hole 211 in the main tank 21. In this way, impurities in the hydrofluoric acid can be carried to the overflow hole 211 and discharged into the hydrofluoric acid filtration device 1, which can prevent impurities from settling and accumulating at the bottom of the main tank 21, thereby improving the filtration effect of hydrofluoric acid.

[0075] like Figure 5 As shown, in some embodiments, the hydrofluoric acid containment tank 2 is an etching tank 5, and the solar cell production equipment also includes a conveyor 3 disposed in the etching tank 5.

[0076] The hydrofluoric acid containment tank 2 is an etching tank 5. The hydrofluoric acid in the etching tank 5 can remove the unnecessary borosilicate glass on the surface of the solar cell 4, exposing the N-type silicon surface, thereby ensuring that the subsequent metal electrode (silver paste) forms a good ohmic contact with the N-type silicon and ensuring the photoelectric conversion efficiency of the solar cell 4.

[0077] The conveyor 3 is disposed in the etching tank 5 and is used to transport the solar cell 4 within the etching tank 5, thereby automatically completing the etching process of the solar cell 4. Specifically, the conveyor 3 can be a conveyor belt, a chain, or a roller; this embodiment does not limit the specific type of conveyor.

[0078] In traditional etching tanks 5, the hydrofluoric acid must be drained before the filter element 12 in the hydrofluoric acid filtration device 1 can be cleaned or replaced, severely impacting the production efficiency of the solar cell 4. However, in this application, by setting the etching tank 5 as a hydrofluoric acid containing tank 2, the cleaning pipe 14 can be used to achieve automatic cleaning of the filter element. That is, the filter element 12 can be rinsed with pure water supplied through the water inlet pipe 141 without draining the hydrofluoric acid from the etching tank 5. Furthermore, in the solar cell production equipment of this application, the filter element 12 can be disassembled, cleaned, replaced, or repaired in an acid-free environment without draining the hydrofluoric acid from the etching tank 5, improving the efficiency of filter element cleaning, replacement, and repair, and ensuring the production efficiency of the solar cell 4. Figure 5As shown, in some embodiments, the solar cell manufacturing equipment includes two hydrofluoric acid containment tanks 2, which are an etching tank 5 and a cleaning tank 6, respectively, and the cleaning tank 6 is located upstream of the etching tank 5.

[0079] The solar cell production equipment also includes a cleaning tank 6 located upstream of the etching tank 5, used to clean the solar cells 4. The hydrofluoric acid in the cleaning tank 6 can remove contaminants such as metal from the surface of the solar cells, ensuring the production quality of the solar cells 4.

[0080] Similarly, by setting the cleaning tank 6 as a hydrofluoric acid containing tank 2, the filter element 12 can be rinsed, replaced, and repaired without having to drain the hydrofluoric acid from the cleaning tank 6, thus reducing the rinsing, replacement, and repair time of the filter element 12 and improving the production efficiency of the solar cell 4.

[0081] Specifically, such as Figures 1 to 6 As shown, during the production process of solar cell 4, the mixture of hydrofluoric acid and impurities in the main tank 21 overflows from the overflow hole 211 into the auxiliary tank 22. Subsequently, the circulation pump 18 pumps the mixture from the auxiliary tank 22 into the filter pipe 11, and the filter element 12 in the receiving part 113 filters the impurities in the mixture to obtain pure hydrofluoric acid. The filtered hydrofluoric acid flows back to the bottom of the main tank through the acid outlet pipe 132, so that the hydrofluoric acid in the main tank 21 is circulated and filtered, and the impurities in the main tank 21 are removed in a timely manner.

[0082] When the filter element 12 needs to be cleaned, close the first valve 161 and the second valve 162, and open the third valve 163 and the fourth valve 164, so that pure water flows into the receiving part 113 through the water inlet pipe 141. The filter element 12 can be automatically cleaned with pure water without disassembly.

[0083] Similarly, when the filter element 12 needs to be replaced, close the first valve 161 and the second valve 162, and open the third valve 163 and the fourth valve 164 to allow pure water to flow into the receiving part 113 through the water inlet pipe 141, displacing the hydrofluoric acid in the filter pipe 11. Then, the filter element 12 can be replaced by opening the end cover 15. The replacement process can avoid the hydrofluoric acid from affecting the operators and the environment.

[0084] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A hydrofluoric acid filtration device, characterized in that, The hydrofluoric acid filtration device includes: A filter pipe includes an inlet and an outlet spaced apart, the filter pipe is hollow to form a receiving part, and the inlet and outlet are connected to the receiving part; A filter element is housed in the receiving portion, and the filter element is at least partially located between the liquid inlet and the liquid outlet; The circulation pipeline includes an acid inlet pipeline and an acid outlet pipeline respectively connected to the liquid inlet and the liquid outlet. The cleaning pipe includes an inlet pipe and an outlet pipe that are connected to the receiving part.

2. The hydrofluoric acid filtration device according to claim 1, characterized in that, The hydrofluoric acid filtration device also includes an end cap, which is detachably attached to one end of the filtration pipe.

3. The hydrofluoric acid filtration device according to claim 2, characterized in that, The liquid outlet is located at the other end of the filter pipe, and the liquid inlet is located on the pipe wall of the filter pipe near the end cap.

4. The hydrofluoric acid filtration device according to claim 1, characterized in that, The hydrofluoric acid filtration device also includes valves, namely a first valve, a second valve, a third valve, and a fourth valve respectively disposed on the acid inlet pipe, the acid outlet pipe, the water inlet pipe, and the water outlet pipe.

5. The hydrofluoric acid filtration device according to any one of claims 1 to 4, characterized in that, The inlet pipe and the outlet pipe are respectively connected to the liquid inlet and the liquid outlet.

6. The hydrofluoric acid filtration device according to claim 5, characterized in that, The hydrofluoric acid filtration device further includes connecting pipes, which include a first connecting pipe and a second connecting pipe respectively connected to the liquid inlet and the liquid outlet. The acid inlet pipe and the water inlet pipe are connected to the first connecting pipe, and the acid outlet pipe and the water outlet pipe are connected to the second connecting pipe.

7. The hydrofluoric acid filtration device according to any one of claims 1 to 4, characterized in that, The hydrofluoric acid filtration device also includes a circulation pump installed in the acid inlet pipe.

8. A solar cell manufacturing equipment, characterized in that, The solar cell manufacturing equipment includes: The hydrofluoric acid filtration device according to any one of claims 1 to 7; and A hydrofluoric acid container tank, wherein the acid inlet pipe and the acid outlet pipe are respectively connected to the hydrofluoric acid container tank.

9. The solar cell production equipment according to claim 8, characterized in that, The hydrofluoric acid container includes a main tank and a secondary tank. The side wall of the main tank is provided with an overflow hole, which connects the main tank and the secondary tank. The acid inlet pipe and the acid outlet pipe are respectively connected to the secondary tank and the main tank.

10. The solar cell production equipment according to claim 9, characterized in that, The acid outlet pipe includes multiple branch pipes, which are connected to the bottom wall of the main tank.

11. The solar cell production equipment according to any one of claims 8 to 10, characterized in that, The hydrofluoric acid container is an etching tank, and the solar cell production equipment also includes a conveyor installed in the etching tank.

12. The solar cell production equipment according to claim 11, characterized in that, The solar cell manufacturing equipment includes two hydrofluoric acid tanks, which are respectively the etching tank and the cleaning tank, and the cleaning tank is located upstream of the etching tank.

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